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公开(公告)号:US08283677B2
公开(公告)日:2012-10-09
申请号:US12933283
申请日:2009-02-02
申请人: Toshiyuki Takizawa , Tetsuzo Ueda , Manabu Usuda
发明人: Toshiyuki Takizawa , Tetsuzo Ueda , Manabu Usuda
CPC分类号: H01L21/02433 , B82Y20/00 , H01L21/02381 , H01L21/02458 , H01L21/0254 , H01L21/02639 , H01L21/02647 , H01L33/007 , H01L33/08 , H01L33/20 , H01L33/24 , H01L2933/0016 , H01S5/34333
摘要: A nitride semiconductor light-emitting device includes a substrate (101) made of silicon, a mask film (102) made of silicon oxide, formed on a principal surface of the substrate (101), and having at least one opening (102a), a seed layer (104) made of GaN selectively formed on the substrate (101) in the opening (102a), an LEG layer (105) formed on a side surface of the seed layer (104), and an n-type GaN layer (106), an active layer (107), and a p-type GaN layer (108) which are formed on the LEG layer (105). The LEG layer (105) is formed by crystal growth using an organic nitrogen material as a nitrogen source.
摘要翻译: 一种氮化物半导体发光器件,包括由硅制成的衬底(101),形成在衬底(101)的主表面上的由氧化硅制成的掩模膜(102),并具有至少一个开口(102a), 在所述开口(102a)中的所述基板(101)上选择性地形成有GaN的种子层(104),形成在所述籽晶层(104)的侧面上的LEG层(105)和n型GaN层 (106),有源层(107)和形成在LEG层(105)上的p型GaN层(108)。 使用有机氮材料作为氮源,通过晶体生长形成LEG层(105)。
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公开(公告)号:US20110012169A1
公开(公告)日:2011-01-20
申请号:US12933283
申请日:2009-02-02
申请人: Toshiyuki Takizawa , Tetsuzo Ueda , Manabu Usuda
发明人: Toshiyuki Takizawa , Tetsuzo Ueda , Manabu Usuda
IPC分类号: H01L33/32
CPC分类号: H01L21/02433 , B82Y20/00 , H01L21/02381 , H01L21/02458 , H01L21/0254 , H01L21/02639 , H01L21/02647 , H01L33/007 , H01L33/08 , H01L33/20 , H01L33/24 , H01L2933/0016 , H01S5/34333
摘要: A nitride semiconductor light-emitting device includes a substrate (101) made of silicon, a mask film (102) made of silicon oxide, formed on a principal surface of the substrate (101), and having at least one opening (102a), a seed layer (104) made of GaN selectively formed on the substrate (101) in the opening (102a), an LEG layer (105) formed on a side surface of the seed layer (104), and an n-type GaN layer (106), an active layer (107), and a p-type GaN layer (108) which are formed on the LEG layer (105). The LEG layer (105) is formed by crystal growth using an organic nitrogen material as a nitrogen source.
摘要翻译: 一种氮化物半导体发光器件,包括由硅制成的衬底(101),形成在衬底(101)的主表面上的由氧化硅制成的掩模膜(102),并具有至少一个开口(102a), 在所述开口(102a)中的所述基板(101)上选择性地形成有GaN的种子层(104),形成在所述籽晶层(104)的侧面上的LEG层(105)和n型GaN层 (106),有源层(107)和形成在LEG层(105)上的p型GaN层(108)。 使用有机氮材料作为氮源,通过晶体生长形成LEG层(105)。
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公开(公告)号:US20080179606A1
公开(公告)日:2008-07-31
申请号:US11971467
申请日:2008-01-09
申请人: Manabu USUDA , Tetsuzo Ueda , Kenji Orita
发明人: Manabu USUDA , Tetsuzo Ueda , Kenji Orita
IPC分类号: H01L33/00
CPC分类号: H01L33/32 , H01L33/007 , H01L33/02 , H01L33/10 , H01L33/105 , H01L33/20 , H01L33/382 , H01L2933/0083
摘要: A nitride semiconductor light emitting device includes a substrate formed of silicon, an insulating film formed on the substrate and a single crystal thin film formed on the insulating film. On the single crystal film, a semiconductor laminated body including a light emitting layer of nitride semiconductor is formed.
摘要翻译: 氮化物半导体发光器件包括由硅形成的衬底,形成在衬底上的绝缘膜和形成在绝缘膜上的单晶薄膜。 在单晶膜上形成包括氮化物半导体发光层的半导体层叠体。
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公开(公告)号:US07518153B2
公开(公告)日:2009-04-14
申请号:US11971467
申请日:2008-01-09
申请人: Manabu Usuda , Tetsuzo Ueda , Kenji Orita
发明人: Manabu Usuda , Tetsuzo Ueda , Kenji Orita
IPC分类号: H01L33/00
CPC分类号: H01L33/32 , H01L33/007 , H01L33/02 , H01L33/10 , H01L33/105 , H01L33/20 , H01L33/382 , H01L2933/0083
摘要: A nitride semiconductor light emitting device includes a substrate formed of silicon, an insulating film formed on the substrate and a single crystal thin film formed on the insulating film. On the single crystal film, a semiconductor laminated body including a light emitting layer of nitride semiconductor is formed.
摘要翻译: 氮化物半导体发光器件包括由硅形成的衬底,形成在衬底上的绝缘膜和形成在绝缘膜上的单晶薄膜。 在单晶膜上形成包括氮化物半导体发光层的半导体层叠体。
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公开(公告)号:US20110211607A1
公开(公告)日:2011-09-01
申请号:US13105337
申请日:2011-05-11
申请人: Toshiyuki Takizawa , Tetsuzo Ueda
发明人: Toshiyuki Takizawa , Tetsuzo Ueda
CPC分类号: H01L21/0262 , B82Y20/00 , H01L21/02381 , H01L21/0242 , H01L21/02433 , H01L21/02458 , H01L21/02494 , H01L21/02516 , H01L21/0254 , H01L21/02587 , H01L21/02609 , H01L21/02636 , H01L33/16 , H01L33/24 , H01L33/32 , H01S5/2009 , H01S5/2237 , H01S5/3202 , H01S5/3216 , H01S5/34333 , H01S2304/04
摘要: An object of the present invention is to provide a nitride semiconductor device which shifts a luminescence wavelength toward a longer wavelength side without decreasing luminescence efficiency, and the nitride semiconductor device according to an implementation of the present invention includes: a GaN layer having a (0001) plane and a plane other than the (0001) plane; and an InGaN layer which contacts the GaN layer and includes indium, and the InGaN layer has a higher indium composition ratio in a portion that contacts the plane other than the (0001) plane than in a portion that contacts the (0001) plane.
摘要翻译: 本发明的目的是提供一种氮化物半导体器件,其将发光波长向较长波长侧移动而不降低发光效率,并且根据本发明的实施方式的氮化物半导体器件包括:具有(0001 )面和除(0001)面之外的平面; 以及与GaN层接触并包含铟的InGaN层,并且InGaN层在与(0001)面以外的平面接触的部分中的铟成分比在与(0001)面接触的部分相比更高。
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公开(公告)号:US20110058586A1
公开(公告)日:2011-03-10
申请号:US12991649
申请日:2009-01-21
申请人: Toshiyuki Takizawa , Tetsuzo Ueda
发明人: Toshiyuki Takizawa , Tetsuzo Ueda
CPC分类号: H01S5/34333 , B82Y20/00 , H01S5/0014 , H01S5/0207 , H01S5/0654 , H01S5/1014 , H01S5/1053 , H01S5/1057 , H01S5/106 , H01S5/164 , H01S5/2201 , H01S5/223 , H01S5/2238 , H01S5/3213 , H01S2304/04 , H01S2304/12
摘要: A projection/recess structure is formed on a base substrate, and a layered structure of a nitride semiconductor laser is formed on the projection/recess structure. InGaN used for an active layer has an In intake efficiency and a growth rate that greatly vary with the plane direction. By use of this characteristic, an active layer structure low in In content and small in well layer thickness can be formed at a light-outgoing end facet by one-time crystal growth, and thus the transition wavelength of the active layer near the light-outgoing end facet can be shortened. As a result, since optical damage due to light absorption at the light-outgoing end facet can be greatly reduced, a nitride semiconductor laser capable of performing high light-output operation can be implemented.
摘要翻译: 在基底基板上形成突起/凹部结构,在突起/凹部结构上形成氮化物半导体激光器的层叠结构。 用于有源层的InGaN具有In取入效率和随平面方向大幅变化的生长速率。 通过使用该特性,可以通过一次晶体生长在光出射端面形成In含量低,阱层厚度小的有源层结构,因此有源层在发光层附近的跃迁波长, 出口端面可以缩短。 结果,由于可以大大减少由于在光出射端小面处的光吸收而引起的光学损伤,因此可以实现能够进行高光输出操作的氮化物半导体激光器。
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公开(公告)号:US20110037101A1
公开(公告)日:2011-02-17
申请号:US12667999
申请日:2009-03-27
IPC分类号: H01L29/205 , H01L29/80 , H01L29/737 , H01L29/20
CPC分类号: H01L29/7371 , H01L27/0605 , H01L29/1066 , H01L29/2003 , H01L29/207 , H01L29/432 , H01L29/7787
摘要: A semiconductor device includes an undoped GaN layer (13), an undoped AlGaN layer (14), and a p-type GaN layer (15). In the p-type GaN layer (15), highly resistive regions (15a) are selectively formed. Resistance of the highly resistive regions (15a) can be increased by introducing a transition metal, for example, titanium.
摘要翻译: 半导体器件包括未掺杂的GaN层(13),未掺杂的AlGaN层(14)和p型GaN层(15)。 在p型GaN层(15)中,选择性地形成高电阻区域(15a)。 可以通过引入过渡金属例如钛来增加高电阻区域(15a)的电阻。
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公开(公告)号:US20100178756A1
公开(公告)日:2010-07-15
申请号:US12608625
申请日:2009-10-29
申请人: Toshiyuki TAKIZAWA , Jun Shimizu , Tetsuzo Ueda
发明人: Toshiyuki TAKIZAWA , Jun Shimizu , Tetsuzo Ueda
IPC分类号: H01L21/20
CPC分类号: H01L33/145 , B82Y20/00 , H01L21/02389 , H01L21/0242 , H01L21/02458 , H01L21/0254 , H01L21/02579 , H01L21/0262 , H01L21/02647 , H01L21/0265 , H01L33/32 , H01L2933/0083 , H01S5/0207 , H01S5/2045 , H01S5/2223 , H01S5/2227 , H01S5/227 , H01S5/3202 , H01S5/34333 , H01S2304/12
摘要: A nitride semiconductor device includes: a substrate having a principal surface; a first nitride semiconductor layer formed on the principal surface of the substrate and includes one or more convex portions whose side surfaces are vertical to the principal surface; and a second nitride semiconductor layer selectively grown on the side surfaces of the one or more convex portions of the first nitride semiconductor layer.
摘要翻译: 氮化物半导体器件包括:具有主表面的衬底; 形成在所述基板的主面上的第一氮化物半导体层,具有与所述主面垂直的一个或多个凸部; 以及选择性地生长在第一氮化物半导体层的一个或多个凸部的侧表面上的第二氮化物半导体层。
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公开(公告)号:US07425732B2
公开(公告)日:2008-09-16
申请号:US11410920
申请日:2006-04-26
IPC分类号: H01L33/00
CPC分类号: H01L33/32 , B82Y20/00 , H01L31/0304 , H01L31/03046 , H01L31/035236 , H01L31/1035 , H01L33/06 , H01S5/322 , H01S5/34333 , Y02E10/544
摘要: A nitride semiconductor device includes an active layer including a first nitride semiconductor layer and a second nitride semiconductor layer which are periodically stacked, the second nitride semiconductor layer having a different composition from a composition of the first nitride semiconductor layer. An energy at a lower edge of a conduction band in the first nitride semiconductor layer is lower than an energy at a lower edge of a conduction band in the second nitride semiconductor layer, and an energy at an upper edge of a valence band in the first nitride semiconductor layer is lower than an energy at an upper edge of a valence band in the second nitride semiconductor layer.
摘要翻译: 氮化物半导体器件包括包含周期性堆叠的第一氮化物半导体层和第二氮化物半导体层的有源层,所述第二氮化物半导体层与第一氮化物半导体层的组成不同。 在第一氮化物半导体层中的导带的下边缘处的能量低于第二氮化物半导体层中的导带的下边缘处的能量,并且第一氮化物半导体层中的导带的上边缘处的能量 氮化物半导体层比在第二氮化物半导体层中的价带的上边缘处的能量低。
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公开(公告)号:US20050029531A1
公开(公告)日:2005-02-10
申请号:US10912142
申请日:2004-08-06
CPC分类号: H01L33/08
摘要: A semiconductor device, which includes an active layer made of a first semiconductor layer formed on a substrate, is designed so that a first oxidized area made of an oxide layer is formed on the active layer.
摘要翻译: 包括由形成在基板上的第一半导体层构成的有源层的半导体器件被设计成使得在有源层上形成由氧化物层形成的第一氧化区域。
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