CHEMICAL-MECHANICAL POLISHING APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICES
    4.
    发明申请
    CHEMICAL-MECHANICAL POLISHING APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICES 失效
    用于制造半导体器件的化学机械抛光装置

    公开(公告)号:US20110171882A1

    公开(公告)日:2011-07-14

    申请号:US12985048

    申请日:2011-01-05

    IPC分类号: B24B41/06 B24B49/00

    CPC分类号: B24B37/10 B24B49/12

    摘要: A chemical-mechanical polishing (CMP) apparatus for manufacturing a semiconductor device. The apparatus includes: a spin chuck for supporting and rotating a semiconductor wafer; a polisher comprising a polishing pad for planarizing a surface of the semiconductor wafer, the polisher moving along the surface of the semiconductor wafer by a polishing arm; and a polisher supporting device for supporting the polisher and maintaining the polisher in a horizontal state, while polishing an edge part of the surface of the semiconductor wafer, in order to improve polishing uniformity of a center part and the edge part of the semiconductor wafer. Accordingly, polishing uniformity of the center part and edge part of the semiconductor wafer may be improved, and a height of the polisher supporting device may be optimized according to a polishing degree. Also, the polisher may be easily supported, wear and tear of the support head may be minimized, and the support head may function as a conditioner.

    摘要翻译: 一种用于制造半导体器件的化学机械抛光(CMP)装置。 该装置包括:用于支撑和旋转半导体晶片的旋转卡盘; 抛光机,包括用于平坦化半导体晶片的表面的抛光垫,抛光机通过抛光臂沿着半导体晶片的表面移动; 以及用于在抛光半导体晶片的表面的边缘部分的同时在支撑抛光机并将抛光机保持在水平状态的抛光机支撑装置,以便改善半导体晶片的中心部分和边缘部分的抛光均匀性。 因此,可以提高半导体晶片的中心部分和边缘部分的抛光均匀性,并且可以根据抛光度来优化抛光机支撑装置的高度。 此外,可以容易地支撑抛光机,可以使支撑头的磨损和撕裂最小化,并且支撑头可用作调节器。

    Diamond tool with metal plate inserted therein
    6.
    发明申请
    Diamond tool with metal plate inserted therein 有权
    镶嵌有金属板的金刚石工具

    公开(公告)号:US20050249560A1

    公开(公告)日:2005-11-10

    申请号:US11118165

    申请日:2005-04-28

    IPC分类号: B23D61/00 B23D61/04 B28D1/12

    摘要: Disclosed is a diamond tool having a metal plate inserted therein. Between abrasive layers containing diamond particles is inserted a ferrous or non-ferrous metal plate having a wear resistance lower than that of the abrasive layers such that a concave groove is spontaneously formed during a cutting process, thereby reducing the contact load with a workpiece to thereby avoid vibration (wobbling) of a shank, and providing a discharge path for smoothly removing cutting chips and the cooling water. In addition, the content of abrasives and the wear resistance of bonding material are uniformly constituted so that the shrinkage rate does not need to be considered during sintering and the manufacturing process can be simplified, thereby reducing the manufacturing cost and improving the productivity therefor. Furthermore, the area of the metal plate can be controlled, thereby enabling an easy design conforming to the working conditions with a workpiece.

    摘要翻译: 公开了一种金刚石工具,其中插入有金属板。 在含有金刚石颗粒的研磨层之间插入耐磨性低于研磨层的耐磨性的铁或非铁金属板,使得在切割过程中自发形成凹槽,从而减少与工件的接触载荷 避免柄的振动(摆动),并且提供用于平滑地去除切屑和冷却水的排出路径。 此外,研磨剂的含量和接合材料的耐磨性均匀地构成,使得在烧结期间不需要考虑收缩率,并且可以简化制造过程,从而降低制造成本并提高其生产率。 此外,可以控制金属板的面积,从而能够使与工件的工作条件相一致的简单设计。

    Obstacle sensor and robot cleaner having the same
    7.
    发明授权
    Obstacle sensor and robot cleaner having the same 有权
    障碍传感器和机器人清洁器具有相同的功能

    公开(公告)号:US09239389B2

    公开(公告)日:2016-01-19

    申请号:US13616137

    申请日:2012-09-14

    摘要: An obstacle sensor includes a line light irradiating unit including a light-emitting unit, a light-emitting driving unit to drive the light-emitting unit, and a first conical mirror, an apex of which is disposed towards the light-emitting unit in a light irradiation direction of the light-emitting unit and which converts light emitted from the light-emitting unit into line light irradiated in all directions, and a reflected light receiving unit including a second conical mirror to condense light, that is irradiated from the first conical mirror and is then reflected from an obstacle, a lens, that is spaced from the apex of the second conical mirror by a predetermined distance and transmits the reflected light, an imaging unit to image the reflected light that passes through the lens, an image processing unit, and an obstacle sensing control unit.

    摘要翻译: 障碍传感器包括:行光照射单元,包括发光单元,驱动发光单元的发光驱动单元;以及第一锥形反射镜,其顶点设置在发光单元中 发光单元的光照射方向,并将从发光单元发射的光转换为沿所有方向照射的线光;以及反射光接收单元,包括第二锥形镜以使光从第一锥形 然后从与第二锥形反射镜的顶点隔开预定距离的障碍物,透镜反射并透射反射光,成像单元对通过透镜的反射光进行成像,图像处理 单元和障碍物感测控制单元。

    System and method for grid MPI job allocation using file-based MPI initialization in grid computing system
    9.
    发明申请
    System and method for grid MPI job allocation using file-based MPI initialization in grid computing system 有权
    在网格计算系统中使用基于文件的MPI初始化的网格MPI作业分配的系统和方法

    公开(公告)号:US20050198104A1

    公开(公告)日:2005-09-08

    申请号:US11044557

    申请日:2005-01-27

    IPC分类号: G06F15/163 G06F15/16

    CPC分类号: G06F9/5072

    摘要: Disclosed is a file-based grid MPI job allocation system for a middleware-based grid computing system in which computers having a plurality of resources including an MPI program are distributed and connected to each other through a network, wherein the grid MPI job allocation system differentiates functions of a middleware and the MPI program, thereby achieving MPI initialization without intervention of a separate arbitration process. The job submission service module generates a file containing an address, a port number, etc. of each node, which are necessary for the MPI initialization, and sends the file to the job execution service module of the corresponding node. Each job execution service module executes the MPI job, and the MPI program waits for the generation of the file and then performs initialization by using the information in the file. The present invention clearly differentiates the jobs to be done by the MPI program and by the job submission service module in the middleware, thereby enabling the MPI program to be executed in the grid computing system regardless of the design of the middleware.

    摘要翻译: 公开了一种用于基于中间件的网格计算系统的基于文件的网格MPI作业分配系统,其中包括MPI程序的多个资源的计算机通过网络分布并彼此连接,其中网格MPI作业分配系统区分 中间件和MPI程序的功能,从而实现MPI初始化,而不需要单独的仲裁过程。 作业提交服务模块生成包含MPI初始化所需的每个节点的地址,端口号等的文件,并将该文件发送到相应节点的作业执行服务模块。 每个作业执行服务模块执行MPI作业,并且MPI程序等待文件的生成,然后使用文件中的信息执行初始化。 本发明明确区分由MPI程序和作业提交服务模块在中间件中完成的作业,从而使得能够在网格计算系统中执行MPI程序,而不管中间件的设计如何。