Ion beam irradiating apparatus including ion neutralizer
    1.
    发明授权
    Ion beam irradiating apparatus including ion neutralizer 失效
    离子束照射装置,包括离子中和剂

    公开(公告)号:US4886971A

    公开(公告)日:1989-12-12

    申请号:US165957

    申请日:1988-03-09

    CPC分类号: G21K5/04 H01J37/026

    摘要: In an ion beam irradiating apparatus, a specified ion beam is first deflected in a deflection direction perpendicular to an ion beam orbit by an ion beam deflector. The deflected ion beam is neutralized by a thermoelectron beam emitted from a filament of an ion neutralizer. An electrode is employed to control the supply of the thermoelectron beam to the deflected ion beam. Both the filament and control electrode elongated along the deflection direction surround the deflected ion beam traveled along the ion beam orbit.

    摘要翻译: 在离子束照射装置中,通过离子束偏转器,指定的离子束首先在与离子束轨道垂直的偏转方向上偏转。 偏转的离子束被从离子中和器的细丝发射的热电子束中和。 采用电极来控制向被偏转的离子束供应热电子束。 沿着偏转方向细长的灯丝和控制电极围绕沿着离子束轨道行进的偏转的离子束。

    Ion beaming irradiating apparatus including ion neutralizer
    2.
    发明授权
    Ion beaming irradiating apparatus including ion neutralizer 失效
    离子束照射装置,包括离子中和剂

    公开(公告)号:US4916311A

    公开(公告)日:1990-04-10

    申请号:US166074

    申请日:1988-03-09

    摘要: In an ion beam irradiating apparatus for providing a neutralized ion beam to a sample, there are provided an ion source, an accelerating device and an ion beam selecting device to which the accelerated and selection ion beam is irradiated. This irradiating apparatus further includes an ion neutralizer positioned between the selecting device and the sample, and includes: an electron beam emitting source for emitting an electron beam; a first electron scatter preventing electrode for preventing the electron beam emitted from the electron beam emitting source from being scattered outside the ion neutralizer; a second electron scatter preventing electrode for preventing the electron beam induced into the specified ion beam from being scattered in a direction opposite to an ion irradiating direction; and a control electrode for controlling a traveling velocity of the electron beam emitted from the electron emitting source so as to drift the emitted electron beam toward the sample, thereby neutralizing the selected ion beam at a location adjacent to a surface of the sample that is being irradiated.

    摘要翻译: 在用于向样品提供中和的离子束的离子束照射装置中,设置有照射加速选择离子束的离子源,加速装置和离子束选择装置。 该照射装置还包括位于选择装置和样品之间的离子中和器,包括:用于发射电子束的电子束发射源; 用于防止从电子束发射源发射的电子束被散射到离子中和器外的第一电子散射防止电极; 第二电子散射防止电极,用于防止被引导到指定的离子束中的电子束沿与离子照射方向相反的方向散射; 以及控制电极,用于控制从电子发射源发射的电子束的行进速度,以使所发射的电子束朝向样品漂移,从而在邻近样品表面的位置处中和选定的离子束 照射。

    Ion implantation apparatus
    5.
    发明授权
    Ion implantation apparatus 失效
    离子注入装置

    公开(公告)号:US5025167A

    公开(公告)日:1991-06-18

    申请号:US533769

    申请日:1990-06-06

    摘要: An ion implantation apparatus comprises an ion beam measuring device to measure and analyze the shape of a beam projected on a substrate for ion implantation and the quantity of current obtained by the ion beam, an analyzing slit member having an opening whose width is changeable, which is located in the ion beam track to extract only implantation ions, and a shaping slit member having an opening whose width is changeable, which is located behind the analyzing slit member to determine the shape of the beam to be projected on the substrate for ion implantation, wherein the widths of the openings of the analyzing slit member and the shaping slit member are changed on the basis of the shape of the beam and the quantity of current obtained as a result of the measurement by the ion beam measuring device.

    摘要翻译: 离子注入装置包括离子束测量装置,用于测量和分析投影在用于离子注入的基板上的光束的形状和由离子束获得的电流量,分析狭缝部件,其具有宽度可变的开口, 位于离子束轨道中以仅提取注入离子;以及成形狭缝构件,其具有位于分析狭缝构件后面的宽度可变的开口,以确定要投影到用于离子注入的衬底上的光束的形状 其中分析狭缝部件和成形狭缝部件的开口的宽度基于由离子束测量装置测量的结果获得的光束形状和电流量而改变。

    Method for separating a semiconductor element in a semiconductor element pushing-up device
    6.
    发明授权
    Method for separating a semiconductor element in a semiconductor element pushing-up device 有权
    用于分离半导体元件上推装置中的半导体元件的方法

    公开(公告)号:US06555418B2

    公开(公告)日:2003-04-29

    申请号:US09735617

    申请日:2000-12-14

    IPC分类号: H01L2148

    摘要: A push-up pin used for separating a semiconductor element attached by adhesive to an adhesive sheet of a semiconductor element pushing-up device in a die bonding apparatus from the adhesive sheet by pushing up the semiconductor element from the rear surface side of the adhesive sheet includes a tip end portion having a shape for applying pushing-up pressure with the thicknesses of the adhesive sheet and the adhesive kept constant when the pushing-up pressure for pushing up the semiconductor element from the rear surface side of the adhesive sheet is applied, and a base portion for supporting the tip end portion.

    摘要翻译: 一种用于将由粘合剂附着的半导体元件与芯片接合装置中的半导体元件上推装置的粘合片从粘合片分离的上推销,其中该半导体元件从粘合片的后表面侧向上推 包括当施加用于从粘合片的后表面侧推上半导体元件的上推压力时,具有用于施加上推压力的形状的末端部分,其中粘合片和粘合剂的厚度保持恒定, 以及用于支撑前端部的基部。

    Push-up pin of a semiconductor element pushing-up device, and a method for separating
    7.
    发明授权
    Push-up pin of a semiconductor element pushing-up device, and a method for separating 失效
    半导体元件上推装置的上推销以及分离方法

    公开(公告)号:US06201306B1

    公开(公告)日:2001-03-13

    申请号:US08760117

    申请日:1996-12-03

    IPC分类号: H01L2348

    摘要: A push-up pin used for separating a semiconductor element attached by adhesive to an adhesive sheet of a semiconductor element pushing-up device in a die bonding apparatus from the adhesive sheet by pushing up the semiconductor element from the rear surface side of the adhesive sheet includes a tip end portion having a shape for applying pushing-up pressure with the thicknesses of the adhesive sheet and the adhesive kept constant when the pushing-up pressure for pushing up the semiconductor element from the rear surface side of the adhesive sheet is applied, and a base portion for supporting the tip end portion.

    摘要翻译: 一种用于将由粘合剂附着的半导体元件与芯片接合装置中的半导体元件上推装置的粘合片从粘合片分离的上推销,其中该半导体元件从粘合片的后表面侧向上推 包括当施加用于从粘合片的后表面侧推上半导体元件的上推压力时,具有用于施加上推压力的形状的末端部分,其中粘合片和粘合剂的厚度保持恒定, 以及用于支撑前端部的基部。

    Recording tape cartridge
    10.
    发明授权
    Recording tape cartridge 失效
    记录磁带盒

    公开(公告)号:US4802045A

    公开(公告)日:1989-01-31

    申请号:US840866

    申请日:1986-03-18

    IPC分类号: G11B23/087 G11B23/02

    CPC分类号: G11B23/08785

    摘要: In a tape cartridge of the Philips type, one or more ribs are projected from a main plate of each case half at regions except for the tape chamber and the tape path so as to conform to one or more flow lines of resin when each half of molded, the cartridge is so that the formation of traces of resin can be prevented, resulting in an increase in mechanical strength of the cartridge.

    摘要翻译: 在飞利浦类型的带盒中,一个或多个肋从每个壳体半部的主板在除了带室和带路径之外的区域处突出,以便当每一半的树脂的一半 可以防止墨盒的形成,从而可以提高墨盒的机械强度。