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公开(公告)号:CN1253662A
公开(公告)日:2000-05-17
申请号:CN98804590.7
申请日:1998-04-30
Applicant: 日立化成工业株式会社
IPC: H01L23/12
CPC classification number: H01L24/85 , H01L21/4803 , H01L23/13 , H01L23/24 , H01L23/3121 , H01L23/3128 , H01L23/36 , H01L23/49816 , H01L24/45 , H01L24/48 , H01L24/73 , H01L29/0657 , H01L2224/0401 , H01L2224/05624 , H01L2224/05647 , H01L2224/131 , H01L2224/32225 , H01L2224/32245 , H01L2224/45015 , H01L2224/45147 , H01L2224/48091 , H01L2224/48227 , H01L2224/4824 , H01L2224/48799 , H01L2224/48824 , H01L2224/48847 , H01L2224/73265 , H01L2224/85 , H01L2924/00011 , H01L2924/00014 , H01L2924/01005 , H01L2924/01006 , H01L2924/01013 , H01L2924/01023 , H01L2924/01027 , H01L2924/01028 , H01L2924/01029 , H01L2924/01033 , H01L2924/01057 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/014 , H01L2924/12042 , H01L2924/15153 , H01L2924/15157 , H01L2924/15165 , H01L2924/1517 , H01L2924/15311 , H01L2924/1532 , H01L2924/181 , H01L2924/18165 , H01L2924/3025 , H05K3/0014 , H01L2224/78 , H01L2924/00012 , H01L2924/00 , H01L2224/45099 , H01L2924/01004
Abstract: 公开一种可靠性高、可以小型化、可以降低造价的具有具备用来装配半导体元件的凹部的基板的半导体器件。通过把由将成为布线构件的铜布线(12)、镍合金等的缓冲层(11)和将成为载体层的铜箱(10)构成的可进行拉伸加工的布线体粘接到树脂基板(14、15)上,同时用模具(13)的突起部分(13a)进行冲压加工,形成埋入到基板表面中的布线(2),并且通过在构成布线(2)的两端的将连接到半导体器件(1)的内部连接端子部分和将连接到外部连接端子(5)的外部连接端于部分之间提供台阶,在基板的中央部分形成容纳半导体器件(1)的凹部。
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公开(公告)号:CN1516251A
公开(公告)日:2004-07-28
申请号:CN03137862.5
申请日:1995-03-17
Applicant: 日立化成工业株式会社
CPC classification number: H01L21/568 , H01L21/4803 , H01L21/56 , H01L21/561 , H01L23/3121 , H01L23/3128 , H01L23/49811 , H01L23/49816 , H01L23/4985 , H01L24/32 , H01L24/45 , H01L24/48 , H01L24/73 , H01L24/83 , H01L24/97 , H01L2221/68377 , H01L2224/16237 , H01L2224/2919 , H01L2224/32057 , H01L2224/32225 , H01L2224/32245 , H01L2224/32503 , H01L2224/45144 , H01L2224/48091 , H01L2224/48227 , H01L2224/48228 , H01L2224/48247 , H01L2224/73204 , H01L2224/73265 , H01L2224/83001 , H01L2224/83102 , H01L2224/8319 , H01L2224/83385 , H01L2224/8381 , H01L2224/8385 , H01L2224/85001 , H01L2224/92125 , H01L2224/97 , H01L2924/01005 , H01L2924/01006 , H01L2924/01015 , H01L2924/01019 , H01L2924/01027 , H01L2924/01029 , H01L2924/01033 , H01L2924/01047 , H01L2924/0105 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/01322 , H01L2924/01327 , H01L2924/014 , H01L2924/0665 , H01L2924/07802 , H01L2924/07811 , H01L2924/12042 , H01L2924/14 , H01L2924/15153 , H01L2924/1517 , H01L2924/15183 , H01L2924/15184 , H01L2924/15311 , H01L2924/181 , H01L2924/203 , H01L2924/351 , H05K3/20 , H01L2224/85 , H01L2924/00014 , H01L2224/83 , H01L2224/92247 , H01L2924/00 , H01L2924/00012 , H01L2924/00015 , H01L2924/0002
Abstract: 本发明涉及半导体组件的制造方法及半导体组件,该半导体元件装载用基板具有绝缘性支撑体和在该支撑体的单面上形成的多条配线,其特征在于,具有:在上述绝缘性支撑体的表面上形成多组半导体元件装载区域和该半导体装载区域的外侧的树脂密封用半导体封装区域的工序;在上述半导体封装区域中形成金属线焊接端子、且在上述半导体元件装载区域中形成外部连接端子、且形成将该金属线焊接端子和该外部连接端子串接在一起的上述配线的配线形成工序,以及在形成上述外部连接端端子的地方的上述绝缘性支撑体上形成到达上述外部连接端子的开口部的开口部形成工序。
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公开(公告)号:CN1098820A
公开(公告)日:1995-02-15
申请号:CN94104987.6
申请日:1994-04-27
Applicant: 日立化成工业株式会社
IPC: H01L21/66
CPC classification number: G01R1/07314 , H05K3/062 , H05K3/205 , H05K3/4007 , H05K2201/0367 , H05K2203/0152 , H05K2203/0376 , H05K2203/0384 , H05K2203/0726
Abstract: 一种用于进行电测试的布线基板及其制造方法,该基板包括绝缘基板,埋于绝缘基板中的规定图形的布线和设置于布线上与被测器件的电极相接触的凸出电极。其制造方法包括:在导电性临时基板上形成规定图形的布线;把布线埋于绝缘基板中;把临时基板上将形成与被测器件之电极相接触的凸出电极的部分留下,除去其余部分。用本发明的电测试用布线基板能方便地测试布线间距小的半导体器件和布线基板。
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公开(公告)号:CN1042187C
公开(公告)日:1999-02-17
申请号:CN94104987.6
申请日:1994-04-27
Applicant: 日立化成工业株式会社
CPC classification number: G01R1/07314 , H05K3/062 , H05K3/205 , H05K3/4007 , H05K2201/0367 , H05K2203/0152 , H05K2203/0376 , H05K2203/0384 , H05K2203/0726
Abstract: 一种用于进行电测试的布线基板及其制造方法,该基板包括绝缘基板、埋于绝缘基板中的规定图形的布线和设置于布线上与被测器件的电极相接触涂敷有导电性聚合物的凸出电极。其制造方法包括:在导电性临时基板上形成规定图形的布线;把布线埋于绝缘基板中;把临时基板上将形成与被测器件之电极相接触的凸出电极的部分留下,除去其余部分,在凸出电极顶端形成导电性聚合物。用本发明的电测试用布线基板能方便地测试布线间距小的半导体器件和布线基板。
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公开(公告)号:CN100370602C
公开(公告)日:2008-02-20
申请号:CN98804590.7
申请日:1998-04-30
Applicant: 日立化成工业株式会社
IPC: H01L23/12
CPC classification number: H01L24/85 , H01L21/4803 , H01L23/13 , H01L23/24 , H01L23/3121 , H01L23/3128 , H01L23/36 , H01L23/49816 , H01L24/45 , H01L24/48 , H01L24/73 , H01L29/0657 , H01L2224/0401 , H01L2224/05624 , H01L2224/05647 , H01L2224/131 , H01L2224/32225 , H01L2224/32245 , H01L2224/45015 , H01L2224/45147 , H01L2224/48091 , H01L2224/48227 , H01L2224/4824 , H01L2224/48799 , H01L2224/48824 , H01L2224/48847 , H01L2224/73265 , H01L2224/85 , H01L2924/00011 , H01L2924/00014 , H01L2924/01005 , H01L2924/01006 , H01L2924/01013 , H01L2924/01023 , H01L2924/01027 , H01L2924/01028 , H01L2924/01029 , H01L2924/01033 , H01L2924/01057 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/014 , H01L2924/12042 , H01L2924/15153 , H01L2924/15157 , H01L2924/15165 , H01L2924/1517 , H01L2924/15311 , H01L2924/1532 , H01L2924/181 , H01L2924/18165 , H01L2924/3025 , H05K3/0014 , H01L2224/78 , H01L2924/00012 , H01L2924/00 , H01L2224/45099 , H01L2924/01004
Abstract: 公开一种可靠性高、可以小型化、可以降低造价的具有具备用来装配半导体元件的凹部的基板的半导体器件。通过把由将成为布线构件的铜布线(12)、镍合金等的缓冲层(11)和将成为载体层的铜箔(10)构成的可进行拉伸加工的布线体粘接到树脂基板(14、15)上,同时用模具(13)的突起部分(13a)进行冲压加工,形成埋入到基板表面中的布线(2),并且通过在构成布线(2)的两端的将连接到半导体器件(1)的内部连接端子部分和将连接到外部连接端子(5)的外部连接端子部分之间提供台阶,在基板的中央部分形成容纳半导体器件(1)的凹部。
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公开(公告)号:CN1117395C
公开(公告)日:2003-08-06
申请号:CN95192144.4
申请日:1995-03-17
Applicant: 日立化成工业株式会社
IPC: H01L23/12
CPC classification number: H01L21/568 , H01L21/4803 , H01L21/56 , H01L21/561 , H01L23/3121 , H01L23/3128 , H01L23/49811 , H01L23/49816 , H01L23/4985 , H01L24/32 , H01L24/45 , H01L24/48 , H01L24/73 , H01L24/83 , H01L24/97 , H01L2221/68377 , H01L2224/16237 , H01L2224/2919 , H01L2224/32057 , H01L2224/32225 , H01L2224/32245 , H01L2224/32503 , H01L2224/45144 , H01L2224/48091 , H01L2224/48227 , H01L2224/48228 , H01L2224/48247 , H01L2224/73204 , H01L2224/73265 , H01L2224/83001 , H01L2224/83102 , H01L2224/8319 , H01L2224/83385 , H01L2224/8381 , H01L2224/8385 , H01L2224/85001 , H01L2224/92125 , H01L2224/97 , H01L2924/01005 , H01L2924/01006 , H01L2924/01015 , H01L2924/01019 , H01L2924/01027 , H01L2924/01029 , H01L2924/01033 , H01L2924/01047 , H01L2924/0105 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/01322 , H01L2924/01327 , H01L2924/014 , H01L2924/0665 , H01L2924/07802 , H01L2924/07811 , H01L2924/12042 , H01L2924/14 , H01L2924/15153 , H01L2924/1517 , H01L2924/15183 , H01L2924/15184 , H01L2924/15311 , H01L2924/181 , H01L2924/203 , H01L2924/351 , H05K3/20 , H01L2224/85 , H01L2924/00014 , H01L2224/83 , H01L2224/92247 , H01L2924/00 , H01L2924/00012 , H01L2924/00015 , H01L2924/0002
Abstract: 本发明提供一种能适应半导体高度集成化的半导体组件基片。在电解铜箔上镀镍层,形成配线,在铜箔上装配LSI芯片,由引线连接LSI端子与配线,并采用环氧树脂密封半导体。用碱腐蚀方法溶解只除去铜箔,露出镍层,在对铜溶解性小的镍剥离液中除去镍层,使配线露出。涂敷焊料保护层,设置图形并使连接端子露出,在该配线露出处溶融配置焊料球,通过焊料球与外部配线板连接。
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公开(公告)号:CN1144016A
公开(公告)日:1997-02-26
申请号:CN95192144.4
申请日:1995-03-17
Applicant: 日立化成工业株式会社
IPC: H01L23/12
CPC classification number: H01L21/568 , H01L21/4803 , H01L21/56 , H01L21/561 , H01L23/3121 , H01L23/3128 , H01L23/49811 , H01L23/49816 , H01L23/4985 , H01L24/32 , H01L24/45 , H01L24/48 , H01L24/73 , H01L24/83 , H01L24/97 , H01L2221/68377 , H01L2224/16237 , H01L2224/2919 , H01L2224/32057 , H01L2224/32225 , H01L2224/32245 , H01L2224/32503 , H01L2224/45144 , H01L2224/48091 , H01L2224/48227 , H01L2224/48228 , H01L2224/48247 , H01L2224/73204 , H01L2224/73265 , H01L2224/83001 , H01L2224/83102 , H01L2224/8319 , H01L2224/83385 , H01L2224/8381 , H01L2224/8385 , H01L2224/85001 , H01L2224/92125 , H01L2224/97 , H01L2924/01005 , H01L2924/01006 , H01L2924/01015 , H01L2924/01019 , H01L2924/01027 , H01L2924/01029 , H01L2924/01033 , H01L2924/01047 , H01L2924/0105 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/01322 , H01L2924/01327 , H01L2924/014 , H01L2924/0665 , H01L2924/07802 , H01L2924/07811 , H01L2924/12042 , H01L2924/14 , H01L2924/15153 , H01L2924/1517 , H01L2924/15183 , H01L2924/15184 , H01L2924/15311 , H01L2924/181 , H01L2924/203 , H01L2924/351 , H05K3/20 , H01L2224/85 , H01L2924/00014 , H01L2224/83 , H01L2224/92247 , H01L2924/00 , H01L2924/00012 , H01L2924/00015 , H01L2924/0002
Abstract: 本发明提供一种能适应半导体高度集成化的半导体组件基片。在电解铜箔上镀镍层,形成配线,在铜箔上装配LSI芯片,由引线连接LSI端子与配线,并采用环氧树脂密封半导体。用碱腐蚀方法溶解只除去铜箔,露出镍层,在对铜溶解性小的镍剥离液中除去镍层,使配线露出。涂敷焊料保护层,设置图形并使连接端子露出,在该配线露出处溶融配置焊料球,通过焊料球与外部配线板连接。
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