摘要:
Etching gases are disclosed for plasma etching channel holes, gate trenches, staircase contacts, capacitor holes, contact holes, etc., in Si-containing layers on a substrate and plasma etching methods of using the same. The etching gases are trans-1,1,1,4,4,4-hexafluoro-2-butene; cis-1,1,1,4,4,4-hexafluoro-2-butene; hexafluoroisobutene; hexafluorocyclobutane (trans-1,1,2,2,3,4); pentafluorocyclobutane (1,1,2,2,3-); tetrafluorocyclobutane (1,1,2,2-); or hexafluorocyclobutane (cis-1,1,2,2,3,4). The etching gases may provide improved selectivity between the Si-containing layers and mask material, less damage to channel region, a straight vertical profile, and reduced bowing in pattern high aspect ratio structures.
摘要:
A method for producing at least one compound of a fluorine-containing olefin compound (51) or a fluorine-containing olefin compound (52) includes performing a reaction of a fluorine-containing olefin compound (21) with an olefin compound (31) in the presence of a metal-carbene complex compound having an olefin metathesis reaction activity and an olefin compound (41) or (42).
摘要:
In a cross coupling reaction, in a case where a halogen atom is selected as the leaving group of the raw material compound, a harmful halogen waste forms as a by-product after the reaction, and disposal of the waste liquid is complicated and environmental burden is high. In a carbon-hydrogen activation cross coupling reaction which requires no halogen atom as the leaving group, although no halogen waste forms as a by-product, the reaction substrate is considerably restricted, and the reaction remains a limited molecular construction method.A method for producing an aromatic compound, which comprises subjecting an aromatic nitro compound and a boronic acid compound to a cross coupling reaction in the presence of a metal catalyst.
摘要:
Described herein are perfluoroalkylated zinc compounds having the structure of Formula (I) or Formula (II), which can be used to perfluoroalkylate organic, inorganic and organometallic substrates. Methods of making and using these compounds by reacting zinc or a dialkylzinc compound with a perfluoroalkyl dihalide in a solvent such as tetrahydrofuran, dioxane or diglyme, are also described.
摘要:
Processes of forming Csp2—Csp3 bonds at the allylic carbon of a cyclic allylic compound starting material are disclosed, in which a racemic mixture of a cyclic allylic compound having a leaving group attached to the allylic carbon is reacted with a compound having a nucleophilic carbon atom in the presence of a Rh(I), Pd(II) or Cu(I) pre-catalyst and a chiral ligand. The reaction products containing the newly-formed Csp2—Csp3 bond are generated in high stereoisomeric excess, and may therefore serve as important organic building blocks in the preparation of new agrochemicals and pharmaceuticals.
摘要:
An object of the present invention is to enable the synthesis of various fluorine-containing compounds having an organic group at both terminals of their tetrafluoroethylene structure (—CF2—CF2—). The present invention provides a fluorine-containing complex compound including a fluorine-containing organic metal compound represented by formula (1a): R1—CF2—CF2-M1 (1a) wherein M1 is a metal selected from the group consisting of copper, zinc, nickel, iron, cobalt, and tin; and R1 represents an organic group, and at least one ligand selected from the group consisting of pyridine ring-containing compounds and phosphines.
摘要:
The present invention is the process comprising forming a stable mixture comprising I(CF2)nI, wherein n is at least 3 and at least one of I(CF2)nI, wherein n is 1 or 2, as a contaminant in said mixture and heating said mixture to a temperature of at least 220° C. to reduce the amount of said contaminant to be no greater than 1% when said contaminant is ICF2I (n=1) and no greater than 0.1% when said contaminant is ICF2CF2I (n=2).
摘要:
Provided is a simple, selective and efficient method for producing 7-methyl-3-methylene-7-octenyl propionate and the like. More specifically, provided is, for example, a method for producing 7-methyl-3-methylene-7-octenyl propionate, comprising the steps of: subjecting a nucleophile represented by Formula (1) and an electrophile represented by Formula (2) to a coupling reaction to obtain a 7-methyl-3-methylene-7-octenyl halide represented by Formula (3), and subjecting the 7-methyl-3-methylene-7-octenyl halide (3) to propionyloxylation to obtain the 7-methyl-3-methylene-7-octenyl propionate represented by Formula (4).
摘要:
The disclosure is directed to: (a) phosphacycle ligands; (b) catalyst compositions comprising phosphacycle ligands; and (c) methods of using such phosphacycle ligands and catalyst compositions in bond forming reactions.
摘要:
Provided is a method for industrially producing a conjugated Z-alken-yn-yl acetate such as Z-13-hexadecen-11-yn-yl acetate which is a sex pheromone component of a pine processionary moth, and an intermediate for the conjugated Z-alken-yn-yl acetate under mild conditions at a high yield. More specifically, provided is a method for producing a conjugated Z-alken-yn-yl acetate (5) comprising the steps of: reacting an ω-halo-2-alkynal (1) with an alkylidene triphenylphosphorane (3) through a Wittig reaction to obtain a conjugated Z-alken-yn-yl halide (4), and acetoxylating the conjugated Z-alken-yn-yl halide (4) into a conjugated Z-alken-yn-yl acetate (5).