公开(公告)号：US09064577B2

公开(公告)日：2015-06-23

申请号：US13707067

申请日：2012-12-06

Applicant: Micron Technology, Inc.

Inventor： Han Zhao ,  Akira Goda ,  Krishna K. Parat ,  Aurelio Giancarlo Mauri ,  Haitao Liu ,  Toru Tanzawa ,  Shigekazu Yamada ,  Koji Sakui

IPC: G11C16/04 ,  G11C11/34 ,  G11C16/06 ,  G11C16/16

CPC classification number: G11C16/3459 ,  G11C8/08 ,  G11C16/0483 ,  G11C16/06 ,  G11C16/08 ,  G11C16/16 ,  G11C16/26 ,  G11C16/32 ,  G11C16/3445 ,  G11C2213/71

Abstract: Some embodiments include apparatuses and methods having a memory cell string including memory cells located in different levels of the apparatus and a data line coupled to the memory cell string. The memory cell string includes a pillar body associated with the memory cells. At least one of such apparatus can include a module configured to store information in a memory cell among memory cells and/or to determine a value of information stored in a memory cell among memory cells. The module can also be configured to apply a voltage having a positive value to the data line and/or a source to control a potential of the body.

Abstract translation: 一些实施例包括具有存储单元串的装置和方法，所述存储单元串包括位于装置的不同级别中的存储器单元和耦合到存储单元串的数据线。 存储单元串包括与存储单元相关联的柱体。 这种装置中的至少一个可以包括被配置为在存储器单元之间存储信息到存储器单元中的模块和/或确定存储器单元中存储在存储单元中的信息的值。 该模块还可以被配置为向数据线和/或源施加具有正值的电压以控制身体的电位。

公开(公告)号：US20140256098A1

公开(公告)日：2014-09-11

申请号：US14283291

申请日：2014-05-21

Applicant: MICRON TECHNOLOGY, INC.

Inventor： Sanh D. Tang ,  John Zahurak ,  Siddartha Kondoju ,  Haitao Liu ,  Nishant Sinha

IPC: H01L27/112 ,  H01L27/115

CPC classification number: H01L27/11293 ,  H01L21/823885 ,  H01L27/0688 ,  H01L27/101 ,  H01L27/105 ,  H01L27/1052 ,  H01L27/11206 ,  H01L27/11517 ,  H01L27/11524 ,  H01L27/11551 ,  H01L27/11563 ,  H01L27/11578 ,  H01L29/66825 ,  H01L29/66833 ,  H01L29/7881 ,  H01L29/792

Abstract: Memories and their formation are disclosed. One such memory has a first array of first memory cells extending in a first direction from a first surface of a semiconductor. A second array of second memory cells extends in a second direction, opposite to the first direction, from a second surface of the semiconductor. Both arrays may be non-volatile memory arrays. For example, one of the memory arrays may be a NAND flash memory array, while the other may be a one-time-programmable memory array.

Abstract translation: 记忆及其形成被披露。 一个这样的存储器具有从半导体的第一表面沿第一方向延伸的第一存储单元阵列。 第二阵列的第二存储单元从与半导体的第二表面在第二方向相反的第二方向延伸。 两个阵列可以是非易失性存储器阵列。 例如，存储器阵列之一可以是NAND快闪存储器阵列，而另一个可以是一次可编程存储器阵列。

公开(公告)号：US20130234206A1

公开(公告)日：2013-09-12

申请号：US13872762

申请日：2013-04-29

Applicant: MICRON TECHNOLOGY, INC.

Inventor： Haitao Liu ,  Jian Li ,  Chandra Mouli

IPC: H01L27/115

CPC classification number: G11C16/14 ,  G11C16/0483 ,  G11C16/10 ,  H01L27/11524 ,  H01L27/11556 ,  H01L27/1157 ,  H01L27/1158 ,  H01L27/11582 ,  H01L29/0847 ,  H01L29/16 ,  H01L29/161 ,  H01L29/20 ,  H01L29/2003 ,  H01L29/22 ,  H01L29/7926

Abstract: Memory devices are shown that include a body region and a connecting region that is formed from a semiconductor with a lower band gap than the body region. Connecting region configurations can provide increased gate induced drain leakage during an erase operation. Configurations shown can provide a reliable bias to a body region for memory operations such as erasing, and containment of charge in the body region during a boost operation.

Abstract translation: 示出了包括主体区域和由具有比身体区域更低带隙的半导体形成的连接区域的存储器件。 连接区域配置可以在擦除操作期间提供增加的栅极引起的漏极泄漏。 所显示的配置可以提供用于存储器操作的身体区域的可靠偏置，例如在升压操作期间擦除和容纳身体区域中的电荷。

公开(公告)号：US12219783B2

公开(公告)日：2025-02-04

申请号：US18519964

申请日：2023-11-27

Applicant: Micron Technology, Inc.

Inventor： Kamal M. Karda ,  Haitao Liu ,  Durai Vishak Nirmal Ramaswamy

IPC: H01L29/49 ,  G11C5/12 ,  G11C13/00 ,  H01L21/8234 ,  H01L27/12 ,  H01L29/66 ,  H01L29/78 ,  H01L29/786 ,  H10B63/00 ,  H10N70/00 ,  H10N70/20 ,  G11C11/16 ,  G11C11/22 ,  G11C11/401

Abstract: Semiconductor devices are disclosed. A semiconductor device may include a hybrid transistor configured in a vertical orientation. The hybrid transistor may include a gate electrode, a drain material, a source material, and a channel material operatively coupled between the drain material and the source material. The source material and the drain material include a first material and the channel material includes a second, different material.

公开(公告)号：US20240405066A1

公开(公告)日：2024-12-05

申请号：US18807639

申请日：2024-08-16

Applicant: Micron Technology, Inc.

Inventor： Gaurav Musalgaonkar ,  Naveen Kaushik ,  Sonam Jain ,  Haitao Liu ,  Chittoor Ranganathan Parthasarathy

IPC: H01L29/06 ,  H01L27/088 ,  H01L29/66 ,  H01L29/78

Abstract: An apparatus includes lightly doped drain regions vertically extending into a semiconductor substrate. A channel region is horizontally interposed between the lightly doped drain regions, and source/drain regions vertically extend into the lightly doped drain regions. Breakdown-enhancement implant intrusion regions are within the lightly doped drain regions and are horizontally interposed between the channel region and the source/drain regions. The breakdown enhancement implant regions have a different chemical species than the lightly doped drain regions and have upper boundaries vertically underlying upper boundaries of the lightly doped drain regions. The apparatus also has a gate structure vertically overlying the channel regions and it is horizontally interposed between the breakdown-enhancement implant regions. Memory devices, electronic systems, and methods of forming microelectronic devices are also described.

公开(公告)号：US20240363763A1

公开(公告)日：2024-10-31

申请号：US18771108

申请日：2024-07-12

Applicant: Micron Technology, Inc.

Inventor： Kamal M. Karda ,  Durai Vishak Nirmal Ramaswamy ,  Haitao Liu

IPC: H01L29/786 ,  H01L21/02 ,  H01L21/8234 ,  H01L29/66 ,  H01L29/78

CPC classification number: H01L29/78696 ,  H01L21/02565 ,  H01L21/0262 ,  H01L21/823412 ,  H01L29/66666 ,  H01L29/66969 ,  H01L29/7827 ,  H01L29/78642 ,  H01L29/7869

Abstract: A device comprises a vertical transistor and a shielding material comprising a conductive material having a P+ type conductivity. The vertical transistor includes an electrode, a dielectric material adjacent to the electrode, and a channel region adjacent to the dielectric material. The channel region comprises a composite structure including at least two semiconductor materials. Also disclosed is a device comprising a first electrically conductive line, vertical transistors overlying the first conductive line, a second electrically conductive line overlying the vertical transistors, and a shielding material positioned between the two adjacent vertical transistors. Each of the vertical transistors comprises a gate electrode, a gate dielectric material on opposite sides of the gate electrode, and a channel region comprising a composite structure including at least two oxide semiconductor materials. The gate dielectric material positions between the gate electrode and the channel region. The shielding material comprises an electrically conductive material.

公开(公告)号：US20240322049A1

公开(公告)日：2024-09-26

申请号：US18588352

申请日：2024-02-27

Applicant: Micron Technology, Inc.

Inventor： Shyam Surthi ,  Haitao Liu ,  Michael A. Smith

IPC: H01L29/861 ,  H01L21/265 ,  H01L21/768 ,  H01L23/00 ,  H01L29/66 ,  H10B80/00

CPC classification number: H01L29/861 ,  H01L21/265 ,  H01L21/76898 ,  H01L24/08 ,  H01L24/80 ,  H01L29/6609 ,  H10B80/00 ,  H01L2224/08145 ,  H01L2224/80895 ,  H01L2224/80896

Abstract: A semiconductor device including a first semiconductor device that includes a substrate, a memory array disposed above the substrate and below a frontside surface of the first semiconductor device, a plurality of source region contact (SRC) nodes disposed under the memory array, and a plurality of high-voltage (HV) diodes disposed in the substrate, each of the plurality of HV diodes being connected to corresponding one of the plurality of SRC nodes; and a second semiconductor device including a plurality of complementary-metal-oxide semiconductor (CMOS) devices, each of the plurality of CMOS devices being connected to, through a backside surface of the second semiconductor device and the frontside surface of the first semiconductor device, corresponding bond pad of the memory array, wherein fusion bonding exists between the backside surface of the second semiconductor device and the frontside surface of the first semiconductor device.

公开(公告)号：US20240244837A1

公开(公告)日：2024-07-18

申请号：US18433863

申请日：2024-02-06

Applicant: Micron Technology, Inc.

Inventor： Luan C. Tran ,  Guangyu Huang ,  Haitao Liu

IPC: H10B41/27 ,  G11C5/06 ,  H10B41/35 ,  H10B41/60 ,  H10B43/27 ,  H10B43/35

CPC classification number: H10B41/27 ,  G11C5/063 ,  H10B41/35 ,  H10B41/60 ,  H10B43/27 ,  H10B43/35

Abstract: A method used in forming a memory array, comprises forming a substrate comprising a conductive tier, an insulator etch-stop tier above the conductive tier, a select gate tier above the insulator etch-stop tier, and a stack comprising vertically-alternating insulative tiers and wordline tiers above the select gate tier. Etching is conducted through the insulative tiers, the wordline tiers, and the select gate tier to and stopping on the insulator etch-stop tier to form channel openings that have individual bottoms comprising the insulator etch-stop tier. The insulator etch-stop tier is penetrated through to extend individual of the channel openings there-through to the conductive tier. Channel material is formed in the individual channel openings elevationally along the insulative tiers, the wordline tiers, and the select gate tier and is directly electrically coupled with the conductive material in the conductive tier. Structure independent of method is disclosed.

公开(公告)号：US20240206152A1

公开(公告)日：2024-06-20

申请号：US18542299

申请日：2023-12-15

Applicant: Micron Technology, Inc.

Inventor： Kamal M. Karda ,  Haitao Liu ,  Scott E. Sills ,  Si-Woo Lee

IPC: H10B12/00 ,  H01L29/06 ,  H01L29/423 ,  H01L29/66 ,  H01L29/775 ,  H01L29/786

CPC classification number: H10B12/31 ,  H01L29/0673 ,  H01L29/42392 ,  H01L29/66439 ,  H01L29/775 ,  H01L29/78696 ,  H10B12/03 ,  H10B12/05 ,  H10B12/482

Abstract: Systems, methods and apparatus are provided for a hybrid gate dielectric access device for vertical three-dimensional (3D) memory. The memory cell has a first horizontally oriented access device having a first source/drain region and a second source/drain region separated by a first channel region. The first access device is operatively controlled by a first gate. A hybrid gate dielectric separates the gate from the channel region and a horizontally oriented storage node coupled to the second source/drain region of the access device.

公开(公告)号：US20240172432A1

公开(公告)日：2024-05-23

申请号：US18428325

申请日：2024-01-31

Applicant: Micron Technology, Inc.

Inventor： Kamal M. Karda ,  Haitao Liu ,  Durai Vishak Nirmal Ramaswamy ,  Yunfei Gao ,  Sanh D. Tang ,  Deepak Chandra Pandey

IPC: H10B41/27 ,  G11C5/02 ,  G11C5/06 ,  H10B43/27

CPC classification number: H10B41/27 ,  G11C5/025 ,  G11C5/06 ,  H10B43/27

Abstract: Some embodiments include an integrated assembly having a carrier-sink-structure, and having digit lines over the carrier-sink-structure. Transistor body regions are over the digit lines. Extensions extend from the carrier-sink-structure to the transistor body regions. The extensions are configured to drain excess carriers from the transistor body regions. Lower source/drain regions are between the transistor body regions and the digit lines, and are coupled with the digit lines. Upper source/drain regions are over the transistor body regions, and are coupled with storage elements. Gates are adjacent the transistor body regions. The transistor body regions, lower source/drain regions and upper source/drain regions are together comprised a plurality of transistors. The transistors and the storage elements are together comprised by a plurality of memory cells of a memory array. Some embodiments include methods of forming integrated assemblies.