Electron multiplying device having multiple dynode stages encased by a
housing
    1.
    发明授权
    Electron multiplying device having multiple dynode stages encased by a housing 失效
    具有由壳体封装的多个倍增电极级的电子倍增装置

    公开(公告)号:US5446275A

    公开(公告)日:1995-08-29

    申请号:US63418

    申请日:1993-05-19

    IPC分类号: H01J43/04 H01J43/28 H01J40/14

    CPC分类号: H01J43/04 H01J43/28

    摘要: The electron multiplying device according to this invention comprises an electron multiplying unit including dynodes arranged in a plurality of stages. The electron multiplying unit has an incidence opening for an energy beam to be multiplied to enter through, and has the proximal end secured to a base. There is provided a casing for housing the electron multiplying unit. The forward edge of the casing is secured to the base, and a space defined by the base and the casing houses the electron multiplying unit. The casing has an entrance window formed at a position opposed to the incidence opening. Energy beams enter the electron multiplying unit through the entrance window, but the electron multiplying unit itself is housed in the casing to be protected from surrounding air flow and unnecessary energy beams not to be measured.

    摘要翻译: 根据本发明的电子倍增装置包括电子倍增单元,其包括以多级布置的倍增电极。 电子倍增单元具有用于能量束的入射开口,该能量束被乘以通过,并且其近端固定到基部。 设置有用于容纳电子倍增单元的壳体。 壳体的前缘固定到基座,由基座和壳体限定的空间容纳电子倍增单元。 壳体具有形成在与入射开口相对的位置处的入口窗口。 能量束通过入口窗进入电子倍增单元,但是电子倍增单元本身被容纳在壳体中以防止周围的空气流动和不被测量的不必要的能量束。

    Electron multiplier
    2.
    发明授权
    Electron multiplier 失效
    电子倍增器

    公开(公告)号:US5578891A

    公开(公告)日:1996-11-26

    申请号:US457174

    申请日:1995-06-01

    IPC分类号: H01J43/20 H01J43/06 H01J43/18

    CPC分类号: H01J43/06

    摘要: An electron multiplier according to this invention comprises dynodes DY1 .about.DY16 arranged in multi-stages along a direction of incidence of an energy beam for, upon incidence of the energy beam, gradually multiplying secondary electrons to emit the same, a collection electrode A for receiving electrons emitted from that of the dynodes on a last stage, and resistors R1 .about.R16 inserted between the respective dynodes and their adjacent ones, the dynodes, the collecting electrode, and the resistors being mounted between two support plates 10a, 10b disposed in parallel with each other, the resistors being arranged in two rows which sandwich the dynodes.

    摘要翻译: 根据本发明的电子倍增器包括沿着能量束的入射方向多级布置的倍增电极DY1差分DY16,用于在能量束入射时,逐渐地将二次电子发射相同,用于接收的收集电极A 电子发射自最后一级的倍增电极的电子,以及插入相应的倍增电极及其相邻电极之间的电阻器R1差分R16,倍增电极,集电极和电阻器被安装在两个平行于 彼此之间,电阻器被排列成两行,夹着倍增极。

    Spectrum detector including a photodector having a concavo-convex patten
    3.
    发明授权
    Spectrum detector including a photodector having a concavo-convex patten 有权
    光谱检测器,包括具有凹凸图案的光电探测器

    公开(公告)号:US09012924B2

    公开(公告)日:2015-04-21

    申请号:US13321082

    申请日:2009-08-17

    摘要: Provided is a spectrum detector capable of being miniaturized and which does not require complicated optical axis alignment. The spectrum detector of the present invention comprises: a substrate; a photodetector formed on the substrate and including a semiconductor having a plurality of convex portions; and a wavelength detection circuit for detecting a wavelength of light transmitted through the plurality of convex portions, from light incident on the photodetector. According to the present invention, a small-sized spectrum detector can be provided which can easily detect a peak wavelength distribution included in light of an unknown wavelength, without the use of optical equipment such as a grating or prism, thus dispensing with the need for the optical axis alignment of a complex optical system.

    摘要翻译: 提供了能够小型化并且不需要复杂的光轴对准的光谱检测器。 本发明的光谱检测器包括:基板; 形成在所述基板上并包括具有多个凸部的半导体的光电探测器; 以及波长检测电路,用于从入射到光电检测器上的光检测透过多个凸部的光的波长。 根据本发明,可以提供一种小型光谱检测器,其可以容易地检测包括在未知波长的光中的峰值波长分布,而不需要使用诸如光栅或棱镜的光学设备,从而不需要 复合光学系统的光轴对准。

    Method of preparing semiconductor layer including cavities
    4.
    发明授权
    Method of preparing semiconductor layer including cavities 有权
    制备包括空腔的半导体层的方法

    公开(公告)号:US09006084B2

    公开(公告)日:2015-04-14

    申请号:US13507210

    申请日:2012-06-13

    申请人: Shiro Sakai

    发明人: Shiro Sakai

    摘要: A method of fabricating a semiconductor substrate, includes forming a first semiconductor layer on a substrate, forming a metallic material layer on the first semiconductor layer, forming a second semiconductor layer on the first semiconductor layer and the metallic material layer, etching the substrate using a solution to remove the metallic material layer and a portion of the first semiconductor layer, and forming a cavity in the first semiconductor layer under where the metallic material layer was removed.

    摘要翻译: 一种制造半导体衬底的方法,包括在衬底上形成第一半导体层,在第一半导体层上形成金属材料层,在第一半导体层和金属材料层上形成第二半导体层,使用 以去除所述金属材料层和所述第一半导体层的一部分,并且在去除所述金属材料层的所述第一半导体层内形成空腔。

    LAMINATE SUBSTRATE AND METHOD OF FABRICATING THE SAME
    5.
    发明申请
    LAMINATE SUBSTRATE AND METHOD OF FABRICATING THE SAME 有权
    层压基板及其制造方法

    公开(公告)号:US20130313577A1

    公开(公告)日:2013-11-28

    申请号:US13985201

    申请日:2011-05-17

    申请人: Shiro Sakai

    发明人: Shiro Sakai

    摘要: Embodiments of the invention provide a crystalline aluminum carbide layer, a laminate substrate having the crystalline aluminum carbide layer formed thereon, and a method of fabricating the same. The laminate substrate has a GaN layer including a GaN crystal and an AlC layer including an AlC crystal. Further, the method of fabricating the laminate substrate, which has the AlN layer including the AlN crystal and the AlC layer including the AlC crystal, includes supplying a carbon containing gas and an aluminum containing gas to grow the AlC layer.

    摘要翻译: 本发明的实施方案提供一种结晶碳化铝层,其上形成有结晶碳化铝层的层压基板及其制造方法。 层压基板具有包括GaN晶体的GaN层和包括AlC晶体的AlC层。 此外,具有包含AlN晶体的AlN层和包含AlC晶体的AlC层的层压基板的制造方法包括供给含碳气体和含铝气体以生长AlC层。

    Operating valve, exposure apparatus, and device manufacturing method
    6.
    发明授权
    Operating valve, exposure apparatus, and device manufacturing method 有权
    操作阀,曝光装置和装置制造方法

    公开(公告)号:US08319947B2

    公开(公告)日:2012-11-27

    申请号:US12574333

    申请日:2009-10-06

    摘要: An operating valve of the present invention is a differential pressure operating valve 100 for performing a vacuum suction of a substrate, the operating valve comprises a body 4 having an opening which is provided at an exhaust side for exhausting an air from an inside to an outside and is opposed to a suction side for sucking the air from the outside to the inside, a valve 8, and a spring 9 whose one end is connected with one of the suction side and the exhaust side of the body 4 and the other end is connected with the valve 8. The spring 9 is configured to stretch or compress in accordance with a differential pressure between the suction side and the exhaust side, and the valve 8 is provided with at least one hole.

    摘要翻译: 本发明的操作阀是用于对基板进行真空抽吸的压差操作阀100,操作阀包括一个主体4,该主体4具有设置在排气侧的开口,用于从内部向外部排出空气 并且与吸入侧相对,用于从外部向内部吸入空气,阀8和弹簧9,其一端与主体4的吸入侧和排气侧中的一个连接,另一端为 与阀8连接。弹簧9构造成根据吸力侧和排气侧之间的压差拉伸或压缩,并且阀8设置有至少一个孔。

    Laser diode having nano patterns and method of fabricating the same
    7.
    发明授权
    Laser diode having nano patterns and method of fabricating the same 有权
    具有纳米图案的激光二极管及其制造方法

    公开(公告)号:US08189635B2

    公开(公告)日:2012-05-29

    申请号:US12768073

    申请日:2010-04-27

    申请人: Shiro Sakai

    发明人: Shiro Sakai

    IPC分类号: H01S5/00 H01S3/08

    摘要: A laser diode having nano patterns is disposed on a substrate. A first conductive-type clad layer is disposed on the substrate, and a second conductive-type clad layer is disposed on the first conductive-type clad layer. An active layer is interposed between the first conductive-type clad layer and the second conductive-type clad layer. Column-shaped nano patterns are arranged at a surface of the second conductive-type clad layer to form a laser diode such as a distributed feedback laser diode.

    摘要翻译: 具有纳米图案的激光二极管设置在基板上。 第一导电型覆盖层设置在基板上,第二导电型覆盖层设置在第一导电型覆盖层上。 在第一导电型覆盖层和第二导电型覆盖层之间插入有源层。 柱状纳米图案布置在第二导电型覆盖层的表面,以形成诸如分布反馈激光二极管的激光二极管。

    Light emitting device having light emitting elements
    9.
    发明授权
    Light emitting device having light emitting elements 有权
    具有发光元件的发光器件

    公开(公告)号:US08084774B2

    公开(公告)日:2011-12-27

    申请号:US12352296

    申请日:2009-01-12

    IPC分类号: H01L33/00

    摘要: A light-emitting device operating on a high drive voltage and a small drive current. LEDs (1) are two-dimensionally formed on an insulating substrate (10) of e.g., sapphire monolithically and connected in series to form an LED array. Two such LED arrays are connected to electrodes (32) in inverse parallel. Air-bridge wiring (28) is formed between the LEDs (1) and between the LEDs (1) and electrodes (32). The LED arrays are arranged zigzag to form a plurality of LEDs (1) to produce a high drive voltage and a small drive current. Two LED arrays are connected in inverse parallel, and therefore an AC power supply can be used as the power supply.

    摘要翻译: 在高驱动电压和小驱动电流下工作的发光装置。 LED(1)二次形成在例如蓝宝石的绝缘基板(10)上,并且串联连接以形成LED阵列。 两个这样的LED阵列反向并联连接到电极(32)。 在LED(1)之间以及LED(1)和电极(32)之间形成空气桥接线(28)。 LED阵列以Z字形排列以形成多个LED(1)以产生高驱动电压和小的驱动电流。 两个LED阵列相反并联连接,因此可以使用交流电源作为电源。

    Light-emitting device having light-emitting elements connected in series
    10.
    发明授权
    Light-emitting device having light-emitting elements connected in series 有权
    发光元件具有串联连接的发光元件

    公开(公告)号:US07956367B2

    公开(公告)日:2011-06-07

    申请号:US11705205

    申请日:2007-02-12

    IPC分类号: H01L25/03

    摘要: A light-emitting device operating on a high drive voltage and a small drive current. LEDs (1) are two-dimensionally formed on an insulating substrate (10) of e.g., sapphire monolithically and connected in series to form an LED array. Two such LED arrays are connected to electrodes (32) in inverse parallel. Air-bridge wiring (28) is formed between the LEDs (1) and between the LEDs (1) and electrodes (32). The LED arrays are arranged zigzag to form a plurality of LEDs (1) to produce a high drive voltage and a small drive current. Two LED arrays are connected in inverse parallel, and therefore an AC power supply can be used as the power supply.

    摘要翻译: 在高驱动电压和小驱动电流下工作的发光装置。 LED(1)二次形成在例如蓝宝石的绝缘基板(10)上,并且串联连接以形成LED阵列。 两个这样的LED阵列反向并联连接到电极(32)。 在LED(1)之间以及LED(1)和电极(32)之间形成空气桥接线(28)。 LED阵列以Z字形排列以形成多个LED(1)以产生高驱动电压和小的驱动电流。 两个LED阵列相反并联连接,因此可以使用交流电源作为电源。