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    YAW-RATE SENSOR
    21.
    发明申请
    YAW-RATE SENSOR 有权
    YAW-RATE传感器

    公开(公告)号：US20120060604A1

    公开(公告)日：2012-03-15

    申请号：US12734228

    申请日：2008-10-02

    Applicant: Reinhard Neul ,  Johannes Classen ,  Torsten Ohms ,  Burkhard Kuhlmann ,  Axel Franke ,  Oliver Kohn ,  Daniel Christoph Meisel ,  Joerg Hauer ,  Udo-Martin Gomez ,  Kersten Kehr

    Inventor： Reinhard Neul ,  Johannes Classen ,  Torsten Ohms ,  Burkhard Kuhlmann ,  Axel Franke ,  Oliver Kohn ,  Daniel Christoph Meisel ,  Joerg Hauer ,  Udo-Martin Gomez ,  Kersten Kehr

    IPC: G01P3/44 ,  F16F3/00

    CPC classification number: G01C19/574 ,  F16F1/025 ,  G01C19/5747 ,  G01P3/44

    Abstract: A yaw-rate sensor having a substrate and a plurality of movable substructures that are mounted over a surface of the substrate, the movable substructures being coupled to a shared, in particular, central spring element, means being provided for exciting the movable substructures into a coupled oscillation in a plane that extends parallel to the surface of the substrate, the movable substructures having Coriolis elements, means being provided for detecting deflections of the Coriolis elements induced by a Coriolis force, a first Coriolis element being provided for detecting a yaw rate about a first axis, a second Coriolis element being provided for detecting a yaw rate about a second axis, the second axis being oriented perpendicularly to the first axis.

    Abstract translation: 具有基板和多个可移动子结构的偏转速率传感器，其安装在所述基板的表面上，所述可移动子结构联接到共享的，特别是中心的弹簧元件，所述装置用于将所述可移动子结构激励为 在平行于衬底表面延伸的平面中的耦合振荡，具有科里奥利元件的可移动子结构被提供用于检测由科里奥利力引起的科里奥利元件的偏转，第一科里奥利元件用于检测围绕 第一轴线，第二科里奥利元件被提供用于检测围绕第二轴线的横摆率，所述第二轴线垂直于所述第一轴线定向。

    Rotation-Rate Sensor Having A Quadrature Compensation Pattern
    22.
    发明申请
    Rotation-Rate Sensor Having A Quadrature Compensation Pattern 有权
    具有正交补偿模式的旋转速率传感器

    公开(公告)号：US20110126621A1

    公开(公告)日：2011-06-02

    申请号：US12308533

    申请日：2007-08-24

    Applicant: Reinhard Neul

    Inventor： Reinhard Neul

    IPC: G01C19/56

    CPC classification number: G01C19/5762

    Abstract: A rotation-rate sensor having at least one quadrature compensation pattern, which includes at least one first electrode and one second electrode. The second electrode has a first electrode surface and a second electrode surface which are situated opposite to each other. The first electrode is situated in an intermediate space, between the first electrode surface and the second electrode surface. The first electrode surface and also the second electrode surface, over their extension, are at a different distance from the first electrode. The first electrode surface and the second electrode surface of the second electrode are at generally the same distance from each other, over their extension.

    Abstract translation: 具有至少一个正交补偿图案的旋转速率传感器，其包括至少一个第一电极和一个第二电极。 第二电极具有彼此相对定位的第一电极表面和第二电极表面。 第一电极位于第一电极表面和第二电极表面之间的中间空间中。 第一电极表面以及第二电极表面在其延伸部分上与第一电极的距离不同。 第二电极的第一电极表面和第二电极表面在它们的延伸部上彼此大致相同的距离。

    Device for determining the rotational speed
    24.
    发明授权
    Device for determining the rotational speed 有权
    用于确定转速的装置

    公开(公告)号：US06205838B1

    公开(公告)日：2001-03-27

    申请号：US09091913

    申请日：1999-08-19

    Applicant: Eberhard Schmid ,  Siegbert Steinlechner ,  Johannes Artznei ,  Reinhard Neul

    Inventor： Eberhard Schmid ,  Siegbert Steinlechner ,  Johannes Artznei ,  Reinhard Neul

    IPC: G01P2100

    CPC classification number: G01C19/56

    Abstract: A device for determining a rotation rate is described, in which by means of digital evaluation circuits the output signals of a rotation rate sensor are evaluated. By identification of the transfer function from the electronically generated oscillation voltage that excites the oscillating body carrying the acceleration elements, to the output of the acceleration elements, or by identification of the transfer function from the electrically generated test voltage at the input of the acceleration elements to their output, the systematic errors of the rotation rate sensor are determined and taken into account in the digital sensor signal processing, with the aid of which the rotation rate is unequivocally determined.

    Abstract translation: 描述用于确定转速的装置，其中通过数字评估电路评估转速传感器的输出信号。 通过从电子产生的振荡电压识别传递函数，该振荡电压激励承载加速元件的振动体到加速元件的输出，或通过从加速元件的输入处的电产生的测试电压识别传递函数 在其输出中，在数字传感器信号处理中确定和考虑旋转速率传感器的系统误差，借助于此，旋转速率被明确地确定。

    Piezoresistive micromechanical sensor component and corresponding measuring method
    25.
    发明授权
    Piezoresistive micromechanical sensor component and corresponding measuring method 有权
    压电微机械传感器元件及相应的测量方法

    公开(公告)号：US09110090B2

    公开(公告)日：2015-08-18

    申请号：US13635581

    申请日：2011-01-19

    Applicant: Reinhard Neul ,  Christian Rettig ,  Achim Trautmann ,  Daniel Christoph Meisel ,  Alexander Buhmann ,  Manuel Engesser ,  Ando Feyh

    Inventor： Reinhard Neul ,  Christian Rettig ,  Achim Trautmann ,  Daniel Christoph Meisel ,  Alexander Buhmann ,  Manuel Engesser ,  Ando Feyh

    IPC: G01P15/12 ,  G01P15/09 ,  G01P15/08

    CPC classification number: G01P15/09 ,  G01P15/0802 ,  G01P15/12 ,  G01P15/123

    Abstract: A piezoresistive micromechanical sensor component includes a substrate, a seismic mass, at least one piezoresistive bar, and a measuring device. The seismic mass is suspended from the substrate such that it can be deflected. The at least one piezoresistive bar is provided between the substrate and the seismic mass and is subject to a change in resistance when the seismic mass is deflected. The at least one piezoresistive bar has a lateral and/or upper and/or lower conductor track which at least partially covers the piezoresistive bar and extends into the region of the substrate. The measuring device is electrically connected to the substrate and to the conductor track and is configured to measure the change in resistance over a circuit path which runs from the substrate through the piezoresistive bar and from the piezoresistive bar through the lateral and/or upper and/or lower conductor track.

    Abstract translation: 压阻微机电传感器部件包括基板，抗震块，至少一个压阻棒和测量装置。 地震质量从基板悬挂使其能够偏转。 所述至少一个压阻棒设置在所述基底和所述抗震块之间，并且当所述地震质量被偏转时，所述至少一个压阻棒经受阻力的变化。 至少一个压阻棒具有至少部分地覆盖压阻棒并延伸到衬底的区域中的横向和/或上部和/或下部导体轨道。 测量装置电连接到基板和导体轨道，并且被配置成测量电路的电阻变化，该电阻通过基板通过压阻棒和从压阻棒通过横向和/或上部和/ 或下导体轨道。

    Micromechanical Angular Acceleration Sensor and Method for Measuring an Angular Acceleration
    27.
    发明申请
    Micromechanical Angular Acceleration Sensor and Method for Measuring an Angular Acceleration 有权
    微机械角加速度传感器和测量角加速度的方法

    公开(公告)号：US20120297878A1

    公开(公告)日：2012-11-29

    申请号：US13479746

    申请日：2012-05-24

    Applicant: Reinhard Neul ,  Torsten Ohms ,  Mirko Hattass ,  Daniel Christoph Meisel

    Inventor： Reinhard Neul ,  Torsten Ohms ,  Mirko Hattass ,  Daniel Christoph Meisel

    IPC: G01P15/097

    CPC classification number: G01P15/0922 ,  H01L41/1132

    Abstract: A micromechanical angular acceleration sensor for measuring an angular acceleration is disclosed. The sensor includes a substrate, a seismic mass, at least one suspension, which fixes the seismic mass to the substrate in a deflectable manner, and at least one piezoresistive and/or piezoelectric element for measuring the angular acceleration. The piezoresistive and/or piezoelectric element is arranged in a cutout of the seismic mass. A corresponding method and uses of the sensor are also disclosed.

    Abstract translation: 公开了一种用于测量角加速度的微机械角加速度传感器。 传感器包括基板，抗震块，至少一个悬架，其以可偏转的方式将地震质量固定到基板，以及用于测量角加速度的至少一个压阻和/或压电元件。 压阻和/或压电元件布置在地震块的切口中。 还公开了传感器的相应方法和用途。

    YAW RATE SENSOR
    29.
    发明申请
    YAW RATE SENSOR 有权
    YAW RATE传感器

    公开(公告)号：US20100000321A1

    公开(公告)日：2010-01-07

    申请号：US12303443

    申请日：2007-06-06

    Applicant: Reinhard Neul ,  Johannes Classen ,  Axel Franke ,  Marco Quander ,  Udo-Martin Gomez ,  Kersten Kehr

    Inventor： Reinhard Neul ,  Johannes Classen ,  Axel Franke ,  Marco Quander ,  Udo-Martin Gomez ,  Kersten Kehr

    IPC: G01C19/56

    CPC classification number: G01C19/5762 ,  G01C19/5747

    Abstract: A yaw rate sensor includes a drive mass element which is situated above a surface of a substrate and is drivable to vibrate by a drive device along a first axis extending along the surface, having a detection mass element, which is deflectable under the influence of a Coriolis force along a second axis perpendicular to the surface, and having a detection device by which the deflection of the detection mass element along the second axis is detectable. Due to the arrangement of the second axis perpendicular to the surface, the yaw rate sensor may be integrated into a chip together with additional yaw rate sensors suitable for detection of rotations about axes of rotation in other directions.

    Abstract translation: 偏航率传感器包括驱动质量元件，该驱动质量元件位于衬底的表面上方并且可被驱动装置驱动，沿着沿表面延伸的第一轴线振动，具有检测质量元件，该检测质量元件可在 科里奥利力沿着垂直于表面的第二轴线，并且具有检测装置，通过该检测装置可以检测检测质量元件沿着第二轴线的偏转。 由于垂直于表面的第二轴的布置，横摆角速度传感器可以与适合于检测围绕其它方向的旋转轴线的旋转的附加横摆速率传感器一体地集成到一个芯片中。

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