METHOD FOR MANUFACTURE AND COATING OF NANOSTRUCTURED COMPONENTS
    51.
    发明申请
    METHOD FOR MANUFACTURE AND COATING OF NANOSTRUCTURED COMPONENTS 审中-公开
    纳米结构组分的制备和涂层方法

    公开(公告)号:US20140093656A1

    公开(公告)日:2014-04-03

    申请号:US14061577

    申请日:2013-10-23

    发明人: David McIlroy

    IPC分类号: C23C16/56 C23C16/04

    摘要: The synthesis of nanostructures uses a catalyst that may be in the form of a thin film layer on a substrate. Precursor compounds are selected for low boiling point or already exist in gaseous form. Nanostructures are capable of synthesis with a masked substrate to form patterned nanostructure growth. The techniques further include forming metal nanoparticles with sizes

    摘要翻译: 纳米结构的合成使用可以在基材上形成薄膜层形式的催化剂。 前体化合物选择为低沸点或已经以气体形式存在。 纳米结构能够用掩蔽的底物合成以形成图案化的纳米结构生长。 该技术还包括形成尺寸小于10nm并且具有窄尺寸分布的金属纳米颗粒。 已经显示金属纳米颗粒具有增强的催化性能。 该方法可以包括等离子体增强的化学气相沉积以将Ni,Pt和/或Au纳米颗粒沉积到SiO 2,SiC和GaN纳米线的表面上。 大约5-7分钟内可以用金属纳米颗粒涂覆纳米结构样品。 可以通过适当控制温度和压力来控制纳米颗粒的尺寸。 涂覆的纳米线具有作为气体和水性传感器和氢气储存的应用。

    Method for making an aligned carbon nanotube
    57.
    发明授权
    Method for making an aligned carbon nanotube 有权
    制造排列碳纳米管的方法

    公开(公告)号:US08080289B2

    公开(公告)日:2011-12-20

    申请号:US12210855

    申请日:2008-09-15

    IPC分类号: C23C16/00 C23F1/00

    摘要: A method for making an aligned carbon nanotube includes the steps of a) applying a layer of a ferrosilicon alloy film onto a substrate, b) etching the layer of the ferrosilicon film to form a plurality of fine ferrosilicon alloy particles that are distributed properly on the substrate, and c) placing the substrate of step (b) into a microwave plasma enhanced chemical vapor deposition system, and supplying a mixture of a carbon-containing reaction gas and a balance gas at a predetermined flow ratio so as to grow carbon nanotubes on the fine ferrosilicon alloy particles, wherein said ferrosilicon alloy of step (a) comprises silicon ranging from 15 wt % to 25 wt %; and step (c) is conducted at a temperature ranging from 300 to 380° C.

    摘要翻译: 制造排列碳纳米管的方法包括以下步骤:a)将硅土合金膜层施加到基底上,b)蚀刻硅铁膜层以形成多个细小的硅铁合金粒子 衬底,和c)将步骤(b)的衬底放入微波​​等离子体增强化学气相沉积系统中,并以预定流量比供应含碳反应气体和平衡气体的混合物,以便将碳纳米管生长在 所述细硅铁合金颗粒,其中步骤(a)的所述硅铁合金包含15重量%至25重量%的硅; 步骤(c)在300-380℃的温度下进行。

    Photocatalyst element, method and device for preparing the same
    58.
    发明授权
    Photocatalyst element, method and device for preparing the same 有权
    光催化剂元素,其制备方法和装置

    公开(公告)号:US08022011B2

    公开(公告)日:2011-09-20

    申请号:US12769343

    申请日:2010-04-28

    IPC分类号: C23C14/08 C23C14/34 B01J21/06

    摘要: A photocatalyst according to the invention comprises a photocatalytic film of a compound of titanium and oxygen and is characterized in that the photocatalytic film is made porous and has 0.02 or higher value as a value calculated by dividing the arithmetical mean deviation of profile Ra with the film thickness. The photocatalytic film can also be specified by the intensity ratio between x-ray diffraction peaks of the anatase structure of titanium oxide. Such a porous photocatalytic material can be obtained by a reactive sputtering method in conditions of adjusting film formation parameters such as the film formation rate, the sputtering pressure, the substrate temperature, the oxygen partial pressure and the like in proper ranges, respectively, and the photocatalyst material is provided with excellent decomposition and hydrophilization capability.

    摘要翻译: 根据本发明的光催化剂包括钛和氧化合物的光催化膜,其特征在于,光催化膜是多孔的,并且具有0.02或更高的值作为通过将膜的算术平均偏差除以膜的计算值 厚度。 也可以通过氧化钛的锐钛矿结构的x射线衍射峰之间的强度比来确定光催化膜。 这种多孔光催化材料可以通过分别在适当范围内调节成膜速度,溅射压力,基板温度,氧分压等成膜参数的条件下通过反应溅射法获得, 光催化剂材料具有优异的分解和亲水化能力。

    CARBON STRUCTURE MANUFACTURING DEVICE AND MANUFACTURING METHOD
    60.
    发明申请
    CARBON STRUCTURE MANUFACTURING DEVICE AND MANUFACTURING METHOD 审中-公开
    碳结构制造装置及制造方法

    公开(公告)号:US20090258164A1

    公开(公告)日:2009-10-15

    申请号:US12439321

    申请日:2007-08-31

    摘要: This invention relates to a carbon structure manufacturing device, which forms carbon structures on a substrate. This manufacturing device comprises a first chamber, which forms a first space accommodating the substrate; a raw material gas supply device, which supplies raw material gas for formation of the carbon structures to the first space; a second chamber, which forms a second space separate from the first space; a gas supply device, which supplies gas for generation of plasma to the second space; a plasma generation device, which generates plasma in the second space; an aperture, connecting the first space and the second space; and, a plasma introduction device, which introduces plasma generated in the second space into the first space via the aperture; the raw material gas is used to form the carbon structures on the substrate. By means of this manufacturing device, when forming carbon structures on the substrate, the occurrence of contamination, foreign matter, and/or the like on electrodes and/or the like can be suppressed, and carbon structures can be formed satisfactorily over a broad area.

    摘要翻译: 本发明涉及在基板上形成碳结构的碳结构制造装置。 该制造装置包括:第一室,其形成容纳基板的第一空间; 原料气体供给装置,其向第一空间供给用于形成碳结构的原料气体; 第二室,其形成与第一空间分开的第二空间; 气体供给装置,其向第二空间供给用于产生等离子体的气体; 等离子体产生装置,其在第二空间中产生等离子体; 连接第一空间和第二空间的孔; 以及等离子体引入装置,其通过所述孔将在所述第二空间中产生的等离子体引入所述第一空间; 原料气体用于在基板上形成碳结构。 通过该制造装置,当在基板上形成碳结构时,可以抑制在电极等上的污染,异物等的发生,并且可以在广泛的区域上令人满意地形成碳结构 。