ACOUSTIC WAVE DEVICE AND METHOD OF MANUFACTURING THE SAME
    43.
    发明申请
    ACOUSTIC WAVE DEVICE AND METHOD OF MANUFACTURING THE SAME 审中-公开
    声波装置及其制造方法

    公开(公告)号:US20090175470A1

    公开(公告)日:2009-07-09

    申请号:US12349265

    申请日:2009-01-06

    Abstract: An acoustic wave device includes a substrate; an acoustic wave element provided on the substrate; a terminal that is provided on the substrate and is electrically coupled to the acoustic wave element; a first insulating layer that is provided on the substrate and has a first opening at a region thereof overlapped with at least a part of the terminal; a second insulating layer that has an second opening at a region thereof overlapped with at least a part of the first opening and is provided on the first insulating layer and the acoustic wave element so that a cavity is formed above the acoustic wave element; a third insulating layer that has a third opening including the region where the first opening and the second opening are overlapped with each other, and is provided on the second insulating layer; a metal post that is electrically coupled to the terminal and is provided in the first opening, the second opening and the third opening; and a solder ball provided on the metal post.

    Abstract translation: 声波装置包括:基板; 设置在基板上的声波元件; 设置在所述基板上并且电耦合到所述声波元件的端子; 第一绝缘层,其设置在所述基板上,并且在其与所述端子的至少一部分重叠的区域具有第一开口; 第二绝缘层,其在与第一开口的至少一部分重叠的区域处具有第二开口,并且设置在第一绝缘层和声波元件上,使得在声波元件上形成空腔; 第三绝缘层,其具有包括第一开口和第二开口彼此重叠的区域的第三开口,并且设置在第二绝缘层上; 电连接到端子并设置在第一开口,第二开口和第三开口中的金属柱; 以及设置在金属柱上的焊球。

    Micro-actuator and method of producing the same
    44.
    发明申请
    Micro-actuator and method of producing the same 失效
    微致动器及其制造方法

    公开(公告)号:US20050104477A1

    公开(公告)日:2005-05-19

    申请号:US11006340

    申请日:2004-12-07

    Abstract: In a method of producing a micro-actuator, a first adhesive is applied to a movable plate, and a movable, and a movable electrode is placed on the first adhesive. A second adhesive is applied to the movable electrode, and a piezoelectric element is placed on the second adhesive. Next, a third adhesive is applied to an actuator base, a base electrode is placed on the third adhesive, and the third adhesive is semi-cured in the same manner as above. A fourth adhesive is applied to the base electrode, the piezoelectric element is placed on the fourth adhesive, and the fourth adhesive is semi-cured in the same manner as above. Finally, the adhered laminate thus obtained is placed into a heating furnace and heated at a predetermined temperature for a predetermined period of time to thereby fully cure the adhesives.

    Abstract translation: 在制造微致动器的方法中,将第一粘合剂施加到可动板上,并且可移动的电极和可动电极被放置在第一粘合剂上。 将第二粘合剂施加到可动电极上,并将压电元件放置在第二粘合剂上。 接下来,将第三粘合剂施加到致动器基座,将基极放置在第三粘合剂上,并且以与上述相同的方式将第三粘合剂半固化。 将第四粘合剂施加到基底电极上,将压电元件放置在第四粘合剂上,并且以与上述相同的方式将第四粘合剂半固化。 最后,将如此得到的粘合层叠体放入加热炉中并在预定温度下加热预定的时间,从而使粘合剂完全固化。

    Method of assembling micro-actuator
    47.
    发明授权
    Method of assembling micro-actuator 失效
    组合微致动器的方法

    公开(公告)号:US06467141B2

    公开(公告)日:2002-10-22

    申请号:US09820553

    申请日:2001-03-29

    Abstract: A method of assembling a micro-actuator is provided in which a base frame having a plurality of actuator bases is placed on a stage, a first adhesive is applied to each of the actuator bases, and a base electrode frame having a plurality of base electrodes is placed on the first adhesive. The first adhesive is semi-cured by heating and pressing. A second adhesive is applied to each of the base electrodes, and a plurality of piezoelectric elements are placed on the second adhesive. The second adhesive is semi-cured by heating and pressing. A third adhesive is,applied to the piezoelectric elements, and a movable electrode frame having a plurality of movable electrodes is placed on the third adhesive. The third adhesive is semi-cured by heating and pressing. Next, a fourth adhesive is applied to each of the movable electrodes, and a hinge plate frame having a plurality of hinge plates is placed on the fourth adhesive. The fourth adhesive is semi-cured by heating and pressing. Finally, the adhered laminate thus obtained is placed in a heating furnace, and is heated at a predetermined temperature for a predetermined period of time, whereby each of the adhesives is fully cured.

    Abstract translation: 提供了一种组装微致动器的方法,其中具有多个致动器基座的基架被放置在台架上,第一粘合剂被施加到每个致动器基座,以及具有多个基极的基极框架 被放置在第一粘合剂上。 第一粘合剂通过加热和压制半固化。 将第二粘合剂施加到每个基底电极上,并且将多个压电元件放置在第二粘合剂上。 第二粘合剂通过加热和压制半固化。 将第三粘合剂施加到压电元件,并且具有多个可移动电极的可动电极框架放置在第三粘合剂上。 第三粘合剂通过加热和压制半固化。 接下来,将第四粘合剂施加到每个可移动电极,并且具有多个铰链板的铰链板框架放置在第四粘合剂上。 第四粘合剂通过加热和加压半固化。 最后,将如此获得的粘合层压材料放置在加热炉中,并在预定温度下加热预定的时间,从而使各种粘合剂完全固化。

Patent Agency Ranking