公开(公告)号：US20060249818A1

公开(公告)日：2006-11-09

申请号：US11484075

申请日：2006-07-11

申请人： Brian Peterson ,  John Kirner ,  Scott Weigel ,  James MacDougall ,  Lisa Deis ,  Thomas Braymer ,  Keith Campbell ,  Martin Devenney ,  C. Ramberg ,  Konstantinos Chondroudis ,  Keith Cendak

发明人： Brian Peterson ,  John Kirner ,  Scott Weigel ,  James MacDougall ,  Lisa Deis ,  Thomas Braymer ,  Keith Campbell ,  Martin Devenney ,  C. Ramberg ,  Konstantinos Chondroudis ,  Keith Cendak

IPC分类号： H01B1/12 ,  H01B1/00

CPC分类号： H01L21/02126 ,  H01L21/02203 ,  H01L21/02216 ,  H01L21/02282 ,  H01L21/3122 ,  H01L21/31695

摘要： Low dielectric materials and films comprising same have been identified for improved performance when used as performance materials, for example, in interlevel dielectrics integrated circuits as well as methods for making same. In one aspect of the present invention, the performance of the dielectric material may be improved by controlling the weight percentage of ethylene oxide groups in the at least one porogen.

公开(公告)号：US20060249713A1

公开(公告)日：2006-11-09

申请号：US11484049

申请日：2006-07-11

申请人： Brian Peterson ,  John Kirner ,  Scott Weigel ,  James MacDougall ,  Thomas Deis ,  Lisa Deis ,  Thomas Braymer ,  Keith Campbell ,  Martin Devenney ,  C. Ramberg ,  Konstantinos Chondroudis ,  Keith Cendak

发明人： Brian Peterson ,  John Kirner ,  Scott Weigel ,  James MacDougall ,  Thomas Deis ,  Lisa Deis ,  Thomas Braymer ,  Keith Campbell ,  Martin Devenney ,  C. Ramberg ,  Konstantinos Chondroudis ,  Keith Cendak

IPC分类号： H01B1/12

CPC分类号： H01L21/02126 ,  H01L21/02203 ,  H01L21/02216 ,  H01L21/02282 ,  H01L21/3122 ,  H01L21/31695

摘要： Low dielectric materials and films comprising same have been identified for improved performance when used as performance materials, for example, in interlevel dielectrics integrated circuits as well as methods for making same. In one aspect of the present invention, the performance of the dielectric material may be improved by controlling the weight percentage of ethylene oxide groups in the at least one porogen.

公开(公告)号：US20050116346A1

公开(公告)日：2005-06-02

申请号：US10964499

申请日：2004-10-13

申请人： John Kirner ,  James MacDougall ,  Brian Peterson ,  Scott Weigel ,  Thomas Deis ,  Martin Devenney ,  C. Ramberg ,  Konstantinos Chondroudis ,  Keith Cendak

发明人： John Kirner ,  James MacDougall ,  Brian Peterson ,  Scott Weigel ,  Thomas Deis ,  Martin Devenney ,  C. Ramberg ,  Konstantinos Chondroudis ,  Keith Cendak

IPC分类号： H01L21/768 ,  C01B33/16 ,  H01B3/12 ,  H01B3/46 ,  H01L21/312 ,  H01L21/316 ,  H01L23/522 ,  B32B9/04

CPC分类号： C09D183/04 ,  H01L21/02126 ,  H01L21/02203 ,  H01L21/02282 ,  H01L21/31695 ,  Y10T428/249967 ,  Y10T428/249969 ,  Y10T428/249979

摘要： Low dielectric materials and films comprising same have been identified for improved performance when used as interlevel dielectrics in integrated circuits as well as methods for making same. These materials are characterized as having a dielectric constant (κ) a dielectric constant of about 3.7 or less; a normalized wall elastic modulus (E0′), derived in part from the dielectric constant of the material, of about 15 GPa or greater; and a metal impurity level of about 500 ppm or less. Low dielectric materials are also disclosed having a dielectric constant of less than about 1.95 and a normalized wall elastic modulus (E0′), derived in part from the dielectric constant of the material, of greater than about 26 GPa.

摘要翻译： 当在集成电路中用作层间电介质时，已经确定了低介电材料和包含它们的薄膜以改善性能，以及制造其的方法。 这些材料的特征在于具有约3.7或更小的介电常数（kappa）的介电常数; 来自材料的介电常数的部分归一化的壁弹性模量（E 0）为约15GPa或更大; 金属杂质含量为约500ppm以下。 还公开了低介电常数材料，其介电常数小于约1.95，并且部分源于材料的介电常数导出的归一化的壁弹性模量（E 0）大于约26 GPa。

公开(公告)号：US20050029089A1

公开(公告)日：2005-02-10

申请号：US10931413

申请日：2004-08-31

申请人： Youqi Wang ,  C. Ramberg

发明人： Youqi Wang ,  C. Ramberg

IPC分类号： B01J19/00 ,  B01J19/12 ,  C23C14/02 ,  C23C14/06 ,  C23C14/34 ,  C40B40/18 ,  C40B60/14 ,  C23C14/32

CPC分类号： B01J19/122 ,  B01J19/0046 ,  B01J19/121 ,  B01J19/127 ,  B01J2219/0043 ,  B01J2219/00443 ,  B01J2219/00527 ,  B01J2219/0059 ,  B01J2219/00596 ,  B01J2219/00603 ,  B01J2219/00605 ,  B01J2219/00621 ,  B01J2219/00659 ,  B01J2219/00745 ,  B01J2219/00756 ,  C23C14/027 ,  C23C14/06 ,  C23C14/3464 ,  C40B40/18 ,  C40B60/14

摘要： The gradient deposition method and apparatus permits a radial thickness or composition gradient on a substrate to be formed. The system comprises one or more deposition sources that can be fired sequentially or simultaneously. The system also comprises one or more dynamic shutters (e.g., shutters that can be moved independently of each other and during the deposition of a material) in combination with equipment that permits the substrate to be rotated during the deposition of the material onto the substrate. The system may also include one or more contact masks that may be placed on the substrate during the deposition in order to mask off particular portions of the substrate during the deposition process.

摘要翻译： 梯度沉积方法和装置允许在要形成的基底上具有径向厚度或组成梯度。 该系统包括一个或多个可以顺次或同时燃烧的沉积源。 该系统还包括一种或多种动态百叶窗（例如，可以彼此独立地移动并且在材料沉积期间）与设备结合使用，以便在将材料沉积到基底上时允许基底旋转。 该系统还可以包括在沉积期间可以放置在衬底上的一个或多个接触掩模，以便在沉积过程期间掩盖衬底的特定部分。

公开(公告)号：US20070214101A1

公开(公告)日：2007-09-13

申请号：US11348873

申请日：2006-02-06

申请人： Youqi Wang ,  Marco Falcioni ,  Stephen Turner ,  C. Ramberg

发明人： Youqi Wang ,  Marco Falcioni ,  Stephen Turner ,  C. Ramberg

IPC分类号： G06N5/00

CPC分类号： C40B50/02 ,  B01J2219/00605 ,  B01J2219/00621 ,  B01J2219/00659 ,  B01J2219/00689 ,  B01J2219/00695 ,  B01J2219/007

摘要： Computer-implemented methods, systems and apparatus, including computer program apparatus, provide techniques for designing a set of experiments to be performed with a set of resources. A plurality of experimental configurations are generated based on a set of parameters describing factors to be varied in the experiments and a set of constraints representing limitations on operations that can be performed with the set of resources. A set of experiments is defined based on a selected configuration. The constraints can be represented as patterns defining an application of a parameter to a set of one or more points of an experimental lattice.

摘要翻译： 包括计算机程序设备在内的计算机实现的方法，系统和装置提供了用于设计要用一组资源执行的一组实验的技术。 基于描述在实验中变化的因素的一组参数生成多个实验配置，以及一组表示可以用该组资源执行的操作的限制。 基于所选配置定义一组实验。 约束可以表示为将参数应用于实验网格的一个或多个点的集合的模式。

公开(公告)号：US20070077657A1

公开(公告)日：2007-04-05

申请号：US11389621

申请日：2006-03-24

申请人： Eric Carlson ,  Peijun Cong ,  William Chandler ,  Henry Chau ,  Earl Danielson ,  Peter Desrosiers ,  Robert Doolen ,  Luping Wu ,  C. Ramberg ,  Thomas Crevier ,  Ralph Nielsen ,  Colin Masui ,  John Varni

发明人： Eric Carlson ,  Peijun Cong ,  William Chandler ,  Henry Chau ,  Earl Danielson ,  Peter Desrosiers ,  Robert Doolen ,  Luping Wu ,  C. Ramberg ,  Thomas Crevier ,  Ralph Nielsen ,  Colin Masui ,  John Varni

IPC分类号： G01N31/00

CPC分类号： B01L3/50255 ,  B01J19/0046 ,  B01J2219/00283 ,  B01J2219/00308 ,  B01J2219/00315 ,  B01J2219/00335 ,  B01J2219/00364 ,  B01J2219/00373 ,  B01J2219/00423 ,  B01J2219/00481 ,  B01J2219/00484 ,  B01J2219/00495 ,  B01J2219/00585 ,  B01J2219/00689 ,  B01J2219/00695 ,  B01J2219/00698 ,  B01J2219/00702 ,  B01J2219/00704 ,  B01J2219/00725 ,  B01J2219/00756 ,  B01L3/06 ,  B01L7/00 ,  B01L2300/0829 ,  B01L2300/185 ,  C40B40/04 ,  C40B40/10 ,  C40B60/10 ,  C40B60/14 ,  G01N5/045 ,  G01N21/23 ,  G01N21/65 ,  G01N25/04 ,  G01N33/15 ,  G01N33/54366 ,  G01N35/028 ,  G01N2013/006 ,  G01N2021/651 ,  G01N2500/00 ,  G16C20/20 ,  G16C20/90 ,  Y10T117/10

摘要： The invention provides methods, apparatus, and systems for performing high-throughput preparation and screening of salts and polymorphs of drug candidates. The invention is directed towards enhancing the pre-formulation discovery process used for drug development. In particular, processes that determine suitable salts and processes that discover substantially every polymorph that can form from a particular drug candidate are provided. The processes are performed using several apparatuses that are specifically configured to carry-out various steps in a high-throughput characterization process. One such apparatus is configured for synthesizing a plurality of library members based on, for example, a library model generated by a computer system. Another apparatus may filter the synthesized solution to provide a substantially pure mixture that can be subjected to salt or polymorph testing. Yet another apparatus may be used to crystallize mixtures on a substrate such that the crystallized mixture can be screened by one or more screening devices.

摘要翻译： 本发明提供了用于进行候选药物的盐和多晶型物的高通量制备和筛选的方法，装置和系统。 本发明旨在增强用于药物开发的预配制发现过程。 特别地，提供了确定基本上发现可从特定药物候选物形成的每个多晶型物的合适的盐和方法的方法。 使用特定配置为在高吞吐量表征过程中执行各种步骤的几个装置来执行处理。 一种这样的装置被配置为基于例如由计算机系统生成的库模型来合成多个库成员。 另一种装置可以过滤合成的溶液以提供可以进行盐或多晶型测试的基本上纯的混合物。 可以使用另一种装置将混合物在基底上结晶，使得结晶的混合物可以被一个或多个筛选装置筛选。

公开(公告)号：US20050037499A1

公开(公告)日：2005-02-17

申请号：US10639003

申请日：2003-08-11

申请人： C. Ramberg ,  Youqi Wang ,  Shenheng Guan ,  David Lee ,  Sum Nguyen

发明人： C. Ramberg ,  Youqi Wang ,  Shenheng Guan ,  David Lee ,  Sum Nguyen

IPC分类号： G01N21/47 ,  G01N21/55 ,  G01N25/04 ,  G01N25/12 ,  G01N33/00 ,  G01N33/48

CPC分类号： G01N21/4738 ,  G01N21/55 ,  G01N25/04 ,  G01N25/12

摘要： An analytical measurement system includes a sample holder, a temperature changing device for changing the temperature of a sample on the sample holder, and a measurement device for detecting a change in the sample such as a phase change. The sample holder can be a micro sample holder including a support member having an aperture, a membrane spanning the aperture, and a backing layer attached to a backside of the membrane. The temperature changing device can be a laser directed at the backside of the sample holder or an electrical resistive heater on the sample holder. The measurement device senses changes in the sample such as the film stress, viscosity, or surface reflectivity, by measuring changes in scattered light, reflected light, emitted light, or electrical resistance.

摘要翻译： 分析测量系统包括样品架，用于改变样品保持器上的样品的温度的温度变化装置，以及用于检测样品变化的测量装置，例如相变。 样品保持器可以是微型样品保持器，其包括具有孔的支撑构件，跨越孔的膜和附着到膜的背侧的背衬层。 温度变化装置可以是指向样品架背面的激光器或样品架上的电阻加热器。 测量装置通过测量散射光，反射光，发射光或电阻的变化来感测样品中的变化，例如膜应力，粘度或表面反射率。

公开(公告)号：US20050035773A1

公开(公告)日：2005-02-17

申请号：US10639008

申请日：2003-08-11

申请人： Youqi Wang ,  C. Ramberg ,  Michael Yee

发明人： Youqi Wang ,  C. Ramberg ,  Michael Yee

IPC分类号： G01K7/02 ,  G01R27/08

CPC分类号： G01K7/02

摘要： Apparatus and methods are provided for efficiently and non-destructively determining the thermal properties of materials having arbitrary surface textures. Two regions of a sample are each contacted by respective pairs of probes, where each pair includes a first probe made of a first material and a second probe made of a second material. A voltage sensor is arranged between the two probes of each pair, and between the probes of the same material from each pair. Nodes connect the voltage sensors to the probes. A temperature gradient is established between the two regions, while the nodes are maintained at a constant temperature. The Seebeck coefficient of the material and the temperatures of the regions can be determined from the voltages measured by the voltage sensors.

摘要翻译： 提供了用于有效且非破坏性地确定具有任意表面纹理的材料的热性质的装置和方法。 样本的两个区域各自由相应的探针对接触，其中每对探针包括由第一材料制成的第一探针和由第二材料制成的第二探针。 在每对的两个探针之间以及来自每对的相同材料的探针之间布置有电压传感器。 节点将电压传感器连接到探头。 在两个区域之间建立温度梯度，而节点保持在恒定温度。 材料的塞贝克系数和区域的温度可以由电压传感器测量的电压来确定。