Suspension for filling via holes in silicon and method for making the same
    13.
    发明授权
    Suspension for filling via holes in silicon and method for making the same 有权
    用于通过硅中的孔填充的悬浮液及其制造方法

    公开(公告)号:US07288474B2

    公开(公告)日:2007-10-30

    申请号:US11544220

    申请日:2006-10-10

    Abstract: A metallization process and material system for metallizing either blind or through vias in silicon, involving forming a low coefficient of thermal expansion composite or suspension, relative to pure metals, such as copper, silver, or gold, and filling the via holes in the silicon with the paste or suspension. The suspensions sinter with minimal bulk shrinkage, forming highly conductive structures without the formation of macroscopic voids. The selected suspension maintains a coefficient of thermal expansion closer to that of silicon.

    Abstract translation: 一种金属化工艺和材料系统,用于在硅中金属化盲孔或通孔,涉及相对于纯金属(例如铜,银或金)形成低热膨胀复合材料或悬浮系数,并填充硅中的通孔 用糊或悬浮液。 悬浮液以最小的体积收缩率烧结,形成高导电性结构,而不形成宏观空隙。 所选择的悬架保持更接近于硅的热膨胀系数。

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