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公开(公告)号:US20150214089A1
公开(公告)日:2015-07-30
申请号:US14682231
申请日:2015-04-09
Applicant: SAMSUNG ELECTRONICS CO., LTD
Inventor: CHUNGSUN LEE , Jung-Seok AHN , Kwang-chul CHOI , Un-Byoung KANG , Jung-Hwan KIM , JOONSIK SOHN , JEON IL LEE
IPC: H01L21/683 , B32B37/18 , B32B37/12 , B32B38/10 , H01L21/02 , B32B38/04 , B32B37/24 , H01L21/304 , H01L21/768 , H01L23/00 , B32B37/26 , B32B38/16
CPC classification number: H01L21/6835 , B32B37/1284 , B32B37/18 , B32B37/24 , B32B37/26 , B32B38/04 , B32B38/10 , B32B38/162 , B32B2037/268 , B32B2315/08 , B32B2457/14 , H01L21/02057 , H01L21/02126 , H01L21/304 , H01L21/6836 , H01L21/76898 , H01L24/03 , H01L24/14 , H01L2221/68318 , H01L2221/68327 , H01L2221/6834 , H01L2221/68363 , H01L2221/68372 , H01L2221/68381 , H01L2224/0401 , H01L2224/05025 , H01L2224/13023 , H01L2924/12042 , H01L2924/181 , Y10S438/977 , H01L2924/00
Abstract: A method for processing substrates includes providing a bonding layer between a substrate and a carrier to bond the substrate to the carrier, processing the substrate while the substrate is supported by the carrier, and removing the bonding layer to separate the substrate from the carrier. The bonding layer may include a thermosetting release layer and thermosetting glue layers, wherein at least one of the thermosetting glue layers is provided on each side of the thermosetting release layer.
Abstract translation: 一种处理衬底的方法包括:在衬底和载体之间提供接合层,以将衬底粘合到载体上,在衬底由载体支撑的同时处理衬底,以及去除结合层以使衬底与载体分离。 粘合层可以包括热固性剥离层和热固性胶层,其中至少一个热固性胶层设置在热固性剥离层的每一侧上。
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公开(公告)号:US20160196760A1
公开(公告)日:2016-07-07
申请号:US14985666
申请日:2015-12-31
Applicant: Samsung Electronics Co., Ltd.
Inventor: Gyo-Seung KOO , Dong-Hun PARK , Hee-Jae JUNG , Jung-Hwan KIM , Ji-Ho MA , Ae-Seon SEO , Jung-Ho SEO
CPC classification number: G09B5/02 , G09B19/0038
Abstract: Disclosed herein are a portable terminal and method. The portable terminal includes a display module and at least one processor operatively coupled to the memory, which may implemented the method to control the display module to display a first image operable to indicate a state of a user, and in response to receiving response information while the first image is displayed, determine a state of the user according to the received response information.
Abstract translation: 这里公开了便携式终端和方法。 便携式终端包括显示模块和可操作地耦合到存储器的至少一个处理器,其可以实现控制显示模块的方法来显示可操作以指示用户的状态的第一图像,并且响应于接收到响应信息, 显示第一图像,根据接收的响应信息确定用户的状态。
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3.
公开(公告)号:US20150093857A1
公开(公告)日:2015-04-02
申请号:US14566685
申请日:2014-12-10
Applicant: Samsung Electronics Co., Ltd.
Inventor: Jihwan HWANG , Young Kun JEE , Jung-Hwan KIM , Tae Hong MIN , Kwang-chul CHOI
CPC classification number: H01L25/50 , H01L21/56 , H01L21/563 , H01L21/6835 , H01L23/3185 , H01L24/97 , H01L25/0657 , H01L25/18 , H01L2221/68327 , H01L2224/16145 , H01L2224/16225 , H01L2224/32145 , H01L2224/73204 , H01L2225/06513 , H01L2225/06517 , H01L2225/06541 , H01L2225/06555 , H01L2225/06582 , H01L2924/1431 , H01L2924/1434 , H01L2924/00
Abstract: Provided are semiconductor devices and methods of manufacturing the same. The semiconductor package includes a substrate, a first semiconductor chip mounted on the circuit substrate and having a first width, a second semiconductor chip overlying the first semiconductor chip and having a second width greater than the first width, and a first under filler disposed between the first and second semiconductor chips, covering a side surface of the first semiconductor chip and having an inclined side surface.
Abstract translation: 提供半导体器件及其制造方法。 半导体封装包括基板,安装在电路基板上并具有第一宽度的第一半导体芯片,覆盖第一半导体芯片并且具有大于第一宽度的第二宽度的第二半导体芯片,以及设置在第一半导体芯片 第一和第二半导体芯片,覆盖第一半导体芯片的侧表面并具有倾斜的侧表面。
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公开(公告)号:US20140210075A1
公开(公告)日:2014-07-31
申请号:US14147718
申请日:2014-01-06
Applicant: Samsung Electronics Co., Ltd
Inventor: CHUNGSUN LEE , Jung-Seok AHN , Kwang-chul CHOI , Un-Byoung KANG , Jung-Hwan KIM , JOONSIK SOHN , JEON IL LEE
IPC: H01L21/304 , H01L21/683
CPC classification number: H01L21/6835 , B32B37/1284 , B32B37/18 , B32B37/24 , B32B37/26 , B32B38/04 , B32B38/10 , B32B38/162 , B32B2037/268 , B32B2315/08 , B32B2457/14 , H01L21/02057 , H01L21/02126 , H01L21/304 , H01L21/6836 , H01L21/76898 , H01L24/03 , H01L24/14 , H01L2221/68318 , H01L2221/68327 , H01L2221/6834 , H01L2221/68363 , H01L2221/68372 , H01L2221/68381 , H01L2224/0401 , H01L2224/05025 , H01L2224/13023 , H01L2924/12042 , H01L2924/181 , Y10S438/977 , H01L2924/00
Abstract: A method for processing substrates includes providing a bonding layer between a substrate and a carrier to bond the substrate to the carrier, processing the substrate while the substrate is supported by the carrier, and removing the bonding layer to separate the substrate from the carrier. The bonding layer may include a thermosetting release layer and thermosetting glue layers, wherein at least one of the thermosetting glue layers is provided on each side of the thermosetting release layer.
Abstract translation: 一种处理衬底的方法包括:在衬底和载体之间提供接合层,以将衬底粘合到载体上,在衬底由载体支撑的同时处理衬底,以及去除结合层以使衬底与载体分离。 粘合层可以包括热固性剥离层和热固性胶层,其中至少一个热固性胶层设置在热固性剥离层的每一侧上。
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5.
公开(公告)号:US20160093518A1
公开(公告)日:2016-03-31
申请号:US14788783
申请日:2015-06-30
Applicant: Samsung Electronics Co., Ltd.
Inventor: Kyu-Dong JUNG , Jung-Hwan KIM , Dong-Gil LEE , Tae-Je CHO , Kwang-Chul CHOI
CPC classification number: H01L21/67115 , B32B38/10 , B32B41/00 , B32B43/006 , B32B2250/02 , B32B2310/0843 , B32B2457/14 , H01L21/67092 , H01L21/67253 , H01L2221/68381 , H01L2224/98 , Y10T156/1158 , Y10T156/1917
Abstract: Provided are an initiator and a method for debonding a wafer supporting system. The initiator for debonding a wafer supporting system includes a rotation chuck having an upper surface on which a wafer supporting system (WSS), which includes a carrier wafer, a device wafer, and a glue layer for bonding the carrier wafer and the device wafer to each other, is seated to rotate the wafer supporting system, a detecting module detecting a height and a thickness of the glue layer and a laser module generating a fracture portion on the glue layer through irradiating a side surface of the glue layer with a laser on the basis of the height and the thickness of the glue layer.
Abstract translation: 提供了一种用于剥离晶片支撑系统的引发剂和方法。 用于剥离晶片支撑系统的启动器包括具有上表面的旋转卡盘,其上包括载体晶片的晶片支撑系统(WSS),器件晶片和用于将载体晶片和器件晶片接合的胶层 彼此坐下来旋转晶片支撑系统,检测模块检测胶层的高度和厚度;以及激光模块,其通过用激光照射胶层的侧表面而在胶层上产生断裂部分 胶层的高度和厚度的基础。
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公开(公告)号:US20140106537A1
公开(公告)日:2014-04-17
申请号:US14053913
申请日:2013-10-15
Applicant: Samsung Electronics Co., Ltd.
Inventor: Jung-Hwan KIM , Sunggil KIM , HungSuk KIM , Guk-Hyon YON , Hunhyeong LIM
IPC: H01L21/762
CPC classification number: H01L21/76224 , H01L21/28273 , H01L21/32155 , H01L21/764 , H01L27/11524
Abstract: Methods of manufacturing a semiconductor device are provided. The method includes forming a poly-silicon layer doped with first p-type dopants on a substrate, etching the poly-silicon layer and the substrate to form a poly-silicon pattern and a trench, forming device isolation pattern covering a lower sidewall of the poly-silicon pattern in the trench, thermally treating the poly-silicon pattern in a gas including second p-type dopants, forming a dielectric layer and a conductive layer on the thermally treated poly-silicon pattern and the device isolation pattern, etching the conductive layer, the dielectric layer, and the thermally treated poly-silicon pattern to form a control gate, a dielectric pattern, and a floating gate respectively.
Abstract translation: 提供制造半导体器件的方法。 该方法包括在衬底上形成掺杂有第一p型掺杂剂的多晶硅层,蚀刻多晶硅层和衬底以形成多晶硅图案和沟槽,从而形成覆盖层的下侧壁的器件隔离图案 沟槽中的多晶硅图案,在包括第二p型掺杂剂的气体中热处理多晶硅图案,在热处理的多晶硅图案和器件隔离图案上形成电介质层和导电层,蚀刻导电 层,电介质层和热处理的多晶硅图案,以分别形成控制栅极,电介质图案和浮置栅极。
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7.
公开(公告)号:US20140091460A1
公开(公告)日:2014-04-03
申请号:US14094996
申请日:2013-12-03
Applicant: Samsung Electronics Co., Ltd.
Inventor: Chung-Sun LEE , Jung-Hwan KIM , Tae-Hong KIM , Hyun-Jung SONG , Sun-Pil YOUN
IPC: H01L25/065
CPC classification number: H01L25/0657 , H01L21/563 , H01L23/3128 , H01L23/3135 , H01L24/13 , H01L24/16 , H01L24/73 , H01L24/97 , H01L25/0655 , H01L25/105 , H01L25/50 , H01L2224/0401 , H01L2224/0557 , H01L2224/13025 , H01L2224/16145 , H01L2224/16146 , H01L2224/16225 , H01L2224/16235 , H01L2224/16265 , H01L2224/17181 , H01L2224/32145 , H01L2224/32225 , H01L2224/45139 , H01L2224/48227 , H01L2224/73204 , H01L2224/73207 , H01L2224/73253 , H01L2224/73265 , H01L2224/97 , H01L2225/0651 , H01L2225/06513 , H01L2225/06517 , H01L2225/06541 , H01L2225/06586 , H01L2225/06589 , H01L2225/1023 , H01L2225/1058 , H01L2225/1094 , H01L2924/00014 , H01L2924/15311 , H01L2924/181 , H01L2924/18161 , H01L2924/3511 , H01L2924/00 , H01L2924/00012 , H01L2224/05552 , H01L2224/81 , H01L2224/83
Abstract: A stack of semiconductor chips, a semiconductor device, and a method of manufacturing are disclosed. The stack of semiconductor chips may comprise a first chip of the stack, a second chip of the stack over the first chip, conductive bumps, a homogeneous integral underfill material, and a molding material. The conductive bumps may extend between an upper surface of the first chip and a lower surface of the second chip. The homogeneous integral underfill material may be interposed between the first chip and the second chip, encapsulate the conductive bumps, and extend along sidewalls of the second chip. The homogeneous integral underfill material may have an upper surface extending in a direction parallel to an upper surface of the second chip and located adjacent the upper surface of the second chip. The molding material may be on outer side surfaces of the homogeneous integral underfill material above the upper surface of the first chip, wherein, in view of a first cross sectional profile, the molding material is separated from sidewalls of the second chip by the homogeneous integral underfill material such that the molding material does not contact sidewalls of the second chip.
Abstract translation: 公开了一叠半导体芯片,半导体器件和制造方法。 堆叠的半导体芯片可以包括堆叠的第一芯片,第一芯片上的堆叠的第二芯片,导电凸块,均匀的整体底部填充材料和模制材料。 导电凸块可以在第一芯片的上表面和第二芯片的下表面之间延伸。 均匀整体的底部填充材料可以插入在第一芯片和第二芯片之间,封装导电凸块,并且沿着第二芯片的侧壁延伸。 均匀整体的底部填充材料可以具有在与第二芯片的上表面平行的方向上延伸并且位于第二芯片的上表面附近的上表面。 模制材料可以在第一芯片的上表面之上的均匀整体底部填充材料的外侧表面上,其中,从第一横截面轮廓的角度来看,模制材料通过均匀的积分与第二芯片的侧壁分离 底部填充材料,使得模制材料不接触第二芯片的侧壁。
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公开(公告)号:US20220384482A1
公开(公告)日:2022-12-01
申请号:US17881707
申请日:2022-08-05
Applicant: Samsung Electronics Co., Ltd.
Inventor: Jung-Hwan KIM , Sunggil KIM , Dongkyum KIM , Seulye KIM , Ji-Hoon CHOI
IPC: H01L27/11582 , H01L27/1157 , H01L27/11565 , H01L29/792 , H01L29/04 , H01L29/423 , H01L27/11573
Abstract: A three-dimensional semiconductor memory device is disclosed. The device may include a first source conductive pattern comprising a polycrystalline material including first crystal grains on a substrate, the substrate may comprising a polycrystalline material including second crystal grains, a grain size of the first crystal grains being smaller than a grain size of the second crystal grains, a stack including a plurality of gate electrodes, the plurality of gates stacked on the first source conductive pattern, and a vertical channel portion penetrating the stack and the first source conductive pattern, and the vertical channel portion being in contact with a side surface of the first source conductive pattern.
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公开(公告)号:US20220115294A1
公开(公告)日:2022-04-14
申请号:US17331951
申请日:2021-05-27
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Sunggil KIM , Jinhyuk KIM , Jung-Hwan KIM
IPC: H01L23/48 , H01L29/78 , H01L27/11556 , H01L27/11582 , H01L25/065
Abstract: A semiconductor device and an electronic system, the device including a substrate including a cell array region and a connection region; a stack including electrodes vertically stacked on the substrate; a source conductive pattern on the cell array region and between the substrate and the stack; a dummy insulating pattern on the connection region and between the substrate and the stack; a conductive support pattern between the stack and the source conductive pattern and between the stack and the dummy insulating pattern; a plurality of first vertical structures on the cell array region and penetrating the electrode structure, the conductive support pattern, and the source structure; and a plurality of second vertical structures on the connection region and penetrating the electrode structure, the conductive support pattern, and the dummy insulating pattern.
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公开(公告)号:US20210217771A1
公开(公告)日:2021-07-15
申请号:US17195756
申请日:2021-03-09
Applicant: Samsung Electronics Co., Ltd.
Inventor: Ji-Hoon CHOI , Sung-Gil KIM , Jung-Hwan KIM , Chan-Hyoung KIM , Woo-Sung LEE
IPC: H01L27/11582 , H01L27/1157 , H01L27/11556 , H01L27/11524
Abstract: A vertical memory device may include a channel connecting pattern on a substrate, gate electrodes spaced apart from each other in a first direction on the channel connecting pattern, and a channel extending in the first direction through the gate electrodes and the channel connecting pattern. Each of the electrodes may extend in a second direction substantially parallel to an upper surface of the substrate, and the first direction may be substantially perpendicular to the upper surface of the substrate. An end portion of the channel connecting pattern in a third direction substantially parallel to the upper surface of the substrate and substantially perpendicular to the second direction may have an upper surface higher than an upper surface of other portions of the channel connecting pattern except for a portion thereof adjacent the channel.
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