公开(公告)号：US5384461A

公开(公告)日：1995-01-24

申请号：US140195

申请日：1994-02-03

Applicant: Joseph P. R. Jullien ,  Jonathan H. Batey ,  Robert Mellor

Inventor： Joseph P. R. Jullien ,  Jonathan H. Batey ,  Robert Mellor

IPC: H01J9/14 ,  H01J3/18 ,  H01J49/42

CPC classification number: H01J49/4215 ,  H01J3/18 ,  H01J49/068 ,  H01J49/4255

Abstract: The method includes the steps of assembling one or more blanks (1) in supporting means (2, 3) so that the or each blank occupies at least the space to be occupied by elongate electrodes and, without disturbing the position of the blanks relative to said supporting means, removing material from all said blanks to generate said electrodes in position in said supporting means. Preferably the material is removed by an electrode-discharge machining (EDM) process, e.g. diesinking. The method avoids time-consuming alignment of preformed electrodes in said supporting means.

Abstract translation: PCT No.PCT / GB92 / 00835 Sec。 371日期：1994年2月3日 102（e）日期1994年2月3日PCT提交1992年5月8日PCT公布。 WO92 / 21141 PCT出版物 该方法包括以下步骤：将一个或多个坯件（1）组装在支撑装置（2,3）中，使得所述或每个坯件至少占据由细长电极占据的空间，并且不受干扰 坯件相对于所述支撑装置的位置，从所有所述坯料上去除材料，以在所述支撑装置中产生所述电极就位。 优选地，通过电极放电加工（EDM）工艺，例如， 沉没 该方法避免了所述支撑装置中预成型电极的耗时对准。

公开(公告)号：US4006376A

公开(公告)日：1977-02-01

申请号：US554099

申请日：1975-02-28

Applicant: Richard Dale Faulkner ,  Robert Edwin McHose

Inventor： Richard Dale Faulkner ,  Robert Edwin McHose

IPC: H01J3/18 ,  H01J40/04 ,  H01J43/18 ,  H01J39/04 ,  H01J39/00

CPC classification number: H01J3/18 ,  H01J40/04 ,  H01J43/18

Abstract: Photoelectrons emitted from a flat photocathode are collected within an evacuated envelope by a surface of an electrode. The photoelectrons are accelerated by an electron lens system, as an electron stream, within an evacuated cavity between the photocathode and the electrode surface. The photoelectrons are accelerated through two succeeding cavity regions in which the electron trajectories associated with the electron stream are increasingly compressed. A cavity region of lessening compression of the electron trajectories associated with the electron stream is defined between the two cavity regions of increasing compression. The electrode surface is located closely proximate to the cavity region of greatest compression to collect a maximum number of the photoelectrons.

Abstract translation: 从平面光电阴极发射的光电子通过电极的表面收集在真空的外壳内。 光电子通过作为电子流的电子透镜系统在光电阴极和电极表面之间的真空腔内加速。 光电子通过两个后续的腔区加速，其中与电子流相关联的电子轨迹越来越多地被压缩。 在增加压缩的两个空腔区域之间限定与电子流相关联的电子轨迹的减小压缩的空腔区域。 电极表面紧邻最大压缩的空腔区域，以收集最大数量的光电子。

公开(公告)号：US20170250051A1

公开(公告)日：2017-08-31

申请号：US15056479

申请日：2016-02-29

Applicant: General Electric Company

Inventor： Sergio Lamaitre

IPC: H01J35/14 ,  H01J3/18 ,  H01J35/06

CPC classification number: H01J3/18 ,  H01J3/027 ,  H01J35/06 ,  H01J35/32

Abstract: In the present invention, a cathode assembly for an X-ray tube is provided including a cathode cup, a pair of emitters disposed within the cup and each configured to emit an electron beam therefrom and an electrode spaced from the pair of emitters and configured to affect the shape and/or intensity of the electron beams emitted by the pair of emitters. The electrode includes a rod extending across a central aperture defined within the electrode that enables the electrode to grid or focus the electron beam or beams emitted from the emitters using a bias voltage between +10 kV and −10 kV.

公开(公告)号：US09653248B2

公开(公告)日：2017-05-16

申请号：US14582782

申请日：2014-12-24

Applicant: Kabushiki Kaisha Toshiba ,  Toshiba Electron Tubes & Devices Co., Ltd.

Inventor： Tomonari Ishihara ,  Naoki Akahori ,  Hidero Anno

IPC: H01J35/14 ,  H01J35/06 ,  H01J3/06 ,  H01J29/50 ,  H01J37/065 ,  H01J19/42 ,  H01J19/10 ,  H01J1/88 ,  A61B6/00 ,  H01J1/16 ,  H01J1/18 ,  H01J23/083 ,  H01J3/18 ,  H01J23/04 ,  H01J29/04 ,  H01J29/62

CPC classification number: H01J35/06 ,  A61B6/44 ,  H01J1/16 ,  H01J1/18 ,  H01J1/88 ,  H01J3/06 ,  H01J3/18 ,  H01J19/10 ,  H01J19/42 ,  H01J23/04 ,  H01J23/083 ,  H01J29/04 ,  H01J29/50 ,  H01J29/62 ,  H01J35/14 ,  H01J37/065 ,  H01J2229/481 ,  H01J2229/4827 ,  H01J2229/4831 ,  H01J2229/50 ,  H01J2229/582 ,  H01J2229/5835 ,  H01J2235/06 ,  H01J2237/032 ,  H01J2237/049 ,  H01J2237/06375 ,  H01J2893/0005 ,  H01J2893/005 ,  H01J2893/0088 ,  H01J2893/0089 ,  H01J2893/0094

Abstract: According to one embodiment, an X-ray tube includes an anode target, a cathode including a filament and a convergence electrode which includes a groove portion, and an envelope. The groove portion includes a pair of first bottom surfaces which are located in the same plane as the filament and between which the filament is interposed in a width direction of the groove portion, and a pair of second bottom surfaces between which the filament and the pair of first bottom surfaces are interposed in a length direction of the groove portion and which are located closer to an opening of the groove portion than the pair of first bottom surfaces.

公开(公告)号：US09117625B2

公开(公告)日：2015-08-25

申请号：US14348559

申请日：2012-09-27

Applicant: KYOCERA Corporation

Inventor： Yukio Noguchi

IPC: G21K5/04 ,  H01J37/12 ,  H01J37/28 ,  H01J37/317 ,  H01J3/18 ,  H01J37/30 ,  B82Y10/00 ,  B82Y40/00

CPC classification number: H01J37/12 ,  B82Y10/00 ,  B82Y40/00 ,  H01J3/18 ,  H01J37/28 ,  H01J37/3007 ,  H01J37/3177 ,  H01J2237/03 ,  H01J2237/1205

Abstract: To provide an electrostatic lens which improves an irradiation accuracy of an electron beam while satisfying the need for higher throughput. An electrostatic lens according to one embodiment of the present invention includes a substrate which includes an insulating plate in which a plurality of first through holes that allow an electron beam to pass through are formed, a plurality of electrodes that are formed on an inner wall of the plurality of first through holes, and a plurality of wirings that are formed on the insulating plate and are electrically connected to each of the electrodes, wherein the plurality of electrodes are electrically independent from each other.

Abstract translation: 提供一种提高电子束的照射精度的静电透镜，同时满足更高的生产量。 根据本发明的一个实施例的静电透镜包括：基板，其包括绝缘板，其中形成有允许电子束穿过的多个第一通孔;多个电极，其形成在 多个第一通孔和多个布线，其形成在绝缘板上并与每个电极电连接，其中多个电极彼此电独立。

公开(公告)号：US08963099B2

公开(公告)日：2015-02-24

申请号：US13862728

申请日：2013-04-15

Applicant: Canon Kabushiki Kaisha

Inventor： Shuji Yamada

IPC: H01J1/02 ,  H01J3/18 ,  H01J37/317 ,  H01J9/02 ,  H01J37/12 ,  H01J1/46 ,  H01J3/02 ,  H01J9/14

CPC classification number: H01J1/02 ,  B82Y10/00 ,  B82Y40/00 ,  H01J1/46 ,  H01J3/027 ,  H01J3/18 ,  H01J9/02 ,  H01J9/14 ,  H01J37/12 ,  H01J37/317 ,  H01J37/3177 ,  H01J2237/032 ,  H01J2237/1205

Abstract: An electrode to be used for an electrostatic lens, wherein the electrode at least includes: a first substrate having a first through-hole and a second substrate having a second through-hole; the first substrate having a thickness smaller than the second substrate; the first through-hole having a diameter smaller than the second through-hole; the second substrate having a specific resistance smaller than the first substrate, wherein the first substrate and the second substrate are superimposed so that the first through-hole and the second through-hole are aligned relative to each other. Notching taking place near any of the through-holes in a dry etching process can be reduced, and thus, the through-holes can be formed accurately.

Abstract translation: 一种用于静电透镜的电极，其中所述电极至少包括：具有第一通孔的第一基板和具有第二通孔的第二基板; 所述第一基板的厚度小于所述第二基板; 所述第一通孔的直径小于所述第二通孔; 所述第二基板具有小于所述第一基板的电阻率，其中所述第一基板和所述第二基板重叠，使得所述第一通孔和所述第二通孔相对于彼此对准。 可以减少在干蚀刻工艺中的任何通孔附近发生的凹陷，因此可以精确地形成通孔。

公开(公告)号：US08686351B2

公开(公告)日：2014-04-01

申请号：US13937913

申请日：2013-07-09

Applicant: Purdue Research Foundation

Inventor： Zheng Ouyang ,  Robert Graham Cooks ,  Sandilya Venkata Garimella ,  Jason David Harper ,  Nicholas Alan Charipar

IPC: H01J37/301 ,  H01J49/04 ,  H01J3/18

CPC classification number: H01J49/0404 ,  G01N27/622 ,  H01J49/0027 ,  H01J49/0031 ,  H01J49/04 ,  H01J49/0409 ,  H01J49/0422 ,  H01J49/0459 ,  H01J49/10 ,  H01J49/26 ,  H01J49/40 ,  H01J49/4215

Abstract: The invention generally relates to systems and methods for transferring ions for analysis. In certain embodiments, the invention provides a system for analyzing a sample including an ionizing source for converting molecules of a sample into gas phase ions in a region at about atmospheric pressure, an ion analysis device, and an ion transfer member operably coupled to a gas flow generating device, in which the gas flow generating device produces a laminar gas flow that transfers the gas phase ions through the ion transfer member to an inlet of the ion analysis device.

Abstract translation: 本发明一般涉及用于转移离子进行分析的系统和方法。 在某些实施方案中，本发明提供了一种用于分析样品的系统，该样品包括用于将样品分子转化成大气压的区域中的气相离子的电离源，离子分析装置和可操作地耦合到气体的离子传递构件 气体发生装置，其中气体流动产生装置产生将气相离子通过离子传递构件转移到离子分析装置的入口的层流气流。

公开(公告)号：US20140034843A1

公开(公告)日：2014-02-06

申请号：US13564450

申请日：2012-08-01

Applicant: Oliver V. Naumovski ,  Shardul Patel ,  Charles A. Teodorczyk

Inventor： Oliver V. Naumovski ,  Shardul Patel ,  Charles A. Teodorczyk

IPC: H01J3/18

CPC classification number: H01J37/1472 ,  H01J37/12 ,  H01J37/3171 ,  H01J49/062 ,  H01J2237/0216 ,  H01J2237/151 ,  H01Q9/04 ,  Y10T428/2918 ,  Y10T428/292

Abstract: A composite electrostatic rod may include a body comprising a length L and cross sectional area A. The body may include an outer portion comprising a first material, and a core comprising a second material different than the first material and surrounded by the outer portion, wherein a natural frequency of the composite electrostatic rod is greater than that of a graphite rod having the length L and cross sectional area A.

Abstract translation: 复合静电杆可包括主体，其包括长度L和横截面面积A.主体可包括包括第一材料的外部部分和包括不同于第一材料并被外部部分包围的第二材料的芯部，其中 复合静电杆的固有频率大于具有长度L和横截面积A的石墨棒的固有频率。

公开(公告)号：US20130306878A1

公开(公告)日：2013-11-21

申请号：US13862728

申请日：2013-04-15

Applicant: CANON KABUSHIKI KAISHA

Inventor： Shuji Yamada

IPC: H01J1/02 ,  H01J37/317 ,  H01J9/02 ,  H01J3/18

CPC classification number: H01J1/02 ,  B82Y10/00 ,  B82Y40/00 ,  H01J1/46 ,  H01J3/027 ,  H01J3/18 ,  H01J9/02 ,  H01J9/14 ,  H01J37/12 ,  H01J37/317 ,  H01J37/3177 ,  H01J2237/032 ,  H01J2237/1205

Abstract: An electrode to be used for an electrostatic lens, wherein the electrode at least includes: a first substrate having a first through-hole and a second substrate having a second through-hole; the first substrate having a thickness smaller than the second substrate; the first through-hole having a diameter smaller than the second through-hole; the second substrate having a specific resistance smaller than the first substrate, wherein the first substrate and the second substrate are superimposed so that the first through-hole and the second through-hole are aligned relative to each other. Notching taking place near any of the through-holes in a dry etching process can be reduced, and thus, the through-holes can be formed accurately.

Abstract translation: 一种用于静电透镜的电极，其中所述电极至少包括：具有第一通孔的第一基板和具有第二通孔的第二基板; 所述第一基板的厚度小于所述第二基板; 所述第一通孔的直径小于所述第二通孔; 所述第二基板具有小于所述第一基板的电阻率，其中所述第一基板和所述第二基板重叠，使得所述第一通孔和所述第二通孔相对于彼此对准。 可以减少在干蚀刻工艺中的任何通孔附近发生的凹陷，因此可以精确地形成通孔。

公开(公告)号：US08519353B2

公开(公告)日：2013-08-27

申请号：US12981096

申请日：2010-12-29

Applicant: Svetlana Radovanov ,  Peter L. Kellerman ,  Frank Sinclair ,  Robert C. Lindberg

Inventor： Svetlana Radovanov ,  Peter L. Kellerman ,  Frank Sinclair ,  Robert C. Lindberg

IPC: H01J1/88 ,  H01J3/18 ,  H01J3/38 ,  G21K1/06

CPC classification number: H01J37/12 ,  H01J37/15 ,  H01J37/3171 ,  H01J2237/121 ,  H01J2237/151

Abstract: A method of controlling deflection of a charged particle beam in an electrostatic lens includes establishing a symmetrical electrostatic lens configuration comprising a plurality of electrodes disposed at unadjusted positions that are symmetric with respect to the central ray trajectory with applied unadjusted voltages that create fields symmetric with respect to the central ray trajectory. A symmetric electric field is calculated corresponding to the set of unadjusted voltages. A plurality of lower electrodes is arranged at adjusted positions that are asymmetric with respect to the central ray trajectory. A set of adjusted voltages is obtained for the plurality of lower electrodes, wherein the set of adjusted voltages corresponds to a set of respective potentials of the symmetric electric field at respective adjusted asymmetric positions. The adjusted voltages are applied to the asymmetric lens configuration when the charged particle beam passes therethrough.

Abstract translation: 控制带电粒子束在静电透镜中的偏转的方法包括建立对称静电透镜配置，其包括设置在相对于中心射线轨迹对称的未调整位置的多个电极，其中施加的未调节电压产生对称的场 到中心射线轨迹。 对应于未调整电压组的对称电场。 多个下电极被布置在相对于中心射线轨迹不对称的调整位置处。 对于多个下电极获得一组调整的电压，其中所述一组调整的电压对应于在各自调整的非对称位置处的对称电场的各个电位的集合。 当带电粒子束通过时，经调整的电压施加到非对称透镜构型。