公开(公告)号：US20050279935A1

公开(公告)日：2005-12-22

申请号：US11025197

申请日：2004-12-29

申请人： Dmirty Shur ,  Alexander Kadyshevitch

发明人： Dmirty Shur ,  Alexander Kadyshevitch

IPC分类号： G01N23/225 ,  G01R31/307 ,  H01J37/256

CPC分类号： G01R31/307 ,  G01N23/225 ,  H01J2237/2594

摘要： A method for measuring leakage through a dielectric layer of a semiconductor device on a wafer, including irradiating the dielectric layer with a charged particle beam having a beam current. The irradiation generates a wafer current having a relation to the beam current in a selected range of the beam current. The method further includes determining a boundary value of the beam current at which the relation is not satisfied, and determining a leakage current through the dielectric layer in response to the boundary value.

摘要翻译： 一种用于测量通过晶片上的半导体器件的电介质层的泄漏的方法，包括用具有束电流的带电粒子束照射介电层。 照射产生在束电流的选定范围内具有与束电流关系的晶片电流。 该方法还包括确定不满足关系的束电流的边界值，以及响应于边界值确定通过电介质层的漏电流。

公开(公告)号：US20050211927A1

公开(公告)日：2005-09-29

申请号：US11127240

申请日：2005-05-12

申请人： Mitsuo Tokuda ,  Muneyuki Fukuda ,  Yasuhiro Mitsui ,  Hidemi Koike ,  Satoshi Tomimatsu ,  Hiroyasu Shichi ,  Hideo Kashima ,  Kaoru Umemura

发明人： Mitsuo Tokuda ,  Muneyuki Fukuda ,  Yasuhiro Mitsui ,  Hidemi Koike ,  Satoshi Tomimatsu ,  Hiroyasu Shichi ,  Hideo Kashima ,  Kaoru Umemura

IPC分类号： G01N1/32 ,  G01N1/28 ,  G01N23/225 ,  G01Q10/00 ,  G01Q30/02 ,  G01Q30/04 ,  G01Q30/16 ,  G01Q30/20 ,  H01J37/20 ,  H01J37/256 ,  H01J37/28 ,  H01J37/30 ,  H01J37/305 ,  H01J37/317 ,  H01L21/66 ,  H04L29/06 ,  H04L29/08 ,  A61N5/00 ,  G21K7/00

CPC分类号： H04L29/06 ,  G01N23/225 ,  H01J37/256 ,  H01J37/3056 ,  H01J2237/20 ,  H01J2237/202 ,  H01J2237/31745 ,  H04L67/16 ,  H04L69/329

摘要： An object of the invention is to realize a method and an apparatus for processing and observing a minute sample which can observe a section of a wafer in horizontal to vertical directions with high resolution, high accuracy and high throughput without splitting any wafer which is a sample. In an apparatus of the invention, there are included a focused ion beam optical system and an electron optical system in one vacuum container, and a minute sample containing a desired area of the sample is separated by forming processing with a charged particle beam, and there are included a manipulator for extracting the separated minute sample, and a manipulator controller for driving the manipulator independently of a wafer sample stage.

公开(公告)号：US06875981B2

公开(公告)日：2005-04-05

申请号：US10333318

申请日：2002-03-22

申请人： Osamu Nishikawa

发明人： Osamu Nishikawa

IPC分类号： G01Q30/02 ,  G01Q60/00 ,  G01Q70/10 ,  H01J37/256 ,  H01J37/285 ,  H01J49/06 ,  H01J49/40 ,  G12B21/04 ,  G01N13/12

CPC分类号： G01Q30/02 ,  H01J37/256 ,  H01J37/285 ,  H01J49/06 ,  H01J49/40 ,  H01J2237/2443 ,  H01J2237/2446 ,  H01J2237/2818 ,  Y10S977/852

摘要： In a scanning atom probe (100), a surface topography of a specimen (3) is firstly analyzed by a surface topography analyzing unit (20). In the next place, an extraction electrode (5) is aligned to a desired area to be analyzed of a specimen surface. In case of analyzing electronic state of the area to be analyzed, negative bias voltage is impressed onto the specimen (3) from a direct current high voltage supply (2) and field emitted electrons are detected by a screen (9). In case of analyzing atomic arrangement and composition of the area to be analyzed, positive voltage is impressed onto the specimen (3) from the direct current high voltage supply (2) and a pulse generator (1) and positive ions generated by field evaporation are detected by a position sensitive ion detector (11) or a relfectron type mass analyzer (13).

摘要翻译： 在扫描原子探针（100）中，首先通过表面形貌分析单元（20）分析样品（3）的表面形貌。 接下来，将取出电极（5）与要分析的试样表面的所需区域对准。 在分析要分析的区域的电子状态的情况下，从直流高压电源（2）将负偏压施加到样品（3）上，并且通过屏幕（9）检测场发射的电子。 在分析待分析区域的原子排列和组成的情况下，从直流高压电源（2）和脉冲发生器（1）向样品（3）施加正电压，通过场蒸发产生的正离子为 通过位置敏感离子检测器（11）或再生型质量分析仪（13）检测。

公开(公告)号：US6118123A

公开(公告)日：2000-09-12

申请号：US12022

申请日：1998-01-22

申请人： Satoshi Notoya

发明人： Satoshi Notoya

IPC分类号： G01Q20/04 ,  G01Q30/02 ,  G01Q30/20 ,  H01J37/21 ,  H01J37/256

CPC分类号： H01J37/256 ,  H01J37/21

摘要： There is disclosed an electron probe microanalyzer capable of achieving focusing after movement of a specimen in a shorter time than conventional, thus improving the total measuring efficiency. When movement into a specified analysis point on the specimen is completed, an automatic focusing device automatically performs a focusing operation consisting of scanning a relatively narrow range. If this operation is performed unsuccessfully, the automatic focusing device automatically performs a second focusing operation consisting of scanning a wider range. Thus, the instrument searches for a focal point.

摘要翻译： 公开了一种电子探针微量分析仪，其能够在比常规的更短的时间内在样品移动之后实现聚焦，从而提高总测量效率。 当移动到样本上的指定分析点时，自动聚焦装置自动执行由扫描较窄范围组成的聚焦操作。 如果该操作不成功，则自动聚焦装置自动执行由较宽范围的扫描组成的第二聚焦操作。 因此，仪器将搜索焦点。

公开(公告)号：US6002128A

公开(公告)日：1999-12-14

申请号：US973547

申请日：1998-05-04

申请人： Rowland Hill ,  Paul William Miles

发明人： Rowland Hill ,  Paul William Miles

IPC分类号： H01J37/256 ,  H01J49/14 ,  H01J49/40 ,  H01J37/252

CPC分类号： H01J49/40 ,  H01J37/256 ,  H01J49/06 ,  H01J49/142

摘要： A time-of-flight secondary ion mass spectrometer instrument comprises a pulsed source of a beam of ions, directed through a focusing device onto a sample to be analyzed. Ions emitted from the sample are collected, and mass spectrometry performed thereon to analyze the sample. Both the source and emitted beams may be focused by the same focusing device. This allows the instrument to be mounted to a single port in a vacuum chamber.

摘要翻译： PCT No.PCT / GB96 / 01592 Sec。 371日期：1998年5月4日 102（e）日期1998年5月4日PCT提交1996年7月2日PCT公布。 公开号WO97 / 02590 日期1997年1月23日飞行时间二次离子质谱仪仪器包括通过聚焦装置引导到待分析样品上的离子束的脉冲源。 收集样品发出的离子，并对其进行质谱分析。 源和发射光束都可以由相同的聚焦装置聚焦。 这样就可以将仪器安装在真空室中的单个端口上。

公开(公告)号：US5986261A

公开(公告)日：1999-11-16

申请号：US945409

申请日：1997-10-29

申请人： Aaron Lewis ,  Galina Fish ,  Sofia Kokotov ,  Klony Lieberman

发明人： Aaron Lewis ,  Galina Fish ,  Sofia Kokotov ,  Klony Lieberman

IPC分类号： G01J5/04 ,  G01J5/12 ,  G01K7/02 ,  G01K7/06 ,  G01Q60/58 ,  G01Q70/12 ,  G01Q70/14 ,  G01Q70/16 ,  H01J1/304 ,  H01J37/073 ,  H01L35/32 ,  H01J37/256

CPC分类号： G01J5/041 ,  B82Y35/00 ,  G01J5/12 ,  G01K7/028 ,  G01K7/06 ,  G01Q60/58 ,  G01Q70/14 ,  H01J1/304 ,  Y10S977/765 ,  Y10S977/875 ,  Y10S977/878 ,  Y10S977/879

摘要： A tapered, nonconductive structure (10) having a hollow core (18) and a conical tip (14) includes a metal wire (16) within the core (18). The wire (16) is sealed within, and is exposed at the end (22) of, the tip (14). An electrically conductive or semiconductive layer (24) on the exterior of the tip (14) form a point thermocouple contact with the wire. The tip (14) may be fabricated, for example, by placing a metal wire (16) within a tube (12), and heating and pulling the tube (12) to produce two tapered micropipettes. Thereafter, a thin metal or semiconductor film (24) is evaporated onto the outer surface.

摘要翻译： PCT No.PCT / US96 / 05655 Sec。 371日期1997年10月29日第 102（e）1997年10月29日PCT PCT 1996年4月29日PCT公布。 出版物WO96 / 35225 PCT 日期1996年11月7日具有中空芯（18）和锥形尖端（14）的锥形非导电结构（10）包括在芯部（18）内的金属丝（16）。 线（16）被密封在尖端（14）的端部（22）内并且暴露在尖端（14）的端部（22）处。 尖端（14）外部的导电或半导体层（24）与导线形成点热电偶接触。 尖端（14）可以例如通过将金属线（16）放置在管（12）内并且加热和拉动管（12）以产生两个锥形微量移液管来制造。 此后，薄的金属或半导体膜（24）蒸发到外表面上。

公开(公告)号：US5831264A

公开(公告)日：1998-11-03

申请号：US736045

申请日：1996-10-22

申请人： Gordon M. Shedd ,  David J. Ray

发明人： Gordon M. Shedd ,  David J. Ray

IPC分类号： G01Q10/04 ,  H01L41/09 ,  H01J37/256 ,  H01J37/28 ,  H01L41/08

CPC分类号： G01Q10/04 ,  B82Y35/00 ,  H01L41/092 ,  Y10S977/872

摘要： The electrostrictive actuator device of the present invention, which controls relative movement in a scanned-probe microscope between the tip of a probe and the surface of a sample, comprises two thin-walled cylindrical members formed of electrostrictive material. The first cylindrical member, which is connected to the microscope, has on each of its inner and outer surfaces a conductive layer that forms at least one electrode. Applying voltages to the electrodes on the inner and outer surfaces of the first cylindrical member controls the two-dimensional X-Y horizontal relative movement between the probe tip and the sample surface. The second cylindrical member of the actuator device is coaxially connected at one end with the first cylindrical member and at its opposite end with the sample or the probe. Both the inner and outer surfaces of the second member have conductive layers, each of which forms an electrode. Applying voltages to the electrodes on the inner and outer surfaces of the second cylindrical member controls the Z-direction vertical relative movement of the probe tip on or near the sample surface. In preferred embodiments of the actuator device of the invention, either or both of the conductive layers on the inner and outer surfaces of the first cylindrical member may comprise two opposite pairs of spaced apart electrodes. Also in accordance with the invention, a scanned-probe microscope apparatus comprises a microscope and the just-described electrostrictive actuator device comprising first and second cylindrical members for controlling, respectively, X-Y horizontal and Z-direction vertical movements.

摘要翻译： 本发明的电致伸缩致动器装置控制探针的尖端和样品表面之间的扫描探针显微镜中的相对运动，包括由电致伸缩材料形成的两个薄壁圆柱形构件。 连接到显微镜的第一圆柱形构件在其每个内表面和外表面上都具有形成至少一个电极的导电层。 向第一圆柱形构件的内表面和外表面上的电极施加电压控制探针尖端和样品表面之间的二维X-Y水平相对运动。 致动器装置的第二圆柱形构件在一端与第一圆柱形构件同轴连接，并且在其相对端与样品或探针同轴连接。 第二构件的内表面和外表面都具有导电层，每个导电层形成电极。 向第二圆柱形构件的内表面和外表面上的电极施加电压控制探针尖端在样品表面上或附近的Z方向垂直相对运动。 在本发明的致动器装置的优选实施例中，第一圆柱形构件的内表面和外表面上的导电层中的一个或两个可以包括两对间隔开的电极。 同样根据本发明，扫描探针显微镜装置包括显微镜和刚才描述的电致伸缩致动器装置，其包括用于分别控制X-Y水平和Z方向垂直运动的第一和第二圆柱形构件。

公开(公告)号：US5811804A

公开(公告)日：1998-09-22

申请号：US682601

申请日：1996-08-12

申请人： Clemens Antoni Van Blitterswijk ,  Hendrick Klaas Koerten ,  Jan Greve

发明人： Clemens Antoni Van Blitterswijk ,  Hendrick Klaas Koerten ,  Jan Greve

IPC分类号： G01N21/65 ,  H01J37/252 ,  H01J37/256 ,  H01J37/244

CPC分类号： H01J37/228 ,  G01N21/65 ,  H01J37/226 ,  H01J37/252 ,  H01J37/256 ,  G01N2021/656 ,  H01J2237/2445

摘要： Electron microscope provided, in the direction of the longitudinal axis, with at least one electron beam generation system, a condenser and objective lens system, a specimen chamber with a specimen mount, a projection lens system with imaging screen for the purpose of transmission electron microscopy (TEM) and/or an electron detector for the purpose of scanning electron microscopy (SEM) . The microscope is used in combination with an externally positioned Raman spectrometer and an associated light source for injecting and extracting, via a window in the microscope wall, a light beam to be directed at the specimen, and specimen-related Raman radiation, respectively. In the specimen chamber, a light beam and Raman radiation guide system is provided with an optical guide to guide the light beam to--and the Raman radiation from--the specimen. The guide system and the specimen mount are displaceable with respect to one another for mutual alignment of the specimen and the optical axis of the Raman spectrometer.

摘要翻译： PCT No.PCT / NL95 / 00033 Sec。 371日期：1996年8月12日 102（e）日期1996年8月12日PCT提交1995年1月24日PCT公布。 公开号WO95 / 20242 日期1995年7月27日电子显微镜在纵向方向上提供至少一个电子束产生系统，冷凝器和物镜系统，具有样本座的样本室，具有成像屏幕的投影透镜系统 用于扫描电子显微镜（SEM）的透射电子显微镜（TEM）和/或电子检测器的目的。 显微镜与外部定位的拉曼光谱仪和相关联的光源结合使用，用于通过显微镜壁中的窗口分别注射和提取指向样品的光束和与样品相关的拉曼辐射。 在样本室中，光束和拉曼辐射导向系统设置有光引导件，以将光束引导到来自样本的拉曼辐射。 引导系统和样本支架可相对于彼此移位，以使样本与拉曼光谱仪的光轴相互对准。

公开(公告)号：US5650620A

公开(公告)日：1997-07-22

申请号：US623149

申请日：1996-03-28

申请人： Hakim Janah ,  Daniel Acroute ,  Pierre Mirebeau ,  Claude Le Gressus ,  Claude Faure

发明人： Hakim Janah ,  Daniel Acroute ,  Pierre Mirebeau ,  Claude Le Gressus ,  Claude Faure

IPC分类号： B07C5/34 ,  G01N23/225 ,  H01B13/00 ,  H01B13/14 ,  H01J37/256

CPC分类号： B07C5/34 ,  G01N23/2251

摘要： A method of verifying that a given insulative element conforms with a reference insulative element, comprising the steps of: emitting a primary beam of electrons impinging on the given insulative element, receiving a secondary beam of electrons returned by the given insulative element in response to emission of the primary beam of electrons, and comparing a curve as a function of time of the electrical current of the secondary beam received with a curve as a function of time of a reference electrical current to establish whether or not the given insulative element conforms to a reference insulative element.

摘要翻译： 一种验证给定绝缘元件符合参考绝缘元件的方法，包括以下步骤：发射撞击给定绝缘元件的电子束的一次束，接收由给定绝缘元件响应于发射而返回的二次电子束 并且将作为参考电流的时间的函数的曲线接收的次级光束的电流的时间的函数的曲线进行比较，以确定给定的绝缘元件是否符合 参考绝缘元件

公开(公告)号：US5550372A

公开(公告)日：1996-08-27

申请号：US543826

申请日：1995-10-16

申请人： Takao Yasue

发明人： Takao Yasue

IPC分类号： G01N23/223 ,  G01N21/88 ,  G01N21/94 ,  G01N21/956 ,  G01N23/225 ,  H01L21/66 ,  H01J37/256

CPC分类号： G01N23/2252

摘要： A device for analyzing foreign matter on semiconductor wafers is provided, which is capable of analyzing a great deal of foreign matter rapidly without requiring the higher level decision capabilities of a skilled analyst. The device for analyzing foreign matter on semiconductor wafers includes a scanning electron microscope (SEM) which obtains the composition ratios of each element of a plurality of foreign matter adhered to semiconductor wafers. A foreign matter plotting section is provided to obtain the distribution of the composition ratios of the plurality of foreign matter on the basis of a result obtained by the SEM. A foreign matter classifying process section classifies the plurality of foreign matter on the basis of the distribution. A foreign matter identifying process section compares the foreign matter classification result with data stored in advance in a foreign matter data base, thereby identifying the foreign matter type.

摘要翻译： 提供一种用于分析半导体晶片上的异物的装置，其能够快速分析大量异物，而不需要技术分析者的更高级别的决定能力。 用于分析半导体晶片上异物的装置包括扫描电子显微镜（SEM），其获得粘附到半导体晶片的多个异物的各元素的组成比。 提供异物绘制部分，以根据通过SEM获得的结果获得多种异物的组成比的分布。 异物分类处理部根据分配对多个异物进行分类。 异物识别处理部将异物分类结果与预先存储在异物数据库中的数据进行比较，从而识别异物类型。