Methods of forming integrated circuit memory devices having improved
electrical interconnects therein
    1.
    发明授权
    Methods of forming integrated circuit memory devices having improved electrical interconnects therein 失效
    形成其中具有改进的电互连的集成电路存储器件的方法

    公开(公告)号:US5879982A

    公开(公告)日:1999-03-09

    申请号:US948566

    申请日:1997-10-10

    摘要: Methods of forming integrated circuit memory devices include the steps of forming a first electrically insulating layer on a semiconductor substrate containing memory cells in a memory cell array region and peripheral circuits for driving the memory cells in a peripheral circuit region adjacent the memory cell array region. An etch-stopping layer is then formed on the first electrically insulating layer and then steps are performed to form a first electrically conductive layer on the etch-stopping layer, form a ferroelectric layer on the first electrically conductive layer, form a second electrode layer on the ferroelectric layer, etch the second electrode layer and ferroelectric layer in sequence using a first mask to define a second electrode and then etch the first electrically conductive layer using a second mask to simultaneously define a first electrode and a first interconnection layer comprising the same material. A second electrically insulating layer is then formed on the second electrode and first interconnection layer. First and second vias are then formed in the second electrically insulating layer, to expose the second electrode and first interconnection layer, respectively. A second electrically conductive layer is then patterned in the first and second vias.

    摘要翻译: 形成集成电路存储器件的方法包括以下步骤:在包含存储单元阵列区域中的存储单元的半导体衬底上形成第一电绝缘层,以及用于驱动与存储单元阵列区域相邻的外围电路区域中的存储单元的外围电路。 然后在第一电绝缘层上形成蚀刻停止层,然后执行步骤以在蚀刻停止层上形成第一导电层,在第一导电层上形成铁电层,形成第二电极层 铁电层,使用第一掩模依次蚀刻第二电极层和铁电层以限定第二电极,然后使用第二掩模蚀刻第一导电层,以同时限定第一电极和包含相同材料的第一互连层 。 然后在第二电极和第一互连层上形成第二电绝缘层。 然后在第二电绝缘层中形成第一和第二通孔,以分别露出第二电极和第一互连层。 然后在第一和第二通孔中将第二导电层图案化。

    Integrated circuit devices having buffer layers therein which contain
metal oxide stabilized by heat treatment under low temperature
    2.
    发明授权
    Integrated circuit devices having buffer layers therein which contain metal oxide stabilized by heat treatment under low temperature 失效
    其中具有缓冲层的集成电路器件含有通过在低温下热处理而稳定的金属氧化物

    公开(公告)号:US6144060A

    公开(公告)日:2000-11-07

    申请号:US127353

    申请日:1998-07-31

    摘要: Integrated circuit devices include a first dielectric layer, an electrically insulating layer on the first dielectric layer and an an aluminum oxide buffer layer formed by atomic layer deposition (ALD) and stabilized by heat treatment at a temperature of less than about 600.degree. C., between the first dielectric layer and the electrically insulating layer. The first dielectric layer may comprise a high dielectric material such as a ferroelectric or paraelectric material. The electrically insulating layer may also comprise a material selected from the group consisting of silicon dioxide, borophosphosilicate glass (BPSG) and phosphosilicate glass (PSG). To provide a preferred integrated circuit capacitor, a substrate may be provided and an interlayer dielectric layer may be provided on the substrate. Here, a metal layer may also be provided between the interlayer dielectric layer and the first dielectric layer. The metal layer may comprise a material selected from the group consisting of Pt, Ru, Ir, and Pd.

    摘要翻译: 集成电路器件包括第一电介质层,第一电介质层上的电绝缘层和通过原子层沉积(ALD)形成并通过在小于约600℃的温度下进行热处理而稳定的氧化铝缓冲层, 在第一介电层和电绝缘层之间。 第一电介质层可以包括高电介质材料,例如铁电或顺电材料。 电绝缘层还可以包括选自二氧化硅,硼磷硅酸盐玻璃(BPSG)和磷硅玻璃(PSG)的材料。 为了提供优选的集成电路电容器,可以提供衬底,并且可以在衬底上提供层间电介质层。 这里,还可以在层间介电层和第一介电层之间设置金属层。 金属层可以包括选自Pt,Ru,Ir和Pd的材料。

    Method of manufacturing a semiconductor element
    3.
    发明授权
    Method of manufacturing a semiconductor element 失效
    制造半导体元件的方法

    公开(公告)号:US07645695B2

    公开(公告)日:2010-01-12

    申请号:US11730665

    申请日:2007-04-03

    IPC分类号: H01L21/4763

    摘要: A method of manufacturing a semiconductor element, includes forming a lower metal wiring layer and an interlayer insulating film on a substrate, forming an opening through the interlayer insulating film, such that the opening is in communication with an upper surface of the lower metal wiring layer, cleaning the opening, forming a metal wiring line protecting film in the opening, such that the metal wiring line protecting film covers the lower metal wiring layer, washing the opening to remove the metal wiring line protecting film, such that a top surface of the lower metal wiring layer is exposed, and drying the substrate.

    摘要翻译: 一种半导体元件的制造方法,其特征在于,在基板上形成下部金属布线层和层间绝缘膜,通过所述层间绝缘膜形成开口,使得所述开口与所述下部金属布线层的上表面连通 ,清洗开口,在开口中形成金属布线保护膜,使得金属布线保护膜覆盖下金属布线层,清洗开口以除去金属布线保护膜,使得金属布线保护膜的顶表面 下金属布线层露出,干燥基板。

    Image recording and playing apparatus for automatically generating playlist using bookmark to-video recording format and playlist generating method thereof
    4.
    发明申请
    Image recording and playing apparatus for automatically generating playlist using bookmark to-video recording format and playlist generating method thereof 审中-公开
    用于使用书签到视频记录格式和播放列表生成方法自动生成播放列表的图像记录和播放装置

    公开(公告)号:US20060204220A1

    公开(公告)日:2006-09-14

    申请号:US11285114

    申请日:2005-11-23

    申请人: Sang-min Lee

    发明人: Sang-min Lee

    IPC分类号: H04N7/00

    CPC分类号: G11B27/034 G11B27/329

    摘要: An image recording and playing apparatus automatically generating a playlist using a bookmark to—video recording format and playlist generating method thereof in which if a bookmark is designated, a playlist is automatically generated to thereby provide an editing mode. The image recording and playing apparatus includes a recording medium having image data stored thereon; a key input portion for inputting an instruction to designate at least one bookmark into the image data; and a control portion for, if the inputting of the instruction to designate the at least one bookmark through the key input portion is completed, automatically generating a playlist including the at least one designated bookmark, storing the playlist on the recording medium and restoring the playlist on the recording medium if the playlist is edited by providing an editing mode. Accordingly, if a bookmark is designated as an area the user wants to see again, a playlist is automatically generated, and it is possible to modify or delete the designated bookmark from the generated playlist.

    摘要翻译: 图像记录和播放设备使用书签到视频记录格式自动生成播放列表,并且其播放列表生成方法,其中如果指定了书签,则自动生成播放列表,从而提供编辑模式。 图像记录和播放装置包括其上存储有图像数据的记录介质; 键输入部分,用于将指示至少一个书签的指令输入到图像数据中; 以及控制部分,用于如果完成通过键输入部分输入指定至少一个书签的指令,则自动生成包括至少一个指定书签的播放列表,将播放列表存储在记录介质上并恢复播放列表 如果通过提供编辑模式来编辑播放列表,则在记录介质上。 因此,如果书签被指定为用户想要再次看到的区域,则自动生成播放列表,并且可以从所生成的播放列表中修改或删除指定的书签。

    Method and device for detecting fault of lead in electrocardiogram system
    5.
    发明授权
    Method and device for detecting fault of lead in electrocardiogram system 有权
    用于检测心电图系统中铅的故障的方法和装置

    公开(公告)号:US06421554B1

    公开(公告)日:2002-07-16

    申请号:US09475157

    申请日:1999-12-30

    IPC分类号: A61B50702

    CPC分类号: A61B5/0424 A61B5/0006

    摘要: A method and device for detecting a lead fault by analyzing a electrocardiogram signal from a telemetric or portable electrocardiogram system using software. In the device for detecting a lead fault, the electrocardiogram signal can be analyzed using software by a microcontroller without an extra microcontroller, so that the size of a telemetric or portable electrocardiogram system can be reduced while also reducing power consumption.

    摘要翻译: 一种通过使用软件从遥测或便携式心电图系统分析心电图信号来检测引线故障的方法和装置。 在用于检测引线故障的装置中,可以通过微控制器的软件来分析心电图信号,而不需要额外的微控制器,从而可以减小遥测或便携式心电图系统的尺寸,同时还降低功耗。

    Optical diagnosis point detector for noninvasive diagnosis of blood
constituents and noninvasive diagnostic device
    6.
    发明授权
    Optical diagnosis point detector for noninvasive diagnosis of blood constituents and noninvasive diagnostic device 失效
    用于非侵入性诊断血液成分和非侵入性诊断装置的光学诊断点检测器

    公开(公告)号:US6101404A

    公开(公告)日:2000-08-08

    申请号:US862264

    申请日:1997-05-23

    摘要: An optimal diagnosis point detector for noninvasive diagnosis of blood constituents and a noninvasive diagnosis device using the same. The optimal diagnosis point detector for noninvasive diagnosis of blood constituents includes detecting means for detecting a predetermined signal concerning bloodstream quantity from a portion of a subject to be diagnosed, driving means for driving the detecting means, amplifying means for amplifying the output signal of the detecting means, analog-to-digital (A/D) converting means for receiving the signal output from the amplifying means and converting the same into digital data, storage means for storing a predetermined optimal diagnosis point detecting method, means through which a user's command is input, central processing means, connected to the driving means, the A/D converting means, the command inputting means, and the storage means, for performing the predetermined optimal diagnosis point detecting method stored in the storage means according to the user's input command, and display means connected to the central processing means for displaying a detected value and displaying an indication that the detected value is the maximum value when a maximum detection signal is detected from the detecting means. Therefore, the concentration of blood constituents of a subject to be diagnosed can be calculated accurately. Also, the constituents that are very lightly concentrated in the blood can be accurately measured.

    摘要翻译: 用于非侵入性诊断血液成分的最佳诊断点检测器和使用其的非侵入性诊断装置。 用于非侵入性诊断血液成分的最佳诊断点检测器包括检测装置,用于检测来自被诊断对象的一部分的血流量的预定信号,用于驱动检测装置的驱动装置,用于放大检测的输出信号的放大装置 用于接收从放大装置输出的信号并将其转换为数字数据的模数(A / D)转换装置,用于存储预定的最佳诊断点检测方法的存储装置,用户命令为 输入,中央处理装置,连接到驱动装置,A / D转换装置,命令输入装置和存储装置,用于根据用户的输入命令执行存储在存储装置中的预定的最佳诊断点检测方法, 以及连接到中央处理装置的显示装置,用于显示检测值并显示 g从检测装置检测到最大检测信号时,检测值为最大值的指示。 因此,可以精确地计算待诊断对象的血液成分浓度。 此外,可以精确地测量非常轻微地集中在血液中的成分。

    User terminal apparatus, image forming device, and network port setting method thereof
    8.
    发明申请
    User terminal apparatus, image forming device, and network port setting method thereof 审中-公开
    用户终端装置,图像形成装置及其网络端口设定方法

    公开(公告)号:US20070279666A1

    公开(公告)日:2007-12-06

    申请号:US11637121

    申请日:2006-12-12

    IPC分类号: G06F3/12

    摘要: A user terminal apparatus, an image forming device and a network port setting method thereof. The user terminal apparatus includes a network searching unit to search an image forming device connected to the user terminal apparatus through a network, a driver searching unit to search preinstalled driver information, an information collecting unit to collect predetermined information related to the searched image forming device to create a pertinent information list, and to create an image forming device list on the basis of the searched driver information, and a port setting unit to set a network port selected on the pertinent information list to an image forming device selected on the image forming device list.

    摘要翻译: 用户终端装置,图像形成装置及其网络端口设定方法。 用户终端装置包括:网络搜索单元,通过网络搜索与用户终端装置连接的图像形成装置;驾驶员搜索单元,搜索预先安装的驾驶员信息;信息收集单元,收集与搜索到的图像形成装置有关的预定信息; 以创建相关的信息列表,并且基于所搜索到的驾驶员信息来创建图像形成装置列表,以及端口设置单元,用于将在相关信息列表上选择的网络端口设置为在图像形成上选择的图像形成装置 设备列表。

    Method for manufacturing thin film using atomic layer deposition
    9.
    发明授权
    Method for manufacturing thin film using atomic layer deposition 有权
    使用原子层沉积制造薄膜的方法

    公开(公告)号:US06270572B1

    公开(公告)日:2001-08-07

    申请号:US09371709

    申请日:1999-08-09

    IPC分类号: C30B2502

    摘要: A thin film manufacturing method is provided. The method includes the step of chemically adsorbing a first reactant on a substrate by injecting the first reactant into a chamber in which the substrate is loaded. Physisorbed first reactant on the chemically adsorbed first reactant is removed by purging or pumping the chamber. After the first reactant is densely chemically adsorbed on the substrate by re-injecting the first reactant into the chamber, the physisorbed first reactant on the dense chemisorbed first reactant is removed by purging or pumping the chamber. A second reactant is chemically adsorbed onto the surface of the substrate by injecting the second reactant into the chamber. Physisorbed second reactant on the chemisorbed first reactant and the second reactant is removed by purging or pumping the chamber. A solid thin film is formed by chemical exchange through densely adsorbing the second reactant onto the substrate by re-injecting the second reactant into the chamber. According to the present invention, it is possible to obtain a precise stoichiometric thin film having a high film density, since the first reactant and the second reactant are densely adsorbed and the impurities are substantially removed by pumping or purging

    摘要翻译: 提供薄膜制造方法。 该方法包括通过将第一反应物注入到其中负载衬底的室中来在基底上化学吸附第一反应物的步骤。 化学吸附的第一反应物上的物理吸附的第一反应物通过清洗或泵送室来除去。 在第一反应物通过将第一反应物重新注入室中密集地化学吸附在基材上之后,通过清洗或泵送室来去除致密化学吸附的第一反应物上的物理吸附的第一反应物。 通过将第二反应物注入到室中,将第二反应物化学吸附到基底的表面上。 化学吸附的第一反应物和第二反应物上的物理吸附的第二反应物通过清洗或泵送室来除去。 通过将第二反应物重新注入到室中,将第二反应物密集地吸附到基底上,通过化学交换形成固体薄膜。 根据本发明,可以获得具有高膜密度的精确化学计量薄膜,因为第一反应物和第二反应物被密集吸附并且通过泵送或清除基本上除去杂质