TFT FABRICATION PROCESS
    81.
    发明申请
    TFT FABRICATION PROCESS 有权
    TFT制造工艺

    公开(公告)号:US20060234430A1

    公开(公告)日:2006-10-19

    申请号:US11276634

    申请日:2006-03-08

    IPC分类号: H01L21/84 H01L21/31

    摘要: A process for fabricating a thin film transistor including: (a) depositing a semiconductor layer; and (b) depositing a multilayer gate dielectric prior to or subsequent to the depositing the semiconductor layer, wherein the multilayer dielectric comprises: (i) a first layer comprising a first material selected from the group consisting of an optionally substituted silsesquioxane, an optionally substituted silsesquioxane-metal oxide hybrid composition, an optionally substituted siloxane-metal oxide hybrid composition, and a mixture thereof, and (ii) a second layer in contact with the first layer, wherein the second layer comprises a second material, wherein the first layer is closer to the semiconductor layer than the second layer.

    摘要翻译: 一种制造薄膜晶体管的方法,包括:(a)沉积半导体层; 以及(b)在沉积半导体层之前或之后沉积多层栅极电介质,其中所述多层电介质包括:(i)第一层,其包含选自任选取代的倍半硅氧烷,任选取代的第一材料 倍半硅氧烷 - 金属氧化物杂化组合物,任选取代的硅氧烷 - 金属氧化物杂化组合物及其混合物,和(ii)与第一层接触的第二层,其中第二层包括第二材料,其中第一层为 比第二层更靠近半导体层。

    Multilayer gate dielectric
    82.
    发明申请
    Multilayer gate dielectric 审中-公开
    多层门电介质

    公开(公告)号:US20060231908A1

    公开(公告)日:2006-10-19

    申请号:US11104728

    申请日:2005-04-13

    IPC分类号: H01L29/94

    摘要: An electronic device composed of: a multilayer dielectric including: (i) a first layer composed of a first material selected from the group consisting of an optionally substituted silsesquioxane, an optionally substituted silsesquioxane-metal oxide hybrid composition, an optionally substituted siloxane-metal oxide hybrid composition, and a mixture thereof, and (ii) a second layer in contact with the first layer, wherein the second layer comprises a second material.

    摘要翻译: 一种电子器件,包括:多层电介质,其包括:(i)由选自任选取代的倍半硅氧烷,任选取代的倍半硅氧烷 - 金属氧化物杂化组合物,任选取代的硅氧烷 - 金属氧化物组成的组中的第一材料构成的第一层 杂化组合物及其混合物,和(ii)与第一层接触的第二层,其中第二层包含第二材料。

    Dielectric materials for electronic devices
    83.
    发明申请
    Dielectric materials for electronic devices 有权
    用于电子设备的电介质材料

    公开(公告)号:US20060097360A1

    公开(公告)日:2006-05-11

    申请号:US10982472

    申请日:2004-11-05

    IPC分类号: H01L23/58

    摘要: A dielectric material prepared from a siloxy/metal oxide hybrid composition, and electronic devices such as thin film transistors comprising such dielectric material are provided herein. The siloxy/metal oxide hybrid composition comprises a siloxy component such as, for example, a siloxane or silsesquioxane. The siloxy/metal oxide hybrid composition is useful for the preparation of dielectric layers for thin film transistors using solution deposition techniques

    摘要翻译: 本文提供由甲硅烷氧基/金属氧化物杂化组合物制备的电介质材料,以及包括这种介电材料的电子器件如薄膜晶体管。 甲硅烷氧基/金属氧化物杂化组合物包含甲硅烷氧基组分,例如硅氧烷或倍半硅氧烷。 甲硅烷氧基/金属氧化物杂化组合物可用于使用溶液沉积技术制备用于薄膜晶体管的电介质层

    Transistor insulator layer incorporating superfine ceramic particles
    86.
    发明授权
    Transistor insulator layer incorporating superfine ceramic particles 失效
    晶体管绝缘体层结合超细陶瓷颗粒

    公开(公告)号:US06586791B1

    公开(公告)日:2003-07-01

    申请号:US09619302

    申请日:2000-07-19

    IPC分类号: H01L2976

    摘要: An insulating layer in a field effect transistor is formed of superfine ceramic particles dispersed in a polymeric matrix. The characteristics of the insulating layer can be changed by varying the mix of ceramic particles and matrix components. Appropriate selection of components can provide a high dielectric constant material which is not subject to pinholes, has a high voltage breakdown and is chemically resistant. The material can be applied at relatively low processing temperatures, using a wide range of coating techniques, and is highly suited for use with polymeric substrates.

    摘要翻译: 场效应晶体管中的绝缘层由分散在聚合物基质中的超细陶瓷颗粒形成。 可以通过改变陶瓷颗粒和基质组分的混合来改变绝缘层的特性。 组件的适当选择可以提供不受针孔影响的高介电常数材料,具有高电压击穿并具有耐化学腐蚀性。 该材料可以在相对低的加工温度下使用,使用广泛的涂覆技术,并且非常适合用于聚合物基材。