Semiconductor device including low-K dielectric cap layer for gate electrodes and related methods
    273.
    发明授权
    Semiconductor device including low-K dielectric cap layer for gate electrodes and related methods 有权
    包括用于栅电极的低K电介质盖层和相关方法的半导体器件

    公开(公告)号:US08907427B2

    公开(公告)日:2014-12-09

    申请号:US13668376

    申请日:2012-11-05

    Inventor: John H Zhang

    Abstract: A semiconductor device may include a substrate, source and drain regions in the substrate, a recessed epitaxial channel layer in the substrate between the source and drain regions, and a high-K gate dielectric layer overlying the recessed epitaxial channel layer. The semiconductor device may further include a gate electrode overlying the high-K gate dielectric layer, a dielectric cap layer in contact with top and sidewall portions of the gate electrode, the dielectric cap layer having a lower dielectric constant than the high-K gate dielectric layer, and source and drain contacts coupled to the source and drain regions.

    Abstract translation: 半导体器件可以包括衬底,衬底中的源极和漏极区域,在源极和漏极区域之间的衬底中的凹陷的外延沟道层以及覆盖凹陷的外延沟道层的高K栅极电介质层。 半导体器件还可以包括覆盖高K栅极电介质层的栅电极,与栅电极的顶部和侧壁部分接触的电介质盖层,介电覆盖层具有比高K栅极电介质低的介电常数 层,以及耦合到源极和漏极区域的源极和漏极接触。

    METHOD FOR THE FORMATION OF FIN STRUCTURES FOR FINFET DEVICES
    274.
    发明申请
    METHOD FOR THE FORMATION OF FIN STRUCTURES FOR FINFET DEVICES 审中-公开
    用于形成FINFET器件的FIN结构的方法

    公开(公告)号:US20140353767A1

    公开(公告)日:2014-12-04

    申请号:US13906505

    申请日:2013-05-31

    Abstract: On a first semiconductor material substrate, an overlying sacrificial layer formed of a second semiconductor material is deposited. In a first region, a first semiconductor material region is formed over the sacrificial layer. In a second region, a second semiconductor material region is formed over the sacrificial layer. The first semiconductor material region is patterned to define a first FinFET fin. The second semiconductor material region is patterned to define a second FinFET fin. The fins are each covered with a cap and sidewall spacer. The sacrificial layer formed of the second semiconductor material is then selectively removed to form an opening below each of the first and second FinFET fins (with those fins being supported by the sidewall spacers). The openings below each of the fins are then filled with a dielectric material that serves to isolate the semiconductive materials of the fins from the substrate.

    Abstract translation: 在第一半导体材料基板上沉积由第二半导体材料形成的上覆牺牲层。 在第一区域中,在牺牲层上形成第一半导体材料区域。 在第二区域中,在牺牲层上形成第二半导体材料区域。 图案化第一半导体材料区域以限定第一FinFET鳍片。 图案化第二半导体材料区域以限定第二FinFET鳍片。 翅片各自被盖和侧壁间隔物覆盖。 然后选择性地去除由第二半导体材料形成的牺牲层,以在第一和第二FinFET鳍片下面形成开口(这些鳍片由侧壁间隔件支撑)。 然后每个翅片下面的开口填充有用于将鳍片的半导体材料与衬底隔离的介电材料。

    METHOD TO CO-INTEGRATE SiGe AND Si CHANNELS FOR FINFET DEVICES
    275.
    发明申请
    METHOD TO CO-INTEGRATE SiGe AND Si CHANNELS FOR FINFET DEVICES 有权
    用于融合FINFET器件的SiGe和Si沟道的方法

    公开(公告)号:US20140353760A1

    公开(公告)日:2014-12-04

    申请号:US13907613

    申请日:2013-05-31

    Abstract: A method for co-integrating finFETs of two semiconductor material types, e.g., Si and SiGe, on a bulk substrate is described. Fins for finFETs may be formed in an epitaxial layer of a first semiconductor type, and covered with an insulator. A portion of the fins may be removed to form voids in the insulator, and the voids may be filled by epitaxially growing a semiconductor material of a second type in the voids. The co-integrated finFETs may be formed at a same device level.

    Abstract translation: 描述了用于在体基板上将诸如Si和SiGe的两种半导体材料类型的finFET共集成的方法。 用于finFET的鳍可以形成在第一半导体类型的外延层中,并被绝缘体覆盖。 可以去除一部分翅片以在绝缘体中形成空隙,并且可以通过在空隙中外延生长第二类型的半导体材料来填充空隙。 共同集成的finFET可以形成在相同的器件级。

    GRAPHENE CAPPED HEMT DEVICE
    276.
    发明申请

    公开(公告)号:US20140353722A1

    公开(公告)日:2014-12-04

    申请号:US13907752

    申请日:2013-05-31

    Abstract: A graphene capped HEMT device and a method of fabricating same are disclosed. The graphene capped HEMT device includes one or more graphene caps that enhance device performance and/or reliability of an exemplary AlGaN/GaN heterostructure transistor used in high-frequency, high-energy applications, e.g., wireless telecommunications. The HEMT device disclosed makes use of the extraordinary material properties of graphene. One of the graphene caps acts as a heat sink underneath the transistor, while the other graphene cap stabilizes the source, drain, and gate regions of the transistor to prevent cracking during high-power operation. A process flow is disclosed for replacing a three-layer film stack, previously used to prevent cracking, with a one-atom thick layer of graphene, without otherwise degrading device performance. In addition, the HEMT device disclosed includes a hexagonal boron nitride adhesion layer to facilitate deposition of the compound nitride semiconductors onto the graphene.

    Abstract translation: 公开了石墨烯封盖HEMT器件及其制造方法。 石墨烯封盖的HEMT器件包括一个或多个石墨烯帽,其增强用于高频,高能量应用(例如无线电信)中的示例性AlGaN / GaN异质结构晶体管的器件性能和/或可靠性。 所公开的HEMT装置利用石墨烯的非凡材料特性。 其中一个石墨烯帽作为晶体管下面的散热器,而另一个石墨烯帽稳定晶体管的源极,漏极和栅极区域,以防止在大功率操作期间的开裂。 公开了一种工艺流程,用于用原子厚的石墨烯层替代先前用于防止裂纹的三层膜堆,而不会使装置性能降低。 此外,所公开的HEMT器件包括六边形氮化硼粘附层,以便于将复合氮化物半导体沉积到石墨烯上。

    METHOD FOR THE FORMATION OF NANO-SCALE ON-CHIP OPTICAL WAVEGUIDE STRUCTURES
    278.
    发明申请
    METHOD FOR THE FORMATION OF NANO-SCALE ON-CHIP OPTICAL WAVEGUIDE STRUCTURES 有权
    形成纳米片状光波导波长结构的方法

    公开(公告)号:US20140345517A1

    公开(公告)日:2014-11-27

    申请号:US13901298

    申请日:2013-05-23

    Inventor: Qing Liu

    Abstract: A strip of sacrificial semiconductor material is formed on top of a non-sacrificial semiconductor material substrate layer. A conformal layer of the non-sacrificial semiconductor material is epitaxially grown to cover the substrate layer and the strip of sacrificial semiconductor material. An etch is performed to selectively remove the strip of sacrificial semiconductor material and leave a hollow channel surrounded by the conformal layer and the substrate layer. Using an anneal, the conformal layer and the substrate layer are reflowed to produce an optical waveguide structure including the hollow channel.

    Abstract translation: 在非牺牲半导体材料衬底层的顶部上形成牺牲半导体材料条。 外延生长非牺牲半导体材料的保形层以覆盖基底层和牺牲半导体材料条。 执行蚀刻以选择性地去除牺牲半导体材料条并留下被保形层和基底层包围的中空通道。 使用退火,共形层和基底层被回流以产生包括中空通道的光波导结构。

Patent Agency Ranking