公开(公告)号：US09202657B1

公开(公告)日：2015-12-01

申请号：US14340012

申请日：2014-07-24

Applicant: Sandia Corporation

Inventor： Paul J. Resnick ,  Eric Langlois

IPC: H01J9/04 ,  H01J3/02 ,  H01J1/308 ,  H01J1/304

CPC classification number: H01J1/308 ,  H01J1/3044 ,  H01J1/36 ,  H01J3/022 ,  H01J9/025 ,  H01J9/14 ,  H01J19/24 ,  H01J19/32 ,  H01J19/46 ,  H01J19/54 ,  H01J21/20

Abstract: Disclosed is an encapsulated micro-diode and a method for producing same. The method comprises forming a plurality columns in the substrate with a respective tip disposed at a first end of the column, the tip defining a cathode of the diode; disposing a sacrificial oxide layer on the substrate, plurality of columns and respective tips; forming respective trenches in the sacrificial oxide layer around the columns; forming an opening in the sacrificial oxide layer to expose a portion of the tips; depositing a conductive material in of the opening and on a surface of the substrate to form an anode of the diode; and removing the sacrificial oxide layer.

Abstract translation: 公开了一种封装微型二极管及其制造方法。 该方法包括在衬底中形成多个柱，其中相应的顶端设置在柱的第一端，尖端限定二极管的阴极; 在基板上设置牺牲氧化物层，多个柱和各个尖端; 在柱周围的牺牲氧化物层中形成相应的沟槽; 在所述牺牲氧化物层中形成开口以暴露所述尖端的一部分; 在所述开口和所述衬底的表面上沉积导电材料以形成所述二极管的阳极; 并去除牺牲氧化物层。

公开(公告)号：US09099271B2

公开(公告)日：2015-08-04

申请号：US13622212

申请日：2012-09-18

Applicant: The Board of Trustees of the Leland Stanford Junior University

Inventor： Dragos E. Constantin ,  Rebecca Fahrig ,  Paul J. Keall

IPC: G06F17/50 ,  H01J3/02 ,  H05H7/08

CPC classification number: H01J3/027 ,  H01J3/029 ,  H05H7/08 ,  H05H2007/084

Abstract: A method of configuring an electron gun for generating and injecting an electron beam into a linac accelerating waveguide operating in magnetic fringe fields of an MRI scanner in the absence of a magnetic shield is provided using an appropriately programmed computer to determining an anode drift tube diameter at an injection point of a linac according to a magnetic field value from an MRI scanner and to a predetermined current density, where the magnetic field has an isocenter, determining a transverse diameter of a Type M cathode in an electron gun, according to the anode drift tube diameter and the current density, and minimizing an emittance value in an electron beam of the electron gun at an entry point of the anode drift tube by optimizing the distance between the cathode and the anode, where the electron beam is along an axis of symmetry of the magnetic field.

Abstract translation: 使用适当编程的计算机来配置电子枪的方法，该电子枪用于在不存在磁屏蔽的情况下，将电子束产生和注入到在MRI扫描仪的磁性条纹区域中工作的线性加速波导中，以确定阳极漂移管直径在 根据来自MRI扫描仪的磁场值的线性加速器的注入点和预定的电流密度，其中磁场具有等角点，根据阳极漂移确定电子枪中的M型阴极的横向直径 管直径和电流密度，并且通过优化阴极和阳极之间的距离使电子枪沿着对称轴线的距离最小化在阳极漂移管的入口处的电子枪的电子束中的发射率值 的磁场。

公开(公告)号：US08975052B2

公开(公告)日：2015-03-10

申请号：US14307922

申请日：2014-06-18

Applicant: Xyleco, Inc.

Inventor： Marshall Medoff

IPC: G06K5/00 ,  D21H21/48 ,  D21H25/04 ,  G03C11/02 ,  G21K5/00 ,  G01N33/34 ,  C12M1/00 ,  H01J3/02 ,  H01J3/04

CPC classification number: G06K5/02 ,  B32B29/002 ,  B32B2262/0276 ,  B32B2554/00 ,  C08B15/00 ,  C08J7/123 ,  C12M45/00 ,  C12M45/06 ,  C12P19/00 ,  D21H21/48 ,  D21H25/04 ,  G01N33/346 ,  G01N2223/1013 ,  G01N2223/102 ,  G03C11/02 ,  G06K5/00 ,  G21K5/00 ,  H01J3/02 ,  H01J3/04

Abstract: Methods of marking paper products and marked paper products are provided. Some methods include irradiating the paper product to alter the functionalization of the paper.

公开(公告)号：US08922107B2

公开(公告)日：2014-12-30

申请号：US14115534

申请日：2012-05-09

Applicant: Triveni Rao ,  John Walsh ,  Elizabeth Gangone

Inventor： Triveni Rao ,  John Walsh ,  Elizabeth Gangone

IPC: H01J1/32 ,  H01J29/41 ,  H01J9/12 ,  H01J1/35 ,  H01J29/04 ,  H01J3/02 ,  H01J25/10 ,  H01J23/04 ,  H01J9/18

CPC classification number: H01J29/04 ,  H01J3/021 ,  H01J9/125 ,  H01J9/18 ,  H01J23/04 ,  H01J25/10

Abstract: A vacuum encapsulated, hermetically sealed cathode capsule for generating an electron beam of secondary electrons, which generally includes a cathode element having a primary emission surface adapted to emit primary electrons, an annular insulating spacer, a diamond window element comprising a diamond material and having a secondary emission surface adapted to emit secondary electrons in response to primary electrons impinging on the diamond window element, a first cold-weld ring disposed between the cathode element and the annular insulating spacer and a second cold-weld ring disposed between the annular insulating spacer and the diamond window element. The cathode capsule is formed by a vacuum cold-weld process such that the first cold-weld ring forms a hermetical seal between the cathode element and the annular insulating spacer and the second cold-weld ring forms a hermetical seal between the annular spacer and the diamond window element whereby a vacuum encapsulated chamber is formed within the capsule.

Abstract translation: 一种用于产生二次电子的电子束的真空密封的气密密封阴极胶囊，其通常包括具有适于发射一次电子的主要发射表面的阴极元件，环形绝缘间隔物，包含金刚石材料的金刚石窗体元件， 二次发射表面适于响应于撞击在金刚石窗口元件上的初级电子发射二次电子，设置在阴极元件和环形绝缘间隔物之间​​的第一冷焊环和设置在环形绝缘间隔物和第二冷焊环之间的第二冷焊环， 钻石窗元素。 阴极胶囊通过真空冷焊工艺形成，使得第一冷焊环在阴极元件和环形绝缘垫片之间形成密封，第二冷焊环在环形间隔件和第二冷焊环之间形成密封 金刚石窗元件，由此在胶囊内形成真空密封室。

公开(公告)号：US20140239175A1

公开(公告)日：2014-08-28

申请号：US13779142

申请日：2013-02-27

Applicant: FEI COMPANY

Inventor： Mostafa Maazouz

IPC: H01J3/02 ,  H01J37/04

CPC classification number: H01J37/07 ,  H01J3/026 ,  H01J37/04 ,  H01J37/06 ,  H01J37/10 ,  H01J37/1477 ,  H01J37/21 ,  H01J37/248 ,  H01J37/3056 ,  H01J37/3178 ,  H01J2237/0473 ,  H01J2237/04735 ,  H01J2237/04756 ,  H01J2237/1518 ,  H01J2237/1534 ,  H01J2237/28 ,  H01J2237/31749

Abstract: The invention provides a charged particle beam system wherein the middle section of the focused ion beam column is biased to a high negative voltage allowing the beam to move at higher potential than the final beam energy inside that section of the column. At low kV potential, the aberrations and coulomb interactions are reduced, which results in significant improvements in spot size.

Abstract translation: 本发明提供了一种带电粒子束系统，其中聚焦离子束列的中间部分被偏压到高的负电压，允许光束以比该塔的该部分内的最终光束能量更高的电位移动。 在低kV电位下，像差和库仑相互作用减小，这导致光斑尺寸的显着改善。

公开(公告)号：US20120288800A1

公开(公告)日：2012-11-15

申请号：US13462088

申请日：2012-05-02

Applicant: Jun ITO

Inventor： Jun ITO

IPC: G03F7/20 ,  H01J3/02

CPC classification number: H01J3/06 ,  B82Y10/00 ,  B82Y40/00 ,  H01J3/028 ,  H01J37/067 ,  H01J37/3174 ,  H01J2237/0206 ,  H01J2237/022

Abstract: An electron beam drawing apparatus performs drawing on a substrate with an electron beam emitted by an electron gun. The apparatus includes a conditioning chamber configured to perform conditioning of a spare electrode that is a spare for an electrode which constitutes the electron gun, and a driving mechanism configured to remove a used electrode from the electron gun, and to install, into the electron gun, the spare electrode having been subjected to the conditioning, wherein the conditioning includes supplying of electric power to the spare electrode.

Abstract translation: 电子束描绘装置利用电子枪发射的电子束对衬底进行绘图。 该装置包括：调节室，被配置为执行作为构成电子枪的电极备用的备用电极的调节;以及驱动机构，其构造成从电子枪中去除使用的电极，并将其安装到电子枪 所述备用电极已经进行了调节，其中所述调节包括向备用电极供电。

公开(公告)号：US20050253837A1

公开(公告)日：2005-11-17

申请号：US10520200

申请日：2003-06-16

Applicant: Roy Dijk ,  Siebe De Zwart ,  Ramon Van Gorkom ,  Hendrikus Van Den Brink

Inventor： Roy Dijk ,  Siebe De Zwart ,  Ramon Van Gorkom ,  Hendrikus Van Den Brink

IPC: G09G1/20 ,  G09G3/22 ,  H01J3/02 ,  H01J17/49 ,  H01J29/48 ,  H01J31/12 ,  G09G5/00

CPC classification number: G09G3/22 ,  G09G1/20 ,  G09G2310/06 ,  H01J29/481 ,  H01J29/482 ,  H01J31/127 ,  H01J2329/46

Abstract: A matrix display device comprises cavities (20) having walls at least one of which is covered with a material (24) having a secondary emission coefficient of more than unity. The cavities form a planar arrangement substantially parallel to the display screen which has a phosphor display screen. The cavities are provided with electrodes (21, 215, 217, 5 22, 225, 228) and the display device has a circuit for supplying an oscillating AC voltage (Vr, VRF) to said electrodes (21, 215, 217, 22, 225, 228) for generating electrons within the cavities by secondary emission. The cavities (20) have apertures (25) facing the screen (41), and the display device has a circuit for selectively letting electrons generated within the cavities pass said apertures and accelerating electrons having passed said apertures to the phosphor display screen.

Abstract translation: 矩阵显示装置包括具有壁的空腔（20），其中至少一个具有二维发射系数大于1的材料（24）的壁。 空腔形成基本上平行于具有磷光体显示屏的显示屏的平面布置。 空腔设置有电极（21,215,217,52,225,228），并且显示装置具有用于向所述电极（21,215,217,22,22）提供振荡AC电压（Vr，VRF）的电路， 225,228），用于通过二次发射在空腔内产生电子。 空腔（20）具有面向屏幕（41）的孔（25），并且显示装置具有用于选择性地使在空腔内产生的电子通过所述孔径并且将通过所述孔的电子加速到荧光体显示屏的电路。

公开(公告)号：US20050253497A1

公开(公告)日：2005-11-17

申请号：US10525574

申请日：2003-07-21

Applicant: Ramon Van Gorkom ,  Nijs Van Der Vaart ,  Johannes Josephus Rosink

Inventor： Ramon Van Gorkom ,  Nijs Van Der Vaart ,  Johannes Josephus Rosink

IPC: H01J29/04 ,  H01J3/02 ,  H01J29/48 ,  H01J31/12 ,  H01J31/26

CPC classification number: H01J3/023 ,  H01J29/482 ,  H01J31/127

Abstract: A display device has a display screen for displaying image information, and cathode means comprising an emitter material for emitting electrons. The emitted electrons are collected by an electron concentrator which redistributes the electrons in a homogenous electron beam (EB). The emitter material is arranged on a first surface excluding a first impact area on which positive ions land that pass through the electron concentrator. Therefore, substantially no emitter material is provided at the first impact area, so that damage inflicted on the cathode means by the positive ions is reduced. Preferably, the display device has a pumping chamber between the cathode means and a back plate, for removing residual gases from the display device.

Abstract translation: 显示装置具有用于显示图像信息的显示屏幕，以及包括用于发射电子的发射体材料的阴极装置。 所发射的电子被电子集中器收集，该电子集中器以均匀的电子束（EB）重新分布电子。 发射极材料配置在除了通过电子集中器的正离子着陆的第一冲击区域之外的第一表面上。 因此，在第一冲击区域基本上不设置发射极材料，因此减少了通过正离子对阴极装置造成的伤害。 优选地，显示装置在阴极装置和背板之间具有泵送室，用于从显示装置去除残留气体。

公开(公告)号：US20050218787A1

公开(公告)日：2005-10-06

申请号：US11085261

申请日：2005-03-22

Applicant: Si-Myeong Kim ,  Il-Hwan Kim ,  Seung-Joon Yoo

Inventor： Si-Myeong Kim ,  Il-Hwan Kim ,  Seung-Joon Yoo

IPC: H01J1/30 ,  H01J1/62 ,  H01J3/02 ,  H01J29/48 ,  H01J31/12

CPC classification number: H01J3/021 ,  H01J29/481 ,  H01J31/127

Abstract: An electron emission device includes: a substrate; first and second electrodes insulated from each other and arranged on the substrate, the first and second electrodes having predetermined shapes; an electron emission region arranged on the substrate; and a first passivation layer covering at least one of the first and second electrodes and exposing at least a portion of the electron emission region. An electron emission display includes: a first substrate and a second substrate opposed to each other; first and second electrodes insulated from each other and arranged transversely to each other on the first substrate, the first and second electrodes having predetermined shapes; an electron emission region arranged on the substrate; a first passivation layer covering at least one of the first and second electrodes and exposing at least a portion of the electron emission region; and an image substrate having an anode electrode and a fluorescent layer formed on the second substrate.

Abstract translation: 电子发射装置包括：基板; 第一和第二电极彼此绝缘并且布置在基板上，第一和第二电极具有预定的形状; 设置在基板上的电子发射区域; 以及覆盖所述第一和第二电极中的至少一个并暴露所述电子发射区域的至少一部分的第一钝化层。 电子发射显示器包括：第一基板和彼此相对的第二基板; 第一和第二电极彼此绝缘并且在第一基板上彼此横向地布置，第一和第二电极具有预定形状; 设置在基板上的电子发射区域; 覆盖所述第一和第二电极中的至少一个并且暴露所述电子发射区域的至少一部分的第一钝化层; 以及具有形成在第二基板上的阳极电极和荧光层的图像基板。

公开(公告)号：US20050212398A1

公开(公告)日：2005-09-29

申请号：US11083095

申请日：2005-03-18

Applicant: Makoto Okano ,  Tetsuya Imai ,  Osamu Kumasaka

Inventor： Makoto Okano ,  Tetsuya Imai ,  Osamu Kumasaka

IPC: H01J29/08 ,  H01J1/304 ,  H01J3/02 ,  H01J63/04

CPC classification number: H01J3/021

Abstract: By making a cathode substrate function as a cathode and applying a voltage to the cathode and an anode, an electron emission element emits an electron from an electron source provided on the cathode substrate, and irradiates the electron onto an electron irradiation surface formed on the anode surface. The electron source is thread-type and provided on the cathode substrate. A deflecting voltage generates the electric field around the electron source. The electron source including a charge receives a power from the generated electric field to curve. Therefore, an irradiation position of the electron moves on the electron irradiation surface. Since it becomes unnecessary to move the electron irradiation surface and the electron source, a configuration of the electron emission element or an apparatus including the electron emission element is not complicated, and can be miniaturized and simple. Further, since the electron source curves, a tip of the electron source and the electron irradiation surface can be close, and a size of a beam spot at the irradiation position can be maintained constant. Therefore, since a mechanism for correcting the size of the beam spot is unnecessary, the configuration of the electron emission element or the apparatus including the electron emission element can be much simpler.

Abstract translation: 通过使阴极基板用作阴极并向阴极和阳极施加电压，电子发射元件从设置在阴极基板上的电子源发射电子，并将电子照射到形成在阳极上的电子照射表面 表面。 电子源为螺纹型，设在阴极基板上。 偏转电压产生电子源周围的电场。 包括电荷的电子源从产生的电场接收功率以进行曲线。 因此，电子的照射位置在电子照射面上移动。 由于不需要移动电子照射表面和电子源，因此电子发射元件或包括电子发射元件的装置的结构不复杂，并且可以小型化和简单化。 此外，由于电子源曲线，电子源的尖端和电子照射表面可以接近，并且照射位置处的光斑的尺寸可以保持恒定。 因此，由于不需要校正束斑的尺寸的机构，所以电子发射元件或包括电子发射元件的装置的结构可以简单得多。