Laser micromachining method
    12.
    发明授权
    Laser micromachining method 有权
    激光微加工方法

    公开(公告)号:US07303977B2

    公开(公告)日:2007-12-04

    申请号:US10985572

    申请日:2004-11-10

    IPC分类号: H01L21/00

    摘要: A laser micromachining method is disclosed wherein a workpiece is milled using an incident beam from a laser beam focused above the surface of the workpiece. The incident beam is guided by a plasma channel generated by the incident beam. The plasma channel, which has a relatively constant diameter over an extended distance, is generated by continual Kerr effect self-focusing balanced by ionization of air beam defocusing.

    摘要翻译: 公开了一种激光微加工方法,其中使用来自聚焦在工件表面上的激光束的入射光束研磨工件。 入射光束由入射光束产生的等离子体通道引导。 等离子体通道在延长的距离上具有相对恒定的直径,是由通过气流散焦电离平衡的连续克尔效应自聚焦产生的。