公开(公告)号：US06927476B2

公开(公告)日：2005-08-09

申请号：US09962738

申请日：2001-09-25

申请人： Gregory G. Freeman ,  Seshadri Subbanna ,  Basanth Jagannathan ,  Kathryn T. Schonenberg ,  Shwu-Jen Jeng ,  Kenneth J. Stein ,  Jeffrey B. Johnson

发明人： Gregory G. Freeman ,  Seshadri Subbanna ,  Basanth Jagannathan ,  Kathryn T. Schonenberg ,  Shwu-Jen Jeng ,  Kenneth J. Stein ,  Jeffrey B. Johnson

IPC分类号： H01L21/331 ,  H01L29/10 ,  H01L29/737 ,  H01L27/082 ,  H01L27/102 ,  H01L29/70 ,  H01L31/11

CPC分类号： H01L29/66242 ,  H01L29/1004 ,  H01L29/7378

摘要： A raised extrinsic base, silicon germanium (SiGe) heterojunction bipolar transistor (HBT), and a method of making the same is disclosed herein. The heterojunction bipolar transistor includes a substrate, a silicon germanium layer formed on the substrate, a collector layer formed on the substrate, a raised extrinsic base layer formed on the silicon germanium layer, and an emitter layer formed on the silicon germanium layer. The silicon germanium layer forms a heterojunction between the emitter layer and the raised extrinsic base layer. The bipolar transistor further includes a base electrode formed on a portion of the raised extrinsic base layer, a collector electrode formed on a portion of the collector layer, and an emitter electrode formed on a portion of the emitter layer. Thus, the heterojunction bipolar transistor includes a self-aligned raised extrinsic base, a minimal junction depth, and minimal interstitial defects influencing the base width, all being formed with minimal thermal processing. The heterojunction bipolar transistor simultaneously improves three factors that affect the speed and performance of bipolar transistors: base width, base resistance, and base-collector capacitance.

摘要翻译： 本文公开了一种凸起的外在基极，硅锗（SiGe）异质结双极晶体管（HBT）及其制造方法。 异质结双极晶体管包括基板，形成在基板上的硅锗层，形成在基板上的集电极层，形成在硅锗层上的升高的非本征基极层和形成在硅锗层上的发射极层。 硅锗层在发射极层和凸起的非本征基极层之间形成异质结。 双极晶体管还包括形成在凸起的非本征基极层的一部分上的基极，在集电极层的一部分上形成的集电极，以及形成在发射极层的一部分上的发射极。 因此，异质结双极晶体管包括自对准凸起的外在基极，最小结深度以及影响基底宽度的最小间隙缺陷，全部以最小的热处理形成。 异质结双极晶体管同时改善了影响双极晶体管速度和性能的三个因素：基极宽度，基极电阻和基极集电极电容。

公开(公告)号：US06506656B2

公开(公告)日：2003-01-14

申请号：US09811859

申请日：2001-03-19

申请人： Gregory G. Freeman ,  Basanth Jagannathan ,  Shwu-Jen Jeng ,  Jeffrey B. Johnson

发明人： Gregory G. Freeman ,  Basanth Jagannathan ,  Shwu-Jen Jeng ,  Jeffrey B. Johnson

IPC分类号： H01L21331

CPC分类号： H01L29/66287 ,  H01L29/0821 ,  H01L29/36 ,  H01L29/66242

摘要： The present invention provides a unique device structure and method that provides increased transistor performance in integrated bipolar circuit devices. The preferred embodiment of the present invention provides improved high speed performance with a stepped collector dopant profile that reduces emitter-collector transit time and parasitic resistance with minimal increase in parasitic capacitances. The preferred stepped collector dopant profile includes a shallow implant and a deeper implant. The shallow implant reduces the base-collector space-charge region width, reduce resistance, and tailors the collector-base breakdown characteristics. The deeper implant links the buried collector to the subcollector and provides a low resistance path to the subcollector. The stepped collector dopant profile has minimal impact on the collector-base capacitance outside the intrinsic region of the device since the higher dopant is compensated by, or buried in, the extrinsic base dopants outside the intrinsic region.

公开(公告)号：US08633096B2

公开(公告)日：2014-01-21

申请号：US12943987

申请日：2010-11-11

申请人： Brian J. Greene ,  Jeffrey B. Johnson ,  Qingqing Liang ,  Edward P. Maciejewski

发明人： Brian J. Greene ,  Jeffrey B. Johnson ,  Qingqing Liang ,  Edward P. Maciejewski

IPC分类号： H01L29/72

CPC分类号： H01L29/66477 ,  H01L21/2253 ,  H01L21/26506 ,  H01L21/26513 ,  H01L21/2658 ,  H01L21/38 ,  H01L21/823807 ,  H01L21/823814 ,  H01L21/84 ,  H01L27/1203 ,  H01L29/66636 ,  H01L29/7848

摘要： A method of forming a transistor device includes implanting a diffusion inhibiting species in a semiconductor-on-insulator substrate comprising a bulk substrate, a buried insulator layer, and a semiconductor-on-insulator layer, the semiconductor-on-insulator substrate having one or more gate structures formed thereon such that the diffusion inhibiting species is disposed in portions of the semiconductor-on-insulator layer corresponding to a channel region, and disposed in portions of the buried insulator layer corresponding to source and drain regions. A transistor dopant species is introduced in the source and drain regions. An anneal is performed so as to diffuse the transistor dopant species in a substantially vertical direction while substantially preventing lateral diffusion of the transistor dopant species into the channel region.

公开(公告)号：US20130285211A1

公开(公告)日：2013-10-31

申请号：US13455732

申请日：2012-04-25

申请人： Robert J. Gauthier, JR. ,  Jeffrey B. Johnson ,  Junjun Li

发明人： Robert J. Gauthier, JR. ,  Jeffrey B. Johnson ,  Junjun Li

IPC分类号： H01L29/00 ,  G06F17/50 ,  H01L21/20

CPC分类号： H01L27/1211 ,  G06F17/5068 ,  H01L21/3086 ,  H01L21/845

摘要： Device structures, design structures, and fabrication methods for fin-type field-effect transistor integrated circuit technologies. First and second fins, which constitute electrodes of the device structure, are each comprised of a first semiconductor material. The second fin is formed adjacent to the first fin to define a gap separating the first and second fins. Positioned in the gap is a layer comprised of a second semiconductor material.

摘要翻译： 鳍式场效应晶体管集成电路技术的器件结构，设计结构和制造方法。 构成器件结构的电极的第一和第二鳍片均由第一半导体材料构成。 第二翅片邻近第一翅片形成以限定分隔第一和第二翅片的间隙。 位于间隙中的是由第二半导体材料构成的层。

公开(公告)号：US08569810B2

公开(公告)日：2013-10-29

申请号：US12961553

申请日：2010-12-07

申请人： Jian Yu ,  Jeffrey B. Johnson ,  Zhengwen Li ,  Chengwen Pei ,  Michael Hargrove

发明人： Jian Yu ,  Jeffrey B. Johnson ,  Zhengwen Li ,  Chengwen Pei ,  Michael Hargrove

IPC分类号： H01L29/76 ,  H01L29/94 ,  H01L31/062 ,  H01L31/113 ,  H01L31/119

CPC分类号： H01L29/66477 ,  H01L21/28518 ,  H01L21/76814 ,  H01L21/76831 ,  H01L23/485 ,  H01L29/495 ,  H01L29/4966 ,  H01L29/517 ,  H01L29/518 ,  H01L29/66545 ,  H01L2924/0002 ,  H01L2924/00

摘要： A method of forming a semiconductor device is provided that includes forming a gate structure on a channel portion of a semiconductor substrate, forming an interlevel dielectric layer over the gate structure, and forming a opening through the interlevel dielectric layer to an exposed surface of the semiconductor substrate containing at least one of the source region and the drain region. A metal semiconductor alloy contact is formed on the exposed surface of the semiconductor substrate. At least one dielectric sidewall spacer is formed on sidewalls of the opening. An interconnect is formed within the opening in direct contact with the metal semiconductor alloy contact.

公开(公告)号：US08536649B2

公开(公告)日：2013-09-17

申请号：US13608860

申请日：2012-09-10

申请人： Geng Wang ,  Joseph Ervin ,  Jeffrey B. Johnson ,  Paul C. Parries

发明人： Geng Wang ,  Joseph Ervin ,  Jeffrey B. Johnson ,  Paul C. Parries

IPC分类号： H01L29/66

CPC分类号： H01L29/66772 ,  H01L21/2652 ,  H01L29/78696

摘要： The present disclosure provides a semiconductor device that may include a substrate including a semiconductor layer overlying an insulating layer. A gate structure that is present on a channel portion of the semiconductor layer. A first dopant region is present in the channel portion of the semiconductor layer, in which the peak concentration of the first dopant region is present within the lower portion of the gate conductor and the upper portion of the semiconductor layer. A second dopant region is present in the channel portion of the semiconductor layer, in which the peak concentration of the second dopant region is present within the lower portion of the semiconductor layer.

摘要翻译： 本公开提供了一种半导体器件，其可以包括包括覆盖绝缘层的半导体层的衬底。 存在于半导体层的沟道部分上的栅极结构。 第一掺杂区存在于半导体层的沟道部分中，其中第一掺杂区的峰值浓度存在于栅极导体的下部和半导体层的上部之间。 第二掺杂剂区域存在于半导体层的沟道部分中，其中第二掺杂剂区域的峰值浓度存在于半导体层的下部。

公开(公告)号：US08407656B2

公开(公告)日：2013-03-26

申请号：US13167826

申请日：2011-06-24

申请人： Terence B. Hook ,  Jeffrey B. Johnson

发明人： Terence B. Hook ,  Jeffrey B. Johnson

IPC分类号： G06F17/50

CPC分类号： G06F17/5068 ,  H01L23/544 ,  H01L29/1083 ,  H01L29/7833 ,  H01L2223/5444 ,  H03K3/84

摘要： Disclosed are a design method and structure for a transistor having a relatively large threshold voltage (Vt) variation range due to exacerbated random dopant fluctuation (RDF). Exacerbated RDF and, thereby a relatively large Vt variation range, is achieved through the use of complementary doping in one or more transistor components and/or through lateral dopant non-uniformity between the channel region and any halo regions. Also disclosed are a design method and structure for a random number generator, which incorporates multiple pairs of essentially identical transistors having such a large Vt variation and which relies on Vt mismatch in pairs of those the transistors to generate a multi-bit output (e.g., a unique identifier for a chip or a secret key). By widening the Vt variation range of the transistors in the random number generator, detecting Vt mismatch between transistors becomes more likely and the resulting multi-bit output will be more stable.

摘要翻译： 公开了由于加剧的随机掺杂剂波动（RDF）而具有相对大的阈值电压（Vt）变化范围的晶体管的设计方法和结构。 通过在一个或多个晶体管组件中使用互补掺杂和/或通过沟道区域和任何晕圈区域之间的横向掺杂剂不均匀性来实现RDF的恶化，从而达到相对较大的Vt变化范围。 还公开了一种用于随机数发生器的设计方法和结构，该方法和结构包括具有如此大的Vt变化的多对基本相同的晶体管，并且其依赖于晶体管对的Vt失配以产生多位输出（例如， 芯片或密钥的唯一标识符）。 通过扩大随机数发生器中的晶体管的Vt变化范围，检测晶体管之间的Vt失配变得更可能，并且所得到的多位输出将更加稳定。

公开(公告)号：US20130015580A1

公开(公告)日：2013-01-17

申请号：US13180842

申请日：2011-07-12

申请人： SAMEER H JAIN ,  Jeffrey B. Johnson ,  Ying Li ,  Hasan M. Nayfeh ,  Ravikumar Ramachandran

发明人： SAMEER H JAIN ,  Jeffrey B. Johnson ,  Ying Li ,  Hasan M. Nayfeh ,  Ravikumar Ramachandran

IPC分类号： H01L29/423 ,  H01L21/28

CPC分类号： H01L29/66545 ,  H01L21/28088 ,  H01L21/28167 ,  H01L21/823807 ,  H01L21/823842 ,  H01L21/823857 ,  H01L21/823864 ,  H01L29/165 ,  H01L29/4966 ,  H01L29/513 ,  H01L29/517 ,  H01L29/665 ,  H01L29/6659 ,  H01L29/66636 ,  H01L29/7843

摘要： A replacement metal gate structure and methods of manufacturing the same is provided. The method includes forming at least one trench structure and forming a liner of high-k dielectric material in the at least one trench structure. The method further includes adjusting a height of the liner of high-k dielectric material. The method further includes forming at least one workfunction metal over the liner, and forming a metal gate structure in the at least one trench structure, over the at least one workfunction metal and the liner of high-k dielectric material.

摘要翻译： 提供替代的金属栅极结构及其制造方法。 所述方法包括形成至少一个沟槽结构并在所述至少一个沟槽结构中形成高k电介质材料的衬垫。 该方法还包括调整高k电介质材料的衬垫的高度。 所述方法还包括在所述衬垫上形成至少一个功函数金属，以及在所述至少一个功函数金属和所述高k电介质材料的衬垫上，在所述至少一个沟槽结构中形成金属栅极结构。

公开(公告)号：US08338265B2

公开(公告)日：2012-12-25

申请号：US12269069

申请日：2008-11-12

申请人： Douglas D. Coolbaugh ,  Jeffrey B. Johnson ,  Peter J. Lindgren ,  Xuefeng Liu ,  James S. Nakos ,  Bradley A. Orner ,  Robert M. Rassel ,  David C. Sheridan

发明人： Douglas D. Coolbaugh ,  Jeffrey B. Johnson ,  Peter J. Lindgren ,  Xuefeng Liu ,  James S. Nakos ,  Bradley A. Orner ,  Robert M. Rassel ,  David C. Sheridan

IPC分类号： H01L21/76

CPC分类号： H01L21/743 ,  H01L21/28518 ,  H01L21/76224 ,  H01L21/8249 ,  H01L27/0623 ,  H01L29/41 ,  H01L2924/0002 ,  H01L2924/00

摘要： A trench contact silicide is formed on an inner wall of a contact trench that reaches to a buried conductive layer in a semiconductor substrate to reduce parasitic resistance of a reachthrough structure. The trench contact silicide is formed at the bottom, on the sidewalls of the trench, and on a portion of the top surface of the semiconductor substrate. The trench is subsequently filled with a middle-of-line (MOL) dielectric. A contact via may be formed on the trench contact silicide. The trench contact silicide may be formed through a single silicidation reaction with a metal layer or through multiple silicidation reactions with multiple metal layers.

摘要翻译： 沟槽接触硅化物形成在接触沟槽的内壁上，该接触沟槽的内壁到达半导体衬底中的掩埋导电层，以减小通孔结构的寄生电阻。 沟槽接触硅化物形成在底部，沟槽的侧壁上以及在半导体衬底的顶表面的一部分上。 沟槽随后填充有中间线（MOL）电介质。 可以在沟槽接触硅化物上形成接触通孔。 沟槽接触硅化物可以通过与金属层的单一硅化反应或通过与多个金属层的多次硅化反应形成。

公开(公告)号：US20120181549A1

公开(公告)日：2012-07-19

申请号：US13009029

申请日：2011-01-19

申请人： Jeffrey B. Johnson ,  Ramachandran Muralidhar ,  Philip J. Oldiges ,  Viorel Ontalus ,  Kai Xiu

发明人： Jeffrey B. Johnson ,  Ramachandran Muralidhar ,  Philip J. Oldiges ,  Viorel Ontalus ,  Kai Xiu

IPC分类号： H01L29/161 ,  H01L29/78 ,  H01L21/336

CPC分类号： H01L29/7848 ,  H01L29/0847 ,  H01L29/165 ,  H01L29/66636 ,  H01L29/78

摘要： A method for forming a stressed channel field effect transistor (FET) with source/drain buffers includes etching cavities in a substrate on either side of a gate stack located on the substrate; depositing source/drain buffer material in the cavities; etching the source/drain buffer material to form vertical source/drain buffers adjacent to a channel region of the FET; and depositing source/drain stressor material in the cavities adjacent to and over the vertical source/drain buffers.

摘要翻译： 用于形成具有源极/漏极缓冲器的应力通道场效应晶体管（FET）的方法包括在位于衬底上的栅极堆叠的任一侧上的衬底中的蚀刻腔; 在空腔中沉积源极/漏极缓冲材料; 蚀刻源极/漏极缓冲材料以形成与FET的沟道区相邻的垂直源极/漏极缓冲器; 以及将源极/漏极应力源材料沉积在与垂直源极/漏极缓冲器相邻并在其上方的空腔中。