Process for selective formation of II-VI group compound film
    72.
    发明授权
    Process for selective formation of II-VI group compound film 失效
    选择性形成II-VI族化合物膜的方法

    公开(公告)号:US5334864A

    公开(公告)日:1994-08-02

    申请号:US818530

    申请日:1992-01-09

    摘要: A process for selective formation of a II-VI group compound film comprises applying a compound film forming treatment, in a gas phase including a starting material for supplying the group II atoms of periodic table and a starting material for supplying the group VI atoms of periodic table, on a substrate having a non-nucleation surface (S.sub.NDS) with small nucleation density and a nucleation surface (S.sub.NDL) with larger nucleation density (ND.sub.L) than the nucleation density (ND.sub.S) of said non-nucleation surface (S.sub.NDS) and a large area sufficient for a number of nuclei to be formed and forming selectively a II-VI group compound film only on said nucleation surface (S.sub.NDL).

    摘要翻译: 用于选择性形成II-VI族化合物膜的方法包括在包括用于提供元素周期表的II族原子的起始材料和用于提供第VI族原子的周期表的原料的气相中进行化合物成膜处理 在具有较小成核密度的非成核表面(SNDS)和具有比所述非成核表面(SNDS)的成核密度(NDS))更大的成核密度(NDL)的成核表面(SNDL)的基底上, 大面积足以形成许多核,并且仅在所述成核表面(SNDL)上选择性地形成II-VI族化合物膜。

    Method of forming a multilayered structure
    73.
    发明授权
    Method of forming a multilayered structure 失效
    形成多层结构的方法

    公开(公告)号:US5324536A

    公开(公告)日:1994-06-28

    申请号:US116542

    申请日:1993-09-07

    申请人: Takao Yonehara

    发明人: Takao Yonehara

    摘要: A method of forming a multilayered structure by flattening an uneven deposited surface thereof. It comprises the steps of: forming lower and higher portions on the deposited surface with different kinds of materials; and depositing a material selectively on the lower portions alone on the surface using the difference in nucleation density between the deposited materials due to the kinds of the materials of the deposited surface, thereby flattening the surface.

    摘要翻译: 通过使其不均匀沉积表面变平而形成多层结构的方法。 它包括以下步骤:用不同种类的材料在沉积表面上形成较低部分和较高部分; 并且由于沉积表面的材料的种类,使用沉积材料之间的成核密度差,在表面上单独地在下部上选择性地沉积材料,从而使表面变平。

    Group III-V compound crystal article using selective epitaxial growth
    74.
    发明授权
    Group III-V compound crystal article using selective epitaxial growth 失效
    使用选择性外延生长的III-V族复合晶体制品

    公开(公告)号:US5281283A

    公开(公告)日:1994-01-25

    申请号:US985751

    申请日:1992-12-04

    IPC分类号: C30B25/02 C30B25/18 H01L21/20

    摘要: A III-V group compound crystal article comprises a substrate having a non-nucleation surface with smaller nucleation density (S.sub.NDS) and a nucleation surface (S.sub.NDL) which is arranged adjacent to said non-nucleation surface (S.sub.NDS), has a sufficiently small area for a crystal to grow only from a single nucleus and a larger nucleation density (ND.sub.L) than the nucleation density (ND.sub.S) of said non-nucleation surface (S.sub.NDS) and is comprised of an amorphous material, and a III-V group compound monocrystal grown from said single nucleus on said substrate and spread on said non-nucleation surface (S.sub.NDS) beyond said nucleation surface (S.sub.NDL).

    摘要翻译: III-V族化合物晶体制品包括具有较小成核密度(SNDS)的非成核表面和与所述非成核表面(SNDS)相邻布置的成核表面(SNDL)的基底具有足够小的面积 使得晶体仅从所述非成核表面(SNDS)的单核和较大的成核密度(NDL)生长,并且由非晶材料和III-V族化合物单晶 在所述基底上从所述单核生长并在所述非成核表面(SNDS)上超过所述成核表面(SNDL)扩散。

    Method for forming semiconductor thin film
    75.
    发明授权
    Method for forming semiconductor thin film 失效
    形成半导体薄膜的方法

    公开(公告)号:US5278093A

    公开(公告)日:1994-01-11

    申请号:US919372

    申请日:1992-07-29

    申请人: Takao Yonehara

    发明人: Takao Yonehara

    IPC分类号: H01L21/20

    CPC分类号: H01L21/2022 Y10S148/154

    摘要: A method for forming a semiconductor thin film comprises crystallizing an amorphous silicon thin film by a first thermal treatment at 700.degree. C. or lower for ten hours or longer and carrying out a second thermal treatment at 1200.degree. C. or higher in which a lamp light is radiated to the crystallized thin film.

    摘要翻译: 一种半导体薄膜的形成方法,其特征在于,在700℃以下进行10小时以上的第1次热处理,在1200℃以上进行第2次热处理,使非晶硅薄膜结晶化, 光被照射到结晶​​的薄膜上。

    Method for forming crystals
    76.
    发明授权
    Method for forming crystals 失效
    晶体形成方法

    公开(公告)号:US5254211A

    公开(公告)日:1993-10-19

    申请号:US759768

    申请日:1991-09-13

    申请人: Takao Yonehara

    发明人: Takao Yonehara

    IPC分类号: C30B19/02 C30B19/12 C30B19/06

    CPC分类号: C30B19/02 C30B19/12

    摘要: A method of forming a crystal comprises a crystal forming treatment effected by dipping a substrate having a nonnucleation surface having a small nucleation density and a nucleation surface having a larger nucleation density than said nonnucleation surface and an area sufficiently fine to such an extent as to allow only a single nucleus to be formed in a solution containing a monocrystal forming material to thereby allow a monocrystal to grow from only the single nucleus.

    摘要翻译: 形成晶体的方法包括通过浸渍具有小成核密度的非成核表面的基底和具有比所述非成核表面更大成核密度的成核表面的基底和足够细的面积至允许 仅在含有单晶形成材料的溶液中形成的单个核,从而允许单晶仅从单个核生长。

    Method of making semiconductor memory device
    78.
    发明授权
    Method of making semiconductor memory device 失效
    制造半导体存储器件的方法

    公开(公告)号:US5155058A

    公开(公告)日:1992-10-13

    申请号:US855498

    申请日:1992-03-23

    摘要: A semiconductor memory device has plural first transistors constituting an information memory circuit and plural second transistors constituting gate units for controlling information input and output. The plural first transistors and the plural second transistors are formed in mutually overlaying structure across an insulating layer. A heterogeneous material of a nucleation density sufficiently higher than that of the insulating layer and of a size small enough to grow a single nucleus of a semiconductor material is formed on the insulating layer. The transistors positioned on the insulating layer are formed in a monocrystalline or substantially monocrystalline semiconductor layer grown around the single nucleus formed on the different material.

    摘要翻译: 半导体存储器件具有构成信息存储电路的多个第一晶体管和构成用于控制信息输入和输出的栅极单元的多个第二晶体管。 多个第一晶体管和多个第二晶体管跨越绝缘层以相互重叠的结构形成。 在绝缘层上形成成核密度足够高于绝缘层的成核密度且尺寸足够小以生长半导体材料的单个核的异质材料。 位于绝缘层上的晶体管形成在形成于不同材料上的单个核周围生长的单晶或基本单晶半导体层中。

    Photoelectric converter
    80.
    发明授权
    Photoelectric converter 失效
    光电转换器

    公开(公告)号:US5013670A

    公开(公告)日:1991-05-07

    申请号:US523828

    申请日:1990-05-15

    摘要: A photoelectric conversion device includes a light transmissive substrate having a deposition surface and a bottom surface. The bottom surface receives light and passes it through the substrate. A heterogeneous deposition surface is formed on the substrate deposition surface and has a nucleation density higher than the nucleation density of the substrate deposition surface. The heterogeneous deposition surface also has an area dimensioned to permit growth of a single nucleus of a single crystal material. A photoelectric conversion collector is formed of the single crystal material grown on the heterogeneous deposition surface. The collector receives light passed through the substrate bottom surface. Photoresponsive transistor elements are formed in and on the collector for outputting a signal corresponding to the light received by the collector through the bottom of the light transmissive substrate. Thus, electrical wiring and transistor elements are formed on the top of the collector, away from the collector surface which receives the light.

    摘要翻译: 光电转换装置包括具有沉积表面和底表面的透光基底。 底面接收光并将其通过基板。 在基板沉积表面上形成非均相沉积表面,其成核密度高于基板沉积表面的成核密度。 异质沉积表面还具有尺寸允许单晶材料单核生长的面积。 光电转换收集器由在异质沉积表面上生长的单晶材料形成。 收集器接收通过基板底面的光。 响应晶体管元件形成在集电极上和集电极上,用于输出对应于集电极通过透光基板的底部接收的光的信号。 因此,电接线和晶体管元件形成在集电器的顶部,远离收纳光的集电器表面。