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282 条记录 (耗时 0.03 秒)

    Low-dose radiographic imaging system
    34.
    发明授权
    Low-dose radiographic imaging system 有权
    低剂量放射成像系统

    公开(公告)号：US09218933B2

    公开(公告)日：2015-12-22

    申请号：US14491825

    申请日：2014-09-19

    申请人： Rapiscan Systems, Inc.

    发明人： Willem Gerhardus Johannes Langeveld ,  Joseph Bendahan ,  Tsahi Gozani ,  Michael King ,  Dan Strellis ,  Edward Franco ,  Krystal R. Alfonso

    IPC分类号： H05G1/52 ,  G21K1/08 ,  H01J37/14 ,  H01J35/14 ,  H01J35/30 ,  H01J37/147 ,  G21K1/093

    CPC分类号： H01J35/14 ,  G01V5/0016 ,  G21K1/093 ,  H01J35/08 ,  H01J35/30 ,  H01J35/32 ,  H01J37/14 ,  H01J37/141 ,  H01J37/147 ,  H01J37/1472 ,  H01J37/1475 ,  H01J37/3178 ,  H01J2235/081 ,  H01J2235/086 ,  H05G1/52 ,  H05G2/00

    摘要： An inspection system for scanning cargo and vehicles is described which employs an X-ray source that includes an electron beam generator, for generating an electron beam; an accelerator for accelerating said electron beam in a first direction; and, a first set of magnetic elements for transporting said electron beam into a magnetic field created by a second set of magnetic elements, wherein the magnetic field created by said second set of magnetic elements causes said electron beam to strike a target such that the target substantially only generates X-rays focused toward a high density section in the scanned object, which is estimated in a second pulse using image data captured by a detector array in a first pulse. The electron beam direction is optimized by said X-ray source during said second pulse to focus X-rays towards said high density section based on said image data in said first pulse.

    摘要翻译： 描述了用于扫描货物和车辆的检查系统，其使用包括电子束发生器的X射线源，用于产生电子束; 用于在第一方向上加速所述电子束的加速器; 以及用于将所述电子束传送到由第二组磁性元件产生的磁场中的第一组磁性元件，其中由所述第二组磁性元件产生的磁场使所述电子束撞击靶，使得所述靶 基本上仅产生朝向扫描对象中的高密度部分聚焦的X射线，其以第一脉冲中由检测器阵列捕获的图像数据在第二脉冲中估计。 在所述第二脉冲期间，由所述X射线源优化电子束方向，以基于所述第一脉冲中的所述图像数据将X射线聚焦到所述高密度部分。

    Multi-axis magnetic lens for focusing a plurality of charged particle beams
    36.
    发明授权
    Multi-axis magnetic lens for focusing a plurality of charged particle beams 有权
    用于聚焦多个带电粒子束的多轴磁性透镜

    公开(公告)号：US09000394B2

    公开(公告)日：2015-04-07

    申请号：US13464261

    申请日：2012-05-04

    申请人： Weiming Ren ,  Zhongwei Chen

    发明人： Weiming Ren ,  Zhongwei Chen

    IPC分类号： H01J37/14

    CPC分类号： H01J37/14 ,  B82Y10/00 ,  B82Y40/00 ,  H01J3/20 ,  H01J37/141 ,  H01J37/145 ,  H01J37/3177 ,  H01J2237/1035 ,  H01J2237/1415 ,  H01J2237/31774

    摘要： The present invention provides two ways to form a special permeability-discontinuity unit inside every sub-lens of a multi-axis magnetic lens, which either has a simpler configuration or has more flexibility in manufacturing such as material selection and mechanical structure. Accordingly several types of multi-axis magnetic lens are proposed for various applications. One type is for general application such as a multi-axis magnetic condenser lens or a multi-axis magnetic transfer lens, another type is a multi-axis magnetic non-immersion objective which can require a lower magnetomotive force, and one more type is a multi-axis magnetic immersion objective lens which can generate smaller aberrations. Due to using permeability-discontinuity units, every multi-axis magnetic lens in this invention can also be electrically excited to function as a multi-axis electromagnetic compound lens so as to further reduce aberrations thereof and/or realize electron beam retarding for low-voltage irradiation on specimen.

    摘要翻译： 本发明提供了在多轴磁性透镜的每个子透镜内部形成特殊的渗透率不连续单元的两种方式，其具有更简单的构造或者在诸如材料选择和机械结构的制造中具有更大的灵活性。 因此，针对各种应用提出了几种类型的多轴磁性透镜。 一种用于一般应用，例如多轴磁聚焦透镜或多轴磁转移透镜，另一种类型是可以要求较低磁动势的多轴磁性非浸没物镜，另一种类型是 可以产生较小像差的多轴磁浸物镜。 由于使用导磁率不连续单位，本发明中的每个多轴磁性透镜也可以被电激励以用作多轴电磁复合透镜，以便进一步降低其像差和/或实现低电压的电子束延迟 对样品照射

    Automated slice milling for viewing a feature
    37.
    发明授权
    Automated slice milling for viewing a feature 有权
    自动切片铣削以查看特征

    公开(公告)号：US08759802B2

    公开(公告)日：2014-06-24

    申请号：US13735714

    申请日：2013-01-07

    申请人： FEI Company

    发明人： Ryan Tanner

    IPC分类号： H01J37/14 ,  H01J37/28

    CPC分类号： H01J37/3005 ,  G01N1/286 ,  H01J37/26 ,  H01J37/265 ,  H01J37/28 ,  H01J37/30 ,  H01J37/3045 ,  H01J37/3056 ,  H01J2237/2611 ,  H01J2237/28 ,  H01J2237/2803 ,  H01J2237/2814 ,  H01J2237/30472 ,  H01J2237/3174 ,  H01J2237/31745 ,  H01J2237/31749

    摘要： A method and apparatus for performing a slice and view technique with a dual beam system. The feature of interest in an image of a sample is located by machine vision, and the area to be milled and imaged in a subsequent slice and view iteration is determined through analysis of data gathered by the machine vision at least in part. A determined milling area may be represented as a bounding box around a feature, which dimensions can be changed in accordance with the analysis step. The FIB is then adjusted accordingly to slice and mill a new face in the subsequent slice and view iteration, and the SEM images the new face. Because the present invention accurately locates the feature and determines an appropriate size of area to mill and image, efficiency is increased by preventing the unnecessary milling of substrate that does not contain the feature of interest.

    摘要翻译： 一种使用双光束系统执行切片和观看技术的方法和装置。 通过机器视觉来定位样本图像中的兴趣特征，并且通过至少部分地通过机器视觉收集的数据的分析来确定要在后续切片和观看迭代中被研磨和成像的区域。 确定的铣削区域可以表示为围绕特征的边界框，该尺寸可以根据分析步骤而改变。 然后，相应地调整FIB以在随后的切片中切割并研磨新的面并查看迭代，并且SEM对新的面进行成像。 因为本发明精确地定位了特征并且确定了适当的面积尺寸以进行研磨和图像，因此通过防止不需要研磨不含有感兴趣特征的基底来提高效率。

    System and Method for Controlling Charge-up in an Electron Beam Apparatus
    38.
    发明申请
    System and Method for Controlling Charge-up in an Electron Beam Apparatus 有权
    用于控制电子束装置中电荷的系统和方法

    公开(公告)号：US20140151554A1

    公开(公告)日：2014-06-05

    申请号：US14081465

    申请日：2013-11-15

    申请人： Hermes Microvision, Inc.

    发明人： Weiming Ren ,  Zhongwei Chen

    IPC分类号： H01J37/26 ,  H01J37/14 ,  H01J37/29

    CPC分类号： H01J37/026 ,  H01J37/14 ,  H01J37/261 ,  H01J37/28 ,  H01J2237/0045 ,  H01J2237/0262 ,  H01J2237/1405 ,  H01J2237/2801 ,  H01J2237/2803

    摘要： The present invention provides means and corresponding embodiments to control charge-up in an electron beam apparatus, which can eliminate the positive charges soon after being generated on the sample surface within a frame cycle of imaging scanning. The means are to let some or all of secondary electrons emitted from the sample surface return back to neutralize positive charges built up thereon so as to reach a charge balance within a limited time period. The embodiments use control electrodes to generate retarding fields to reflect some of secondary electrons with low kinetic energies back to the sample surface.

    摘要翻译： 本发明提供了用于控制电子束装置中的充电的装置和相应的实施例，其可以在成像扫描的帧周期内在样品表面上产生后不久就消除正电荷。 该方法是使从样品表面发射的二次电子的一些或全部返回到中和积聚在其上的正电荷，从而在有限的时间段内达到电荷平衡。 这些实施例使用控制电极产生延迟场，以将具有低动能的一些二次电子反射回样品表面。

    Apparatus and method for merging a low energy electron flow into a high energy electron flow
    39.
    发明授权
    Apparatus and method for merging a low energy electron flow into a high energy electron flow 有权
    将低能电子流合并成高能电子流的装置和方法

    公开(公告)号：US08153965B1

    公开(公告)日：2012-04-10

    申请号：US12634361

    申请日：2009-12-09

    申请人： John L. Adamski ,  Benjamin Emerson Carl Koltenbah

    发明人： John L. Adamski ,  Benjamin Emerson Carl Koltenbah

    IPC分类号： H01S3/02 ,  H01J37/14

    CPC分类号： H05H7/08 ,  H05H2007/087

    摘要： An apparatus for merging a low energy electron flow into a high energy electron flow may include: a high energy electron path for accommodating the high energy electron flow; and a plurality of magnetic elements arranged to guide the low energy electron flow through a chicane presenting a path having a first end and a second end. The path intersects the high energy electron path at the second end. The path has a plurality of turns and path segments intermediate the first and second ends. Respective adjacent path segments intersect at each respective turn. The path establishes a respective bend radius and subtends a respective path angle between respective adjacent path segments at each respective turn. Each respective path angle is maximized within predetermined path angle limits. Each respective bend radius is minimized within predetermined bend radius limits.

    摘要翻译： 用于将低能电子流合并成高能电子流的装置可以包括：用于容纳高能电子流的高能电子路径; 以及多个磁性元件，其布置成引导低能电子流通过具有第一端和第二端的路径的拐角。 该路径在第二端与高能电子路径相交。 路径在第一和第二端之间具有多个匝和路径段。 相应的相邻路径段在每个相应的转弯处相交。 路径建立相应的弯曲半径，并且在每个相应的转弯处对应相应的相邻路径段之间的相应路径角。 每个相应的路径角度在预定的路径角度范围内被最大化。 每个相应的弯曲半径在预定弯曲半径范围内最小化。

    Magnetic deflector for an electron column
    40.
    发明授权
    Magnetic deflector for an electron column 有权
    用于电子柱的磁偏转器

    公开(公告)号：US08071955B2

    公开(公告)日：2011-12-06

    申请号：US12600266

    申请日：2008-05-15

    申请人： Ho Seob Kim ,  Young Chul Kim

    发明人： Ho Seob Kim ,  Young Chul Kim

    IPC分类号： H01J3/26 ,  H01J37/14 ,  H01J37/147

    CPC分类号： H01J37/147 ,  H01J37/153 ,  H01J37/28 ,  H01J2237/1205 ,  H01J2237/152 ,  H01J2237/1532

    摘要： The present invention relates, in general, to a deflector for microcolumns for generating electron beams, and, more particularly, to a deflector capable of scanning or shifting electron beams or functioning as a stigmator using a magnetic field. The deflector (100) according to the present invention includes one or more deflector electrodes. Each of the deflector electrodes includes a core (12) made of a conductor or a semiconductor, and a coil (11) wound around the core (12).

    摘要翻译： 本发明一般涉及用于产生电子束的微柱偏转器，更具体地，涉及一种能够扫描或移动电子束或用作使用磁场的标称器的偏转器。 根据本发明的偏转器（100）包括一个或多个偏转器电极。 每个偏转器电极包括由导体或半导体制成的芯体（12）和缠绕在芯部（12）上的线圈（11）。