公开(公告)号：US07109483B2

公开(公告)日：2006-09-19

申请号：US09985331

申请日：2001-11-02

Applicant: Mamoru Nakasuji ,  Nobuharu Noji ,  Tohru Satake ,  Toshifumi Kimba ,  Masahiro Hatakeyama ,  Kenji Watanabe ,  Hirosi Sobukawa ,  Tsutomu Karimata ,  Shoji Yoshikawa ,  Shin Oowada ,  Mutsumi Saito ,  Muneki Hamashima

Inventor： Mamoru Nakasuji ,  Nobuharu Noji ,  Tohru Satake ,  Toshifumi Kimba ,  Masahiro Hatakeyama ,  Kenji Watanabe ,  Hirosi Sobukawa ,  Tsutomu Karimata ,  Shoji Yoshikawa ,  Shin Oowada ,  Mutsumi Saito ,  Muneki Hamashima

IPC: H01J37/06

CPC classification number: G01N23/225 ,  H01J37/06 ,  H01J37/073 ,  H01J37/185 ,  H01J37/20 ,  H01J37/222 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/082 ,  H01J2237/202 ,  H01J2237/20228 ,  H01J2237/204 ,  H01J2237/22 ,  H01J2237/24564 ,  H01J2237/2806 ,  H01J2237/2816 ,  H01J2237/2817

Abstract: The present invention relates to a substrate inspection apparatus for inspecting a pattern formed on a substrate by irradiating a charged particle beam onto the substrate. The substrate inspection apparatus comprises: an electron beam apparatus including a charged particle beam source for emitting a charged particle beam, a primary optical system for irradiating the charged particle beam onto the substrate, a secondary optical system into which a secondary charged particle beam is introduced, the secondary charged particle beam being emitted from the substrate by an irradiation of the charged particle beam, a detection system for detecting the secondary charged particle beam introduced into said secondary optical system and outputting as an electric signal, and a process control system for processing and evaluating the electric signal; a stage unit for holding the substrate and moving the substrate relatively to said electron beam apparatus; a working chamber capable of shielding at least an upper region of the stage unit form outside to control under desired atmosphere; and a substrate load-unload mechanism for transferring the substrate into or out of the stage.

公开(公告)号：US20060169900A1

公开(公告)日：2006-08-03

申请号：US11378465

申请日：2006-03-20

Applicant: Nobuharu Noji ,  Tohru Satake ,  Hirosi Sobukawa ,  Toshifumi Kimba ,  Masahiro Hatakeyama ,  Shoji Yoshikawa ,  Takeshi Murakami ,  Kenji Watanabe ,  Tsutomu Karimata ,  Kenichi Suematsu ,  Yutaka Tabe ,  Ryo Tajima ,  Keiichi Tohyama

Inventor： Nobuharu Noji ,  Tohru Satake ,  Hirosi Sobukawa ,  Toshifumi Kimba ,  Masahiro Hatakeyama ,  Shoji Yoshikawa ,  Takeshi Murakami ,  Kenji Watanabe ,  Tsutomu Karimata ,  Kenichi Suematsu ,  Yutaka Tabe ,  Ryo Tajima ,  Keiichi Tohyama

IPC: G21K7/00

CPC classification number: H01J37/20 ,  G01N23/2204 ,  G01N23/225 ,  H01J37/05 ,  H01J37/28 ,  H01J2237/202 ,  H01J2237/2441 ,  H01J2237/2446 ,  H01J2237/2801 ,  H01J2237/2817 ,  H01L21/6833 ,  H01L2223/54466

Abstract: A system for further enhancing speed, i.e. improving throughput in a SEM-type inspection apparatus is provided. An inspection apparatus for inspecting a surface of a substrate produces a crossover from electrons emitted from an electron beam source 25•1, then forms an image under a desired magnification in the direction of a sample W to produce a crossover. When the crossover is passed, electrons as noises are removed from the crossover with an aperture, an adjustment is made so that the crossover becomes a parallel electron beam to irradiate the substrate in a desired sectional form. The electron beam is produced such that the unevenness of illuminance is 10% or less. Electrons emitted from the sample W are detected by a detector 25•11.

公开(公告)号：US06998611B2

公开(公告)日：2006-02-14

申请号：US10234152

申请日：2002-09-05

Applicant: Mamoru Nakasuji ,  Takao Kato ,  Kenji Watanabe ,  Shoji Yoshikawa ,  Tohru Satake ,  Nobuharu Noji

Inventor： Mamoru Nakasuji ,  Takao Kato ,  Kenji Watanabe ,  Shoji Yoshikawa ,  Tohru Satake ,  Nobuharu Noji

IPC: G01N23/00 ,  H01L21/66 ,  H01G23/00

CPC classification number: B82Y10/00 ,  G01N23/225 ,  G01R31/307 ,  H01J37/242 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/221 ,  H01J2237/24507 ,  H01J2237/2817

Abstract: An electron beam apparatus is provided for reliably measuring a potential contrast and the like at a high throughput in a simple structure. The electron beam apparatus for irradiating a sample, such as a wafer, formed with a pattern with an electron beam to evaluate the sample comprises an electron-optical column for accommodating an electron beam source, an objective lens, an ExB separator, and a secondary electron beam detector; a stage for holding the sample, and relatively moving the sample with respect to the electron-optical column; a working chamber for accommodating the stage and capable of controlling the interior thereof in a vacuum atmosphere; a loader for supplying a sample to the stage; a voltage applying mechanism for applying a voltage to the sample, and capable of applying at least two voltages to a lower electrode of the objective lens; and an alignment mechanism for measuring a direction in which dies are arranged on the sample. When the sample is evaluated, a direction in which the stage is moved is corrected to align with the direction in which the dies are arranged.

公开(公告)号：US4577320A

公开(公告)日：1986-03-18

申请号：US575042

申请日：1984-01-30

Applicant: Shoji Yoshikawa ,  Masaharu Sakamoto

Inventor： Shoji Yoshikawa ,  Masaharu Sakamoto

IPC: H01L33/00 ,  G11B7/1263 ,  G11B7/1267 ,  H01S5/06 ,  H01S5/0683 ,  H01S3/13

CPC classification number: H01S5/06832 ,  G11B7/125

Abstract: A light power controlling apparatus contains a semiconductor laser and a photosensor for receiving part of light emitted from the semiconductor laser to produce a corresponding electrical signal. The semiconductor laser is connected to first and second current circuits. The first current circuit averages a voltage signal based on the electrical signal of the photosensor by a first low-pass filter, thereby to have a detected voltage. The detected voltage is compared with a desired voltage by an error amplifier. The error amplifier produces a signal representing a difference between the detected voltage and the desired voltage. The difference signal is integrated by an integrator. According to the integrated signal, the first current circuit supplies a forward current to the semiconductor laser. The second current circuit is set at a peak power value in a modulating mode according to a voltage signal of a peak power setting member. The second current circuit supplies to the semiconductor laser a forward current according to a modulating signal, with superposing on the forward current of the first current circuit. The modulating signal is averaged by a second low pass filter. A voltage representing the product of the averaged value and the peak power value is added to the desired value. The sum voltage is then supplied to the error amplifier where it is compared with the detected voltage.

Abstract translation: 光功率控制装置包含半导体激光器和用于接收从半导体激光器发射的一部分光以产生相应的电信号的光电传感器。 半导体激光器连接到第一和第二电流电路。 第一电流电路根据光传感器的电信号通过第一低通滤波器平均电压信号，从而具有检测电压。 通过误差放大器将检测到的电压与期望的电压进行比较。 误差放大器产生表示检测到的电压和期望电压之间的差的信号。 差分信号由积分器积分。 根据积分信号，第一电流电路向半导体激光器提供正向电流。 根据峰值功率设定部件的电压信号，将第二电流电路设定在调制模式的峰值功率值。 第二电流电路根据调制信号向半导体激光器提供正向电流，并叠加在第一电流电路的正向电流上。 调制信号由第二低通滤波器平均。 表示平均值和峰值功率值的乘积的电压被加到期望值。 然后将和电压提供给误差放大器，在其中与检测到的电压进行比较。

公开(公告)号：US4505585A

公开(公告)日：1985-03-19

申请号：US362680

申请日：1982-03-29

Applicant: Shoji Yoshikawa ,  Ken Ohshima ,  Hiroshi Kodama ,  Kunio Yamamiya ,  Masaharu Sakamoto ,  Kiichi Kato

Inventor： Shoji Yoshikawa ,  Ken Ohshima ,  Hiroshi Kodama ,  Kunio Yamamiya ,  Masaharu Sakamoto ,  Kiichi Kato

IPC: G01N21/84 ,  G01N21/88 ,  G01N21/95 ,  G06T7/00 ,  G11B7/0037 ,  G01B11/30 ,  G06F15/20

CPC classification number: G01N21/9506 ,  G11B7/00375 ,  G01N2021/8864 ,  G01N21/9501

Abstract: In a system for detecting defects on an optical surface, a disk to be inspected is mounted on a turntable, and is attracted on the surface of the turntable. On the disk is provided an optical head having an objective lens located at its focal point on the surface of the disk. A laser beam emitted from a laser unit is projected through the optical head onto the disk, is reflected on the disk, and is then directed through the optical head to a photo detector. The optical head is moved in the radial direction of the disk as the turntable is rotated, and the disk is helically scanned by the laser beam. Only a defect signal is extracted from an electrical signal generated from the photo detector in a defect signal generator. The defect signal is compared in a data processing unit, and is converted to defect information of different size. When it is judged that a prescribed region on the surface of the disk is scanned by a position signal from a position sensor for detecting the position of the optical head, the data processing unit generates an address, and the defect information is stored in each size in specific assigned locations of the RAM. The defect information thus stored is displayed on a CRT or is printed out by a printer.

Abstract translation: 在用于检测光学表面上的缺陷的系统中，待检查的盘安装在转盘上，并且被吸引在转台的表面上。 在光盘上设置有一个光学头，该光学头具有位于其表面上的焦点处的物镜。 从激光单元发射的激光束通过光头投影到盘上，在盘上被反射，然后被引导通过光头到光检测器。 当转盘旋转时，光头在盘的径向上移动，并且盘被激光束螺旋扫描。 在缺陷信号发生器中仅从光电检测器产生的电信号中提取缺陷信号。 在数据处理单元中比较缺陷信号，并将其转换为不同大小的缺陷信息。 当通过来自用于检测光头的位置的位置传感器的位置信号来判断盘的表面上的规定区域被扫描时，数据处理单元生成地址，并且以每个尺寸存储缺陷信息 在RAM的特定分配位置。 由此存储的缺陷信息显示在CRT上，或由打印机打印出来。

公开(公告)号：US4499514A

公开(公告)日：1985-02-12

申请号：US362614

申请日：1982-03-29

Applicant: Kunio Yamamiya ,  Hiroshi Kodama ,  Ken Ohshima ,  Shoji Yoshikawa ,  Kiichi Kato ,  Masaharu Sakamoto

Inventor： Kunio Yamamiya ,  Hiroshi Kodama ,  Ken Ohshima ,  Shoji Yoshikawa ,  Kiichi Kato ,  Masaharu Sakamoto

IPC: G11B17/028 ,  G11B19/20 ,  G11B23/00 ,  G11B25/04 ,  G11B5/012

CPC classification number: G11B17/0282 ,  G11B19/2009 ,  G11B23/00 ,  G11B25/043

Abstract: A disc drive apparatus for driving a disc selected from discs of various diameters with and without a central hole comprises: a turntable with a hole at the center of rotation thereof; a turntable support for rotatably supporting the turntable; a motor for driving the turntable; a centering member to be detachably inserted in the hole of the turntable and for mounting a disc with a central hole; a plurality of elastic disc support members which are coaxial with the center of rotation of the turntable, which extend from the surface of the turntable, and which form a plurality of annular shapes; centering index marks, disposed on the turntable, for centering a disc without a central hole; a vacuum pump; and suction channels, one end of which is open to the surface of the turntable and the other end of which is connected to the vacuum pump, for fixing on some of the disc support members the disc selected from discs of various diameters with and without a central hole and placed on some of said disc support members.

Abstract translation: 一种盘驱动装置，用于驱动选自具有和不具有中心孔的各种直径的盘的盘，包括：具有在其旋转中心的孔的转台; 用于可旋转地支撑转盘的转盘支撑件; 用于驱动转台的电机; 定心构件可拆卸地插入转盘的孔中并用于安装具有中心孔的盘; 与转盘的旋转中心同轴的多个弹性盘支撑构件，其从转台的表面延伸并且形成多个环形形状; 设置在转盘上的定心折痕标记，用于使没有中心孔的圆盘定心; 真空泵; 以及抽吸通道，其一端通向转台的表面，另一端连接到真空泵，用于将一些盘支撑件固定在盘片上，该碟片选自具有和不具有 中心孔并放置在一些所述盘支撑构件上。

公开(公告)号：US08497476B2

公开(公告)日：2013-07-30

申请号：US13420731

申请日：2012-03-15

Applicant: Masahiro Hatakeyama ,  Shoji Yoshikawa ,  Takeshi Murakami ,  Kenji Watanabe ,  Yoshihiko Naito ,  Yasushi Toma ,  Tsutomu Karimata ,  Takehide Hayashi ,  Kiwamu Tsukamoto ,  Tatsuya Kohama ,  Noboru Kobayashi

Inventor： Masahiro Hatakeyama ,  Shoji Yoshikawa ,  Takeshi Murakami ,  Kenji Watanabe ,  Yoshihiko Naito ,  Yasushi Toma ,  Tsutomu Karimata ,  Takehide Hayashi ,  Kiwamu Tsukamoto ,  Tatsuya Kohama ,  Noboru Kobayashi

IPC: G01N23/225

CPC classification number: H01J37/073 ,  G01N23/22 ,  G01N23/223 ,  G01N23/2251 ,  G01N2223/611 ,  H01J1/34 ,  H01J37/09 ,  H01J37/10 ,  H01J37/20 ,  H01J37/222 ,  H01J37/244 ,  H01J37/265 ,  H01J37/28 ,  H01J37/29 ,  H01J2237/0048 ,  H01J2237/022 ,  H01J2237/032 ,  H01J2237/038 ,  H01J2237/045 ,  H01J2237/0458 ,  H01J2237/0473 ,  H01J2237/0492 ,  H01J2237/061 ,  H01J2237/06333 ,  H01J2237/166 ,  H01J2237/186 ,  H01J2237/2002 ,  H01J2237/2007 ,  H01J2237/2008 ,  H01J2237/2448 ,  H01J2237/2482 ,  H01J2237/2485 ,  H01J2237/2817 ,  H01J2237/2855 ,  H01J2237/2857

Abstract: An inspection device for inspecting a surface of an inspection object using a beam includes a beam generator capable of generating one of either charge particles or an electromagnetic wave as a beam, a primary optical system capable of guiding and irradiating the beam to the inspection object supported within a working chamber, a secondary optical system capable of including a first movable numerical aperture and a first detector which detects secondary charge particles generated from the inspection object, the secondary charge particles passing through the first movable numerical aperture, an image processing system capable of forming an image based on the secondary charge particles detected by the first detector; and a second detector arranged between the first movable numerical aperture and the first detector and which detects a location and shape at a cross over location of the secondary charge particles generated from the inspection object.

Abstract translation: 用于使用光束检查检查对象的表面的检查装置包括能够产生电荷粒子或电磁波之一作为光束的光束发生器，能够将所述光束引导并照射到被检查对象的主光学系统 在工作室内，能够包括第一可移动数值孔径的二次光学系统和检测从检查对象产生的二次电荷粒子的第一检测器，通过第一可移动数值孔径的二次电荷粒子，能够 基于由所述第一检测器检测到的次级电荷粒子形成图像; 以及第二检测器，其布置在第一可移动数值孔径和第一检测器之间，并且检测在从检查对象生成的次级充电颗粒的交叉位置处的位置和形状。

公开(公告)号：US08431892B2

公开(公告)日：2013-04-30

申请号：US12899270

申请日：2010-10-06

Applicant: Masahiro Hatakeyama ,  Shoji Yoshikawa ,  Kenichi Suematsu ,  Tsutomu Karimata ,  Nobuharu Noji

Inventor： Masahiro Hatakeyama ,  Shoji Yoshikawa ,  Kenichi Suematsu ,  Tsutomu Karimata ,  Nobuharu Noji

IPC: G01N23/00 ,  G21K7/00

CPC classification number: H01J37/261 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/2441 ,  H01J2237/2446

Abstract: An inspecting apparatus for reducing a time loss associated with a work for changing a detector is characterized by comprising a plurality of detectors 11, 12 for receiving an electron beam emitted from a sample W to capture image data representative of the sample W, and a switching mechanism M for causing the electron beam to be incident on one of the plurality of detectors 11, 12, where the plurality of detectors 11, 12 are disposed in the same chamber MC. The plurality of detectors 11, 12 can be an arbitrary combination of a detector comprising an electron sensor for converting an electron beam into an electric signal with a detector comprising an optical sensor for converting an electron beam into light and converting the light into an electric signal. The switching mechanism M may be a mechanical moving mechanism or an electron beam deflector.

Abstract translation: 用于减少与用于改变检测器的工作相关联的时间损失的检查装置的特征在于包括用于接收从样本W发射的电子束以捕获表示样本W的图像数据的多个检测器11,12，以及切换 机构M，用于使电子束入射到多个检测器11,12中的一个上，其中多个检测器11,12设置在同一室MC中。 多个检测器11,12可以是检测器的任意组合，该检测器包括用于将电子束转换为电信号的电子传感器，该检测器包括用于将电子束转换成光并将光转换成电信号的光学传感器 。 切换机构M可以是机械移动机构或电子束偏转器。

公开(公告)号：US07928382B2

公开(公告)日：2011-04-19

申请号：US12063604

申请日：2006-08-10

Applicant: Masahiro Hatakeyama ,  Shoji Yoshikawa ,  Kenichi Suematsu ,  Tsutomu Karimata ,  Nobuharu Noji

Inventor： Masahiro Hatakeyama ,  Shoji Yoshikawa ,  Kenichi Suematsu ,  Tsutomu Karimata ,  Nobuharu Noji

IPC: G01N23/00 ,  G21K7/00

CPC classification number: H01J37/261 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/2441 ,  H01J2237/2446

Abstract: An inspecting apparatus for reducing a time loss associated with a work for changing a detector is characterized by comprising a plurality of detectors 11, 12 for receiving an electron beam emitted from a sample W to capture image data representative of the sample W, and a switching mechanism M for causing the electron beam to be incident on one of the plurality of detectors 11, 12, where the plurality of detectors 11, 12 are disposed in the same chamber MC. The plurality of detectors 11, 12 can be an arbitrary combination of a detector comprising an electron sensor for converting an electron beam into an electric signal with a detector comprising an optical sensor for converting an electron beam into light and converting the light into an electric signal. The switching mechanism M may be a mechanical moving mechanism or an electron beam deflector.

Abstract translation: 用于减少与用于改变检测器的工作相关联的时间损失的检查装置的特征在于包括用于接收从样本W发射的电子束以捕获表示样本W的图像数据的多个检测器11,12，以及切换 机构M，用于使电子束入射到多个检测器11,12中的一个上，其中多个检测器11,12设置在同一室MC中。 多个检测器11,12可以是包括用于将电子束转换为电信号的电子传感器的检测器的任意组合，该检测器包括用于将电子束转换成光并将该光转换成电信号的光学传感器 。 切换机构M可以是机械移动机构或电子束偏转器。

公开(公告)号：US07888642B2

公开(公告)日：2011-02-15

申请号：US12188567

申请日：2008-08-08

Applicant: Mamoru Nakasuji ,  Nabuharu Noji ,  Tohru Satake ,  Masahiro Hatakeyama ,  Kenji Watanabe ,  Takao Kato ,  Hirosi Sobukawa ,  Tsutomu Karimata ,  Shoji Yoshikawa ,  Toshifumi Kimba ,  Shin Oowada ,  Mutsumi Saito ,  Muneki Hamashima

Inventor： Mamoru Nakasuji ,  Nabuharu Noji ,  Tohru Satake ,  Masahiro Hatakeyama ,  Kenji Watanabe ,  Takao Kato ,  Hirosi Sobukawa ,  Tsutomu Karimata ,  Shoji Yoshikawa ,  Toshifumi Kimba ,  Shin Oowada ,  Mutsumi Saito ,  Muneki Hamashima

IPC: H01J49/48 ,  G21K5/04

CPC classification number: B82Y10/00 ,  B82Y40/00 ,  G01N23/225 ,  H01J37/06 ,  H01J37/063 ,  H01J37/073 ,  H01J37/185 ,  H01J37/20 ,  H01J37/222 ,  H01J37/244 ,  H01J37/28 ,  H01J37/3174 ,  H01J2237/0435 ,  H01J2237/0635 ,  H01J2237/082 ,  H01J2237/202 ,  H01J2237/20228 ,  H01J2237/204 ,  H01J2237/22 ,  H01J2237/2446 ,  H01J2237/24485 ,  H01J2237/24564 ,  H01J2237/2806 ,  H01J2237/2816 ,  H01J2237/2817

Abstract: The present invention provides an electron beam apparatus for irradiating a sample with primary electron beams to detect secondary electron beams generated from a surface of the sample by the irradiation for evaluating the sample surface. In the electron beam apparatus, an electron gun has a cathode for emitting primary electron beams. The cathode includes a plurality of emitters for emitting primary electron beams, arranged apart from one another on a circle centered at an optical axis of a primary electro-optical system. The plurality of emitters are arranged such that when the plurality of emitters are projected onto a straight line parallel with a direction in which the primary electron beams are scanned, resulting points on the straight line are spaced at equal intervals.

Abstract translation: 本发明提供了一种用于用一次电子束照射样品的电子束装置，以通过用于评估样品表面的照射来检测从样品表面产生的二次电子束。 在电子束装置中，电子枪具有用于发射一次电子束的阴极。 阴极包括用于发射一次电子束的多个发射器，其以在主电光系统的光轴为中心的圆周彼此分开布置。 多个发射器被布置成使得当多个发射器投射到与一次电子束扫描的方向平行的直线上时，直线上的所得点以相等的间隔隔开。