公开(公告)号：US20070235645A1

公开(公告)日：2007-10-11

申请号：US11240391

申请日：2005-10-03

Applicant: Yuusuke Tanba ,  Mitsugu Sato ,  Kaname Takahashi ,  Shunya Watanabe ,  Mine Nakagawa ,  Atsushi Muto

Inventor： Yuusuke Tanba ,  Mitsugu Sato ,  Kaname Takahashi ,  Shunya Watanabe ,  Mine Nakagawa ,  Atsushi Muto

IPC: G21K7/00

CPC classification number: H01J37/244 ,  H01J37/28 ,  H01J2237/24455 ,  H01J2237/2446 ,  H01J2237/2802

Abstract: The charged particle beam device of this invention separately detects secondary signal particles emitted from the surface of a sample, dark field signal particles scattered within and transmitted through the sample, bright field signal particles transmitted through the sample without being scattered within the sample, and thereby allows the operator to observe the image with an optimum contrast according to applications. In order to detect only the dark field transmitted signal particles scattered within the sample, among the transmitted signal particles obtained by the primary charged particle beams having transmitted through the thin film sample, the device includes a transmitted signal conversion member having an opening through which the bright field transmitted signal particles not being scattered within the sample can pass, and a detection means for detecting signals colliding against the conversion member.

Abstract translation: 本发明的带电粒子束装置分别检测从样品表面发射的二次信号颗粒，散射在样品内并透过样品的暗场信号颗粒，通过样品透射的亮场信号颗粒，而不分散在样品内， 允许操作者根据应用以最佳对比度观察图像。 为了仅检测在样品内散射的暗场发射信号颗粒，在通过薄膜样品传输的初级带电粒子束获得的透射信号颗粒中，该装置包括具有开口的透射信号转换构件， 未被分散在样品内的明场传输信号粒子可以通过;以及检测装置，用于检测与转换构件相撞的信号。

公开(公告)号：US20070120065A1

公开(公告)日：2007-05-31

申请号：US11599611

申请日：2006-11-15

Applicant: Atsushi Takane ,  Satoru Yamaguchi ,  Mitsugu Sato

Inventor： Atsushi Takane ,  Satoru Yamaguchi ,  Mitsugu Sato

IPC: G01K1/08

CPC classification number: H01J37/1471 ,  H01J37/265 ,  H01J2237/1501 ,  H01J2237/216 ,  H01J2237/28

Abstract: A charged particle beam apparatus is provided which can prevent the accuracy of positional shift detection from being degraded owing to differences in picture quality, so that even when the state of a charged particle beam is changed at the time that optical conditions are changed or the optical axis changes with time, an auto adjustment of the optical axis can be realized easily and highly accurately. In the charged particle beam apparatus, evaluation or adjustment of focusing is conducted before the deflection condition of an alignment deflector for optical axis adjustment is changed or a table of focus adjustment amounts in correspondence with deflection conditions of the alignment deflector is provided, whereby when the deflection condition of the alignment deflector is changed, a focus adjustment is carried out in accordance with the table.

Abstract translation: 提供一种带电粒子束装置，其可以防止由于图像质量的差异而导致的位置偏移检测的精度降低，使得即使当光学条件改变时带电粒子束的状态改变或光学条件改变时， 轴随时间变化，可以容易且高精度地实现光轴的自动调节。 在带电粒子束装置中，在用于光轴调节的对准偏转器的偏转状态改变之前进行聚焦的评估或调整，或者提供与对准偏转器的偏转条件相对应的焦点调整量表， 改变对准偏转器的偏转状态，根据该表进行焦点调整。

公开(公告)号：US07214936B2

公开(公告)日：2007-05-08

申请号：US11242129

申请日：2005-10-04

Applicant: Mitsugu Sato ,  Katsuhiko Sakai ,  Atsushi Takane ,  Yoshihiko Nakayama

Inventor： Mitsugu Sato ,  Katsuhiko Sakai ,  Atsushi Takane ,  Yoshihiko Nakayama

IPC: H01J37/21

CPC classification number: H01J37/244 ,  H01J37/21 ,  H01J37/222 ,  H01J37/28 ,  H01J2237/21 ,  H01J2237/221 ,  H01J2237/24578 ,  H01J2237/24592 ,  H01J2237/2816 ,  H01J2237/2817

Abstract: There is provided a charged particle beam apparatus which allows implementation of a high-reliability and high-accuracy dimension measurement even if height differences exist on the surface of a sample. The charged particle beam apparatus includes the following configuration components: An acquisition unit for acquiring a plurality of SEM images whose focus widths are varied in correspondence with the focal depths, a determination unit for determining, from the plurality of SEM images acquired, a SEM image for which the image sharpness degree of the partial domain including a dimension-measuring domain becomes the maximum value, and a measurement unit for measuring the dimension of the predetermined domain from the SEM image whose image sharpness degree is the maximum value.

Abstract translation: 提供了一种带电粒子束装置，即使在样品的表面上存在高差也允许实现高可靠性和高精度尺寸测量。 带电粒子束装置包括以下配置部件：用于获取与焦点深度相对应的聚焦宽度变化的多个SEM图像的获取单元，确定单元，用于从所获取的多个SEM图像中确定SEM图像 包括尺寸测量区域的部分域的图像清晰度变为最大值;以及测量单元，用于从图像锐度度为最大值的SEM图像测量预定域的尺寸。

公开(公告)号：US20070085007A1

公开(公告)日：2007-04-19

申请号：US11582955

申请日：2006-10-19

Applicant: Mine Araki ,  Shunya Watanabe ,  Chisato Kamiya ,  Mitsugu Sato ,  Atsushi Takane ,  Akinari Morikawa ,  Atsushi Miyaki ,  Toru Ishitani

Inventor： Mine Araki ,  Shunya Watanabe ,  Chisato Kamiya ,  Mitsugu Sato ,  Atsushi Takane ,  Akinari Morikawa ,  Atsushi Miyaki ,  Toru Ishitani

IPC: G21K7/00

CPC classification number: H01J37/265 ,  H01J2237/221

Abstract: There is disclosed a charged particle beam device which judges whether or not an image based on a dark-field signal has an appropriate atomic number contrast. Input reference information, a bright-field image or a back-scattered electron image is compared with a dark-field image, and it is judged whether or not a correlation value between them or the dark-field image has a predetermined contrast. According to such a constitution, it is possible to obtain information by which it is judged whether or not the dark-field image has an appropriate atomic number contrast.

Abstract translation: 公开了一种带电粒子束装置，其判断基于暗场信号的图像是否具有适当的原子序数对比度。 将输入参考信息，亮场图像或背散射电子图像与暗视场图像进行比较，并且判断它们之间的相关值或暗视场图像是否具有预定的对比度。 根据这样的结构，可以获得判断暗场图像是否具有适当的原子序数对比度的信息。

公开(公告)号：US20060284087A1

公开(公告)日：2006-12-21

申请号：US11498125

申请日：2006-08-03

Applicant: Toshihide Agemura ,  Mitsugu Sato

Inventor： Toshihide Agemura ,  Mitsugu Sato

IPC: G21K7/00

CPC classification number: G01R31/307 ,  G01N23/2251 ,  H01J37/28 ,  H01J2237/15 ,  H01J2237/24564 ,  H01J2237/24592 ,  H01J2237/2487 ,  H01J2237/28 ,  H01J2237/2817

Abstract: In a defect inspection apparatus which combines a plurality of probes for measuring electric properties of a specimen including a fine circuit line pattern with a charged particle beam apparatus, the charged particle beam apparatus reduces a degradation in resolution even with an image-shift of ±75 μm or more. The defect inspection apparatus has a CAD navigation function associated with an image-shift function. The CAD navigation function uses coordinates for converting an image-shift moving amount to a DUT stage moving amount in communications between an image processing unit for processing charged particle beam images and a memory for storing information on circuit line patterns. The defect inspection provides the user with significantly improved usability.

Abstract translation: 在将包含精细电路线图案的样本的电特性的多个探针与带电粒子束装置组合的缺陷检查装置中，带电粒子束装置即使图像偏移为±75，也降低了分辨率的劣化 妈妈还是更多 缺陷检查装置具有与图像移位功能相关联的CAD导航功能。 CAD导航功能在用于处理带电粒子束图像的图像处理单元和用于存储关于电路线图案的信息的存储器之间的通信中使用用于将图像移位移动量转换为DUT阶段移动量的坐标。 缺陷检查为用户提供了显着提高的可用性。

公开(公告)号：US20060219907A1

公开(公告)日：2006-10-05

申请号：US11311425

申请日：2005-12-20

Applicant: Takeshi Ogashiwa ,  Mitsugu Sato ,  Atsushi Takane

Inventor： Takeshi Ogashiwa ,  Mitsugu Sato ,  Atsushi Takane

IPC: G21K7/00 ,  G01N23/00

CPC classification number: H01J37/222

Abstract: A sample image display method and an image shift sensitivity measuring method to be executed in a charged particle beam apparatus are provided for accurately correcting an image drift in any observing and analyzing condition such as an accelerating voltage, a working distance or a raster rotation. When obtaining a reference image used for detecting a drift, the process is executed to obtain an image having the different image shift amount from that of the reference image at a time and to occasionally measure an image shift sensitivity. Then, the process is executed to automatically register this reference image and the image shift sensitivity and to detect a drift amount and control an image shift (correct a drift) according to the registered conditions when correcting the drift.

Abstract translation: 在带电粒子束装置中执行的样本图像显示方法和图像偏移灵敏度测量方法被提供用于在诸如加速电压，工作距离或光栅旋转的观察和分析条件中精确校正图像漂移。 当获得用于检测漂移的参考图像时，执行该处理以一次获得具有与参考图像的图像偏移量不同的图像偏移量的图像，并且偶尔测量图像偏移灵敏度。 然后，执行该处理以自动登记该参考图像和图像移位灵敏度，并且在校正漂移时根据注册条件来检测漂移量并控制图像偏移（校正漂移）。

公开(公告)号：US20060076489A1

公开(公告)日：2006-04-13

申请号：US11196399

申请日：2005-08-04

Applicant: Takashi Ohshima ,  Mitsugu Sato ,  Soichi Katagiri

Inventor： Takashi Ohshima ,  Mitsugu Sato ,  Soichi Katagiri

IPC: G21K7/00

CPC classification number: H01J37/244 ,  H01J37/28 ,  H01J2237/0268 ,  H01J2237/04756 ,  H01J2237/1205 ,  H01J2237/121 ,  H01J2237/188 ,  H01J2237/24465 ,  H01J2237/2611 ,  H01J2237/31749

Abstract: A charged particle beam apparatus in which an electrostatic lens is used as a main focusing element to obtain a subminiature high-sensitivity high-resolution SEM, a drift tube for an electron beam is located inside a column between an electron source and a sample, and a detector for secondary electrons is located inside the drift tube. This solves the problem associated with the provision of a secondary electron detector, which heretofore has been a bottleneck in making a subminiature high-resolution SEM column.

Abstract translation: 使用静电透镜作为主聚焦元件以获得超小型高灵敏度高分辨率SEM的带电粒子束装置，用于电子束的漂移管位于电子源和样品之间的列内，并且 用于二次电子的检测器位于漂移管内。 这解决了与提供二次电子检测器相关的问题，这种二次电子检测器迄今已成为制造超小型高分辨率SEM柱的瓶颈。

公开(公告)号：US07012252B2

公开(公告)日：2006-03-14

申请号：US11108877

申请日：2005-04-19

Applicant: Yuko Iwabuchi ,  Hideo Todokoro ,  Hiroyoshi Mori ,  Mitsugu Sato ,  Yasutsugu Usami ,  Mikio Ichihashi ,  Satoru Fukuhara ,  Hiroyuki Shinada ,  Yutaka Kaneko ,  Katsuya Sugiyama ,  Atsuko Takafuji ,  Hiroshi Toyama

Inventor： Yuko Iwabuchi ,  Hideo Todokoro ,  Hiroyoshi Mori ,  Mitsugu Sato ,  Yasutsugu Usami ,  Mikio Ichihashi ,  Satoru Fukuhara ,  Hiroyuki Shinada ,  Yutaka Kaneko ,  Katsuya Sugiyama ,  Atsuko Takafuji ,  Hiroshi Toyama

IPC: H01J37/28

CPC classification number: H01J37/28 ,  G01N23/20 ,  G01N23/2251 ,  G03F7/7065 ,  G06T7/001 ,  G06T2207/10056 ,  G06T2207/30148 ,  H01J37/04 ,  H01J37/20 ,  H01J37/265 ,  H01J2237/04756 ,  H01J2237/20221 ,  H01J2237/2444 ,  H01J2237/24592 ,  H01J2237/2817 ,  H01J2237/31766

Abstract: Problems encountered in the conventional inspection method and the conventional apparatus adopting the method are solved by the present invention using an electron beam by providing a novel inspection method and an inspection apparatus adopting the novel method which are capable of increasing the speed to scan a specimen such as a semiconductor wafer.The inspection novel method provided by the present invention comprises the steps of: generating an electron beam; converging the generated electron beam on a specimen by using an objective lens; scanning the specimen by using the converged electron beam; continuously moving the specimen during scanning; detecting charged particles emanating from the specimen at a location between the specimen and the objective lens and converting the detected charged particles into an electrical signal; storing picture information conveyed by the electrical signal; comparing a picture with another by using the stored picture information; and detecting a defect of the specimen.

公开(公告)号：US06979821B2

公开(公告)日：2005-12-27

申请号：US10730106

申请日：2003-12-09

Applicant: Naomasa Suzuki ,  Toshiro Kubo ,  Noriaki Arai ,  Mitsugu Sato ,  Hideo Todokoro ,  Yoichi Ose

Inventor： Naomasa Suzuki ,  Toshiro Kubo ,  Noriaki Arai ,  Mitsugu Sato ,  Hideo Todokoro ,  Yoichi Ose

IPC: H01J37/244 ,  G01Q30/02 ,  H01J37/28

CPC classification number: H01J37/28 ,  H01J2237/04753 ,  H01J2237/04756

Abstract: Image observation at high resolution is realized and irregularity information of a sample is obtained.The reflected electrons 12a emitted in a direction at a small angle with the surface of the sample 8 are detected by the detectors 10a and 10b arranged on the side of the electron source 1 of the magnetic field leakage type object lens 7 and a sample image is formed. Irregularity information of the sample is obtained from the effects of light and shade appearing in the sample image.

Abstract translation: 实现高分辨率的图像观察，获得样品的不规则信息。 通过布置在磁场泄漏型物镜7的电子源1侧的检测器10a和10b来检测与样品8的表面成小角度方向发射的反射电子12a和 形成样品图像。 从样本图像中出现的光和阴影的效果获得样本的不规则信息。

公开(公告)号：US20050189501A1

公开(公告)日：2005-09-01

申请号：US11038478

申请日：2005-01-21

Applicant: Mitsugu Sato ,  Atsushi Takane ,  Shigeto Isakozawa ,  Takashi Iizumi ,  Tatsuya Maeda ,  Hiromi Inada

Inventor： Mitsugu Sato ,  Atsushi Takane ,  Shigeto Isakozawa ,  Takashi Iizumi ,  Tatsuya Maeda ,  Hiromi Inada

IPC: G21K5/00 ,  G03F7/20 ,  G21K5/04 ,  H01J37/08 ,  H01J37/22 ,  H01J37/256 ,  H01J37/28 ,  H01L21/027 ,  H01L21/66

CPC classification number: H01J37/28 ,  H01J2237/2826

Abstract: A charged particle beam apparatus capable of automatically measuring an image magnification error of an apparatus and capable of automatically calibrating the image magnification in high precision is provided. To this end, while an image processing operation of either an auto-correlation function or an FFT transformation is employed with respect to a scanning image of a reference material having a periodic structure, the averaged pitch dimension of which is known, averaged periodic information owned by the scanning image is detected so as to measure an image magnification error of the apparatus. Also, the information as to the acquired image magnification error is fed back to an image magnification control means of the apparatus so as to automatically execute a calibration as to the image magnification in high precision.

Abstract translation: 提供一种能够自动测量装置的图像放大误差并且能够以高精度自动校准图像放大率的带电粒子束装置。 为此，当对具有周期性结构的参考材料的扫描图像采用自相关函数或FFT变换的图像处理操作时，其平均间距尺寸已知，所拥有的平均周期信息 检测扫描图像以测量装置的图像放大误差。 此外，关于获取的图像放大误差的信息被反馈到装置的图像倍率控制装置，以便以高精度自动执行关于图像放大的校准。