SHOWER HEAD OF COMBINATORIAL SPATIAL ATOMIC LAYER DEPOSITION APPARATUS
    2.
    发明申请
    SHOWER HEAD OF COMBINATORIAL SPATIAL ATOMIC LAYER DEPOSITION APPARATUS 审中-公开
    组合空间原子层沉积装置的淋浴头

    公开(公告)号:US20170058402A1

    公开(公告)日:2017-03-02

    申请号:US15014568

    申请日:2016-02-03

    IPC分类号: C23C16/455 C23C16/44

    摘要: A shower head of a combinatorial spatial atomic layer deposition (CS-ALD) apparatus may be provided. The shower head of the CS-ALD apparatus may include a plurality of shower blocks. Each of shower blocks may include a plurality of unit modules. Each of the shower blocks and each of the unit modules may be controlled independently from each other. Each of the plurality of unit modules may include a source gas injection nozzle, a purge gas injection nozzle, a reactant gas injection nozzle, and exhaust areas between the injection nozzles. The plurality of shower blocks may be separated from each other. Gas injection areas of the injection nozzles may be separated from the exhaust area.

    摘要翻译: 可以提供组合空间原子层沉积(CS-ALD)装置的喷头。 CS-ALD装置的喷头可以包括多个淋浴块。 每个淋浴块可以包括多个单元模块。 每个淋浴块和每个单元模块可以彼此独立地控制。 多个单元模块中的每一个可以包括源气体喷射喷嘴,吹扫气体喷射喷嘴,反应气体喷射喷嘴和喷射喷嘴之间的排气区域。 多个淋浴块可以彼此分离。 注射喷嘴的气体注入区域可以与排气区域分离。