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    Charged particle beam apparatus
    21.
    发明授权
    Charged particle beam apparatus 有权
    带电粒子束装置

    公开(公告)号：US09208995B2

    公开(公告)日：2015-12-08

    申请号：US14379291

    申请日：2013-02-15

    申请人： Hitachi High-Technologies Corporation

    发明人： Yusuke Ominami ,  Takashi Ohshima ,  Hiroyuki Ito ,  Mitsugu Sato ,  Sukehiro Ito

    IPC分类号： G21K5/00 ,  H01J37/28 ,  H01J37/16 ,  H01J37/18 ,  H01J37/09

    CPC分类号： H01J37/28 ,  H01J37/09 ,  H01J37/16 ,  H01J37/18 ,  H01J2237/0451 ,  H01J2237/06341 ,  H01J2237/10 ,  H01J2237/1405 ,  H01J2237/164 ,  H01J2237/2608 ,  H01J2237/2801

    摘要： Provided is a charged particle beam apparatus (111) to and from which a diaphragm (101) can be easily attached and detached, and in which a sample (6) can be arranged under vacuum and under high pressure. The charged particle beam apparatus includes: a lens barrel (3) holding a charged particle source (110) and an electron optical system (1,2,7); a first housing (4) connected to the lens barrel (3); a second housing (100) recessed to inside the first housing (4); a first diaphragm (10) separating the space inside the lens barrel (3) and the space inside the first housing (4), and through which the charged particle beam passes; a second diaphragm (101) separating the spaces inside and outside the recessed section (100a) in the second housing (100), and through which the charged particle beam passes; and a pipe (23) connected to a third housing (22) accommodating the charged particle source (110). The first diaphragm (10) is attached to the pipe (23), and the pipe (23) and the third housing (22) can be attached to and detached from the lens barrel (3) in the direction of the optical axis (30). A space (105) surrounded by the first housing (4) and the second housing (100) is depressurized, and the sample (6) arranged inside the recessed section (100a) is irradiated with a charged particle beam.

    摘要翻译： 提供了一种带电粒子束装置（111），隔膜（101）可以从其中容易地附接和拆卸，并且其中样品（6）可以在真空和高压下布置。 带电粒子束装置包括：保持带电粒子源（110）和电子光学系统（1,2,7）的镜筒（3）; 连接到镜筒（3）的第一壳体（4）; 第二壳体（100），其凹入到所述第一壳体（4）的内部; 分离透镜筒（3）内的空间与第一壳体（4）内的空间的第一隔膜（10），带电粒子束通过该第一隔膜 第二隔膜（101），其分离所述第二壳体（100）中的所述凹部（100a）的内部和外部的空间，并且所述带电粒子束穿过所述第二隔膜; 以及连接到容纳所述带电粒子源（110）的第三壳体（22）的管道（23）。 第一隔膜（10）附接到管道（23），并且管道（23）和第三壳体（22）可以沿着光轴（30）的方向附接到镜筒（3）并从镜筒 ）。 由第一壳体（4）和第二壳体（100）围绕的空间（105）被减压，并且将配置在凹部（100a）内部的样品（6）照射带电粒子束。

    Charged particle beam drawing apparatus and drawing chamber
    22.
    发明授权
    Charged particle beam drawing apparatus and drawing chamber 有权
    带电粒子束绘图装置和绘图室

    公开(公告)号：US09196458B2

    公开(公告)日：2015-11-24

    申请号：US14326997

    申请日：2014-07-09

    申请人： NuFlare Technology, Inc

    发明人： Hiroyasu Saito ,  Yoshinori Nakagawa ,  Seiichi Nakazawa

    IPC分类号： H01J37/20 ,  H01J37/317 ,  H01J37/16

    CPC分类号： H01J37/3174 ,  H01J37/16 ,  H01J2237/20

    摘要： A charged particle beam drawing apparatus includes: a stage configured to support a specimen as a drawing target; and an airtight drawing chamber formed into a box shape provided with a side wall and a bottom plate, and configured to house the stage. The bottom plate includes: multiple support portions connected to the side wall and configured to support the stage; and a curved portion connected to the support portions and having a convex shape curved outward.

    摘要翻译： 带电粒子束描绘装置包括：被配置为支撑作为绘图目标的样本的平台; 以及形成为具有侧壁和底板的箱形的气密拉拔室，并且构造成容纳所述台。 底板包括：多个支撑部分，其连接到侧壁并且被配置为支撑台架; 以及与支撑部连接并具有向外弯曲的凸形的弯曲部。

    Observation Apparatus and Optical Axis Adjustment Method
    25.
    发明申请
    Observation Apparatus and Optical Axis Adjustment Method 有权
    观察装置和光轴调整方法

    公开(公告)号：US20150228448A1

    公开(公告)日：2015-08-13

    申请号：US14422531

    申请日：2013-07-01

    申请人： Hitachi High-Technologies Corporation

    发明人： Yusuke Ominami ,  Mami Konomi ,  Shinsuke Kawanishi ,  Sukehiro Ito

    IPC分类号： H01J37/18 ,  H01J37/09 ,  H01J37/26

    CPC分类号： H01J37/18 ,  H01J37/04 ,  H01J37/09 ,  H01J37/16 ,  H01J37/20 ,  H01J37/228 ,  H01J37/261 ,  H01J37/28 ,  H01J2237/045 ,  H01J2237/164 ,  H01J2237/1825 ,  H01J2237/2602 ,  H01J2237/2605

    摘要： Ordinary charged particle beam apparatuses have each been an apparatus manufactured for dedicated use in making observations in a gas atmosphere at atmospheric pressure or at a pressure substantially equal thereto. There have existed no devices capable of simply making observations using an ordinary high-vacuum charged particle microscope in a gas atmosphere at atmospheric pressure or at a pressure approximately equal thereto. Furthermore, ordinary techniques have been incapable of observing the same spot of the sample in such an atmosphere using a charged particle beam and light simultaneously. This invention thus provides an apparatus including: a charged particle optical tube that irradiates a sample with a primary charged particle beam; a vacuum pump that evacuates the inside of the charged particle optical tube; a diaphragm arranged to separate a space in which the sample is placed from the charged particle optical tube, the diaphragm being detachable and allowing the primary charged particle beam to permeate or pass therethrough; and an optical microscope positioned on the opposite side of the charged particle optical tube across the diaphragm and the sample, the optical microscope having an optical axis thereof aligned with at least part of an extension of the optical axis of the charged particle optical tube.

    摘要翻译： 普通带电粒子束装置各自是制造用于在大气压或基本上等于其的压力下在气体气氛中进行观察的专用制造装置。 在大气压或大致相等的压力下，不存在使用普通的高真空带电粒子显微镜简单地进行观察的装置。 此外，普通技术已经不能使用带电粒子束和光同时在这样的大气中观察样品的相同点。 因此，本发明提供了一种装置，包括：带有电荷的粒子束照射样品的带电粒子光管; 抽真空带电粒子光管内部的真空泵; 隔膜，布置成将带有样品的空间与带电粒子光管分离，隔膜可拆卸并允许初级带电粒子束渗透或通过; 以及光学显微镜，其位于带电粒子光管的横跨隔膜和样品的相反侧，光学显微镜的光轴与带电粒子光管的光轴的延伸部分的至少一部分对准。

    Charged Particle Beam Device and Sample Observation Method
    26.
    发明申请
    Charged Particle Beam Device and Sample Observation Method 有权
    带电粒子束装置和样品观察方法

    公开(公告)号：US20150228447A1

    公开(公告)日：2015-08-13

    申请号：US14422552

    申请日：2013-06-28

    申请人： Hitachi High-Technologies Corporation

    发明人： Yusuke Ominami ,  Sukehiro Ito

    IPC分类号： H01J37/16 ,  H01J37/26 ,  H01J37/244

    CPC分类号： H01J37/16 ,  H01J37/00 ,  H01J37/18 ,  H01J37/20 ,  H01J37/244 ,  H01J37/26 ,  H01J37/28 ,  H01J2237/2002 ,  H01J2237/24455 ,  H01J2237/2605

    摘要： A sample observation method includes irradiating a sample with a primary charged particle beam, detecting a secondary charged particle signal obtained by the irradiating, and observing the sample. The method is characterized by causing the primary charged particle beam generated in a charged particle optical lens barrel, which is maintained in a vacuum state, to be transmitted or passed through a separating film disposed to isolate a space in which the sample is placed from the charged particle optical lens barrel; and detecting a transmitted charged particle beam obtained by irradiating the sample, placed in an atmospheric pressure or a predetermined gas atmosphere of a slightly negative pressure state compared with the atmospheric pressure, with the primary charged particle beam.

    摘要翻译： 样品观察方法包括用初级带电粒子束照射样品，检测通过照射获得的二次带电粒子信号，并观察样品。 该方法的特征在于使保持在真空状态的带电粒子光学镜筒中产生的初级带电粒子束透过或通过分离膜，以将样品放置的空间从 带电粒子光学镜头镜筒; 并且与初级带电粒子束一起检测放置在与大气压相比的微小负压状态的大气压或预定气体气氛中的样品所获得的透射带电粒子束。

    Charged particle beam apparatus
    27.
    发明授权
    Charged particle beam apparatus 有权
    带电粒子束装置

    公开(公告)号：US09105442B2

    公开(公告)日：2015-08-11

    申请号：US14552477

    申请日：2014-11-24

    申请人： Hitachi High-Technologies Corporation

    发明人： Yusuke Ominami ,  Sukehiro Ito ,  Tomohisa Ohtaki

    IPC分类号： H01J37/28 ,  H01J37/20 ,  H01J37/16 ,  G01N13/10 ,  H01J37/18 ,  H01J37/244

    CPC分类号： H01J37/18 ,  H01J37/16 ,  H01J37/185 ,  H01J37/20 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/16 ,  H01J2237/164 ,  H01J2237/1825 ,  H01J2237/2007 ,  H01J2237/2608

    摘要： Provided is a charged particle beam apparatus or charged particle microscope capable of observing an observation target sample in an air atmosphere or a gas environment without making significant changes to the configuration of a conventional high vacuum charged particle microscope. In a charged particle beam apparatus configured such that a thin film (10) is used to separate a vacuum environment and an air atmosphere (or a gas environment), an attachment (121) capable of holding the thin film (10) and whose interior can be maintained at an air atmosphere or a gas environment is inserted into a vacuum chamber (7) of a high vacuum charged particle microscope. The attachment (121) is vacuum-sealed and fixed to a vacuum partition of the vacuum sample chamber. Image quality is further improved by replacing the atmosphere in the attachment with helium or a light-elemental gas that has a lower mass than atmospheric gases such as nitrogen or water vapor.

    摘要翻译： 提供一种能够在空气气氛或气体环境中观察观察目标样品的带电粒子束装置或带电粒子显微镜，而不会对传统的高真空带电粒子显微镜的构造进行显着变化。 在构成为使用薄膜（10）分离真空环境和空气气氛（或气体环境）的带电粒子束装置中，能够保持薄膜（10）的附件（121），其内部 可以在空气气氛中保持，或者将气体环境插入到高真空带电粒子显微镜的真空室（7）中。 附件（121）被真空密封并固定到真空样品室的真空隔板。 通过用氦气或具有比大气气体如氮气或水蒸气更低的质量的轻质气体代替附件中的气氛来进一步改善图像质量。

    Charged Particle Beam Apparatus
    28.
    发明申请
    Charged Particle Beam Apparatus 审中-公开
    带电粒子束装置

    公开(公告)号：US20150213999A1

    公开(公告)日：2015-07-30

    申请号：US14422454

    申请日：2013-07-01

    申请人： Hitachi High-Technologies Corporation

    发明人： Yusuke Ominami ,  Noriyuki Sakuma ,  Shinsuke Kawanishi ,  Masahiko Ajima ,  Sukehiro Ito

    IPC分类号： H01J37/16 ,  H01J37/26

    CPC分类号： H01J37/16 ,  H01J37/18 ,  H01J37/244 ,  H01J37/26 ,  H01J37/28 ,  H01J2237/164 ,  H01J2237/2605

    摘要： The ordinary charged particle beam apparatus works on the assumption that signals are detected while its diaphragm and the sample are being positioned close to each other. This structure is not suitable for observing a sample with a prominently uneven surface in a gas atmosphere at atmospheric pressure or at a pressure substantially equal thereto. The present invention provides a charged particle beam apparatus that separates its charged particle optical tube from the space in which the sample is placed. The apparatus includes a detachable diaphragm that lets a primary charged particle beam permeate or pass therethrough. Installed in the space where the sample is placed is a detector that detects secondary particles discharged from the sample irradiated with the primary charged particle beam.

    摘要翻译： 普通带电粒子束装置的工作原理是在其膜片和样品彼此靠近的位置检测信号。 该结构不适用于在大气压或与其基本相等的压力的气体气氛中观察具有显着不平坦表面的样品。 本发明提供一种带电粒子束装置，其将带电粒子光学管与其中放置样品的空间分离。 该装置包括一个可拆卸的隔膜，使一次带电粒子束透过或通过。 安装在放置样品的空间中的检测器是用于检测从初次带电粒子束照射的样品排出的二次粒子的检测器。

    CHARGED PARTICLE BEAM GENERATING APPARATUS, CHARGED PARTICLE BEAM APPARATUS, HIGH VOLTAGE GENERATING APPARATUS, AND HIGH POTENTIAL APPARATUS
    29.
    发明申请
    CHARGED PARTICLE BEAM GENERATING APPARATUS, CHARGED PARTICLE BEAM APPARATUS, HIGH VOLTAGE GENERATING APPARATUS, AND HIGH POTENTIAL APPARATUS 有权
    充电颗粒光束发生装置，充电颗粒光束装置，高电压发生装置和高电位装置

    公开(公告)号：US20150179387A1

    公开(公告)日：2015-06-25

    申请号：US14406909

    申请日：2013-05-08

    申请人： HITACHI HIGH-TECHNOLOGIES CORPORATION

    发明人： Takashi Onishi ,  Shunichi Watanabe ,  Minoru Kaneda

    IPC分类号： H01J29/48 ,  H01J27/02

    CPC分类号： H01J37/04 ,  H01J27/024 ,  H01J29/485 ,  H01J37/026 ,  H01J37/067 ,  H01J37/073 ,  H01J37/16 ,  H01J37/241 ,  H01J37/248 ,  H01J2237/16

    摘要： An instrument producing a charged particle beam according to the present invention is provided with: a charged particle source; a plurality of first electrodes disposed along a direction of irradiation of charged particles from the charged particle source; a plurality of insulation members disposed between the first electrodes; and a housing mounted around the plurality of first electrodes. The housing is formed from an insulating solid material, and includes a plurality of second electrodes disposed at positions in proximity to the plurality of first electrodes. At least one of the plurality of second electrodes is electrically connected to at least one of the plurality of first electrodes, each of the plurality of second electrodes having the same potential as the potential of the proximate one of the first electrodes.

    摘要翻译： 根据本发明的产生带电粒子束的仪器具有：带电粒子源; 多个第一电极，其沿带电粒子源的带电粒子的照射方向设置; 设置在所述第一电极之间的多个绝缘构件; 以及围绕所述多个第一电极安装的壳体。 壳体由绝缘固体材料形成，并且包括设置在靠近多个第一电极的位置处的多个第二电极。 所述多个第二电极中的至少一个电连接到所述多个第一电极中的至少一个，所述多个第二电极中的每一个具有与所述第一电极中的所述第一电极的电位相同的电位。