公开(公告)号：US20090283693A1

公开(公告)日：2009-11-19

申请号：US12489105

申请日：2009-06-22

Applicant: David S.Y. Hsu ,  Jonathan L. Shaw

Inventor： David S.Y. Hsu ,  Jonathan L. Shaw

IPC: H01J27/00 ,  H01L33/00

CPC classification number: H01J49/168 ,  B82Y10/00 ,  H01J1/304 ,  H01J3/04 ,  H01J2201/30469 ,  H01L51/0048 ,  Y10S977/876 ,  Y10S977/936 ,  Y10S977/938

Abstract: Described herein is a field ionization and electron impact ionization device consisting of carbon nanotubes with microfabricated integral gates that is capable of producing short pulses of ions.

Abstract translation: 这里描述的是由能够产生短脉冲离子的具有微结构的整体门的碳纳米管组成的场电离和电子轰击电离装置。

公开(公告)号：US07609815B2

公开(公告)日：2009-10-27

申请号：US11757137

申请日：2007-06-01

Applicant: Ka-Ngo Leung ,  Qing Ji ,  William A. Barletta ,  Ximan Jiang ,  Lili Ji

Inventor： Ka-Ngo Leung ,  Qing Ji ,  William A. Barletta ,  Ximan Jiang ,  Lili Ji

IPC: H01J35/06

CPC classification number: G01N23/203 ,  B82Y10/00 ,  B82Y40/00 ,  G01V5/0008 ,  H01J3/025 ,  H01J3/04 ,  H01J27/024 ,  H01J35/00 ,  H01J37/045 ,  H01J37/077 ,  H01J37/08 ,  H01J37/3172 ,  H01J37/3174 ,  H01J37/3177 ,  H01J2235/06 ,  H01J2235/068 ,  H01J2237/0435 ,  H01J2237/061 ,  H01J2237/06366 ,  H01J2237/06375 ,  H01J2237/3171

Abstract: Techniques for controllably directing beamlets to a target substrate are disclosed. The beamlets may be either positive ions or electrons. It has been shown that beamlets may be produced with a diameter of 1 μm, with inter-aperture spacings of 12 μm. An array of such beamlets, may be used for maskless lithography. By step-wise movement of the beamlets relative to the target substrate, individual devices may be directly e-beam written. Ion beams may be directly written as well. Due to the high brightness of the beamlets from extraction from a multicusp source, exposure times for lithographic exposure are thought to be minimized. Alternatively, the beamlets may be electrons striking a high Z material for X-ray production, thereafter collimated to provide patterned X-ray exposures such as those used in CAT scans. Such a device may be used for remote detection of explosives.

Abstract translation: 公开了用于将子束可控地引导到目标衬底的技术。 子束可以是正离子或电子。 已经表明，可以制造直径为1um的子束，孔径间隔为12μm。 这种子束的阵列可用于无掩模光刻。 通过子束相对于目标衬底的逐步运动，各个器件可以被直接电子束写入。 离子束也可以直接写入。 由于从多焦源提取的子束的高亮度，认为光刻曝光的曝光时间被最小化。 或者，子束可以是撞击高Z材料用于X射线产生的电子，然后准直以提供图案化的X射线曝光，例如在CAT扫描中使用的那些。 这种装置可用于远程检测炸药。

公开(公告)号：US20080049888A1

公开(公告)日：2008-02-28

申请号：US11757137

申请日：2007-06-01

Applicant: Ka-Ngo Leung ,  Qing Ji ,  William Barletta ,  Ximan Jiang ,  Lili Ji

Inventor： Ka-Ngo Leung ,  Qing Ji ,  William Barletta ,  Ximan Jiang ,  Lili Ji

IPC: G21K1/02 ,  G01N23/203 ,  H01J37/08

CPC classification number: G01N23/203 ,  B82Y10/00 ,  B82Y40/00 ,  G01V5/0008 ,  H01J3/025 ,  H01J3/04 ,  H01J27/024 ,  H01J35/00 ,  H01J37/045 ,  H01J37/077 ,  H01J37/08 ,  H01J37/3172 ,  H01J37/3174 ,  H01J37/3177 ,  H01J2235/06 ,  H01J2235/068 ,  H01J2237/0435 ,  H01J2237/061 ,  H01J2237/06366 ,  H01J2237/06375 ,  H01J2237/3171

Abstract: Techniques for controllably directing beamlets to a target substrate are disclosed. The beamlets may be either positive ions or electrons. It has been shown that beamlets may be produced with a diameter of 1 μm, with inter-aperture spacings of 12 μm. An array of such beamlets, may be used for maskless lithography. By step-wise movement of the beamlets relative to the target substrate, individual devices may be directly e-beam written. Ion beams may be directly written as well. Due to the high brightness of the beamlets from extraction from a multicusp source, exposure times for lithographic exposure are thought to be minimized. Alternatively, the beamlets may be electrons striking a high Z material for X-ray production, thereafter collimated to provide patterned X-ray exposures such as those used in CAT scans. Such a device may be used for remote detection of explosives.

Abstract translation: 公开了用于将子束可控地引导到目标衬底的技术。 子束可以是正离子或电子。 已经表明，可以制造直径为1um的子束，孔径间隔为12μm。 这种子束的阵列可用于无掩模光刻。 通过子束相对于目标衬底的逐步运动，各个器件可以被直接电子束写入。 离子束也可以直接写入。 由于从多焦源提取的子束的高亮度，认为光刻曝光的曝光时间被最小化。 或者，子束可以是撞击高Z材料用于X射线产生的电子，然后准直以提供图案化的X射线曝光，例如在CAT扫描中使用的那些。 这种装置可用于远程检测炸药。

公开(公告)号：US20040222382A1

公开(公告)日：2004-11-11

申请号：US10786229

申请日：2004-02-26

Applicant: Ionfinity LLC

Inventor： Frank T. Hartley

IPC: H01J027/00

CPC classification number: H01J49/168 ,  G01N2223/612 ,  H01J3/027 ,  H01J3/04 ,  H01J27/02 ,  H01J27/26 ,  H01J37/08 ,  H01J49/0018 ,  H01J49/0427 ,  H01J2237/061 ,  H01J2237/0815 ,  H01J2237/317

Abstract: Devices are disclosed that incorporate an ionization device for generating ions and electrons having first and second conductive electrodes that are separated by less than the mean-free-path of molecules being ionized. Electrons generated by the ionization device may be used for applications such as light sources, electron bombardment sensors, thyratrons, vacuum tubes, plasma displays, and microwave switches, and ions generated by the ionization device may be used, inter alia, in connection with ion focused milling devices, maskless ion implantation devices, ion beam lithography devices, semiconductor mask modification devices, and semiconductor chip wiring devices. Methods of use and manufacture are also provided.

Abstract translation: 公开了包括用于产生离子的电离装置的装置，该离子和电子具有通过小于被离子化的分子的平均自由路径分开的第一和第二导电电极。 由电离装置产生的电子可用于诸如光源，电子轰击传感器，闸流管，真空管，等离子体显示器和微波开关等应用，并且离子化装置产生的离子尤其可以用于离子 聚焦铣削装置，无掩模离子注入装置，离子束光刻装置，半导体掩模修改装置和半导体芯片布线装置。 还提供了使用和制造方法。

公开(公告)号：US20180336375A1

公开(公告)日：2018-11-22

申请号：US16047155

申请日：2018-07-27

Applicant: Xyleco, Inc.

Inventor： Marshall Medoff

IPC: G06K5/02

CPC classification number: G06K5/02 ,  B32B29/002 ,  B32B2262/0276 ,  B32B2554/00 ,  C08B15/00 ,  C08J7/123 ,  C12M45/00 ,  C12M45/06 ,  C12P19/00 ,  D21H21/48 ,  D21H25/04 ,  G01N33/346 ,  G01N2223/1013 ,  G01N2223/102 ,  G03C11/02 ,  G06K5/00 ,  G21K5/00 ,  H01J3/02 ,  H01J3/04

Abstract: Methods of marking paper products and marked paper products are provided. Some methods include irradiating the paper product to alter the functionalization of the paper.

公开(公告)号：US09355806B2

公开(公告)日：2016-05-31

申请号：US13945589

申请日：2013-07-18

Applicant: Schlumberger Technology Corporation

Inventor： Brian Umbach

IPC: H01J1/94 ,  H01J9/18 ,  H01J43/00 ,  H01J1/18 ,  H01J3/04 ,  H01J35/06 ,  H05H3/06 ,  H01J1/16 ,  H01J27/02 ,  H01J3/02

CPC classification number: H01J1/94 ,  H01J1/16 ,  H01J1/18 ,  H01J3/027 ,  H01J3/04 ,  H01J9/18 ,  H01J27/022 ,  H01J35/06 ,  H01J43/00 ,  H05H3/06

Abstract: A cathode assembly is for use in a radiation generator and includes an ohmically heated cathode, and a support having formed therein a hole and a recess at least partially surrounding the hole. In addition, there is a mount coupled to the support. The mount includes a larger outer frame positioned within the recess, a smaller inner frame carrying the ohmically heated cathode and spaced apart from the larger outer frame, and a plurality of members coupling the smaller inner frame to the larger outer frame.

Abstract translation: 阴极组件用于辐射发生器中并且包括欧姆加热的阴极，以及在其中形成有孔和至少部分地围绕孔的凹部的支撑件。 另外，还有一个联接在支架上的支架。 安装座包括位于凹槽内的较大外框架，承载欧姆加热阴极并与较大外框架间隔开的较小内框架，以及将较小内框架连接到较大外框架的多个构件。

公开(公告)号：US09317722B2

公开(公告)日：2016-04-19

申请号：US14308156

申请日：2014-06-18

Applicant: XYLECO, INC.

Inventor： Marshall Medoff

IPC: D21H25/04 ,  G06K5/00 ,  D21H21/48 ,  G03C11/02 ,  G21K5/00 ,  G01N33/34 ,  C12M1/00 ,  H01J3/02 ,  H01J3/04 ,  C08B15/00 ,  C08J7/12

CPC classification number: G06K5/02 ,  B32B29/002 ,  B32B2262/0276 ,  B32B2554/00 ,  C08B15/00 ,  C08J7/123 ,  C12M45/00 ,  C12M45/06 ,  C12P19/00 ,  D21H21/48 ,  D21H25/04 ,  G01N33/346 ,  G01N2223/1013 ,  G01N2223/102 ,  G03C11/02 ,  G06K5/00 ,  G21K5/00 ,  H01J3/02 ,  H01J3/04

Abstract: Methods of marking paper products and marked paper products are provided. Some methods include irradiating the paper product to alter the functionalization of the paper.

公开(公告)号：US20150136967A1

公开(公告)日：2015-05-21

申请号：US14605985

申请日：2015-01-26

Applicant: Advanced Ion Beam Technology, Inc.

Inventor： Nicholas WHITE ,  Zhimin WAN ,  Erik COLLART

IPC: H01J37/05 ,  H01J37/147 ,  H01J37/30 ,  H01J37/317

CPC classification number: H01J37/05 ,  H01J3/04 ,  H01J3/26 ,  H01J37/1472 ,  H01J37/3007 ,  H01J37/3171 ,  H01J2237/04756 ,  H01J2237/053 ,  H01J2237/057 ,  H01J2237/151 ,  H01J2237/303 ,  H01J2237/31701

Abstract: A deceleration apparatus capable of decelerating a short spot beam or a tall ribbon beam is disclosed. In either case, effects tending to degrade the shape of the beam profile are controlled. Caps to shield the ion beam from external potentials are provided. Electrodes whose position and potentials are adjustable are provided, on opposite sides of the beam, to ensure that the shape of the decelerating and deflecting electric fields does not significantly deviate from the optimum shape, even in the presence of the significant space-charge of high current low-energy beams of heavy ions.

Abstract translation: 公开了一种减速装置，能够使短点光束或高色带光束减速。 在任一种情况下，都会控制趋向于降低光束轮廓形状的效果。 提供了用于将离子束屏蔽到外部电位的盖子。 其位置和电位可调的电极设置在梁的相对两侧，以确保减速和偏转电场的形状不会显着偏离最佳形状，即使存在显着的空间电荷高 目前低能量的重离子束。

公开(公告)号：US20150090898A1

公开(公告)日：2015-04-02

申请号：US14236581

申请日：2012-08-03

Applicant: Richard John Futter ,  Andreas Markwitz

Inventor： Richard John Futter ,  Andreas Markwitz

IPC: H01J37/08 ,  H01J37/317

CPC classification number: H01J37/08 ,  C23C14/046 ,  C23C14/48 ,  C23C14/562 ,  H01J3/04 ,  H01J27/14 ,  H01J37/3171 ,  H01J2237/002 ,  H01J2237/061

Abstract: The invention provides an ion source comprising first and second cathode pole pieces spaced apart from one another to form a cavity therebetween, an edge of the first cathode pole piece being spaced apart from an edge of the second cathode pole piece to define an elongate cathode gap between the respective edges of the pole pieces, the elongate cathode gap having a longitudinal axis; at least one magnet arranged for magnetising the first and second cathode pole pieces with opposite magnetic polarities; an elongate anode located in the cavity, the anode being spaced apart from the first and second cathode pole pieces and having a longitudinal axis, the longitudinal axis of the elongate anode and the longitudinal axis of the elongate cathode gap substantially coplanar; a first electrical connection which extends from outside the cavity to the anode; and a gas feed conduit which extends from outside the cavity to inside the cavity for introducing a gas into the cavity.

Abstract translation: 本发明提供了一种离子源，其包括彼此间隔开以在其间形成空腔的第一和第二阴极极片，第一阴极极片的边缘与第二阴极极片的边缘间隔开以限定细长的阴极间隙 在极片的相应边缘之间，细长阴极间隙具有纵向轴线; 至少一个磁体布置成用于以相反的磁极性磁化所述第一和第二阴极极片; 位于空腔中的细长阳极，阳极与第一和第二阴极极片间隔开并且具有纵向轴线，细长阳极的纵向轴线和细长阴极间隙的纵向轴线基本上共面; 从空腔外部延伸到阳极的第一电连接; 以及从空腔外部延伸到腔体内部的气体供给导管，用于将气体引入空腔。

公开(公告)号：US08975052B2

公开(公告)日：2015-03-10

申请号：US14307922

申请日：2014-06-18

Applicant: Xyleco, Inc.

Inventor： Marshall Medoff

IPC: G06K5/00 ,  D21H21/48 ,  D21H25/04 ,  G03C11/02 ,  G21K5/00 ,  G01N33/34 ,  C12M1/00 ,  H01J3/02 ,  H01J3/04

CPC classification number: G06K5/02 ,  B32B29/002 ,  B32B2262/0276 ,  B32B2554/00 ,  C08B15/00 ,  C08J7/123 ,  C12M45/00 ,  C12M45/06 ,  C12P19/00 ,  D21H21/48 ,  D21H25/04 ,  G01N33/346 ,  G01N2223/1013 ,  G01N2223/102 ,  G03C11/02 ,  G06K5/00 ,  G21K5/00 ,  H01J3/02 ,  H01J3/04

Abstract: Methods of marking paper products and marked paper products are provided. Some methods include irradiating the paper product to alter the functionalization of the paper.