Excimer laser device
    71.
    发明授权
    Excimer laser device 失效
    准分子激光装置

    公开(公告)号:US5642374A

    公开(公告)日:1997-06-24

    申请号:US420132

    申请日:1995-04-10

    CPC分类号: H01S3/134 H01S3/225

    摘要: Aimed at preventing a laser light beam profile from fluctuating, and by using the fact that there is a substantially proportional relation between the beam profile and the charging voltage as well as between the beam profile and the composition or the total pressure of the laser gases, an excimer laser device comprises a laser chamber containing laser gases which are excited by initiating an electric discharge in the laser chamber to output laser light, a beam profile detector for detecting a beam profile of the output laser light, and a controller for controlling a electric discharge voltage (excitation intensity) and composition or total pressure of the prescribed types of laser gases in such a way that the beam profile is shaped as desired based on detection results of the beam profile detector. An excimer laser feedback control circuit detects the output laser beam width and controls the beam width by controlling one or more of the laser voltage, composition of the laser gas, pressure or partial pressure of the laser gas, or feed rate of a laser gas. The laser gas may comprise a halogen, buffer, or rare gas.

    摘要翻译: 旨在防止激光束轮廓波动,并且通过使用光束轮廓和充电电压之间以及光束轮廓与激光气体的组成或总压力之间存在实质上成比例关系的事实, 准分子激光装置包括激光室,其包含通过在激光室中引发放电而激发的激光气体输出激光,用于检测输出激光的光束分布的光束分布检测器,以及用于控制电 放电电压(激发强度)和规定类型的激光气体的组成或总压力,使得根据光束轮廓检测器的检测结果,根据需要对光束轮廓进行成形。 准分子激光反馈控制电路通过控制激光电压,激光气体的组成,激光气体的压力或分压或激光气体的进给速率中的一个或多个来检测输出激光束宽度并控制光束宽度。 激光气体可以包括卤素,缓冲剂或稀有气体。

    Narrow band excimer laser
    72.
    发明授权
    Narrow band excimer laser 失效
    窄带准分子激光器

    公开(公告)号:US5596596A

    公开(公告)日:1997-01-21

    申请号:US573593

    申请日:1995-12-15

    摘要: A narrow-band excimer laser employing a diffraction grating as a wavelength selective element, which is particularly suited for a light source of a reduction projection aligner. The grating used in the narrow-band excimer laser of the invention is so disposed that the ruling direction of the grating is nearly perpendicular to the direction of laser discharge. When a beam expander is used to expand laser beam falling on the beam expander is so disposed that the direction of beam expansion is nearly perpendicular to that of discharge of the laser. Further, when an aperture is to be used in the laser cavity, the aperture is placed so that the longitudinal direction may be parallel to the direction of laser discharge. Moreover, the front mirror of the laser cavity is a cylindrical one, whose mechanical axis is in parallel with the direction of laser discharge. This makes it possible to provide a narrow-band excimer laser having very high efficiency and excellent durability.

    摘要翻译: 采用衍射光栅作为波长选择元件的窄带准分子激光器,其特别适用于还原投影对准器的光源。 在本发明的窄带准分子激光器中使用的光栅被布置成使得光栅的光栅方向几乎垂直于激光放电的方向。 当使用光束扩展器来扩展落在光束扩展器上的激光束时,光束扩展的方向几乎垂直于激光放电的方向。 此外,当在激光腔中使用孔时,孔被放置成使得纵向方向可以平行于激光放电的方向。 此外,激光腔的前镜是圆柱形的,其机械轴与激光放电的方向平行。 这使得可以提供非常高的效率和优异的耐久性的窄带准分子激光器。

    METHOD OF CONTROLLING LASER APPARATUS AND LASER APPARATUS
    75.
    发明申请
    METHOD OF CONTROLLING LASER APPARATUS AND LASER APPARATUS 有权
    控制激光装置和激光装置的方法

    公开(公告)号:US20150188274A1

    公开(公告)日:2015-07-02

    申请号:US14579698

    申请日:2014-12-22

    摘要: A method of controlling a laser apparatus may include: exchanging a gain medium in a chamber configured to output a laser beam by exciting the gain medium; first measuring, after the exchanging, pulse energy of a laser beam which is oscillated in the chamber under a specific gas pressure and a specific charge voltage; calculating an approximate expression indicating a relationship between the pulse energy of the laser beam and the gas pressure in the chamber and the charge voltage, or a table representing a correlationship between the pulse energy, the gas pressure and the charge voltage, based on the specific pressure, the specific charge voltage and the pulse energy in the first measuring; storing the approximate expression or the table; second measuring, after the first measuring, pulse energy Er of a laser beam oscillated in the chamber; calculating pulse energy Eec which is supposed to be obtained directly after the exchanging under the gas pressure and the charge voltage in the second measuring based on the approximate expression or the table; calculating a reduction amount ΔEd of pulse energy based on the pulse energy Eec and the pulse energy Er using ΔEd=Eec−Er; and calculating a partial gas exchange amount Q for partial gas exchange in the chamber based on the reduction amount ΔEd of pulse energy.

    摘要翻译: 控制激光装置的方法可以包括:在配置成通过激励增益介质输出激光束的腔室中交换增益介质; 在交换之后,首先测量在特定气体压力和特定充电电压下在腔室中振荡的激光束的脉冲能量; 计算表示激光束的脉冲能量与腔室中的气体压力与充电电压之间的关系的近似表达式,或表示脉冲能量,气体压力和充电电压之间的相关性的表格, 压力,第一次测量中的具体充电电压和脉冲能量; 存储近似表达式或表格; 在第一次测量之后,第二次测量激光束的脉冲能量Er在腔室中振荡; 基于近似表达式或表格,计算在气体压力下的交换和第二测量中的充电电压之间直接获得的脉冲能量Eec; 使用&Dgr; Ed = Eec-Er计算基于脉冲能量Eec和脉冲能量Er的脉冲能量的减少量&Dgr; Ed; 并且基于脉冲能量的减少量&Dgr; Ed计算腔室中部分气体交换的部分气体交换量Q。

    Extreme ultraviolet light generation apparatus
    78.
    发明授权
    Extreme ultraviolet light generation apparatus 有权
    极紫外光发生装置

    公开(公告)号:US08710474B2

    公开(公告)日:2014-04-29

    申请号:US13532365

    申请日:2012-06-25

    IPC分类号: G21K5/00 G01K5/00 B41C3/02

    CPC分类号: H05G2/008 H05G2/006

    摘要: An apparatus used with an external laser apparatus for generating extreme ultraviolet light includes a target storage unit for storing a target material, a nozzle unit having a through-hole in communication with the interior of the storage unit through which the target material is outputted, an electrode having a through-hole facing the nozzle unit, and a target detector for detecting a target formed of the target material and outputting a detection signal. A direct current voltage adjuster applies and adjusts a direct current between the target material and the electrode, a pressure adjuster applies and adjusts a pressure to the target material through gas, and a controller controls at least one of the direct current voltage adjuster and the pressure adjuster based on the detection signal from the target detector.

    摘要翻译: 与用于产生极紫外光的外部激光装置一起使用的装置包括用于存储目标材料的目标存储单元,具有与被输送目标材料的存储单元的内部连通的通孔的喷嘴单元, 电极,其具有面向喷嘴单元的通孔,以及目标检测器,用于检测由目标材料形成的目标并输出检测信号。 直流电压调节器施加并调节目标材料和电极之间的直流电流,压力调节器通过气体施加和调节对目标材料的压力,并且控制器控制至少一个直流电压调节器和压力 基于来自目标检测器的检测信号的调节器。

    Chamber apparatus and extreme ultraviolet (EUV) light generation apparatus including the chamber apparatus
    79.
    发明授权
    Chamber apparatus and extreme ultraviolet (EUV) light generation apparatus including the chamber apparatus 有权
    包括室装置的室内装置和极紫外(EUV)光发生装置

    公开(公告)号:US08698113B2

    公开(公告)日:2014-04-15

    申请号:US13696517

    申请日:2011-12-13

    IPC分类号: H05G2/00

    摘要: A chamber apparatus used with a laser apparatus may include a chamber, a beam expanding optical system, and a focusing optical system. The chamber may be provided with at least one inlet, through which a laser beam outputted from the laser apparatus is introduced into the chamber. The beam expanding optical system is configured to expand the laser beam in diameter. The focusing optical system is configured to focus the laser beam that has been expanded in diameter.

    摘要翻译: 与激光装置一起使用的室装置可以包括室,扩束光学系统和聚焦光学系统。 该室可以设置有至少一个入口,激光装置输出的激光束通过该入口被引入腔室。 扩束光学系统被配置为直径地扩大激光束。 聚焦光学系统被配置为聚焦已经扩大直径的激光束。

    Master oscillator system and laser apparatus
    80.
    发明授权
    Master oscillator system and laser apparatus 有权
    主振荡器系统和激光设备

    公开(公告)号:US08675697B2

    公开(公告)日:2014-03-18

    申请号:US13597556

    申请日:2012-08-29

    IPC分类号: H01S3/10

    摘要: A master oscillator system may include a grating configured to function as one resonator mirror in an optical resonator, a spectral bandwidth tuning unit configured to tune the spectral bandwidth of a laser beam transmitted within the optical resonator, a storage unit configured to store a control value of the spectral bandwidth tuning unit corresponding to a desired spectral bandwidth and a controller configured to control the spectral bandwidth tuning unit based on the control value stored in the storage unit.

    摘要翻译: 主振荡器系统可以包括被配置为用作光学谐振器中的一个谐振器反射镜的光栅,被配置为调节在光学谐振器内传输的激光束的光谱带宽的光谱带宽调谐单元,被配置为存储控制值 的光谱带宽调谐单元,以及配置为基于存储在存储单元中的控制值来控制光谱带宽调谐单元的控制器。