Flexible circuit electrode array and method of manufacturing the same
    6.
    发明授权
    Flexible circuit electrode array and method of manufacturing the same 有权
    柔性电路电极阵列及其制造方法

    公开(公告)号:US08322027B1

    公开(公告)日:2012-12-04

    申请号:US11926498

    申请日:2007-10-29

    IPC分类号: H05K3/00 H05K3/10 H05K1/00

    摘要: A method for manufacturing a flexible circuit electrode array, comprising: a) depositing a metal trace layer containing a base coating layer, a conducting layer and a top coating layer on said insulator polymer base layer; b) applying a layer of photoresist on said metal trace layer and patterning said metal trace layer and forming metal traces on said insulator polymer base layer; c) activating said insulator polymer base layer and depositing a top insulator polymer layer and forming one single insulating polymer layer with said base insulator polymer layer; d) applying a thin metal layer and a layer of photoresist on the surface of said insulator polymer layer and selective etching said insulator layer and said top coating layer to obtain at least one via; and e) filling said via with electrode material. A layer of polymer is laid down. A layer of metal is applied to the polymer and patterned to create electrodes and leads for those electrodes. A second layer of polymer is applied over the metal layer and patterned to leave openings for the electrodes, or openings are created later by means such as laser ablation. Hence the array and its supply cable are formed of a single body. Alternatively, multiple alternating layers of metal and polymer may be applied to obtain more metal traces within a given width.The method provides an excellent adhesion between the polymer base layer and the polymer top layer and insulation of the trace metals and electrodes.

    摘要翻译: 一种制造柔性电路电极阵列的方法,包括:a)在所述绝缘体聚合物基底层上沉积包含基底涂层,导电层和顶部涂层的金属迹线层; b)在所述金属迹线层上施加一层光致抗蚀剂,并图案化所述金属迹线层并在所述绝缘体聚合物基底层上形成金属迹线; c)激活所述绝缘体聚合物基层并沉积顶部绝缘体聚合物层并与所述基础绝缘体聚合物层形成单个绝缘聚合物层; d)在所述绝缘体聚合物层的表面上施加薄金属层和光致抗蚀剂层,并选择性地蚀刻所述绝缘体层和所述顶部涂层以获得至少一个通孔; 和e)用电极材料填充所述通孔。 放置一层聚合物。 将一层金属施加到聚合物上并图案化以产生用于那些电极的电极和引线。 将第二层聚合物施加在金属层上并图案化以留下电极的开口,或稍后通过诸如激光烧蚀的手段产生开口。 因此阵列及其供电电缆由单体形成。 或者,可以施加金属和聚合物的多个交替层以在给定宽度内获得更多的金属迹线。 该方法提供了聚合物基底层和聚合物顶层之间的极好的粘合性,并且痕迹金属和电极的绝缘性。

    Method of manufacturing a flexible circuit electrode array
    10.
    发明授权
    Method of manufacturing a flexible circuit electrode array 有权
    柔性电路电极阵列的制造方法

    公开(公告)号:US07914842B1

    公开(公告)日:2011-03-29

    申请号:US11702735

    申请日:2007-02-06

    IPC分类号: A61N1/04

    摘要: Polymer materials form electrode array bodies for neural stimulation, especially for retinal stimulation to create vision. The method lays down a polymer layer. Apply a metal layer to the polymer and pattern to create electrodes and leads. Apply a second polymer layer over the metal layer and pattern to leave openings for electrodes. The array and its supply cable are a single body. A method for manufacturing a flexible circuit electrode array, is: deposit a metal trace layer on an insulator polymer base layer; apply a layer of photoresist on the metal trace layer and pattern the metal trace layer and form metal traces on the insulator polymer base layer; activate the insulator polymer base layer and deposit a top insulator polymer layer and form a single insulating polymer layer with the base insulator polymer layer; wherein the insulator polymer layers are heated at 80-150° C. and then at 230-350° C.

    摘要翻译: 聚合物材料形成用于神经刺激的电极阵列体,特别是用于视网膜刺激以产生视觉。 该方法沉积聚合物层。 将金属层施加到聚合物和图案以产生电极和引线。 在金属层和图案上施加第二聚合物层以留下用于电极的开口。 阵列及其供电电缆是单体。 柔性电路电极阵列的制造方法是:在绝缘体聚合物基层上沉积金属迹线层; 在金属迹线层上施加一层光致抗蚀剂,并对金属迹线层进行图案化并在绝缘体聚合物基层上形成金属迹线; 激活绝缘体聚合物基层并沉积顶绝缘体聚合物层并与基底绝缘体聚合物层形成单个绝缘聚合物层; 其中将绝缘体聚合物层在80-150℃,然后在230-350℃下加热