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    Halogen gas discharge laser electrodes
    4.
    发明授权
    Halogen gas discharge laser electrodes 有权
    卤素气体放电激光电极

    公开(公告)号：US07301980B2

    公开(公告)日：2007-11-27

    申请号：US10877737

    申请日：2004-06-25

    申请人： Thomas D. Steiger ,  Richard C. Ujazdowski ,  Timothy S. Dyer ,  Thomas P. Duffey ,  Walter D. Gillespie ,  Bryan G. Moosman ,  Richard G. Morton ,  Brian D. Strate

    发明人： Thomas D. Steiger ,  Richard C. Ujazdowski ,  Timothy S. Dyer ,  Thomas P. Duffey ,  Walter D. Gillespie ,  Bryan G. Moosman ,  Richard G. Morton ,  Brian D. Strate

    IPC分类号： H01S3/097

    CPC分类号： H01S3/225 ,  H01S3/0381 ,  H01S3/0385 ,  H01S3/0388 ,  H01S3/0971 ,  H01S3/09713

    摘要： A gas discharge laser includes a laser chamber containing a halogen laser gas, two electrode elements defining a cathode and an anode, each having a discharge receiving region defining two longitudinal edges and having a region width defining a width of an electric discharge between the electrode elements in the laser gas. The anode comprising a first anode portion comprising a first anode material defining a first anode material erosion rate, located entirely within the discharge receiving region, a pair of second anode portions comprising a second anode material defining a second anode material erosion rate, respectively located on each side of the first anode portion and at least partially within the discharge receiving region; an electrode center base portion integral with the first anode portion; and wherein each of the respective pair of second anode portions is mechanically bonded to the center base portion.

    摘要翻译： 气体放电激光器包括含有卤素激光气体的激光室，限定阴极和阳极的两个电极元件，每个具有限定两个纵向边缘的放电接收区域，并且具有限定电极元件之间的放电宽度的区域宽度 在激光气体中。 阳极包括第一阳极部分，其包括限定第一阳极材料侵蚀速率的第一阳极材料，其完全位于放电接收区域内;一对第二阳极部分，包括限定第二阳极材料侵蚀速率的第二阳极材料，分别位于 所述第一阳极部分的每一侧并且至少部分地在所述放电接收区域内; 与所述第一阳极部分成一体的电极中心基部; 并且其中相应的一对第二阳极部分中的每一个机械地结合到中心基部。

    Gas discharge laser chamber improvements
    5.
    发明授权
    Gas discharge laser chamber improvements 有权

    公开(公告)号：US07522650B2

    公开(公告)日：2009-04-21

    申请号：US10815387

    申请日：2004-03-31

    申请人： William N. Partlo ,  Yoshiho Amada ,  James A. Carmichael ,  Timothy S. Dyer ,  Walter D. Gillespie ,  Bryan G. Moosman ,  Richard G. Morton ,  Curtis L. Rettig ,  Brian D. Strate ,  Thomas D. Steiger ,  Fedor Trintchouk ,  Richard C. Ujazdowski

    发明人： William N. Partlo ,  Yoshiho Amada ,  James A. Carmichael ,  Timothy S. Dyer ,  Walter D. Gillespie ,  Bryan G. Moosman ,  Richard G. Morton ,  Curtis L. Rettig ,  Brian D. Strate ,  Thomas D. Steiger ,  Fedor Trintchouk ,  Richard C. Ujazdowski

    IPC分类号： H01S3/22

    CPC分类号： H01S3/036 ,  H01S3/0384 ,  H01S3/041 ,  H01S3/0971 ,  H01S3/225

    摘要： A method and apparatus if disclosed which may comprise a high power high repetition rate gas discharge laser UV light source which may comprise: a gas discharge chamber comprising an interior wall comprising a vertical wall and an adjacent bottom wall; a gas circulation fan creating a gas flow path adjacent the interior vertical wall and the adjacent bottom wall; an in-chamber dust trap positioned a region of low gas flow, which may be along an interior wall and may comprise at least one meshed screen, e.g., a plurality of meshed screens, which may comprise at least two different gauge meshed screens. The dust trap may extend along the bottom interior wall of the chamber and/or a vertical portion of the interior wall. The dust trap may comprise a first meshed screen having a first gauge; a second meshed screen having a second gauge smaller than the first gauge; and the second meshed screen intermediate the first meshed screen and the interior wall. The chamber may comprise a plurality of dust collecting recesses in at least one of the vertical interior wall and the bottom wall of the chamber which may be selected from a group comprising a one-part recess and a multi-part recess, which may comprise two sections angled with respect to each other. The dust trap may comprise a pressure trap positioned between a portion of a main insulator and an interior wall of the chamber. The chamber may comprise a gas circulating fan comprising a cross-flow fan with a fan cutoff that may comprise a vortex control pocket. The chamber may comprise a preionization mechanism comprising a preionization tub containing a ground rod within an elongated opening in the preionization tube that may comprise a compliant member, an automatic preionization shut-off mechanism, a preionization onset control mechanism and/or a focusing element. The chamber may comprise an elongated baffle plate that may comprise a plurality of pyramidal structures including varying numbers of generally pyramidal elements and oriented in groups of varying numbers of generally pyramidal elements and oriented along and transverse to the longitudinal axis. Acoustic resonances within the chamber may also be reduced by introducing an artificial jitter into the timing of the laser discharges varying the inter-pulse period randomly or in a repeating pattern from pulse to pulse within a burst.

    Line narrowing apparatus with high transparency prism beam expander
    9.
    发明授权
    Line narrowing apparatus with high transparency prism beam expander 有权
    具有高透明棱镜光束扩张器的线条变窄装置

    公开(公告)号：US5978409A

    公开(公告)日：1999-11-02

    申请号：US162341

    申请日：1998-09-28

    申请人： Palash P. Das ,  Alexander I. Ershov ,  Richard G. Morton

    发明人： Palash P. Das ,  Alexander I. Ershov ,  Richard G. Morton

    IPC分类号： G03F7/20 ,  H01S3/03 ,  H01S3/08 ,  H01S3/1055 ,  H01S3/137 ,  H01S3/225

    CPC分类号： G03F7/70025 ,  G03F7/70041 ,  G03F7/70558 ,  G03F7/70575 ,  H01S3/03 ,  H01S3/08009 ,  H01S3/225 ,  H01S3/1055

    摘要： A grating based line-narrowing apparatus having a prism beam expander with at least four prisms. Each prism is positioned at an incidence angle between 67 and 71 degrees. A single layer coating of high refractive index, robust material, such as Al.sub.2 O.sub.3, is applied to the hypotenuse face of each prism, providing an efficient, anti-reflection coating. In a preferred embodiment the incident angle of the four prisms are each at about 68.2 degrees. The laser of the preferred embodiment has similar line narrowing efficiency and bandwidth as that for a laser with a 3 prism, ideal multi-layer anti-reflection coated beam expander. The primary benefit of the new four prism arrangement is that the prism coatings should be much less expensive and have greatly increased durability. Applicants have tested the new prisms for 30 million, 10 mJ pulses in air with no noticeable degradation. No present day dielectric multi-layer stack coating could survive such exposure.

    摘要翻译： 一种基于光栅的线条变窄装置，具有至少具有四个棱镜的棱镜扩束器。 每个棱镜定位在67和71度之间的入射角。 高折射率的单层涂层，诸如Al2O3的坚固材料被施加到每个棱镜的斜边面，从而提供有效的抗反射涂层。 在一个优选实施例中，四个棱镜的入射角分别为约68.2度。 优选实施例的激光器具有与具有3棱镜，理想的多层抗反射涂层光束扩展器的激光器相似的线窄化效率和带宽。 新的四棱镜布置的主要优点是棱镜涂层应该便宜得多，并且耐久性大大提高。 申请人已经在空气中测试了新的棱镜3000万，10 mJ脉冲，没有明显的退化。 没有现在的电介质多层堆叠涂层可以经受这样的曝光。

    Protective overcoat for replicated diffraction gratings
    10.
    发明授权
    Protective overcoat for replicated diffraction gratings 有权
    复制衍射光栅的保护涂层

    公开(公告)号：US06529321B2

    公开(公告)日：2003-03-04

    申请号：US09731938

    申请日：2000-12-07

    申请人： Xiaojiang J. Pan ,  Richard G. Morton ,  Alexander I. Ershov

    发明人： Xiaojiang J. Pan ,  Richard G. Morton ,  Alexander I. Ershov

    IPC分类号： G02B508

    CPC分类号： H01S3/225 ,  C23C14/0694 ,  C23C14/16 ,  C23C14/225 ,  C23C14/24 ,  G02B1/105 ,  G02B1/14 ,  G02B5/1838 ,  G02B5/1847 ,  G02B5/1852 ,  G02B5/1861 ,  G03F7/70025 ,  G03F7/70041 ,  G03F7/70558 ,  G03F7/70575 ,  H01S3/03

    摘要： An overcoat protected diffraction grating. A replica grating having a thin aluminum reflective grating surface is produced by replication of a master grating or a submaster grating. The thin aluminum reflective surface may be cracked or have relatively thick grain boundaries containing oxides and hydroxides of aluminum and typically is also naturally coated with an aluminum oxide film. The grating is subsequently recoated in a vacuum chamber with a thin, pure, dense aluminum overcoat and then also in the vacuum the aluminum overcoat is coated with a thin film of MgF2. The grating is especially suited for use for wavelength selection in an ArF laser operating producing an ultraviolet laser beam at a wavelength of about 193 nm. The oxygen free aluminum overcoat prevents the ultraviolet light from causing damage by stimulating chemical reactions in grating materials under the aluminum grating surface or in the aluminum oxide film. The MgF2 additionally prevents oxidation on the surface, of the aluminum overcoat.

    摘要翻译： 外涂保护衍射光栅。 具有薄铝反射光栅表面的复制光栅通过主光栅或子光栅的复制产生。 薄的铝反射表面可能是破裂的或具有含有氧化物和铝的氢氧化物的相对较厚的晶界，并且通常也被氧化铝膜自然地涂覆。 随后在具有薄的，纯的，致密的铝外涂层的真空室中重新涂覆光栅，然后在真空中将铝外涂层涂覆有MgF 2的薄膜。 该光栅特别适合用于在大约193nm的波长下产生紫外激光束的ArF激光器中的波长选择。 无氧铝外套防止紫外光通过在铝光栅表面或氧化铝膜下的光栅材料中刺激化学反应而引起损伤。 MgF2另外防止铝外涂层表面的氧化。