公开(公告)号：US06831002B2

公开(公告)日：2004-12-14

申请号：US10242422

申请日：2002-09-13

申请人： Yoshihide Iwazaki ,  Shinji Suminoe ,  Hiroyuki Nakanishi ,  Toshiya Ishio ,  Takamasa Tanaka ,  Katsunobu Mori

发明人： Yoshihide Iwazaki ,  Shinji Suminoe ,  Hiroyuki Nakanishi ,  Toshiya Ishio ,  Takamasa Tanaka ,  Katsunobu Mori

IPC分类号： H01L244763

CPC分类号： H01L21/76882 ,  H01L21/2885 ,  H01L21/76898

摘要： A manufacturing method of a semiconductor device for providing wires on a front surface of a semiconductor wafer by providing a plating layer, in which conductive layers provided on the front and back surfaces of the semiconductor wafer are electrically conducted by solder filled in its through-holes, and electrolytic plating is carried out by electrically connecting cathode terminals of an electrolytic plating apparatus and the conductive layer provided on the back surface of the semiconductor wafer which is provided with a mask on the conductive layer provided on its front surface.

摘要翻译： 一种半导体器件的制造方法，其通过提供镀层，在半导体晶片的前表面上提供导线，其中设置在半导体晶片的前表面和后表面上的导电层通过填充在其通孔中的焊料电导电 并且通过将电解电镀装置的阴极端子与设置在其前表面上的导电层上设置有掩模的半导体晶片的背面上的导电层电连接进行电解电镀。

公开(公告)号：US06838748B2

公开(公告)日：2005-01-04

申请号：US10434205

申请日：2003-05-09

申请人： Toshiya Ishio ,  Hiroyuki Nakanishi ,  Katsunobu Mori ,  Yoshihide Iwazaki ,  Shinji Suminoe

发明人： Toshiya Ishio ,  Hiroyuki Nakanishi ,  Katsunobu Mori ,  Yoshihide Iwazaki ,  Shinji Suminoe

IPC分类号： H01L23/00 ,  H01L23/31 ,  H01L23/552 ,  H01L29/06

CPC分类号： H01L23/552 ,  H01L23/3114 ,  H01L24/45 ,  H01L24/48 ,  H01L24/97 ,  H01L29/0657 ,  H01L2224/05124 ,  H01L2224/05147 ,  H01L2224/05155 ,  H01L2224/05166 ,  H01L2224/05171 ,  H01L2224/05568 ,  H01L2224/05573 ,  H01L2224/05624 ,  H01L2224/05644 ,  H01L2224/05655 ,  H01L2224/16 ,  H01L2224/45144 ,  H01L2224/48227 ,  H01L2224/97 ,  H01L2924/00014 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01013 ,  H01L2924/01024 ,  H01L2924/01029 ,  H01L2924/01033 ,  H01L2924/01047 ,  H01L2924/01074 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/10158 ,  H01L2924/10253 ,  H01L2924/12042 ,  H01L2924/15311 ,  H01L2924/16152 ,  H01L2924/181 ,  H01L2924/3025 ,  H01L2224/81 ,  H01L2924/00 ,  H01L2924/00012 ,  H01L2224/45015 ,  H01L2924/207

摘要： A semiconductor chip of the present invention is so arranged that a front face on which an element circuit is formed has electrode pads and a side face and a back face are coated with a shielding layer for shielding electromagnetic waves. With this, it is possible to provide a semiconductor element capable of being easily manufactured into a smaller semiconductor device compared with a conventional semiconductor device equipped with a shielding cap; a semiconductor device; and a method for manufacturing a semiconductor element.

摘要翻译： 本发明的半导体芯片被布置成使得其上形成有元件电路的正面具有电极焊盘，并且侧面和背面涂覆有用于屏蔽电磁波的屏蔽层。 由此，与配备有屏蔽盖的现有的半导体装置相比，可以提供能够容易地制造成较小的半导体装置的半导体元件; 半导体器件; 以及半导体元件的制造方法。

公开(公告)号：US20060237848A1

公开(公告)日：2006-10-26

申请号：US11474469

申请日：2006-06-26

申请人： Shinji Suminoe ,  Hiroyuki Nakanishi ,  Toshiya Ishio ,  Yoshihide Iwazaki ,  Katsunobu Mori

发明人： Shinji Suminoe ,  Hiroyuki Nakanishi ,  Toshiya Ishio ,  Yoshihide Iwazaki ,  Katsunobu Mori

IPC分类号： H01L23/52 ,  H01L23/48 ,  H01L29/40

CPC分类号： H01L24/10 ,  H01L23/3114 ,  H01L24/05 ,  H01L24/13 ,  H01L2224/0231 ,  H01L2224/0401 ,  H01L2224/05006 ,  H01L2224/05546 ,  H01L2224/05567 ,  H01L2224/13 ,  H01L2224/13007 ,  H01L2224/13022 ,  H01L2224/13024 ,  H01L2224/13099 ,  H01L2924/0002 ,  H01L2924/01004 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01007 ,  H01L2924/01013 ,  H01L2924/01014 ,  H01L2924/01022 ,  H01L2924/01024 ,  H01L2924/01027 ,  H01L2924/01028 ,  H01L2924/01029 ,  H01L2924/01033 ,  H01L2924/01046 ,  H01L2924/01047 ,  H01L2924/0105 ,  H01L2924/01068 ,  H01L2924/01074 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/01082 ,  H01L2924/01322 ,  H01L2924/014 ,  H01L2924/12044 ,  H01L2224/05552 ,  H01L2924/00

摘要： A manufacturing method of a semiconductor device, comprising the steps of forming an insulation layer, which has an opening section in an area including an area on an electrode pad, on a top surface of the semiconductor substrate on which the electrode pad is formed; at least forming a first barrier metal layer, which becomes a part of a leading wiring layer, in an inner peripheral surface of the opening section including the top surface of the electrode pad; at least forming a main conductor layer, which becomes a part of the leading wiring layer, in an area surrounded by the first barrier metal layer in the opening section; eliminating an upper portion of the main conductor layer at least to a position at which the first barrier metal layer is exposed, and forming a second barrier metal layer, which becomes a part of the leading wiring layer, so as to cover the whole top surface of the main conductor layer.

摘要翻译： 一种半导体器件的制造方法，包括以下步骤：在形成有电极焊盘的半导体衬底的顶表面上形成绝缘层，该绝缘层在包括电极焊盘的区域的区域中具有开口部分; 至少在包括所述电极焊盘的顶面的所述开口部的内周面中形成成为前导布线层的一部分的第一阻挡金属层; 至少在由开口部分中的第一阻挡金属层包围的区域中形成成为引导布线层的一部分的主导体层; 消除主导体层的上部至少到第一阻挡金属层露出的位置，形成作为引导布线层的一部分的第二阻挡金属层，以覆盖整个顶表面 的主导体层。

公开(公告)号：US20050104165A1

公开(公告)日：2005-05-19

申请号：US11023389

申请日：2004-12-29

申请人： Toshiya Ishio ,  Hiroyuki Nakanishi ,  Katsunobu Mori ,  Yoshihide Iwazaki ,  Shinji Suminoe

发明人： Toshiya Ishio ,  Hiroyuki Nakanishi ,  Katsunobu Mori ,  Yoshihide Iwazaki ,  Shinji Suminoe

IPC分类号： H01L23/00 ,  H01L23/31 ,  H01L23/552 ,  H01L29/06 ,  H01L21/302

CPC分类号： H01L23/552 ,  H01L23/3114 ,  H01L24/45 ,  H01L24/48 ,  H01L24/97 ,  H01L29/0657 ,  H01L2224/05124 ,  H01L2224/05147 ,  H01L2224/05155 ,  H01L2224/05166 ,  H01L2224/05171 ,  H01L2224/05568 ,  H01L2224/05573 ,  H01L2224/05624 ,  H01L2224/05644 ,  H01L2224/05655 ,  H01L2224/16 ,  H01L2224/45144 ,  H01L2224/48227 ,  H01L2224/97 ,  H01L2924/00014 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01013 ,  H01L2924/01024 ,  H01L2924/01029 ,  H01L2924/01033 ,  H01L2924/01047 ,  H01L2924/01074 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/10158 ,  H01L2924/10253 ,  H01L2924/12042 ,  H01L2924/15311 ,  H01L2924/16152 ,  H01L2924/181 ,  H01L2924/3025 ,  H01L2224/81 ,  H01L2924/00 ,  H01L2924/00012 ,  H01L2224/45015 ,  H01L2924/207

摘要： A semiconductor chip of the present invention is so arranged that a front face on which an element circuit is formed has electrode pads and a side face and a back face are coated with a shielding layer for shielding electromagnetic waves. With this, it is possible to provide a semiconductor element capable of being easily manufactured into a smaller semiconductor device compared with a conventional semiconductor device equipped with a shielding cap; a semiconductor device; and a method for manufacturing a semiconductor element.

摘要翻译： 本发明的半导体芯片被布置成使得其上形成有元件电路的正面具有电极焊盘，并且侧面和背面涂覆有用于屏蔽电磁波的屏蔽层。 由此，与配备有屏蔽盖的现有的半导体装置相比，可以提供能够容易地制造成较小的半导体装置的半导体元件; 半导体器件; 以及半导体元件的制造方法。

公开(公告)号：US07445958B2

公开(公告)日：2008-11-04

申请号：US11474469

申请日：2006-06-26

申请人： Shinji Suminoe ,  Hiroyuki Nakanishi ,  Toshiya Ishio ,  Yoshihide Iwazaki ,  Katsunobu Mori

发明人： Shinji Suminoe ,  Hiroyuki Nakanishi ,  Toshiya Ishio ,  Yoshihide Iwazaki ,  Katsunobu Mori

IPC分类号： H01L21/44

CPC分类号： H01L24/10 ,  H01L23/3114 ,  H01L24/05 ,  H01L24/13 ,  H01L2224/0231 ,  H01L2224/0401 ,  H01L2224/05006 ,  H01L2224/05546 ,  H01L2224/05567 ,  H01L2224/13 ,  H01L2224/13007 ,  H01L2224/13022 ,  H01L2224/13024 ,  H01L2224/13099 ,  H01L2924/0002 ,  H01L2924/01004 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01007 ,  H01L2924/01013 ,  H01L2924/01014 ,  H01L2924/01022 ,  H01L2924/01024 ,  H01L2924/01027 ,  H01L2924/01028 ,  H01L2924/01029 ,  H01L2924/01033 ,  H01L2924/01046 ,  H01L2924/01047 ,  H01L2924/0105 ,  H01L2924/01068 ,  H01L2924/01074 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/01082 ,  H01L2924/01322 ,  H01L2924/014 ,  H01L2924/12044 ,  H01L2224/05552 ,  H01L2924/00

摘要： A manufacturing method of a semiconductor device, comprising the steps of forming an insulation layer, which has an opening section in an area including an area on an electrode pad, on a top surface of the semiconductor substrate on which the electrode pad is formed; at least forming a first barrier metal layer, which becomes a part of a leading wiring layer, in an inner peripheral surface of the opening section including the top surface of the electrode pad; at least forming a main conductor layer, which becomes a part of the leading wiring layer, in an area surrounded by the first barrier metal layer in the opening section; eliminating an upper portion of the main conductor layer at least to a position at which the first barrier metal layer is exposed, and forming a second barrier metal layer, which becomes a part of the leading wiring layer, so as to cover the whole top surface of the main conductor layer.

摘要翻译： 一种半导体器件的制造方法，包括以下步骤：在形成有电极焊盘的半导体衬底的顶表面上形成绝缘层，该绝缘层在包括电极焊盘的区域的区域中具有开口部分; 至少在包括所述电极焊盘的顶面的所述开口部的内周面中形成成为前导布线层的一部分的第一阻挡金属层; 至少在由开口部分中的第一阻挡金属层包围的区域中形成成为引导布线层的一部分的主导体层; 消除主导体层的上部至少到第一阻挡金属层露出的位置，形成作为引导布线层的一部分的第二阻挡金属层，以覆盖整个顶表面 的主导体层。

公开(公告)号：US07091616B2

公开(公告)日：2006-08-15

申请号：US10163492

申请日：2002-06-07

申请人： Shinji Suminoe ,  Hiroyuki Nakanishi ,  Toshiya Ishio ,  Yoshihide Iwazaki ,  Katsunobu Mori

发明人： Shinji Suminoe ,  Hiroyuki Nakanishi ,  Toshiya Ishio ,  Yoshihide Iwazaki ,  Katsunobu Mori

IPC分类号： H01L23/48

CPC分类号： H01L24/10 ,  H01L23/3114 ,  H01L24/05 ,  H01L24/13 ,  H01L2224/0231 ,  H01L2224/0401 ,  H01L2224/05006 ,  H01L2224/05546 ,  H01L2224/05567 ,  H01L2224/13 ,  H01L2224/13007 ,  H01L2224/13022 ,  H01L2224/13024 ,  H01L2224/13099 ,  H01L2924/0002 ,  H01L2924/01004 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01007 ,  H01L2924/01013 ,  H01L2924/01014 ,  H01L2924/01022 ,  H01L2924/01024 ,  H01L2924/01027 ,  H01L2924/01028 ,  H01L2924/01029 ,  H01L2924/01033 ,  H01L2924/01046 ,  H01L2924/01047 ,  H01L2924/0105 ,  H01L2924/01068 ,  H01L2924/01074 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/01082 ,  H01L2924/01322 ,  H01L2924/014 ,  H01L2924/12044 ,  H01L2224/05552 ,  H01L2924/00

摘要： A leading wiring layer is provided with a main conductor layer, a first barrier metal layer for covering bottom and side surfaces of the main conductor layer, and a second barrier metal layer for covering a top surface of the main conductor layer. This ensures the respective barrier metal layers to cover entire surroundings including the side, bottom and top surfaces of the main conductor layer.

摘要翻译： 引导布线层设置有主导体层，用于覆盖主导体层的底部和侧表面的第一阻挡金属层和用于覆盖主导体层的顶表面的第二阻挡金属层。 这确保相应的阻挡金属层覆盖包括主导体层的侧面，底部和顶部表面的整个环境。

公开(公告)号：US06940175B2

公开(公告)日：2005-09-06

申请号：US10163497

申请日：2002-06-07

申请人： Yoshihide Iwazaki ,  Toshiya Ishio ,  Hiroyuki Nakanishi ,  Katsunobu Mori

发明人： Yoshihide Iwazaki ,  Toshiya Ishio ,  Hiroyuki Nakanishi ,  Katsunobu Mori

IPC分类号： H01L21/60 ,  H01L25/065 ,  H01L25/07 ,  H01L25/18 ,  H05K3/12 ,  H05K3/32 ,  H05K3/34 ,  H05K3/36 ,  H01L23/48 ,  H01L23/52 ,  H01L29/40

CPC分类号： H01L24/11 ,  H01L24/13 ,  H01L24/81 ,  H01L2224/05568 ,  H01L2224/05573 ,  H01L2224/11312 ,  H01L2224/1132 ,  H01L2224/1134 ,  H01L2224/11515 ,  H01L2224/11901 ,  H01L2224/1319 ,  H01L2224/13562 ,  H01L2224/1357 ,  H01L2224/1379 ,  H01L2224/138 ,  H01L2224/16145 ,  H01L2224/81192 ,  H01L2224/81855 ,  H01L2924/00013 ,  H01L2924/00014 ,  H01L2924/01004 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01013 ,  H01L2924/01019 ,  H01L2924/01033 ,  H01L2924/01047 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/01082 ,  H01L2924/014 ,  H05K3/1216 ,  H05K3/321 ,  H05K3/3436 ,  H05K2201/10674 ,  H05K2201/10992 ,  H05K2201/2036 ,  H05K2203/1476 ,  H01L2224/131 ,  H01L2224/13144 ,  H01L2224/13099 ,  H01L2224/05599

摘要： A semiconductor device includes (i) spacers between a first electronic component and a second electronic component facing each other, for keeping a distance between the first and second electronic components constant and (ii) combining parts for combining the first electronic component with the second electronic component. The spacers are made of liquid resin material made of thermosetting resin, and the combining parts are made of liquid conductive combining material including metal and thermosetting resin. A manufacturing method of the semiconductor device includes the steps of: forming the spacers on first electrode pads by hardening the liquid resin material; providing the liquid conductive combining material on either the first electrode pads or second electrode pads; aligning the first electronic component with the second electronic component so that (i) the spacers contact with the second electrode pads and (ii) the liquid conductive combining material contact with either at least a part of one the first electrode pads or at least part of one of the second electrode pads; and combining the first electronic component with the second electronic component by hardening the liquid conductive combining material. The steps above are carried out in this order.

摘要翻译： 半导体器件包括（i）第一电子部件和第二电子部件之间的间隔物，用于保持第一和第二电子部件之间的距离恒定，以及（ii）组合用于将第一电子部件与第二电子部件组合的部件 零件。 间隔件由由热固性树脂制成的液体树脂材料制成，并且组合部分由包括金属和热固性树脂的液体导电组合材料制成。 半导体器件的制造方法包括以下步骤：通过使液体树脂材料硬化来在第一电极焊盘上形成间隔物; 在第一电极焊盘或第二电极焊盘上提供液体导电组合材料; 将第一电子部件与第二电子部件对准，使得（i）间隔件与第二电极焊盘接触，和（ii）液体导电组合材料与第一电​​极焊盘的至少一部分或至少部分 第二电极焊盘之一; 以及通过硬化所述液体导电组合材料来将所述第一电子部件与所述第二电子部件组合。 上述步骤按此顺序进行。

公开(公告)号：US06396157B2

公开(公告)日：2002-05-28

申请号：US09752682

申请日：2001-01-03

申请人： Hiroyuki Nakanishi ,  Katsunobu Mori ,  Toshiya Ishio ,  Shinji Suminoe

发明人： Hiroyuki Nakanishi ,  Katsunobu Mori ,  Toshiya Ishio ,  Shinji Suminoe

IPC分类号： H01L2348

CPC分类号： H01L24/11 ,  H01L24/13 ,  H01L2224/05001 ,  H01L2224/05008 ,  H01L2224/05022 ,  H01L2224/05024 ,  H01L2224/05548 ,  H01L2224/05569 ,  H01L2224/1147 ,  H01L2224/13099 ,  H01L2224/131 ,  H01L2924/0001 ,  H01L2924/01004 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01015 ,  H01L2924/01029 ,  H01L2924/01033 ,  H01L2924/01047 ,  H01L2924/01078 ,  H01L2924/014 ,  H01L2924/14

摘要： A semiconductor integrated circuit device in accordance with the present invention is provided with first electrode pads, a first insulation layer and a second insulation layer. The first electrode pad are formed on the circuit formation face side of an IC chip. The first insulation layer is placed on areas other than the upper portions of the first electrode pads. The second insulation layer, which is made from a photosensitive material, is formed on the first insulation layer with an opening section for allowing at least one portion of the first electrode, the wire and at least one portion of the second electrode to be exposed. Here, the wire and the second electrode are formed by filling the opening section of the second insulation layer with particles of a conductive material. Thus, it is possible to provide a semiconductor integrated circuit device to which a fine wire processing technique is applied while maintaining the same functions as conventional devices at low costs, and a manufacturing method for such a device.

摘要翻译： 根据本发明的半导体集成电路器件设置有第一电极焊盘，第一绝缘层和第二绝缘层。 第一电极焊盘形成在IC芯片的电路形成面侧。 第一绝缘层放置在除第一电极焊盘的上部之外的区域上。 由感光材料制成的第二绝缘层在第一绝缘层上形成有用于允许第一电极，电线和至少一部分第二电极的至少一部分露出的开口部分。 这里，通过用导电材料的颗粒填充第二绝缘层的开口部分来形成电线和第二电极。 因此，可以提供一种半导体集成电路器件，在保持与传统器件相同功能的低成本的条件下应用细线加工技术，以及这种器件的制造方法。

公开(公告)号：US20050194686A1

公开(公告)日：2005-09-08

申请号：US11072238

申请日：2005-03-07

申请人： Yoshihide Iwazaki ,  Shinji Suminoe ,  Katsunobu Mori

发明人： Yoshihide Iwazaki ,  Shinji Suminoe ,  Katsunobu Mori

IPC分类号： H01L23/52 ,  H01L21/3205 ,  H01L21/44 ,  H01L21/60 ,  H01L23/12 ,  H01L23/31 ,  H01L23/48 ,  H01L23/485 ,  H01L23/525 ,  H05K3/34

CPC分类号： H05K3/3452 ,  H01L23/3114 ,  H01L23/525 ,  H01L24/11 ,  H01L24/13 ,  H01L2224/0231 ,  H01L2224/0401 ,  H01L2224/05647 ,  H01L2224/05655 ,  H01L2224/11 ,  H01L2224/11334 ,  H01L2224/1148 ,  H01L2224/13 ,  H01L2224/131 ,  H01L2224/13147 ,  H01L2224/1357 ,  H01L2924/00013 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01015 ,  H01L2924/01018 ,  H01L2924/01023 ,  H01L2924/01024 ,  H01L2924/01029 ,  H01L2924/01033 ,  H01L2924/01074 ,  H01L2924/01075 ,  H01L2924/01078 ,  H01L2924/01082 ,  H01L2924/014 ,  H01L2924/14 ,  H05K2201/2081 ,  H05K2203/0315 ,  H01L2924/00014 ,  H01L2224/13099 ,  H01L2924/00 ,  H01L2924/013

摘要： A semiconductor device according to the present invention comprises an electrode pad electrically conducted to an electric circuit formed on an element-formed surface of a silicon wafer; a wiring pattern re-wired by being electrically conducted to the electrode pad; and an oxide film formed on a surface of the wiring pattern, the oxide film being formed by subjecting the wiring pattern to oxidization. With the provision of oxide film, the semiconductor device prevents a decrease in reliability in terms of electric characteristic or the like, and also achieves reduction in fabrication cost compared to a conventional semiconductor device.

摘要翻译： 根据本发明的半导体器件包括电导体，该电极焊盘导电到形成在硅晶片的元件形成表面上的电路; 通过对电极焊盘进行导电而重新布线的布线图案; 以及形成在所述布线图案的表面上的氧化膜，所述氧化膜通过对所述布线图案进行氧化而形成。 通过提供氧化膜，半导体器件防止电特性等的可靠性降低，并且与现有的半导体器件相比，也可以实现制造成本的降低。

公开(公告)号：US06552426B2

公开(公告)日：2003-04-22

申请号：US09847314

申请日：2001-05-03

申请人： Toshiya Ishio ,  Hiroyuki Nakanishi ,  Katsunobu Mori

发明人： Toshiya Ishio ,  Hiroyuki Nakanishi ,  Katsunobu Mori

IPC分类号： H01L2352

CPC分类号： H01L24/97 ,  H01L23/3121 ,  H01L24/45 ,  H01L24/48 ,  H01L25/0652 ,  H01L25/0657 ,  H01L2224/45144 ,  H01L2224/48091 ,  H01L2224/4824 ,  H01L2224/48465 ,  H01L2224/73207 ,  H01L2224/73215 ,  H01L2224/73265 ,  H01L2224/97 ,  H01L2225/06506 ,  H01L2225/06558 ,  H01L2924/00014 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01013 ,  H01L2924/01019 ,  H01L2924/01029 ,  H01L2924/01033 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/01082 ,  H01L2924/10253 ,  H01L2924/15311 ,  H01L2924/181 ,  H01L2924/3025 ,  H01L2224/85 ,  H01L2924/00 ,  H01L2924/00012 ,  H01L2224/45015 ,  H01L2924/207

摘要： The present invention provides a quality and reliable high-density package (Chip Size Package) semiconductor device without problems related to the manufacturing process. The semiconductor device includes the first semiconductor substrate piece having electrode pads formed on its principle surface, and a second semiconductor mounting piece mounted thereon via a first insulating film and a die-attaching material. On the surface opposite the first semiconductor substrate piece of the second semiconductor substrate piece, formed are wiring patterns and a second insulating film for protecting the wiring patterns. The wiring patterns include electrode pads, wires, and lands where external connection terminals are provided.

摘要翻译： 本发明提供了质量可靠的高密度封装（芯片尺寸封装）半导体器件，而与制造工艺无关。 半导体器件包括：第一半导体衬底片，其具有形成在其主表面上的电极焊盘;以及第二半导体安装件，其经由第一绝缘膜和管芯附着材料安装在其上。 在与第二半导体衬底片的第一半导体衬底片相对的表面上形成布线图案和用于保护布线图案的第二绝缘膜。 布线图案包括设置有外部连接端子的电极焊盘，电线和焊盘。