Method of manufacturing field effect type compound semiconductor device
    4.
    发明授权
    Method of manufacturing field effect type compound semiconductor device 有权
    制造场效应型化合物半导体器件的方法

    公开(公告)号:US08841154B2

    公开(公告)日:2014-09-23

    申请号:US13916006

    申请日:2013-06-12

    Abstract: Disclosed is a method of manufacturing a field effect type compound semiconductor device in which leakage current of a device is decreased and breakdown voltage is enhanced. The method of manufacturing a field effect type compound semiconductor device includes: stacking an active layer and an ohmic layer on a substrate and forming a first oxide layer on the ohmic layer; forming a mesa region in predetermined regions of the first oxide layer, the ohmic layer, and the active layer; planarizing the mesa region after forming a nitride layer by evaporating a nitride on the mesa region; forming an ohmic electrode on the first oxide layer; forming a minute gate resist pattern after forming a second oxide layer on a semiconductor substrate in which the ohmic electrode is formed and forming a minute gate pattern having a under-cut shaped profile by dry-etching the first oxide layer, the nitride layer, and the second oxide layer; forming a gate recess region by forming a head pattern of a gamma gate electrode on the semiconductor substrate; and forming the gamma gate electrode by evaporating refractory metal on the semiconductor substrate in which the gate recess region is formed.

    Abstract translation: 公开了一种制造场效应型化合物半导体器件的方法,其中器件的漏电流降低并且击穿电压增强。 制造场效应型化合物半导体器件的方法包括:在衬底上堆叠有源层和欧姆层,并在欧姆层上形成第一氧化物层; 在所述第一氧化物层,所述欧姆层和所述有源层的预定区域中形成台面区域; 通过在台面区域上蒸发氮化物,在形成氮化物层之后使台面区域平坦化; 在所述第一氧化物层上形成欧姆电极; 在形成欧姆电极的半导体衬底上形成第二氧化物层之后形成微小栅极抗蚀剂图案,并通过干蚀刻第一氧化物层,氮化物层和形成具有下切形状轮廓的微小栅极图案 第二氧化物层; 通过在所述半导体衬底上形成伽马栅电极的头部图形来形成栅极凹部区域; 以及通过在形成有所述栅极凹部的所述半导体衬底上蒸发难熔金属而形成所述γ栅电极。

    ELECTRONIC DEVICE RELIABILITY MEASUREMENT SYSTEM AND METHOD
    5.
    发明申请
    ELECTRONIC DEVICE RELIABILITY MEASUREMENT SYSTEM AND METHOD 审中-公开
    电子设备可靠性测量系统和方法

    公开(公告)号:US20140152338A1

    公开(公告)日:2014-06-05

    申请号:US13950939

    申请日:2013-07-25

    CPC classification number: G01R31/2608 G01R31/2621 G01R31/2632

    Abstract: Provided is a low-cost and high-efficient system for measuring reliability of an electronic device. According to the present invention, a single input power source for applying power to an input terminal of a plurality of electronic device samples and a single output power source for applying power to an output terminal of the plurality of electronic device samples are provided. Further, an input switch having first switches of which the number corresponds to the number of the plurality of electronic device samples, the input switch being installed between the input power source and the input terminal so that the first switches are selectively switched to apply input power; and an output switch having second switches of which the number corresponds to the number of the plurality of electronic device samples, the output switch being installed between the output power source and the output terminal so that the second switches are selectively switched to apply output power are provided.

    Abstract translation: 提供了用于测量电子设备的可靠性的低成本和高效率的系统。 根据本发明,提供了用于向多个电子设备样本的输入端施加电力的单个输入电源和用于向多个电子设备样本的输出端施加电力的单个输出电源。 此外,具有第一开关的输入开关,其数量对应于多个电子设备样本的数量,输入开关安装在输入电源和输入端子之间,使得第一开关被选择性地切换以施加输入功率 ; 以及具有第二开关的输出开关,其数量对应于多个电子设备样本的数量,输出开关安装在输出电源和输出端子之间,使得第二开关选择性地切换以施加输出功率 提供。

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