Mass transfer tool
    44.
    发明授权

    公开(公告)号:US10183401B2

    公开(公告)日:2019-01-22

    申请号:US15282225

    申请日:2016-09-30

    Applicant: Apple Inc.

    Abstract: Systems and methods for transferring a micro device from a carrier substrate are disclosed. In an embodiment, a mass transfer tool includes an articulating transfer head assembly, a carrier substrate holder, and an actuator assembly to adjust a spatial relationship between the articulating transfer head assembly and the carrier substrate holder. The articulating transfer head assembly may include an electrostatic voltage source connection and a substrate supporting an array of electrostatic transfer heads.

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