Electronic assembly and cooling thereof
    45.
    发明授权
    Electronic assembly and cooling thereof 有权
    电子组装和冷却

    公开(公告)号:US06377457B1

    公开(公告)日:2002-04-23

    申请号:US09660859

    申请日:2000-09-13

    IPC分类号: H05K720

    摘要: An electronic assembly is provided. An electronic substrate of the assembly has a plurality of conductive lines to transmit signals, and a cooling opening therethrough. The cooling opening has an inlet to allow fluid into the electronic substrate, a section in the electronic substrate through which the fluid flows from the inlet, and an outlet from which the fluid flows from the section out of the electronic substrate. A semiconductor die of the assembly is mounted to the electronic substrate. The die has an electronic circuit connected to the metal lines so that signals are transmitted between the electronic circuit and the metal lines, operation of the electronic circuit causing heating of the die, heat being transferred from the die to the electronic substrate from where heat is transferred to the fluid flowing through the section.

    摘要翻译: 提供电子组件。 组件的电子基板具有多条传输信号的导线和通过其的冷却开口。 冷却开口具有允许流体进入电子基板的入口,电子基板中的流体从入口流过的部分和流体从该部分流出电子基板的出口。 组件的半导体管芯安装到电子基板上。 模具具有连接到金属线的电子电路,使得信号在电子电路和金属线之间传输,电子电路的操作导致模具的加热,热量从模具转移到电子基板,从那里热量是 转移到流经该部分的流体。

    Metal locking structures to prevent a passivation layer from delaminating
    46.
    发明授权
    Metal locking structures to prevent a passivation layer from delaminating 失效
    金属锁定结构,以防止钝化层分层

    公开(公告)号:US6043551A

    公开(公告)日:2000-03-28

    申请号:US940535

    申请日:1997-09-30

    申请人: Krishna Seshan

    发明人: Krishna Seshan

    摘要: An integrated circuit (IC) is provided. The IC includes a silicon substrate and a dielectric layer formed upon the silicon substrate. The IC further includes a terminal metal layer (TML) formed upon the dielectric layer. The dielectric layer and the TML form a die active area. The TML has formed therein a plurality of spaced locking structures. The plurality of space locking structures are electrically isolated therebetween. Each locking structure is formed outside the die active area. The IC further includes a passivation layer adhering to the locking structures.

    摘要翻译: 提供集成电路(IC)。 IC包括硅衬底和形成在硅衬底上的电介质层。 IC还包括形成在电介质层上的端子金属层(TML)。 电介质层和TML形成管芯有源区。 TML中形成有多个间隔开的锁定结构。 多个空间锁定结构之间电隔离。 每个锁定结构形成在模具有效区域的外部。 IC还包括粘附到锁定结构的钝化层。

    Self cooling electrically programmable fuse
    47.
    发明授权
    Self cooling electrically programmable fuse 失效
    自冷却电可编程保险丝

    公开(公告)号:US5585663A

    公开(公告)日:1996-12-17

    申请号:US511565

    申请日:1995-08-04

    摘要: An electrically programmable fuse buried under quartz and layers of polyimide with a specific structure to enhance its "thermal" capabilities. The fuse is designed to "blow" and cool off quickly so as not to cause damage to areas above and surrounding the fuse. A passivation layer is added above the fuse to act as a heat sink and absorb and redistribute the heat generated from one localized area to a broader and cooler area. The materials used for the fuse and the heat sink are selected to be compatible with both oxide and polyimide personalization schemes. Modeling of the fuse enables optimizing the characteristics of the fuse, particularly to transmit to the surface of the passivation layer the thermal wave created during programming of the fuse.

    摘要翻译: 埋在石英下的电可编程熔丝和具有特定结构的聚酰亚胺层,以增强其“热”能力。 保险丝设计为“吹”并快速冷却,以免对保险丝上方和周围的区域造成损坏。 保险丝上方加上钝化层,作为散热片,吸收并重新分配从一个局部区域产生的热量到较宽和较冷的区域。 用于保险丝和散热器的材料被选择为与氧化物和聚酰亚胺个性化方案兼容。 保险丝的建模可以优化保险丝的特性,特别是在保险丝编程期间向钝化层的表面传输热波。

    Thermally activated noise immune fuse
    48.
    发明授权
    Thermally activated noise immune fuse 失效
    热激噪声免疫保险丝

    公开(公告)号:US5444287A

    公开(公告)日:1995-08-22

    申请号:US292901

    申请日:1994-08-10

    摘要: A noise immune fuse having sub-micron dimensions which can be programmed by an electrically and thermally synchronized event. The fuse includes a pair of fuse links in close proximity of each other, a layer of thermally conductive and electrically insulating material thermally coupling the two links forming the pair, and means for programming the first link by prompting the second link to gate the energy transfer between the links via the coupling layer. By combining thermal and electrical pulses to perform the programming function, the reliability of the fuse structure is greatly enhanced when compared to that of a single element fuse.

    摘要翻译: 具有亚微米尺寸的噪声免疫保险丝,可通过电和热同步事件进行编程。 熔丝包括彼此紧密相邻的一对熔丝链,热耦合形成该对的两个连接的导热和电绝缘材料层,以及用于通过提示第二连接件对能量传递进行栅极编程的装置 通过耦合层在链路之间。 通过组合热和电脉冲来执行编程功能,与单个元件熔断器相比,熔丝结构的可靠性大大提高。

    Electrically programmable antifuse using metal penetration of a junction
    49.
    发明授权
    Electrically programmable antifuse using metal penetration of a junction 失效
    使用电连接的金属穿透电可编程反熔丝

    公开(公告)号:US5298784A

    公开(公告)日:1994-03-29

    申请号:US858835

    申请日:1992-03-27

    摘要: An improved antifuse uses metal penetration of either a P-N diode junction or a Schottky diode. The P-N junction, or Schottky diode, is contacted by a diffusion barrier such as TiN, W, Ti-W alloy, or layers of Ti and Cr, with a metal such as Al. Al-CU alloy, Cu, Au, or Ag on top of the diffusion barrier. When this junction is stressed with voltage pulse producing a high current density, severe joule heating occurs resulting in metal penetration of the diffusion barrier and the junction. The voltage drop across the junction decreases by about a factor of ten after the current stress and is stable thereafter. Alternatively, a shallow P-N junction in a silicon substrate is contacted by a layer of metal that forms a silicide, such as Ti, Cr, W, Mo, or Ta. Stressing the junction with a voltage pulse to produce a high current density results in the metal penetrating the junction and reacting with the substrate to form a silicide.

    摘要翻译: 改进的反熔丝使用P-N二极管结或肖特基二极管的金属穿透。 P-N结或肖特基二极管通过诸如TiN,W,Ti-W合金或Ti和Cr的层的扩散阻挡层与诸如Al的金属接触。 Al-Cu合金,Cu,Au或Ag在扩散阻挡层的顶部。 当该结被电压脉冲施加而产生高电流密度时,发生严重的焦耳加热,导致扩散阻挡层和结的金属穿透。 跨接点的电压降在电流应力之后减少约十倍,此后稳定。 或者,硅衬底中的浅P-N结与由Ti,Cr,W,Mo或Ta形成硅化物的金属层接触。 用电压脉冲强加结以产生高电流密度导致金属穿透接合部并与衬底反应形成硅化物。

    Ultrasonic adhesion/dehesion monitoring apparatus with power feedback
measuring means
    50.
    发明授权
    Ultrasonic adhesion/dehesion monitoring apparatus with power feedback measuring means 失效
    具有功率反馈测量装置的超声波粘附/粘附监测装置

    公开(公告)号:US5213249A

    公开(公告)日:1993-05-25

    申请号:US890988

    申请日:1992-05-29

    IPC分类号: B23K20/10 H01L21/00

    摘要: An ultrasonic adhesion/dehesion monitoring apparatus for monitoring the adhesion/dehesion between first and second substrates comprising: a. an ultrasonic source for transmitting ultrasonic energy to at least first and second substrates; b. means for measuring the instantaneous AC current and instantaneous AC supplied to said ultrasonic source; c. means for multiplying the instantaneous AC voltage and the instantaneous AC current to determine the instantaneous power supplied to said ultrasonic source; and d. monitor means coupled to said ultrasonic source and said power determining means for monitoring the instantaneous power supplied to said ultrasonic source. Also disclosed is a method for monitoring the quality and/or adhesion/dehesion between first and second substrates in the ultrasonic adhesion/dehesion monitoring apparatus.

    摘要翻译: 一种用于监测第一和第二基底之间的粘合/粘合的超声粘附/粘合监测装置,包括:a。 用于将超声波能量传输到至少第一和第二基底的超声波源; b。 用于测量提供给所述超声波源的瞬时AC电流和瞬时AC的装置; C。 用于将瞬时AC电压和瞬时AC电流相乘以确定提供给所述超声波源的瞬时功率的装置; 和d。 监视器装置,耦合到所述超声波源和所述功率确定装置,用于监视提供给所述超声波源的瞬时功率。 还公开了一种用于在超声波粘合/粘合监测装置中监测第一和第二基板之间的质量和/或粘附/粘合的方法。