CHIP STRUCTURE WITH A PASSIVE DEVICE AND METHOD FOR FORMING THE SAME
    14.
    发明申请
    CHIP STRUCTURE WITH A PASSIVE DEVICE AND METHOD FOR FORMING THE SAME 审中-公开
    具有被动装置的芯片结构及其形成方法

    公开(公告)号:US20130214387A1

    公开(公告)日:2013-08-22

    申请号:US13851050

    申请日:2013-03-26

    发明人: Mou-Shiung Lin

    IPC分类号: H01L27/04 H01L21/82

    摘要: The present disclosure provides a method for forming a chip structure with a resistor. A semiconductor substrate is provided and has a surface. A plurality of electronic devices and a resistor is formed on the surface of the semiconductor substrate. A plurality of dielectric layers and a plurality of circuit layers are formed over the semiconductor substrate. The dielectric layers are stacked over the semiconductor substrate and have a plurality of via holes. Each of the circuit layers is disposed on corresponding one of the dielectric layers respectively, wherein the circuit layers are electrically connected with each other through the via holes and are electrically connected to the electronic devices. A passivation layer is formed over the dielectric layers and the circuit layers. A circuit line is formed over the passivation layer, wherein the circuit line passes through the passivation layer and is electrically connected to the resistor.

    摘要翻译: 本公开提供了一种用电阻器形成芯片结构的方法。 提供半导体衬底并具有表面。 在半导体衬底的表面上形成多个电子器件和电阻器。 在半导体衬底上形成多个电介质层和多个电路层。 电介质层堆叠在半导体衬底上并具有多个通孔。 电路层中的每一个分别设置在相应的一个电介质层上,其中电路层通过通孔彼此电连接并与电子器件电连接。 在电介质层和电路层上形成钝化层。 在钝化层上形成电路线,其中电路线通过钝化层并与电阻器电连接。