公开(公告)号：US11742329B2

公开(公告)日：2023-08-29

申请号：US17399233

申请日：2021-08-11

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Jongho Park ,  Kyungsuk Oh ,  Hyunki Kim ,  Yongkwan Lee ,  Sangsoo Kim ,  Seungkon Mok ,  Junyoung Oh ,  Changyoung Yoo

IPC: H01L23/16 ,  H01L25/065 ,  H01L23/00 ,  H01L23/31 ,  H01L23/498

CPC classification number: H01L25/0657 ,  H01L23/16 ,  H01L23/3185 ,  H01L23/49811 ,  H01L24/16 ,  H01L24/48 ,  H01L2224/16227 ,  H01L2224/48227

Abstract: A semiconductor package including a circuit substrate including a plurality of interconnections; a first chip on the circuit substrate; a second chip stacked on the first chip; a plurality of first pads on the circuit substrate, the plurality of first pads overlapping the first chip; a plurality of bumps between the circuit substrate and the first chip; a plurality of second pads on an edge portion of a first side of the circuit substrate, the plurality of second pads electrically connected to the second chip through a conductive wire; an underfill that fills a space between the circuit substrate and the first chip; and a first dam on the circuit substrate, the first dam overlapping the first chip. The first dam includes a conductive material and overlaps at least one of the plurality of interconnections.

公开(公告)号：US11688656B2

公开(公告)日：2023-06-27

申请号：US17098748

申请日：2020-11-16

Applicant: Samsung Electronics Co., Ltd.

Inventor： Junyoung Oh ,  Hyunggil Baek ,  Seunghwan Kim ,  Jungjoo Kim ,  Jongho Park ,  Yongkwan Lee

IPC: H01L23/16 ,  H01L25/065 ,  H01L23/498 ,  H01L23/31 ,  H01L23/538

CPC classification number: H01L23/16 ,  H01L23/3128 ,  H01L23/49811 ,  H01L23/5389 ,  H01L25/0657

Abstract: A semiconductor package is provided. The semiconductor package includes: a first package substrate; a first semiconductor chip on the first package substrate; an interposer substrate including a lower surface facing the first package substrate, an upper surface opposite to the lower surface, and an upper conductive pad in the upper surface of the interposer substrate; a first dam structure on the upper surface of the interposer substrate and extending along an edge of the upper conductive pad; a first molding layer in contact with the lower and upper surfaces of the interposer substrate and with an outer wall of the first dam structure; and a conductive connector in contact with an inner wall of the at least one first dam structure and with the upper conductive pad.

公开(公告)号：US20230131730A1

公开(公告)日：2023-04-27

申请号：US17862586

申请日：2022-07-12

Applicant: Samsung Electronics Co., Ltd.

Inventor： Junwoo Park ,  Sangsoo Kim ,  Seunghwan Kim ,  Jungjoo Kim ,  Yongkwan Lee

IPC: H01L25/16 ,  H01L23/498 ,  H01L23/64

Abstract: A semiconductor package includes a package substrate including a base substrate including a redistribution layer, pads disposed on first and second surfaces of the base substrate and connected to the redistribution layer, and a protective layer having a mounting region in which first openings respectively exposing first pads among the pads and a second opening exposing second pads among the pads and a portion of the second surface are disposed on the second surface; a semiconductor chip disposed on the mounting region and connected to the pads through the first openings and the second opening; and a sealing material covering a portion of the semiconductor chip and extending into the second opening. Four first openings among the first openings are respectively disposed adjacent to respective corners of the mounting region. The second opening is disposed to divide the four first openings into at least two groups.

公开(公告)号：US20220367416A1

公开(公告)日：2022-11-17

申请号：US17671065

申请日：2022-02-14

Applicant: Samsung Electronics Co., Ltd.

Inventor： Yongkwan Lee ,  Seunghwan Kim ,  Jungjoo Kim ,  Jongwan Kim ,  Hyunki Kim ,  Junwoo Park ,  Hyunggil Baek ,  Junga Lee ,  Taejun Jeon

IPC: H01L25/065 ,  H01L23/00 ,  H01L23/498 ,  H01L23/538

Abstract: A semiconductor package includes a package substrate having a communication hole extending from an upper surface of the package substrate to a lower surface of the package substrate, a semiconductor chip attached to the upper surface of the package substrate, an auxiliary chip attached to the lower surface of the package substrate, external connection terminals attached to the lower surface of the package substrate and spaced apart from the auxiliary chip, and an encapsulant encapsulating the semiconductor chip and the auxiliary chip and filling the communication hole.

公开(公告)号：US20210066046A1

公开(公告)日：2021-03-04

申请号：US16883392

申请日：2020-05-26

Applicant: Samsung Electronics Co., Ltd.

Inventor： Junyoung Oh ,  Jaeho Kwak ,  Boeun Jang ,  Seokyeon Hwang ,  Yongseok Seo ,  Sangsoo Kim ,  Seunghwan Kim ,  Jongho Park ,  Yongkwan Lee ,  Jongho Lee ,  Daewook Kim ,  Wonpil Lee ,  Changkyu Choi

IPC: H01J37/32 ,  H01L21/67 ,  H01J37/34

Abstract: A surface treatment apparatus and a surface treatment system having the same are disclosed. The surface treatment apparatus includes a process chamber in which the surface treatment process is conducted, a plasma generator for generating process radicals as a plasma state for the surface treatment process, the plasma generator being positioned outside of the process chamber and connected to the process chamber by a supply duct, a heat exchanger arranged on the supply duct and cooling down temperature of the process radicals passing through the supply duct and a flow controller controlling the process radicals to flow out of the process chamber. The flow controller is connected to a discharge duct through which the process radicals are discharged outside the process chamber. The plasma surface treatment process is conducted to the package structure having minute mounting gap without the damages to the IC chip and the board.

公开(公告)号：US12205925B2

公开(公告)日：2025-01-21

申请号：US17671065

申请日：2022-02-14

Applicant: Samsung Electronics Co., Ltd.

Inventor： Yongkwan Lee ,  Seunghwan Kim ,  Jungjoo Kim ,  Jongwan Kim ,  Hyunki Kim ,  Junwoo Park ,  Hyunggil Baek ,  Junga Lee ,  Taejun Jeon

IPC: H01L25/065 ,  H01L23/00 ,  H01L23/498 ,  H01L23/538

Abstract: A semiconductor package includes a package substrate having a communication hole extending from an upper surface of the package substrate to a lower surface of the package substrate, a semiconductor chip attached to the upper surface of the package substrate, an auxiliary chip attached to the lower surface of the package substrate, external connection terminals attached to the lower surface of the package substrate and spaced apart from the auxiliary chip, and an encapsulant encapsulating the semiconductor chip and the auxiliary chip and filling the communication hole.

公开(公告)号：US12057357B2

公开(公告)日：2024-08-06

申请号：US17212417

申请日：2021-03-25

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Kyong Hwan Koh ,  Jongwan Kim ,  Juhyeon Oh ,  Yongkwan Lee

IPC: H01L23/48 ,  H01L21/48 ,  H01L21/56 ,  H01L23/13 ,  H01L23/31 ,  H01L23/498 ,  H01L23/52 ,  H01L23/00

CPC classification number: H01L23/13 ,  H01L21/4803 ,  H01L21/561 ,  H01L23/3107 ,  H01L23/49838 ,  H01L23/49827 ,  H01L24/06 ,  H01L24/48 ,  H01L24/49 ,  H01L24/73 ,  H01L2224/06135 ,  H01L2224/48227 ,  H01L2224/49173 ,  H01L2224/73265

Abstract: A semiconductor package includes a base substrate that includes a first surface and a second surface that face each other, a plurality of first metal line patterns disposed on the first surface, a plurality of second metal line patterns disposed on the second surface, a plurality of vias that penetrate the base substrate and connect the first metal line patterns to the second metal line patterns, a semiconductor chip disposed on the first surface, and a molding member that covers the first surface and the semiconductor chip. The base substrate includes at least one recess at a corner of the base substrate. The recess extends from the first surface toward the second surface. The molding member includes a protrusion that fills the recess.

公开(公告)号：US20230378094A1

公开(公告)日：2023-11-23

申请号：US18104650

申请日：2023-02-01

Applicant: Samsung Electronics Co., Ltd.

Inventor： Junwoo Park ,  Yongkwan Lee ,  Seunghwan Kim ,  Jungjoo Kim ,  Jongwan Kim ,  Taejun Jeon ,  Junhyeung Jo

IPC: H01L23/00 ,  H01L23/538 ,  H01L23/498 ,  H01L23/31 ,  H10B80/00

CPC classification number: H01L23/562 ,  H01L23/5383 ,  H01L23/5386 ,  H01L23/5385 ,  H01L23/49811 ,  H01L23/3128 ,  H10B80/00 ,  H01L2224/16227 ,  H01L24/16 ,  H01L2224/32225 ,  H01L24/32 ,  H01L2224/73204 ,  H01L24/73

Abstract: A semiconductor package includes a support wiring structure, a semiconductor chip on the support wiring structure, a connection structure on the support wiring structure and spaced apart from the semiconductor chip in a horizontal direction, an interposer including a central portion and an outer portion and having a recess portion provided on a lower surface of the central portion facing the semiconductor chip, wherein the central portion is on the semiconductor chip and the connection structure is connected to the outer portion, and a metal plate disposed along a portion of a surface of the recess portion inside the interposer, wherein the metal plate extends along a side surface of the outer portion of the interposer and the lower surface of the central portion of the interposer, and the metal plate has a cavity passing through a vicinity of a center of the metal plate planarly.

公开(公告)号：US20230260926A1

公开(公告)日：2023-08-17

申请号：US18107143

申请日：2023-02-08

Applicant: Samsung Electronics Co., Ltd.

Inventor： Yongkwan Lee ,  Seunghwan Kim ,  Jungjoo Kim ,  Jongwan Kim ,  Junwoo Park ,  Hyunggil Baek ,  Junga Lee

IPC: H01L23/544 ,  H01L23/31 ,  H01L23/498 ,  H01L23/00 ,  H01L25/10 ,  H01L23/538 ,  H01L21/48 ,  H01L21/56

CPC classification number: H01L23/544 ,  H01L23/3128 ,  H01L23/49811 ,  H01L23/562 ,  H01L25/105 ,  H01L23/5383 ,  H01L23/5385 ,  H01L21/4846 ,  H01L21/563 ,  H01L2224/16227 ,  H01L24/16 ,  H01L2224/32225 ,  H01L24/32 ,  H01L2224/73204 ,  H01L24/73 ,  H01L2223/54426 ,  H01L2224/92125 ,  H01L24/92

Abstract: A semiconductor package includes an interposer including an upper pad and an upper passivation layer partially covering the upper pad, a semiconductor chip disposed on the interposer, a conductor pattern disposed on the interposer, a guide pattern disposed on the interposer while including a main opening and at least one sub-opening connected to the main opening, a support disposed on the interposer while including a core portion and a peripheral portion surrounding the core portion, a lower surface of the support being disposed in the main opening of the guide pattern, an upper redistribution structure disposed on the semiconductor chip and connected to the conductor pattern and the guide pattern, and an encapsulant between the interposer and the upper redistribution structure. The encapsulant contacts an inner wall of the main opening, an inner wall of the at least one sub-opening and a side surface of the support.

公开(公告)号：US11728142B2

公开(公告)日：2023-08-15

申请号：US16883392

申请日：2020-05-26

Applicant: Samsung Electronics Co., Ltd.

Inventor： Junyoung Oh ,  Jaeho Kwak ,  Boeun Jang ,  Seokyeon Hwang ,  Yongseok Seo ,  Sangsoo Kim ,  Seunghwan Kim ,  Jongho Park ,  Yongkwan Lee ,  Jongho Lee ,  Daewook Kim ,  Wonpil Lee ,  Changkyu Choi

IPC: H01J37/32 ,  C23C16/455 ,  C23C16/458 ,  H01L21/673

CPC classification number: H01J37/32449 ,  C23C16/45504 ,  C23C16/45589 ,  H01J37/32633 ,  C23C16/4583 ,  C23C16/45502 ,  C23C16/45591 ,  H01J37/32357 ,  H01L21/67326

Abstract: A surface treatment apparatus and a surface treatment system having the same are disclosed. The surface treatment apparatus includes a process chamber in which the surface treatment process is conducted, a plasma generator for generating process radicals as a plasma state for the surface treatment process, the plasma generator being positioned outside of the process chamber and connected to the process chamber by a supply duct, a heat exchanger arranged on the supply duct and cooling down temperature of the process radicals passing through the supply duct and a flow controller controlling the process radicals to flow out of the process chamber. The flow controller is connected to a discharge duct through which the process radicals are discharged outside the process chamber. The plasma surface treatment process is conducted to the package structure having minute mounting gap without the damages to the IC chip and the board.