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15 条记录 (耗时 0.017 秒)

    Laser apparatus and extreme ultraviolet light generation system
    5.
    发明授权
    Laser apparatus and extreme ultraviolet light generation system 有权

    公开(公告)号：US10122145B2

    公开(公告)日：2018-11-06

    申请号：US15651253

    申请日：2017-07-17

    申请人： GIGAPHOTON INC.

    发明人： Yoshiaki Kurosawa ,  Hideo Hoshino

    IPC分类号： H01S3/10 ,  H01S3/00 ,  H01S3/034 ,  H01S3/08 ,  H01S3/095 ,  H01S3/23 ,  H05G2/00 ,  H01S3/097

    摘要： A laser apparatus may include a master oscillator, a plurality of amplifiers, a photodetector device configured to detect a light beam traveling back along a laser beam path, and a controller. The photodetector device may include a first photodetector configured to detect energy of a light beam traveling back along the laser beam path and a second photodetector configured to detect power of the light beam traveling back along the laser beam path. The controller may be configured to determine that a return beam is generated when the intensity of the energy detection signal exceeds a first threshold. The controller may be configured to determine that a self-oscillation beam is generated when the intensity of the power detection signal exceeds a second threshold.

    Target image-capture device, extreme-ultraviolet-light generation device, and extreme-ultraviolet-light generation system
    6.
    发明授权
    Target image-capture device, extreme-ultraviolet-light generation device, and extreme-ultraviolet-light generation system 有权

    公开(公告)号：US10141186B2

    公开(公告)日：2018-11-27

    申请号：US15671691

    申请日：2017-08-08

    申请人： Gigaphoton Inc.

    发明人： Hirokazu Hosoda ,  Takayuki Yabu ,  Hideo Hoshino

    IPC分类号： G03B27/52 ,  H01L21/027 ,  G03F7/20 ,  H05G2/00

    摘要： A target image-capture device may be configured to capture an image of a target that is made into plasma when irradiated with laser light and generates extreme-ultraviolet-light. The target image-capture device may include a droplet detector configured to detect passage of a droplet output as the target, and output a detection signal, an illumination light source, an image capturing element, a shutter device, and a controller configured to output, to the image capturing element, an exposure signal allowing the image capturing element to perform image capturing, and output, to the shutter device, a shutter open/close signal allowing a shutter to perform an open and close operation upon input of the detection signal. The controller may output the shutter open/close signal to the shutter device to make the shutter closed during when the droplet is irradiated with the laser light so that the plasma is generated.

    Optical device, laser apparatus, and extreme ultraviolet light generation system
    7.
    发明授权
    Optical device, laser apparatus, and extreme ultraviolet light generation system 有权
    光学装置，激光装置和极紫外光发生系统

    公开(公告)号：US09362703B2

    公开(公告)日：2016-06-07

    申请号：US14485355

    申请日：2014-09-12

    申请人： GIGAPHOTON INC.

    发明人： Hakaru Mizoguchi ,  Takashi Suganuma ,  Hideo Hoshino ,  Osamu Wakabayashi

    IPC分类号： G01C1/00 ,  H01S3/00 ,  H05G2/00 ,  H01S3/10 ,  H01S3/13

    CPC分类号： H01S3/0071 ,  H01S3/0014 ,  H01S3/10061 ,  H01S3/1305 ,  H05G2/008

    摘要： An optical device may include: an optical module disposed in a beam delivery path of a laser beam; a beam adjusting unit disposed in the beam delivery path for adjusting the beam delivery path of the laser beam; a measuring unit disposed in the beam delivery path for detecting the beam delivery path; and a control unit for controlling the beam adjusting unit based on a detection result of the beam delivery path of the laser beam detected by the measuring unit.

    摘要翻译： 光学装置可以包括：设置在激光束的光束输送路径中的光学模块; 设置在所述光束传送路径中用于调节所述激光束的光束传送路径的光束调节单元; 设置在所述光束传送路径中用于检测所述光束传送路径的测量单元; 以及控制单元，用于基于由测量单元检测到的激光束的光束传递路径的检测结果来控制光束调节单元。

    Temperature controller for gas laser
    9.
    发明授权
    Temperature controller for gas laser 有权

    公开(公告)号：US08811438B2

    公开(公告)日：2014-08-19

    申请号：US13936734

    申请日：2013-07-08

    申请人： Gigaphoton Inc.

    发明人： Yukio Watanabe ,  Hideyuki Hayashi ,  Kouji Kakizaki ,  Michio Shinozaki ,  Hideo Hoshino

    IPC分类号： H01S3/04 ,  H01S3/22 ,  H01S3/223 ,  H01S3/03 ,  F25D17/02 ,  H01S3/041

    CPC分类号： H01S3/0407 ,  F25B2400/06 ,  F25D17/02 ,  H01S3/03 ,  H01S3/041 ,  H01S3/22

    摘要： A temperature controller for a gas laser which controls temperatures of a plurality of temperature-controlled apparatuses including a first temperature-controlled portion requiring a high-precision temperature-control and a second temperature-controlled portion requiring a low-precision temperature-control as compared with the first temperature-controlled portion and allowing a temperature-control with a low or high temperature as compared with the first temperature-controlled portion, comprises a first temperature control portion generating a cooling agent or a heating agent for adjusting a temperature of each first temperature-controlled portion, a second temperature control portion generating a cooling agent or a heating agent for adjusting a temperature of each second temperature-controlled portion, a first piping system connecting the first temperature control portion and each first temperature-controlled portion in parallel, and a second piping system connecting the second temperature control portion and each second temperature-controlled portion in parallel.

    Temperature controller for gas laser
    10.
    发明授权
    Temperature controller for gas laser 有权
    气体激光器温度控制器

    公开(公告)号：US08787413B2

    公开(公告)日：2014-07-22

    申请号：US13936819

    申请日：2013-07-08

    申请人： Gigaphoton Inc.

    发明人： Yukio Watanabe ,  Hideyuki Hayashi ,  Kouji Kakizaki ,  Michio Shinozaki ,  Hideo Hoshino

    IPC分类号： H01S3/04

    CPC分类号： H01S3/0407 ,  F25B2400/06 ,  F25D17/02 ,  H01S3/03 ,  H01S3/041 ,  H01S3/22

    摘要： A temperature controller for a gas laser which controls temperatures of a plurality of temperature-controlled apparatuses including a first temperature-controlled portion requiring a high-precision temperature-control and a second temperature-controlled portion requiring a low-precision temperature-control as compared with the first temperature-controlled portion and allowing a temperature-control with a low or high temperature as compared with the first temperature-controlled portion, comprises a first temperature control portion generating a cooling agent or a heating agent for adjusting a temperature of each first temperature-controlled portion, a second temperature control portion generating a cooling agent or a heating agent for adjusting a temperature of each second temperature-controlled portion, a first piping system connecting the first temperature control portion and each first temperature-controlled portion in parallel, and a second piping system connecting the second temperature control portion and each second temperature-controlled portion in parallel.

    摘要翻译： 一种用于气体激光器的温度控制器，其控制多个温度控制装置的温度，包括需要高精度温度控制的第一温度控制部分和需要低精度温度控制的第二温度控制部分 与第一温度控制部分相比，第一温度控制部分与低温或高温的温度控制相比，包括产生冷却剂的第一温度控制部分或用于调节每个第一温度控制部分的温度的加热剂 温度控制部分，产生冷却剂的第二温度控制部分或用于调节每个第二温度控制部分的温度的加热剂，将第一温度控制部分和第一温度控制部分并联连接的第一管道系统， 以及连接第二回火的第二管道系统 所述控制部分和每个第二温度控制部分并联。