公开(公告)号：US08035231B2

公开(公告)日：2011-10-11

申请号：US12114238

申请日：2008-05-02

申请人： Yoichiro Kurita ,  Masaya Kawano ,  Koji Soejima

发明人： Yoichiro Kurita ,  Masaya Kawano ,  Koji Soejima

IPC分类号： H01L23/48

CPC分类号： H01L23/3128 ,  H01L21/563 ,  H01L21/6835 ,  H01L23/481 ,  H01L23/49816 ,  H01L23/49822 ,  H01L24/81 ,  H01L25/0655 ,  H01L25/0657 ,  H01L2221/68345 ,  H01L2221/68359 ,  H01L2221/68363 ,  H01L2224/16145 ,  H01L2224/16146 ,  H01L2224/16225 ,  H01L2224/16235 ,  H01L2224/17181 ,  H01L2224/32145 ,  H01L2224/32225 ,  H01L2224/73203 ,  H01L2224/73204 ,  H01L2224/81005 ,  H01L2224/8121 ,  H01L2224/81815 ,  H01L2224/83005 ,  H01L2224/83051 ,  H01L2225/06513 ,  H01L2225/06517 ,  H01L2225/06541 ,  H01L2225/06572 ,  H01L2225/06582 ,  H01L2225/06586 ,  H01L2924/00011 ,  H01L2924/00014 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/14 ,  H01L2924/15192 ,  H01L2924/15311 ,  H01L2924/18161 ,  H01L2924/19041 ,  H05K3/4644 ,  H05K3/4676 ,  H05K3/4688 ,  Y10T29/4913 ,  H01L2924/00 ,  H01L2224/0401

摘要： The semiconductor device 1 includes interconnect layers 10, 20, an IC chip 30, via plugs 42, 44, a seal resin 50, and solder balls 60. The interconnect layer 10 includes a via plug 42. An end face of the via plug 42 on the side of the interconnect layer 20 is smaller in area than the opposite end face, i.e. the end face on the side of the IC chip 30. An end face of the via plug 44 on the side of the interconnect layer 10 is smaller in area than the opposite end face, i.e. the end face on the side of the solder balls 60. The thermal decomposition temperature of the insulating resin 14 constituting the interconnect layer 10 is higher than that of the insulating resin 24 constituting the interconnect layer 20.

摘要翻译： 半导体器件1包括互连层10,20，IC芯片30，经由插头42,44，密封树脂50和焊球60.互连层10包括通孔塞42.通孔插塞42的端面 在互连层20一侧的面积比相对端面即IC芯片30一侧的端面的面积小。在互连层10一侧的通路插塞44的端面较小 构成互连层10的绝缘树脂14的热分解温度高于构成互连层20的绝缘树脂24的热分解温度。

公开(公告)号：US07928001B2

公开(公告)日：2011-04-19

申请号：US11865750

申请日：2007-10-02

申请人： Yoichiro Kurita ,  Koji Soejima ,  Masaya Kawano

发明人： Yoichiro Kurita ,  Koji Soejima ,  Masaya Kawano

IPC分类号： H01L21/4763

CPC分类号： H01L23/3128 ,  H01L21/4857 ,  H01L21/6835 ,  H01L23/3135 ,  H01L23/5389 ,  H01L25/0652 ,  H01L25/18 ,  H01L2221/68345 ,  H01L2224/0554 ,  H01L2224/05573 ,  H01L2224/13025 ,  H01L2224/16145 ,  H01L2224/16146 ,  H01L2224/16225 ,  H01L2224/17181 ,  H01L2224/32145 ,  H01L2224/32225 ,  H01L2224/73204 ,  H01L2224/73253 ,  H01L2224/81005 ,  H01L2224/83005 ,  H01L2225/06565 ,  H01L2924/00014 ,  H01L2924/01079 ,  H01L2924/09701 ,  H01L2924/15192 ,  H01L2924/15311 ,  H01L2924/15321 ,  H01L2924/18161 ,  H01L2924/19041 ,  H01L2924/19105 ,  H05K3/0058 ,  H05K3/284 ,  H05K3/4682 ,  H05K2201/0195 ,  H05K2201/09527 ,  H05K2201/096 ,  H05K2201/09972 ,  H05K2203/016 ,  H05K2203/0733 ,  H05K2203/1469 ,  H01L2924/00 ,  H01L2224/05599 ,  H01L2224/0555 ,  H01L2224/0556

摘要： The electronic device includes a first interconnect layer and a second interconnect layer. The second interconnect layer is provided on the lower surface of the first interconnect layer. The first interconnect layer includes a via plug (first conductive plug). An end face of the via plug on the side of the second interconnect layer is smaller in area than the opposite end face. The via plug is exposed on the surface of the first interconnect layer facing the second interconnect layer. An insulating resin forming the first interconnect layer is higher in thermal decomposition temperature than an insulating resin forming the second interconnect layer.

摘要翻译： 电子设备包括第一互连层和第二互连层。 第二互连层设置在第一互连层的下表面上。 第一互连层包括通孔插头（第一导电插头）。 通孔塞在第二互连层一侧的端面的面积小于相对端面。 通孔插头暴露在面向第二互连层的第一互连层的表面上。 形成第一互连层的绝缘树脂的热分解温度高于形成第二互连层的绝缘树脂。

公开(公告)号：US07759786B2

公开(公告)日：2010-07-20

申请号：US11543079

申请日：2006-10-05

申请人： Yoichiro Kurita ,  Koji Soejima ,  Masaya Kawano

发明人： Yoichiro Kurita ,  Koji Soejima ,  Masaya Kawano

IPC分类号： H01L23/12

CPC分类号： H01L23/3128 ,  H01L21/563 ,  H01L21/6835 ,  H01L24/11 ,  H01L24/12 ,  H01L24/16 ,  H01L24/29 ,  H01L24/81 ,  H01L2221/68345 ,  H01L2224/1147 ,  H01L2224/13099 ,  H01L2224/13111 ,  H01L2224/16145 ,  H01L2224/16225 ,  H01L2224/29111 ,  H01L2224/2919 ,  H01L2224/32225 ,  H01L2224/73104 ,  H01L2224/73203 ,  H01L2224/73204 ,  H01L2224/81191 ,  H01L2224/81203 ,  H01L2224/8182 ,  H01L2224/83191 ,  H01L2224/83856 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01013 ,  H01L2924/01015 ,  H01L2924/01029 ,  H01L2924/01033 ,  H01L2924/01046 ,  H01L2924/01047 ,  H01L2924/0105 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/0132 ,  H01L2924/0133 ,  H01L2924/014 ,  H01L2924/14 ,  H01L2924/15311 ,  H01L2924/1532 ,  H01L2924/18161 ,  H01L2924/00 ,  H01L2924/00014 ,  H01L2924/0695

摘要： An insulating layer 12 is formed as a surface layer of electronic circuit chip 10. A conductor interconnect 14 is formed in the insulating layer 12. The conductor interconnect 14 is exposed in the surface of the insulating layer 12. A solder wetting metallic film 16 (a metallic film) is formed on a portion of the conductor interconnect 14 to be exposed in the surface of the insulating layer 12. Typical metallic material (second metallic material) available for composing the solder wetting metallic film 16 includes a material that requires higher free energy for forming an oxide thereof, as compared with a free energy required for forming an oxide of the metallic material composing the conductor interconnect 14.

摘要翻译： 形成绝缘层12作为电子电路芯片10的表面层。导体互连14形成在绝缘层12中。导体互连14暴露在绝缘层12的表面中。焊料润湿金属膜16 金属膜）形成在导体互连14的一部分上以暴露在绝缘层12的表面中。可用于组成焊料润湿金属膜16的典型金属材料（第二金属材料）包括需要较高自由度的材料 与用于形成构成导体互连14的金属材料的氧化物所需的自由能相比，形成其氧化物的能量。

公开(公告)号：US07656046B2

公开(公告)日：2010-02-02

申请号：US11543207

申请日：2006-10-05

申请人： Yoichiro Kurita ,  Koji Soejima ,  Masaya Kawano

发明人： Yoichiro Kurita ,  Koji Soejima ,  Masaya Kawano

IPC分类号： H01L23/28

CPC分类号： H01L21/6835 ,  H01L21/563 ,  H01L21/568 ,  H01L23/3128 ,  H01L23/3142 ,  H01L23/49816 ,  H01L23/49838 ,  H01L24/32 ,  H01L24/48 ,  H01L24/73 ,  H01L2221/68345 ,  H01L2224/16225 ,  H01L2224/16227 ,  H01L2224/32057 ,  H01L2224/32225 ,  H01L2224/48091 ,  H01L2224/48227 ,  H01L2224/48465 ,  H01L2224/73203 ,  H01L2224/73204 ,  H01L2224/73265 ,  H01L2224/81001 ,  H01L2224/83385 ,  H01L2924/00014 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01029 ,  H01L2924/01033 ,  H01L2924/01078 ,  H01L2924/01082 ,  H01L2924/10253 ,  H01L2924/15311 ,  H01L2924/181 ,  H01L2924/18301 ,  H01L2924/00012 ,  H01L2924/00 ,  H01L2224/45099 ,  H01L2224/45015 ,  H01L2924/207

摘要： A semiconductor device 1 is a semiconductor device of the BGA type, and includes a semiconductor chip 10, a resin layer 20, an insulating layer 30, and an external electrode pad 40. The resin layer 20 is constituted by a sealing resin 22 and an underfill resin 24, and covers the semiconductor chip 10. The insulating layer 30 is formed on the resin layer 20. The external electrode pad 40 is formed in the insulating layer 30. This external electrode pad 40 extends through the insulating layer 30. One surface S1 of the external electrode pad 40 is exposed in the surface of the insulating layer 30, and the other surface S2 is located in the resin layer 20. A concave portion 45 is formed in the surface S2 of the external electrode pad 40. The resin composing the resin layer 20 enters into the concave portion 45.

摘要翻译： 半导体器件1是BGA型的半导体器件，包括半导体芯片10，树脂层20，绝缘层30和外部电极焊盘40.树脂层20由密封树脂22和 底部填充树脂24并且覆盖半导体芯片10.绝缘层30形成在树脂层20上。外部电极焊盘40形成在绝缘层30中。该外部电极焊盘40延伸穿过绝缘层30.一个表面 外部电极焊盘40的S1被暴露在绝缘层30的表面中，另一个表面S2位于树脂层20中。在外部电极焊盘40的表面S2中形成有凹部45。 构成树脂层20进入凹部45。

公开(公告)号：US20090273092A1

公开(公告)日：2009-11-05

申请号：US12505011

申请日：2009-07-17

申请人： Yoichiro Kurita ,  Koji Soejima ,  Masaya Kawano

发明人： Yoichiro Kurita ,  Koji Soejima ,  Masaya Kawano

IPC分类号： H01L23/498

CPC分类号： H01L21/6835 ,  H01L21/4853 ,  H01L21/568 ,  H01L23/3128 ,  H01L23/49816 ,  H01L23/5389 ,  H01L24/16 ,  H01L24/83 ,  H01L24/90 ,  H01L24/97 ,  H01L2221/68345 ,  H01L2224/04105 ,  H01L2224/05571 ,  H01L2224/05573 ,  H01L2224/12105 ,  H01L2224/13147 ,  H01L2224/16225 ,  H01L2224/16235 ,  H01L2224/2919 ,  H01L2224/32225 ,  H01L2224/73204 ,  H01L2224/81005 ,  H01L2224/83192 ,  H01L2224/838 ,  H01L2224/97 ,  H01L2924/00014 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01015 ,  H01L2924/01029 ,  H01L2924/01033 ,  H01L2924/01055 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/014 ,  H01L2924/0665 ,  H01L2924/15174 ,  H01L2924/15184 ,  H01L2924/15192 ,  H01L2924/15311 ,  H01L2924/1532 ,  H01L2924/00 ,  H01L2924/3512 ,  H01L2224/05599

摘要： In a method for manufacturing a semiconductor module, a metal layer is formed on a support substrate. Then, first conductive posts and a first insulating layer are formed on the metal layer. The first insulating layer surrounds the sides of the first conductive posts. Then, second conductive posts are formed above the first conductive posts. The second conductive posts are electrically connected to the first conductive posts. Then, a second insulating layer is formed so as to cover the second conductive posts. The second insulating layer is made of adhesive resin. Finally, a semiconductor device is adhered to the second conductive posts by the second insulating layer while a gap between the first semiconductor device and the first insulating layer is sealed by the second insulating layer.

摘要翻译： 在半导体模块的制造方法中，在支撑基板上形成金属层。 然后，在金属层上形成第一导电柱和第一绝缘层。 第一绝缘层围绕第一导电柱的侧面。 然后，在第一导电柱上形成第二导电柱。 第二导电柱电连接到第一导电柱。 然后，形成第二绝缘层以覆盖第二导电柱。 第二绝缘层由粘合树脂制成。 最后，通过第二绝缘层将半导体器件粘附到第二导电柱，同时第一半导体器件和第一绝缘层之间的间隙被第二绝缘层密封。

公开(公告)号：US20080136020A1

公开(公告)日：2008-06-12

申请号：US11790155

申请日：2007-04-24

申请人： Koji Soejima ,  Yoichiro Kurita ,  Masaya Kawano ,  Shintaro Yamamichi ,  Katsumi Kikuchi

发明人： Koji Soejima ,  Yoichiro Kurita ,  Masaya Kawano ,  Shintaro Yamamichi ,  Katsumi Kikuchi

IPC分类号： H01L23/488 ,  H01L21/44

CPC分类号： H01L21/563 ,  H01L21/6835 ,  H01L24/81 ,  H01L25/0657 ,  H01L2221/68345 ,  H01L2224/0554 ,  H01L2224/05568 ,  H01L2224/05573 ,  H01L2224/1147 ,  H01L2224/131 ,  H01L2224/16225 ,  H01L2224/16235 ,  H01L2224/32225 ,  H01L2224/73203 ,  H01L2224/73204 ,  H01L2224/8121 ,  H01L2224/81815 ,  H01L2225/06572 ,  H01L2225/06586 ,  H01L2924/00013 ,  H01L2924/00014 ,  H01L2924/01021 ,  H01L2924/01046 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/15311 ,  H01L2924/014 ,  H01L2224/13099 ,  H01L2924/00 ,  H01L2224/05599 ,  H01L2224/0555 ,  H01L2224/0556

摘要： A first electronic circuit component and a second electronic circuit component are electrically connected to an electro-conductive member via a first solder and a second solder, respectively. The electro-conductive member is formed in a resin film. The electro-conductive member is configured as containing a second diffusion barrier metal film. The second diffusion barrier metal film prevents diffusion of the second solder. Between the electro-conductive member and the first solder, a first diffusion barrier metal film is provided. The first diffusion barrier metal film prevents diffusion of the first solder. On the first surface of the resin film and on the electro-conductive member, an adhesive metal film is formed so as to contact with the resin film and the electro-conductive member. The adhesive metal film has stronger adhesiveness to the resin film than either of those of the first solder and the first diffusion barrier metal film.

摘要翻译： 第一电子电路部件和第二电子电路部件分别经由第一焊料和第二焊料电连接到导电部件。 导电构件形成在树脂膜中。 导电构件被构造成包含第二扩散阻挡金属膜。 第二扩散阻挡金属膜防止第二焊料的扩散。 在导电构件和第一焊料之间设置有第一扩散阻挡金属膜。 第一扩散阻挡金属膜防止第一焊料的扩散。 在树脂膜的第一表面和导电部件上形成粘接金属膜，以与树脂膜和导电部件接触。 粘合金属膜比第一焊料和第一扩散阻挡金属膜中的任一种具有比树脂膜更强的粘附性。

公开(公告)号：US20080079163A1

公开(公告)日：2008-04-03

申请号：US11865745

申请日：2007-10-02

申请人： Yoichiro Kurita ,  Masaya Kawano ,  Koji Soejima

发明人： Yoichiro Kurita ,  Masaya Kawano ,  Koji Soejima

IPC分类号： H01L23/52 ,  H01L21/4763

CPC分类号： H01L25/50 ,  H01L21/568 ,  H01L21/6835 ,  H01L23/13 ,  H01L23/3121 ,  H01L23/49816 ,  H01L23/522 ,  H01L23/5226 ,  H01L23/5383 ,  H01L23/5384 ,  H01L23/5386 ,  H01L24/02 ,  H01L24/16 ,  H01L25/0652 ,  H01L25/0657 ,  H01L25/16 ,  H01L25/18 ,  H01L2221/68345 ,  H01L2221/68372 ,  H01L2224/02319 ,  H01L2224/02331 ,  H01L2224/02333 ,  H01L2224/02372 ,  H01L2224/02373 ,  H01L2224/02379 ,  H01L2224/02381 ,  H01L2224/16137 ,  H01L2224/16146 ,  H01L2224/16225 ,  H01L2224/16235 ,  H01L2224/16238 ,  H01L2224/17181 ,  H01L2224/32145 ,  H01L2224/32225 ,  H01L2224/73204 ,  H01L2224/81005 ,  H01L2224/83005 ,  H01L2225/06513 ,  H01L2225/06544 ,  H01L2225/06555 ,  H01L2225/06582 ,  H01L2924/00011 ,  H01L2924/00014 ,  H01L2924/01079 ,  H01L2924/09701 ,  H01L2924/12042 ,  H01L2924/14 ,  H01L2924/15192 ,  H01L2924/15311 ,  H01L2924/1532 ,  H01L2924/18161 ,  H01L2924/19015 ,  H01L2924/19041 ,  H01L2924/19105 ,  H05K3/0058 ,  H05K3/284 ,  H05K3/4682 ,  H05K2201/0195 ,  H05K2201/09527 ,  H05K2201/096 ,  H05K2201/09972 ,  H05K2203/016 ,  H05K2203/0733 ,  H05K2203/1469 ,  H01L2924/00 ,  H01L2224/0401

摘要： In a conventional electronic device and a method of manufacturing the same, reduction in cost of the electronic device is hindered because resin used in an interconnect layer on the solder ball side is limited. The electronic device includes an interconnect layer (a first interconnect layer) and an interconnect layer (a second interconnect layer). The second interconnect layer is formed on the undersurface of the first interconnect layer. The second interconnect layer is larger in area seen from the top than the first interconnect layer and is extended to the outside from the first interconnect layer.

摘要翻译： 在传统的电子设备及其制造方法中，由于在焊球侧的互连层中使用的树脂受到限制，妨碍了电子设备的成本的降低。 电子设备包括互连层（第一互连层）和互连层（第二互连层）。 第二互连层形成在第一互连层的下表面上。 第二互连层的面积比第一互连层的面积大，并且从第一互连层延伸到外部。

公开(公告)号：US08354340B2

公开(公告)日：2013-01-15

申请号：US11865745

申请日：2007-10-02

申请人： Yoichiro Kurita ,  Masaya Kawano ,  Koji Soejima

发明人： Yoichiro Kurita ,  Masaya Kawano ,  Koji Soejima

IPC分类号： H01L21/4763 ,  H01L23/48 ,  H01L23/52 ,  H01L29/40

CPC分类号： H01L25/50 ,  H01L21/568 ,  H01L21/6835 ,  H01L23/13 ,  H01L23/3121 ,  H01L23/49816 ,  H01L23/522 ,  H01L23/5226 ,  H01L23/5383 ,  H01L23/5384 ,  H01L23/5386 ,  H01L24/02 ,  H01L24/16 ,  H01L25/0652 ,  H01L25/0657 ,  H01L25/16 ,  H01L25/18 ,  H01L2221/68345 ,  H01L2221/68372 ,  H01L2224/02319 ,  H01L2224/02331 ,  H01L2224/02333 ,  H01L2224/02372 ,  H01L2224/02373 ,  H01L2224/02379 ,  H01L2224/02381 ,  H01L2224/16137 ,  H01L2224/16146 ,  H01L2224/16225 ,  H01L2224/16235 ,  H01L2224/16238 ,  H01L2224/17181 ,  H01L2224/32145 ,  H01L2224/32225 ,  H01L2224/73204 ,  H01L2224/81005 ,  H01L2224/83005 ,  H01L2225/06513 ,  H01L2225/06544 ,  H01L2225/06555 ,  H01L2225/06582 ,  H01L2924/00011 ,  H01L2924/00014 ,  H01L2924/01079 ,  H01L2924/09701 ,  H01L2924/12042 ,  H01L2924/14 ,  H01L2924/15192 ,  H01L2924/15311 ,  H01L2924/1532 ,  H01L2924/18161 ,  H01L2924/19015 ,  H01L2924/19041 ,  H01L2924/19105 ,  H05K3/0058 ,  H05K3/284 ,  H05K3/4682 ,  H05K2201/0195 ,  H05K2201/09527 ,  H05K2201/096 ,  H05K2201/09972 ,  H05K2203/016 ,  H05K2203/0733 ,  H05K2203/1469 ,  H01L2924/00 ,  H01L2224/0401

摘要： In a conventional electronic device and a method of manufacturing the same, reduction in cost of the electronic device is hindered because resin used in an interconnect layer on the solder ball side is limited. The electronic device includes an interconnect layer (a first interconnect layer) and an interconnect layer (a second interconnect layer). The second interconnect layer is formed on the undersurface of the first interconnect layer. The second interconnect layer is larger in area seen from the top than the first interconnect layer and is extended to the outside from the first interconnect layer.

摘要翻译： 在传统的电子设备及其制造方法中，由于在焊球侧的互连层中使用的树脂受到限制，妨碍了电子设备的成本的降低。 电子设备包括互连层（第一互连层）和互连层（第二互连层）。 第二互连层形成在第一互连层的下表面上。 第二互连层的面积比第一互连层的面积大，并且从第一互连层延伸到外部。

公开(公告)号：US07598117B2

公开(公告)日：2009-10-06

申请号：US11580869

申请日：2006-10-16

申请人： Yoichiro Kurita ,  Koji Soejima ,  Masaya Kawano

发明人： Yoichiro Kurita ,  Koji Soejima ,  Masaya Kawano

IPC分类号： H01L21/50 ,  H01L21/48 ,  H01L21/44

CPC分类号： H01L21/6835 ,  H01L21/4853 ,  H01L21/568 ,  H01L23/3128 ,  H01L23/49816 ,  H01L23/5389 ,  H01L24/16 ,  H01L24/83 ,  H01L24/90 ,  H01L24/97 ,  H01L2221/68345 ,  H01L2224/05571 ,  H01L2224/05573 ,  H01L2224/13147 ,  H01L2224/16225 ,  H01L2224/16235 ,  H01L2224/2919 ,  H01L2224/32225 ,  H01L2224/73204 ,  H01L2224/81005 ,  H01L2224/83192 ,  H01L2224/838 ,  H01L2224/97 ,  H01L2924/00014 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01015 ,  H01L2924/01029 ,  H01L2924/01033 ,  H01L2924/01055 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/014 ,  H01L2924/0665 ,  H01L2924/15174 ,  H01L2924/15184 ,  H01L2924/15192 ,  H01L2924/15311 ,  H01L2924/1532 ,  H01L2924/00 ,  H01L2924/3512 ,  H01L2224/05599

摘要： In a method for manufacturing a semiconductor module, a metal layer is formed on a support substrate. Then, first conductive posts and a first insulating layer are formed on the metal layer. The first insulating layer surrounds the sides of the first conductive posts. Then, second conductive posts are formed above the first conductive posts. The second conductive posts are electrically connected to the first conductive posts. Then, a second insulating layer is formed so as to cover the second conductive posts. The second insulating layer is made of adhesive resin. Finally, a semiconductor device is adhered to the second conductive posts by the second insulating layer while a gap between the first semiconductor device and the first insulating layer is sealed by the second insulating layer.

摘要翻译： 在半导体模块的制造方法中，在支撑基板上形成金属层。 然后，在金属层上形成第一导电柱和第一绝缘层。 第一绝缘层包围第一导电柱的侧面。 然后，在第一导电柱上形成第二导电柱。 第二导电柱电连接到第一导电柱。 然后，形成第二绝缘层以覆盖第二导电柱。 第二绝缘层由粘合树脂制成。 最后，通过第二绝缘层将半导体器件粘附到第二导电柱，同时第一半导体器件和第一绝缘层之间的间隙被第二绝缘层密封。

公开(公告)号：US07538022B2

公开(公告)日：2009-05-26

申请号：US11528422

申请日：2006-09-28

申请人： Yoichiro Kurita ,  Koji Soejima ,  Masaya Kawano

发明人： Yoichiro Kurita ,  Koji Soejima ,  Masaya Kawano

IPC分类号： H01L21/44 ,  H01L21/4763 ,  H01L21/00

CPC分类号： H01L23/3128 ,  H01L21/563 ,  H01L21/6835 ,  H01L24/28 ,  H01L24/81 ,  H01L2221/68345 ,  H01L2224/16225 ,  H01L2224/32225 ,  H01L2224/73203 ,  H01L2224/73204 ,  H01L2224/75252 ,  H01L2224/81054 ,  H01L2224/81193 ,  H01L2224/81203 ,  H01L2224/81801 ,  H01L2224/83102 ,  H01L2224/92125 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01024 ,  H01L2924/01029 ,  H01L2924/01033 ,  H01L2924/01046 ,  H01L2924/01047 ,  H01L2924/0105 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/014 ,  H01L2924/15311 ,  H01L2924/181 ,  H01L2924/19041 ,  H01L2924/19043 ,  H01L2924/00 ,  H01L2924/00012

摘要： The method of manufacturing an electronic circuit device according to an embodiment of the present invention includes preparing an interconnect substrate 10 including an interconnect 14 and an electrode pad 16 integrally formed with the interconnect 14; preparing an electronic circuit chip 20 including a solder electrode 22; and melting the solder electrode 22 and connecting it to the electrode pad 16, thus connecting the interconnect substrate 10 and the electronic circuit chip 20. A first metal material, exposed in the surface of the electrode pad 16 opposite to an insulating resin layer 12 and constituting the electrode pad 16, has higher free energy for forming an oxide than a second metal material exposed in the surface of the interconnect 14 opposite to the insulating resin layer 12 and constituting the interconnect 14.

摘要翻译： 根据本发明的实施例的制造电子电路器件的方法包括制备包括互连14的互连衬底10和与互连14一体形成的电极焊盘16; 制备包括焊料电极22的电子电路芯片20; 并且熔化焊料电极22并将其连接到电极焊盘16，从而连接互连基板10和电子电路芯片20.暴露在与绝缘树脂层12相对的电极焊盘16的表面中的第一金属材料和 构成电极焊盘16的自由能比暴露在与绝缘树脂层12相对的互连件14的表面中的第二金属材料形成氧化物并构成互连件14。