Magnetic recording disk and disk drive with improved head-disk interface
    11.
    发明授权
    Magnetic recording disk and disk drive with improved head-disk interface 失效
    磁记录磁盘和磁盘驱动器,具有改进的磁头磁盘接口

    公开(公告)号:US5569506A

    公开(公告)日:1996-10-29

    申请号:US132543

    申请日:1993-10-06

    摘要: A thin film metal alloy magnetic recording disk has an improved protective overcoat that creates a low level of static friction in a contact start/stop disk drive. The disk has an amorphous carbon overcoat containing a transition liquid metal interlayer (TLMI). The carbon overcoat is formed by depositing an initial amorphous carbon layer to a first thickness, then depositing an interlayer material of a low-melting point metal or metal alloy (such as In or In--Nb) while maintaining the temperature of the disk substrate above the melting point of the interlayer material, and then depositing a top additional layer of amorphous carbon. Because the initial carbon layer presents a nonwetting surface, the interlayer material "balls up" on the carbon and forms discontinuous spheres of the interlayer material. The additional top layer of carbon bonds to the initial carbon layer and to the metal or metal alloy spheres. The completed disk protective overcoat presents a continuous but textured surface of amorphous carbon for the head-disk interface in the disk drive.

    摘要翻译: 薄膜金属合金磁记录盘具有改进的保护外涂层,在接触启动/停止磁盘驱动器中产生低水平的静摩擦力。 盘具有含有过渡液态金属中间层(TLMI)的无定形碳外涂层。 通过将初始无定形碳层沉积到第一厚度,然后沉积低熔点金属或金属合金(例如In或In-Nb)的中间层材料,同时将盘基底的温度保持在上方而形成碳覆盖层 中间层材料的熔点,然后沉积顶层附加的无定形碳层。 由于初始碳层呈现不润湿表面,所以中间层材料在碳上“起球”并形成中间层材料的不连续球体。 附加的顶层碳键到初始碳层和金属或金属合金球体。 完成的磁盘保护外套为磁盘驱动器中的磁头 - 磁盘接口呈现无定形碳的连续但有纹理的表面。

    In-situ texturing of a thin film magnetic medium
    12.
    发明授权
    In-situ texturing of a thin film magnetic medium 失效
    薄膜磁介质的原位变形

    公开(公告)号:US5399386A

    公开(公告)日:1995-03-21

    申请号:US997843

    申请日:1992-12-29

    IPC分类号: G11B5/73 G11B5/84 H01F10/02

    CPC分类号: G11B5/7325 G11B5/8404

    摘要: A magnetic storage medium is composed of a non-wettable substrate upon which a transient liquid metal layer is deposited and maintained as a distribution of discontinuous liquid features. An intermediate metal layer is subsequently deposited in-situ in an atmosphere comprising oxygen and at least one inert gas. A magnetic layer is then deposited on the intermediate metal layer. The surface topology and magnetic characteristics of the medium are controlled by adjusting the thickness of the TLM layer and the conditions under which the TLM layer, intermediate metal layer, and magnetic layer are deposited.

    摘要翻译: 磁性存储介质由不可润湿的基底组成,其上沉积有瞬态液态金属层并保持为不连续液体特征的分布。 随后在包含氧和至少一种惰性气体的气氛中原位沉积中间金属层。 然后在中间金属层上沉积磁性层。 通过调整TLM层的厚度和沉积TLM层,中间金属层和磁性层的条件来控制介质的表面拓扑结构和磁特性。

    Micro-electro-mechanical system (MEMS) and related actuator bumps, methods of manufacture and design structures
    14.
    发明授权
    Micro-electro-mechanical system (MEMS) and related actuator bumps, methods of manufacture and design structures 有权
    微机电系统(MEMS)及相关执行器凸块,制造和设计结构的方法

    公开(公告)号:US09120667B2

    公开(公告)日:2015-09-01

    申请号:US13164331

    申请日:2011-06-20

    IPC分类号: H02N1/00 B81B3/00 H05K13/00

    摘要: Micro-Electro-Mechanical System (MEMS) structures, methods of manufacture and design structures are provided. The method of forming a MEMS structure includes forming fixed actuator electrodes and a contact point on a substrate. The method further includes forming a MEMS beam over the fixed actuator electrodes and the contact point. The method further includes forming an array of actuator electrodes in alignment with portions of the fixed actuator electrodes, which are sized and dimensioned to prevent the MEMS beam from collapsing on the fixed actuator electrodes after repeating cycling. The array of actuator electrodes are formed in direct contact with at least one of an underside of the MEMS beam and a surface of the fixed actuator electrodes.

    摘要翻译: 提供微机电系统(MEMS)结构,制造方法和设计结构。 形成MEMS结构的方法包括在基板上形成固定的致动器电极和接触点。 该方法还包括在固定的致动器电极和接触点上形成MEMS光束。 该方法还包括形成与固定致动器电极的部分对准的致动器电极阵列,其尺寸和尺寸被设计成防止MEMS光束在重复循环之后塌陷在固定的致动器电极上。 致动器电极阵列形成为与MEMS光束的下侧和固定的致动器电极的表面中的至少一个直接接触。

    MICRO-ELECTRO-MECHANICAL STRUCTURE (MEMS) CAPACITOR DEVICES, CAPACITOR TRIMMING THEREOF AND DESIGN STRUCTURES
    16.
    发明申请
    MICRO-ELECTRO-MECHANICAL STRUCTURE (MEMS) CAPACITOR DEVICES, CAPACITOR TRIMMING THEREOF AND DESIGN STRUCTURES 有权
    微电子机械结构(MEMS)电容器件,电容器及其设计结构

    公开(公告)号:US20130154054A1

    公开(公告)日:2013-06-20

    申请号:US13326409

    申请日:2011-12-15

    IPC分类号: H01L29/02 G06F17/50

    摘要: Micro-electro-mechanical structure (MEMS) capacitor devices, capacitor trimming for MEMS capacitor devices, and design structures are disclosed. The method includes identifying a process variation related to a formation of micro-electro-mechanical structure (MEMS) capacitor devices across a substrate. The method further includes providing design offsets or process offsets in electrode areas of the MEMS capacitor devices across the substrate, based on the identified process variation.

    摘要翻译: 公开了微电子机械结构(MEMS)电容器件,用于MEMS电容器件的电容器微调和设计结构。 该方法包括识别跨越衬底形成微机电结构(MEMS)电容器器件的过程变化。 该方法还包括基于所识别的过程变化,在跨越衬底的MEMS电容器器件的电极区域中提供设计偏移或过程偏移。