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    SYSTEM AND METHOD FOR FORMING A SEALED CHAMBER
    13.
    发明申请
    SYSTEM AND METHOD FOR FORMING A SEALED CHAMBER 有权
    用于形成密封室的系统和方法

    公开(公告)号：US20160268097A1

    公开(公告)日：2016-09-15

    申请号：US15160972

    申请日：2016-05-20

    Applicant: APPLIED MATERIALS ISRAEL LTD.

    Inventor： Michael R. Rice ,  Ron Naftali ,  Natan Schlimoff ,  Igor Krivts (Krayvitz) ,  Israel Avneri ,  Yoram Uziel ,  Zvika Rozenberg ,  Erez Admoni ,  Yochanan Madmon

    IPC: H01J37/18 ,  G01N21/95 ,  H01J37/20 ,  H01L21/67 ,  G02B21/26

    CPC classification number: H01J37/18 ,  G01N21/9501 ,  G01N2201/023 ,  G02B21/26 ,  H01J37/20 ,  H01J2237/022 ,  H01J2237/182 ,  H01J2237/202 ,  H01L21/67126 ,  H01L21/6719 ,  H01L21/67196 ,  H01L21/67242

    Abstract: Chamber elements defining an internal chamber to be utilized during a substrate related stage selected from the group consisting of substrate manufacturing stage and substrate inspection stage, the chamber elements comprising: a first element having a first surface; a second element having a second surface about the periphery of the internal chamber; a third element connected to the second element; and a clamping mechanism that is connected to the second and third elements and is arranged to press the second element towards the first element; wherein a first area of the first surface and a second area of the second surface come into proximity with each other at a first interface; wherein the first surface is positioned above the second surface; wherein a gas groove and a vacuum groove are formed in the second area; wherein the second element comprises a gas conduit that is arranged to provide gas to the gas groove and a vacuum conduit that is arranged to provide vacuum to the vacuum groove; wherein a provision of the gas and the vacuum assists in a formation of a gas cushion between the first and second areas; wherein the chamber elements are operable to partially surround a first portion of a movement system and a substrate during the substrate related stage, the movement system is arranged to introduce a movement of the first element in relation to the second element and the third element, wherein the gas cushion maintains predefined conditions in the internal chamber during the movement.

    Abstract translation: 腔室元件限定在从由衬底制造阶段和衬底检查阶段组成的组中选择的衬底相关阶段期间被利用的内部室，所述室元件包括：具有第一表面的第一元件; 第二元件，其具有围绕所述内部腔室的周边的第二表面; 连接到第二元件的第三元件; 以及夹紧机构，其连接到所述第二和第三元件并且被布置成朝向所述第一元件按压所述第二元件; 其中所述第一表面的第一区域和所述第二表面的第二区域在第一界面处彼此接近; 其中所述第一表面位于所述第二表面上方; 其中在所述第二区域中形成气体槽和真空槽; 其中所述第二元件包括气体管道，所述气体管道被布置成向所述气体槽提供气体;以及真空管道，其布置成向所述真空槽提供真空; 其中所述气体和所述真空的提供有助于在所述第一和第二区域之间形成气垫; 其中所述室元件可操作以在所述基板相关级期间部分地包围运动系统和基板的第一部分，所述运动系统布置成引入所述第一元件相对于所述第二元件和所述第三元件的运动，其中 气垫在运动过程中保持内腔中的预定条件。

    SYSTEM AND METHOD FOR FORMING A SEALED CHAMBER
    14.
    发明申请
    SYSTEM AND METHOD FOR FORMING A SEALED CHAMBER 审中-公开
    用于形成密封室的系统和方法

    公开(公告)号：US20160163570A1

    公开(公告)日：2016-06-09

    申请号：US15040904

    申请日：2016-02-10

    Applicant: APPLIED MATERIALS ISRAEL LTD.

    Inventor： Michael R. Rice ,  Paul Reuter ,  William (Ty) Weaver ,  Travis Morey ,  Natan Schlimoff ,  Igor Krivts (Krayvitz) ,  Israel Avneri ,  Yoram Uziel ,  Erez Admoni

    IPC: H01L21/67 ,  H01L21/687 ,  H01L21/677

    CPC classification number: H01L21/67126 ,  H01L21/67748 ,  H01L21/67751 ,  H01L21/68714

    Abstract: According to an embodiment of the invention, there is provided a system, comprising: a first chamber; a second chamber; a chuck; a movement system; wherein the first chamber comprises: a first element that has a first surface; a first chamber housing that comprises a second surface; wherein the first surface and the second surface come into proximity with each other at a first interface; a supporting element for supporting the chuck when the chuck is positioned within the first chamber; and a first dynamic seal formed at the first interface and is arranged to seal the first chamber from the movement system; wherein the second chamber comprises: a second chamber housing; a movement system that is arranged to introduce movement between (a) the first chamber housing and (b) the first element and the chuck; and a movement control element for mechanically coupling the first element to the movement system.

    Abstract translation: 根据本发明的实施例，提供了一种系统，包括：第一室; 第二个房间 一个卡盘 运动系统; 其中所述第一室包括：具有第一表面的第一元件; 包括第二表面的第一腔室; 其中所述第一表面和所述第二表面在第一界面处彼此接近; 用于当所述卡盘位于所述第一腔室内时支撑所述卡盘的支撑元件; 以及第一动态密封件，其形成在所述第一界面处并且被布置成将所述第一腔室与所述运动系统密封; 其中所述第二腔室包括：第二腔室壳体; 运动系统，被布置成引入（a）第一室壳体和（b）第一元件和卡盘之间的运动; 以及用于将第一元件机械地联接到移动系统的移动控制元件。

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