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    Method and apparatus for measuring the physical properties of micro region
    21.
    发明授权
    Method and apparatus for measuring the physical properties of micro region 失效
    测量微区物理性质的方法和装置

    公开(公告)号：US07385198B2

    公开(公告)日：2008-06-10

    申请号：US11326399

    申请日：2006-01-06

    申请人： Yoshifumi Taniguchi ,  Mikio Ichihashi ,  Masanari Kouguchi

    发明人： Yoshifumi Taniguchi ,  Mikio Ichihashi ,  Masanari Kouguchi

    IPC分类号： H01J37/26

    CPC分类号： H01J37/28 ,  G01L1/241 ,  G01L5/0047 ,  G01N23/20 ,  G01N23/20058 ,  G01N23/2251 ,  H01J37/2955 ,  H01J2237/24585 ,  H01J2237/2544 ,  H01J2237/2813 ,  H01L22/12 ,  H01L2924/0002 ,  H01L2924/00

    摘要： A method and apparatus for measuring the physical properties of a micro region measures the two-dimensional distribution of stress/strain in real time at high resolution and sensitivity and with a high level of measuring position matching. A sample is scanned and irradiated with a finely focused electron beam (23, 26), and the displacement of position of a diffraction spot (32, 33) is measured by a two-dimensional position-sensitive electron detector (13). The displacement amount is outputted as a voltage value that is then converted into the magnitude of the stress/strain according to the principle of a nano diffraction method, and the magnitude is displayed in synchronism with a sample position signal.

    摘要翻译： 用于测量微区物理特性的方法和装置以高分辨率和灵敏度实时测量应力/应变的二维分布以及高水平的测量位置匹配。 扫描样品并用精细聚焦的电子束（23,26）照射，并且通过二维位置敏感电子检测器（13）测量衍射光斑（32,33）的位置位移。 将位移量作为电压值输出，然后根据纳米衍射方法的原理将其转换为应力/应变的大小，并且与样本位置信号同步地显示幅度。

    Observation apparatus and observation method using an electron beam
    22.
    发明授权
    Observation apparatus and observation method using an electron beam 失效
    使用电子束的观察装置和观察方法

    公开(公告)号：US06750451B2

    公开(公告)日：2004-06-15

    申请号：US10183157

    申请日：2002-06-28

    申请人： Masanari Koguchi ,  Kuniyasu Nakamura ,  Kaoru Umemura ,  Yoshifumi Taniguchi ,  Mikio Ichihashi

    发明人： Masanari Koguchi ,  Kuniyasu Nakamura ,  Kaoru Umemura ,  Yoshifumi Taniguchi ,  Mikio Ichihashi

    IPC分类号： H01J3726

    CPC分类号： H01J37/2955 ,  H01J2237/2802

    摘要： Disclosed is an observation apparatus and method using an electron beam, capable of measuring stress and strain information on a crystal structure in a specimen using electron beam diffraction images. A method according to the invention includes mounting a specimen on a specimen stage; irradiating a predetermined area in the specimen with an electron beam while scanning the electron beam, and acquiring an enlarged image of a specimen internal structure in the predetermined area; irradiating a specific portion included in the predetermined area and acquiring a diffraction image showing the crystal structure in the specimen; extracting information on the crystal structure in the specimen; displaying the information of the crystal structure in the specimen so as to be superimposed on the acquired enlarged image. The observation method according to the invention can obtain information on the crystal structure in a specimen with a high degree of sensitivity and with a high level of resolution.

    摘要翻译： 公开了一种使用电子束的观测装置和方法，其能够使用电子束衍射图像测量样品中的晶体结构的应力和应变信息。 根据本发明的方法包括将样品安装在样品台上; 在扫描电子束的同时用电子束照射样本中的预定区域，并获取预定区域中的样本内部结构的放大图像; 照射包含在预定区域中的特定部分，并获取示出样品中的晶体结构的衍射图像; 提取样品中晶体结构的信息; 在样本中显示晶体结构的信息，以便叠加在所获取的放大图像上。 根据本发明的观察方法可以以高灵敏度和高分辨率获得关于样品中的晶体结构的信息。

    Electron microscope
    23.
    发明授权
    Electron microscope 失效
    电子显微镜

    公开(公告)号：US5552602A

    公开(公告)日：1996-09-03

    申请号：US398684

    申请日：1995-03-06

    申请人： Hiroshi Kakibayashi ,  Yasuhiro Mitsui ,  Hideo Tadokoro ,  Katsuhiro Kuroda ,  Masanari Koguchi ,  Kazutaka Tsuji ,  Tatsuo Makishima ,  Mikio Ichihashi ,  Shigeto Isakozawa

    发明人： Hiroshi Kakibayashi ,  Yasuhiro Mitsui ,  Hideo Tadokoro ,  Katsuhiro Kuroda ,  Masanari Koguchi ,  Kazutaka Tsuji ,  Tatsuo Makishima ,  Mikio Ichihashi ,  Shigeto Isakozawa

    IPC分类号： G01N23/04 ,  G01R31/305 ,  H01J37/26

    CPC分类号： G01R31/305 ,  G01N23/046 ,  G01N2223/419 ,  H01J2237/226

    摘要： 3-dimensional observation on the atomic arrangement and atomic species in a thin-film specimen as well as conventional electron microscope observations is carried out at high speed and accuracy by an electron microscope which measures electrons emitted at high angle from the specimen. For that purpose, the present invention provides a scanning transmission electron microscope having an electron detection device comprising a scintillator converting electrons detected thereby to photons, a photoconductive-film converting photons from the scintillator detected thereby to c.a. 1000 times as many electron-hole pairs as these photons (i.d. avalanche multiplication), an electron gun emitting an electron beam toward the photoconductive-film to detect the holes generated therein, and electron deflector electrodes deflecting the electron beam on the photoconductive-film. Avalanche multiplication in the photoconductive-film amplifies the signal of these photons at so high signal-to-noise ratio that the electron microscope in this invention can detect such weak electrons as emitted at high angle from the specimen at high sensitivity and resolution. Therefore this invention enables a scanning transmission electron microscope to obtain for example 3-dimensional image of point defects and impurity elements existing in joint interfaces and contacts in a ULSI device rapidly and accurately.

    摘要翻译： 通过电子显微镜以高速和准确的方式对薄膜样品中的原子排列和原子种类进行3维观察，以及常规的电子显微镜观察，测量从样品以高角度发射的电子。 为此目的，本发明提供了一种具有电子检测装置的扫描透射电子显微镜，该电子检测装置包括将由此检测的电子转化为光子的闪烁体，从其检测的闪烁体的光电导膜转换光子至c.a. 与这些光子（i.d.雪崩乘法）一样多的电子 - 空穴对的1000倍，向光电导膜发射电子束以检测其中产生的空穴的电子枪以及偏转电子束在光电导膜上的电子偏转器电极。 光电导膜中的雪崩乘法以如此高的信噪比放大了这些光子的信号，使得本发明的电子显微镜能够以高灵敏度和分辨率从样品中以高角度检测出这样的弱电子。 因此，本发明能够使扫描透射电子显微镜能够快速，准确地获得例如存在于ULSI装置的接合界面和触点中的点缺陷和杂质元素的3维图像。

    Electron lens
    24.
    发明授权
    Electron lens 失效
    电子透镜

    公开(公告)号：US5442182A

    公开(公告)日：1995-08-15

    申请号：US145161

    申请日：1993-11-03

    申请人： Toshiro Kubo ,  Toshiyuki Ohashi ,  Mikio Ichihashi ,  Yuji Sato

    发明人： Toshiro Kubo ,  Toshiyuki Ohashi ,  Mikio Ichihashi ,  Yuji Sato

    IPC分类号： G01Q30/02 ,  G01Q30/20 ,  H01J37/141

    CPC分类号： H01J37/141

    摘要： An electron lens comprising a first exciting coil, a second exciting coil, a casing for encompassing the first and second exciting coils, and an excitation control apparatus for controlling the excitation state of at least the first exciting coil independently of the second exciting coil. The excitation control apparatus independently controls currents applied to the first and second exciting coils, respectively. At this time, exothermy of each coil can be kept constant and thermal deformation of the casing can be prevented by keeping the sum of the absolute values of the currents applied to the coils.

    摘要翻译： 一种电子透镜，包括第一激励线圈，第二激励线圈，用于包围第一和第二激励线圈的壳体，以及用于独立于第二激励线圈来控制至少第一励磁线圈的激励状态的励磁控制装置。 励磁控制装置分别独立地控制施加到第一和第二励磁线圈的电流。 此时，可以通过保持施加到线圈的电流的绝对值的总和来保持每个线圈的放热恒定并且可以防止壳体的热变形。

    Field-emission transmission electron microscope and operation method thereof
    25.
    发明授权
    Field-emission transmission electron microscope and operation method thereof 失效
    场发射透射电子显微镜及其操作方法

    公开(公告)号：US5373158A

    公开(公告)日：1994-12-13

    申请号：US69838

    申请日：1993-06-01

    申请人： Hisaya Murakoshi ,  Mikio Ichihashi

    发明人： Hisaya Murakoshi ,  Mikio Ichihashi

    IPC分类号： H01J37/073 ,  H01J37/141 ,  H01J37/26

    CPC分类号： H01J37/26 ,  H01J2237/0492 ,  H01J2237/06341 ,  H01J2237/25

    摘要： An object of the present invention is to realize a field-emission transmission electron microscope which is able to cope with both observation of an electron-microscopic image of a high brightness and microanalysis. A low aberration condenser lens 4 is disposed at the farthest position from a specimen 7, and a short focal length lens 5 is disposed at the midpoint between the specimen 7 and the condenser lens 4. In the case of an observation of an electron-microscopic image, the condenser lens unit is operated for enlargement in which the condenser lens 4 and the condenser lens 5 are driven in an interlocking motion. When the size of a beam spot on a specimen is to be reduced, a condenser lens 6 disposed close to the specimen between the condenser lens 5 and the specimen 7 is driven to make the condenser lens unit be operated for reduction. The coexistence of a small illuminating angle and the illumination of a specimen with a fine beam spot is realized, which makes it possible for a field-emission transmission electron microscope to have both functions, being able to observe a bright electron microscopic image and to perform an element analysis.

    摘要翻译： 本发明的目的是实现能够应对高亮度和微量分析的电子显微图像的观察的场致发射透射电子显微镜。 低像差聚光透镜4设置在距样本7最远的位置，并且短焦距透镜5设置在样本7和聚光透镜4之间的中点。在观察电子显微镜的情况下 图像中，聚光透镜单元被操作以使聚光透镜4和聚光透镜5以互锁的方式驱动。 当要减小试样上的束斑的尺寸时，驱动设置在聚光透镜5和样品7之间的样本附近的聚光透镜6，以使聚光透镜单元被操作以进行还原。 实现了小的照明角度和具有精细光束点的样本的照射的共存，这使得场致发射透射电子显微镜具有两个功能，能够观察明亮的电子显微镜图像并执行 元素分析。

    Apparatus for focusing a charged particle beam onto a specimen
    26.
    发明授权
    Apparatus for focusing a charged particle beam onto a specimen 失效
    用于将带电粒子束聚焦到样本上的装置

    公开(公告)号：US4605860A

    公开(公告)日：1986-08-12

    申请号：US654457

    申请日：1984-09-26

    申请人： Satoru Fukuhara ,  Mikio Ichihashi ,  Hisaya Murakoshi ,  Shigemitsu Seitoh

    发明人： Satoru Fukuhara ,  Mikio Ichihashi ,  Hisaya Murakoshi ,  Shigemitsu Seitoh

    IPC分类号： H01J37/21 ,  H01J37/28 ,  H01J37/304 ,  G01K1/08 ,  H01J3/14

    CPC分类号： H01J37/304 ,  H01J37/21

    摘要： Disclosed is an apparatus for focusing a charged particle beam onto a speciman, which comprises a scanner for scanning a pre-formed standard pattern with a charged particle beam, a converging unit capable of converging the charged particle beam onto a specimen, a detector for detecting secondary charged particles emitted as a result of scanning the standard pattern by the scanner, a circuit for deriving a standard frequency component determined by the period of scanning with the charged particle beam and the shape of the portion of the standard pattern in the region being scanned with the charged particle beam, and a circuit cooperating with the converging unit for finding the maximum value of the amplitude of the standard frequency component thereby identifying attainment of focusing of the charged particle beam with high accuracy.

    摘要翻译： 公开了一种用于将带电粒子束聚焦到标本上的装置，其包括用于利用带电粒子束扫描预形成的标准图案的扫描器，能够将带电粒子束收敛到样本上的会聚单元，用于检测的检测器 作为由扫描仪扫描标准图案的结果而发射的二次带电粒子，用于导出由带电粒子束扫描的周期确定的标准频率分量的电路和被扫描的区域中的标准图案的部分的形状 带电粒子束，以及与会聚单元配合的电路，用于找到标准频率分量的振幅的最大值，从而以高精度识别带电粒子束的聚焦。

    Electron gun
    27.
    发明授权
    Electron gun 有权
    电子枪

    公开(公告)号：US08669535B2

    公开(公告)日：2014-03-11

    申请号：US13322025

    申请日：2010-04-14

    申请人： Mikio Ichihashi ,  Takashi Onishi ,  Shunichi Watanabe ,  Keiji Tamura

    发明人： Mikio Ichihashi ,  Takashi Onishi ,  Shunichi Watanabe ,  Keiji Tamura

    IPC分类号： H01J1/50

    CPC分类号： H01J37/063 ,  H01J37/073 ,  H01J37/141 ,  H01J2237/06316 ,  H01J2237/06341 ,  H01J2237/065 ,  H01J2237/26

    摘要： The present invention has an object to provide a cold cathode field-emission electron gun with low aberration, to thereby provide a high-brightness electron gun even in the case of a large current. The present invention provides a field-emission electron gun which extracts an electron beam from a cathode and converges the extracted electron beam, the field-emission electron gun including: a magnetic field lens which is provided such that the cathode is disposed inside of a magnetic field of the lens; and an extraction electrode for extracting electrons from the cathode, the extraction electrode being formed into a cylindrical shape without an aperture structure. The present invention can provide an electron gun having a function of converging an electron beam using a magnetic field, the electron gun which is capable of reducing an incidental electrostatic lens action and has small aberration and high brightness.

    摘要翻译： 本发明的目的是提供一种具有低像差的冷阴极场致发射电子枪，从而即使在大电流的情况下也提供高亮度电子枪。 本发明提供一种场致发射电子枪，其从阴极提取电子束并使所提取的电子束会聚，该场发射电子枪包括：磁场透镜，其被设置为使得阴极设置在磁性 镜头领域; 以及用于从阴极提取电子的引出电极，所述引出电极形成为没有孔结构的圆筒形状。 本发明可以提供一种电子枪，其具有使用磁场会聚电子束的功能，该电子枪能够减少偶然的静电透镜作用并且具有小的像差和高亮度。

    Method and apparatus for measuring the physical properties of micro region
    29.
    发明申请
    Method and apparatus for measuring the physical properties of micro region 失效
    测量微区物理性质的方法和装置

    公开(公告)号：US20060113473A1

    公开(公告)日：2006-06-01

    申请号：US11326399

    申请日：2006-01-06

    申请人： Yoshifumi Taniguchi ,  Mikio Ichihashi ,  Masanari Kouguchi

    发明人： Yoshifumi Taniguchi ,  Mikio Ichihashi ,  Masanari Kouguchi

    IPC分类号： G21K7/00

    CPC分类号： H01J37/28 ,  G01L1/241 ,  G01L5/0047 ,  G01N23/20 ,  G01N23/20058 ,  G01N23/2251 ,  H01J37/2955 ,  H01J2237/24585 ,  H01J2237/2544 ,  H01J2237/2813 ,  H01L22/12 ,  H01L2924/0002 ,  H01L2924/00

    摘要： A method and apparatus for measuring the physical properties of a micro region measures the two-dimensional distribution of stress/strain in real time at high resolution and sensitivity and with a high level of measuring position matching. A sample is scanned and irradiated with a finely focused electron beam (23, 26), and the displacement of position of a diffraction spot (32, 33) is measured by a two-dimensional position-sensitive electron detector (13). The displacement amount is outputted as a voltage value that is then converted into the magnitude of the stress/strain according to the principle of a nano diffraction method, and the magnitude is displayed in synchronism with a sample position signal.

    摘要翻译： 用于测量微区物理特性的方法和装置以高分辨率和灵敏度实时测量应力/应变的二维分布以及高水平的测量位置匹配。 扫描样品并用精细聚焦的电子束（23,26）照射，并且通过二维位置敏感电子检测器（13）测量衍射光斑（32,33）的位置位移。 将位移量作为电压值输出，然后根据纳米衍射方法的原理将其转换为应力/应变的大小，并且与样本位置信号同步地显示幅度。