PROBE PINS WITH ETCHED TIPS FOR ELECTRICAL DIE TEST

    公开(公告)号:US20170276700A1

    公开(公告)日:2017-09-28

    申请号:US15083082

    申请日:2016-03-28

    Abstract: A prober head to interface an E-testing apparatus to a device under test, which may be an unpackaged die, for example. In some embodiments, the prober head includes an array of conductive pins, each of the pins extending outwardly from a first pin end anchored to a substrate. At least a partial length of each of the pins is coated with a hydrophobic monolayer. The conductive pins may be composite metal wires including a core metal encased by one or more peripheral metal. At a tip of the pins, opposite the first pin end anchored to the substrate, the peripheral metals are recessed from the core metal. In further embodiments, the hydrophobic monolayer is disposed on an outer surface of the peripheral metals, but is substantially absent from a surface of the core metal exposed at the tip.

    PATTERNED ADHESIVE TAPE FOR BACKGRINDING PROCESSES
    5.
    发明申请
    PATTERNED ADHESIVE TAPE FOR BACKGRINDING PROCESSES 审中-公开
    用于背景加工的图案胶带

    公开(公告)号:US20130256909A1

    公开(公告)日:2013-10-03

    申请号:US13992511

    申请日:2011-09-08

    Abstract: The present disclosure relates to the field of fabricating microelectronic devices, wherein a microelectronic device substrate, such as a microelectronic wafer, may be thinned by a backgrinding process using a patterned adhesive tape that reduces slurry seepage and adhesive contamination. The patterned adhesive tape may comprise a base film and adhesive material patterned on the base film such that an edge or periphery portion of the microelectronic device substrate may contact the adhesive material, but substantially no adhesive material contacts interconnectors formed on the microelectronic device substrate.

    Abstract translation: 本公开涉及制造微电子器件的领域,其中微电子器件衬底(例如微电子晶片)可以通过使用减少浆液渗漏和粘合剂污染的图案化胶带的背面研磨工艺来减薄。 图案化的胶带可以包括在基膜上图案化的基膜和粘合剂材料,使得微电子器件基板的边缘或周边部分可以接触粘合剂材料,但是基本上没有粘合剂材料接触形成在微电子器件基板上的互连器。

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