Piezoelectric based MEMS structure
    45.
    发明授权
    Piezoelectric based MEMS structure 有权
    压电式MEMS结构

    公开(公告)号:US09236555B2

    公开(公告)日:2016-01-12

    申请号:US13349009

    申请日:2012-01-12

    摘要: In one embodiment, a method of deforming a MEMS structure includes providing a base layer, providing a first piezoelectric slab operably connected to a surface of the base layer, determining a desired deformation of the base layer, applying a first potential to a first electrode operably connected to the first piezoelectric slab, applying a second potential to a second electrode operably connected to the first piezoelectric slab, and deforming the base layer with the first piezoelectric slab using the applied first potential and the applied second potential based upon the determined desired deformation.

    摘要翻译: 在一个实施例中,使MEMS结构变形的方法包括提供基底层,提供可操作地连接到基底层的表面的第一压电片,确定基底层的期望变形,将第一电位可操作地施加到第一电极 连接到所述第一压电板,将第二电位施加到可操作地连接到所述第一压电板的第二电极,以及基于所确定的期望变形,使用所施加的第一电位和所施加的第二电位,使所述基层与所述第一压电板发生变形。

    MICRO ELECTRICAL MECHANICAL MAGNETIC FIELD SENSOR UTILIZING MODIFIED INERTIAL ELEMENTS
    49.
    发明申请
    MICRO ELECTRICAL MECHANICAL MAGNETIC FIELD SENSOR UTILIZING MODIFIED INERTIAL ELEMENTS 有权
    微机电磁场传感器利用修正惯性元件

    公开(公告)号:US20110192229A1

    公开(公告)日:2011-08-11

    申请号:US12703516

    申请日:2010-02-10

    IPC分类号: G01P15/125 H05K13/00

    CPC分类号: G01R33/0286 Y10T29/49002

    摘要: A micro electrical-mechanical system (MEMS) is disclosed. The MEMS includes a substrate, a first pivot extending upwardly from the substrate, a first lever arm with a first longitudinal axis extending above the substrate and pivotably mounted to the first pivot for pivoting about a first pivot axis, a first capacitor layer formed on the substrate at a location beneath a first capacitor portion of the first lever arm, a second capacitor layer formed on the substrate at a location beneath a second capacitor portion of the first lever arm, wherein the first pivot supports the first lever arm at a location between the first capacitor portion and the second capacitor portion along the first longitudinal axis, and a first conductor member extending across the first longitudinal axis and spaced apart from the first pivot axis.

    摘要翻译: 公开了一种微机电系统(MEMS)。 MEMS包括基板,从基板向上延伸的第一枢轴,第一杠杆臂,第一纵向轴线在基板上方延伸并且可枢转地安装到第一枢轴上,用于围绕第一枢转轴线枢转,第一电容器层形成在第一枢转轴上 基板,位于第一杠杆臂的第一电容器部分下方的位置处;第二电容器层,形成在第一杠杆臂的第二电容器部分下方的位置处的基板上,其中第一枢轴在第一杠杆臂之间的位置处支撑第一杠杆臂, 所述第一电容器部分和所述第二电容器部分沿着所述第一纵向轴线延伸,以及第一导体部件,其延伸穿过所述第一纵向轴线并与所述第一枢转轴线间隔开。

    METHOD OF MANUFACTURING A PLANAR ELECTRODE WITH LARGE SURFACE AREA
    50.
    发明申请
    METHOD OF MANUFACTURING A PLANAR ELECTRODE WITH LARGE SURFACE AREA 有权
    具有大面积面积的平面电极的制造方法

    公开(公告)号:US20110019337A1

    公开(公告)日:2011-01-27

    申请号:US12508894

    申请日:2009-07-24

    IPC分类号: H01G9/00 B05D5/12

    摘要: A method for fabricating a pair of large surface area planar electrodes. The method includes forming a first template above a first substrate, the first template having a first plurality of pores, coating the first plurality of pores of the first template with a first layer of conducting material to form a first electrode, placing the first plurality of pores of the first electrode in proximity to a second electrode, thereby forming a gap between the first plurality of pores and the second electrode, and filling the gap with an electrolyte material.

    摘要翻译: 一种制造一对大面积平面电极的方法。 该方法包括在第一基板上形成第一模板,第一模板具有第一多个孔,用第一导电材料层涂覆第一模板的第一多个孔以形成第一电极,将第一多个 在第二电极附近形成第一电极的孔,从而在第一多个孔和第二电极之间形成间隙,并用电解质材料填充间隙。