Packaging method of molded wafer level chip scale package (WLCSP)
    93.
    发明授权
    Packaging method of molded wafer level chip scale package (WLCSP) 有权
    模制晶圆级芯片级封装(WLCSP)的封装方法

    公开(公告)号:US08778735B1

    公开(公告)日:2014-07-15

    申请号:US13931854

    申请日:2013-06-29

    Abstract: A WLCSP method comprises: depositing a metal bump on bonding pads of chips; forming a first packaging layer at front surface of wafer to cover metal bumps while forming an un-covered ring at the edge of wafer to expose the ends of each scribe line located between two adjacent chips; thinning first packaging layer to expose metal bumps; forming a groove on front surface of first packaging layer along each scribe line by cutting along a straight line extended by two ends of scribe line exposed on front surface of un-covered ring; grinding back surface of wafer to form a recessed space and a support ring at the edge of the wafer; depositing a metal layer at bottom surface of wafer in recessed space; cutting off the edge portion of wafer; and separating individual chips from wafer by cutting through first packaging layer, the wafer and metal layer along groove.

    Abstract translation: WLCSP方法包括:在芯片的焊盘上沉积金属凸块; 在晶片的前表面形成第一包装层以覆盖金属凸块,同时在晶片边缘形成未覆盖的环,以露出位于两个相邻芯片之间的每个划线的端部; 稀释第一包装层以暴露金属凸块; 通过沿着未被覆盖的环的前表面上暴露的划线的两端延伸的直线切割沿着每个划线在第一包装层的前表面上形成凹槽; 研磨晶片的后表面以在晶片的边缘处形成凹陷空间和支撑环; 在凹陷空间中在晶片的底面沉积金属层; 切断晶片的边缘部分; 以及通过沿着沟槽切割第一包装层,晶片和金属层,从晶片分离单个芯片。

    Wafer level packaging structure with large contact area and preparation method thereof
    95.
    发明授权
    Wafer level packaging structure with large contact area and preparation method thereof 有权
    具有接触面积大的晶圆级封装结构及其制备方法

    公开(公告)号:US08710648B2

    公开(公告)日:2014-04-29

    申请号:US13429263

    申请日:2012-03-23

    Applicant: Yan Xun Xue

    Inventor: Yan Xun Xue

    Abstract: A method to provide a wafer level package with increasing contact pad area comprising the steps of forming a first packaging layer on wafer top surface, grinding the wafer back surface and etch through holes, depositing a metal to fill the through holes and covering wafer backside, cutting through the wafer from wafer backside forming a plurality of grooves separating each chip then depositing a second packaging layer filling the grooves and covering the wafer back metal, reducing the first packaging layer thickness to expose the second packaging layer filling the grooves and forming a plurality of contact pads overlaying the first packaging layer thereafter cutting through the second packaging layer in the grooves to form individual package.

    Abstract translation: 一种用于提供具有增加的接触焊盘区域的晶片级封装的方法,包括以下步骤:在晶片顶表面上形成第一封装层,研磨晶片背面并蚀刻通孔,沉积金属以填充通孔并覆盖晶片背面, 从晶片背面切割晶片,形成分开每个芯片的多个沟槽,然后沉积填充沟槽并覆盖晶片背面金属的第二封装层,减小第一封装层厚度以露出填充凹槽的第二封装层并形成多个 接触垫重叠在第一包装层上,然后切割槽中的第二包装层以形成单个包装。

    Packaging method of molded wafer level chip scale package (WLCSP)
    96.
    发明授权
    Packaging method of molded wafer level chip scale package (WLCSP) 有权
    模制晶圆级芯片级封装(WLCSP)的封装方法

    公开(公告)号:US08563361B2

    公开(公告)日:2013-10-22

    申请号:US13547358

    申请日:2012-07-12

    Abstract: A WLCSP method comprises: depositing a metal bump on bonding pads of chips; forming a first packaging layer at front surface of wafer to cover metal bumps while forming an un-covered ring at the edge of wafer to expose the ends of each scribe line located between two adjacent chips; thinning first packaging layer to expose metal bumps; forming a groove on front surface of first packaging layer along each scribe line by cutting along a straight line extended by two ends of scribe line exposed on front surface of un-covered ring; grinding back surface of wafer to form a recessed space and a support ring at the edge of the wafer; depositing a metal layer at bottom surface of wafer in recessed space; cutting off the edge portion of wafer; and separating individual chips from wafer by cutting through first packaging layer, the wafer and metal layer along groove.

    Abstract translation: WLCSP方法包括:在芯片的焊盘上沉积金属凸块; 在晶片的前表面形成第一包装层以覆盖金属凸块,同时在晶片边缘形成未覆盖的环,以露出位于两个相邻芯片之间的每个划线的端部; 稀释第一包装层以暴露金属凸块; 通过沿着未被覆盖的环的前表面上暴露的划线的两端延伸的直线切割沿着每个划线在第一包装层的前表面上形成凹槽; 研磨晶片的后表面以在晶片的边缘处形成凹陷空间和支撑环; 在凹陷空间中在晶片的底面沉积金属层; 切断晶片的边缘部分; 以及通过沿着沟槽切割第一包装层,晶片和金属层,从晶片分离单个芯片。

Patent Agency Ranking