METHOD AND SYSTEM FOR BONDING A CHIP TO A SUBSTRATE
    2.
    发明公开
    METHOD AND SYSTEM FOR BONDING A CHIP TO A SUBSTRATE 审中-公开
    用于将芯片结合到衬底的方法和系统

    公开(公告)号:EP3276655A1

    公开(公告)日:2018-01-31

    申请号:EP16181184.9

    申请日:2016-07-26

    摘要: A method and system for heat bonding a chip to a substrate by means of heat bonding material disposed there between. At least the substrate is preheated from an initial temperature to an elevated temperature below a damage temperature of the substrate. A light pulse applied to the chip momentarily increases the chip temperature to a pulsed peak temperature below a peak damage temperature of the chip. The momentarily increased pulsed peak temperature of the chip causes a flow of conducted heat from the chip to the bonding material, causing the bonding material to form a bond.

    摘要翻译: 一种通过设置在其间的热粘合材料将芯片热粘合到衬底的方法和系统。 至少将衬底从初始温度预热至低于衬底损伤温度的升高温度。 施加到芯片上的光脉冲瞬间将芯片温度增加到低于芯片的峰值损伤温度的脉冲峰值温度。 瞬时增加的芯片的脉冲峰值温度引起从芯片到结合材料的传导热量的流动,导致结合材料形成结合。