公开(公告)号：US10861854B2

公开(公告)日：2020-12-08

申请号：US16707019

申请日：2019-12-09

Applicant: Samsung Electronics Co., Ltd.

Inventor： Jiyoung Kim ,  Kiseok Lee ,  Bong-Soo Kim ,  Junsoo Kim ,  Dongsoo Woo ,  Kyupil Lee ,  HyeongSun Hong ,  Yoosang Hwang

IPC: H01L27/108 ,  H01L27/06 ,  H01L49/02

Abstract: Semiconductor memory devices are provided. A semiconductor memory device includes a substrate. The semiconductor memory device includes a plurality of memory cell transistors vertically stacked on the substrate. The semiconductor memory device includes a first conductive line connected to a source region of at least one of the plurality of memory cell transistors. The semiconductor memory device includes a second conductive line connected to a plurality of gate electrodes of the plurality of memory cell transistors. Moreover, the semiconductor memory device includes a data storage element connected to a drain region of the at least one of the plurality of memory cell transistors.

公开(公告)号：US10796950B2

公开(公告)日：2020-10-06

申请号：US16238172

申请日：2019-01-02

Applicant: Samsung Electronics Co., Ltd.

Inventor： Myeong-Dong Lee ,  Keunnam Kim ,  Dongryul Lee ,  Minseong Choi ,  Jimin Choi ,  Yong Kwan Kim ,  Changhyun Cho ,  Yoosang Hwang

IPC: H01L21/76 ,  H01L21/768 ,  H01L27/108 ,  H01L23/532 ,  H01L23/535

Abstract: According to some embodiments, a semiconductor device may include gate structures on a substrate; first and second impurity regions formed in the substrate and at both sides of each of the gate structures; conductive line structures provided to cross the gate structures and connected to the first impurity regions; and contact plugs connected to the second impurity regions, respectively. For each of the conductive line structures, the semiconductor device may include a first air spacer provided on a sidewall of the conductive line structure; a first material spacer provided between the conductive line structure and the first air spacer; and an insulating pattern provided on the air spacer. The insulating pattern may include a first portion and a second portion, and the second portion may have a depth greater than that of the first portion and defines a top surface of the air spacer.

公开(公告)号：US10535659B2

公开(公告)日：2020-01-14

申请号：US16038052

申请日：2018-07-17

Applicant: Samsung Electronics Co., Ltd.

Inventor： Jiyoung Kim ,  Kiseok Lee ,  Bong-Soo Kim ,  Junsoo Kim ,  Dongsoo Woo ,  Kyupil Lee ,  HyeongSun Hong ,  Yoosang Hwang

IPC: H01L27/108 ,  H01L27/06 ,  H01L49/02

Abstract: Semiconductor memory devices are provided. A semiconductor memory device includes a substrate. The semiconductor memory device includes a plurality of memory cell transistors vertically stacked on the substrate. The semiconductor memory device includes a first conductive line connected to a source region of at least one of the plurality of memory cell transistors. The semiconductor memory device includes a second conductive line connected to a plurality of gate electrodes of the plurality of memory cell transistors. Moreover, the semiconductor memory device includes a data storage element connected to a drain region of the at least one of the plurality of memory cell transistors.

公开(公告)号：US10332890B2

公开(公告)日：2019-06-25

申请号：US15653198

申请日：2017-07-18

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Kiseok Lee ,  Chan-Sic Yoon ,  Augustin Hong ,  Keunnam Kim ,  Dongoh Kim ,  Bong-Soo Kim ,  Jemin Park ,  Hoin Lee ,  Sungho Jang ,  Kiwook Jung ,  Yoosang Hwang

IPC: H01L27/108 ,  H01L27/24 ,  H01L27/22

Abstract: A method of manufacturing a semiconductor memory device and a semiconductor memory device, the method including providing a substrate that includes a cell array region and a peripheral circuit region; forming a mask pattern that covers the cell array region and exposes the peripheral circuit region; growing a semiconductor layer on the peripheral circuit region exposed by the mask pattern such that the semiconductor layer has a different lattice constant from the substrate; forming a buffer layer that covers the cell array region and exposes the semiconductor layer; forming a conductive layer that covers the buffer layer and the semiconductor layer; and patterning the conductive layer to form conductive lines on the cell array region and to form a gate electrode on the peripheral circuit region.

公开(公告)号：US10269808B2

公开(公告)日：2019-04-23

申请号：US15584342

申请日：2017-05-02

Applicant: Samsung Electronics Co., Ltd.

Inventor： Daeik Kim ,  Bong-Soo Kim ,  Jemin Park ,  Taejin Park ,  Yoosang Hwang

IPC: H01L27/108

Abstract: Semiconductor devices are provided. A semiconductor device includes a substrate. The semiconductor device includes a stack structure on the substrate. The stack structure includes a first insulating material and a second insulating material that is on the first insulating material. The semiconductor device includes a spacer that extends from a sidewall of the first insulating material of the stack structure to a portion of a sidewall of the second insulating material of the stack structure. Moreover, the semiconductor device includes a conductive line that is on the spacer. Methods of forming semiconductor devices are also provided.

公开(公告)号：US20190019554A1

公开(公告)日：2019-01-17

申请号：US15987207

申请日：2018-05-23

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： SUNGWOO KIM ,  Bong-Soo Kim ,  Youngbae Kim ,  Kijae Hur ,  Gwanhyeob Koh ,  Hyeongsun Hong ,  Yoosang Hwang

IPC: G11C14/00 ,  H01L27/108 ,  H01L27/24 ,  H01L23/528 ,  H01L45/00 ,  G11C13/00

CPC classification number: G11C14/0045 ,  G11C5/025 ,  G11C11/005 ,  G11C13/0004 ,  G11C13/0007 ,  G11C2213/15 ,  G11C2213/31 ,  G11C2213/32 ,  G11C2213/52 ,  G11C2213/76 ,  H01L23/528 ,  H01L27/10814 ,  H01L27/10823 ,  H01L27/10897 ,  H01L27/2409 ,  H01L27/2427 ,  H01L27/2463 ,  H01L45/06 ,  H01L45/1233 ,  H01L45/1253 ,  H01L45/143 ,  H01L45/144 ,  H01L45/146 ,  H01L45/147

Abstract: A semiconductor device includes: a first memory section, a first peripheral circuit section, and a second peripheral circuit section that are disposed on a substrate; and a second memory section and a wiring section that are stacked on the second peripheral circuit section, wherein the first memory section includes a plurality of first memory cells, each of the first memory cells including a cell transistor and a capacitor connected to the cell transistor, the second memory section includes a plurality of second memory cells, each of the second memory cells including a variable resistance element and a select element coupled in series to each other, and the wiring section includes a plurality of line patterns, wherein the line patterns and the second memory cells are higher than the capacitor with respect to the substrate.

公开(公告)号：US09847278B2

公开(公告)日：2017-12-19

申请号：US15095327

申请日：2016-04-11

Applicant: Samsung Electronics Co., Ltd.

Inventor： Kyung-Eun Kim ,  Yongkwan Kim ,  Semyeong Jang ,  Jaehyoung Choi ,  Yoosang Hwang ,  Bong-Soo Kim

IPC: H01L21/70 ,  H01L21/76 ,  H01L23/482 ,  H01L29/06 ,  H01L21/762 ,  H01L21/768 ,  H01L27/108 ,  H01L23/522 ,  H01L23/532

CPC classification number: H01L23/4821 ,  H01L21/76264 ,  H01L21/7682 ,  H01L21/76897 ,  H01L23/5222 ,  H01L23/53295 ,  H01L27/10814 ,  H01L27/10855 ,  H01L27/10885 ,  H01L29/0649

Abstract: A semiconductor device includes first and second bit line structures on a substrate and spaced apart from each other, a via plug partially filling between the first and second bit line structures, a via pad in contact with an upper surface of the via plug and an upper sidewall of the first bit line structure, the via pad being spaced apart from an upper portion of the second bit line structure, a first cavity filled with air being between the via plug and the first bit line structure and a second cavity filled with air between the via plug and the second bit line structure, A gap capping spacer having a first portion on the upper sidewall of the first bit line structure and a second portion covers the first air spacer. A horizontal width of the first portion is smaller than that of the second portion.

公开(公告)号：US09761591B2

公开(公告)日：2017-09-12

申请号：US15148405

申请日：2016-05-06

Applicant: Samsung Electronics Co., Ltd.

Inventor： Eunjung Kim ,  Sohyun Park ,  Bong-Soo Kim ,  Yoosang Hwang ,  Dong-Wan Kim ,  Junghoon Han

IPC: H01L21/20 ,  H01L27/108 ,  H01L21/56 ,  H01L21/311 ,  H01L49/02 ,  H01L21/3105 ,  H01L21/027

CPC classification number: H01L27/10894 ,  H01L21/0274 ,  H01L21/31051 ,  H01L21/31144 ,  H01L21/565 ,  H01L27/10814 ,  H01L27/10823 ,  H01L27/10852 ,  H01L27/10897 ,  H01L27/11582 ,  H01L28/00 ,  H01L28/60

Abstract: A method of forming a semiconductor device includes forming a molding layer and a supporter layer on a substrate including an etch stop layer, forming a mask layer on the supporter layer, forming a first edge blocking layer on the mask layer, forming a mask pattern by etching the mask layer, forming a hole, forming a lower electrode in the hole, forming a supporter mask layer on the supporter layer, forming a second edge blocking layer on the supporter mask layer, forming a supporter mask pattern by patterning the supporter mask layer, forming a supporter opening passing through the supporter layer, removing the molding layer, forming a capacitor dielectric layer and an upper electrode on the lower electrode, forming an interlayer insulating layer on the upper electrode, and planarizing the interlayer insulating layer. The hole passes through the supporter layer, the molding layer and the etch stop layer.

公开(公告)号：US09449677B2

公开(公告)日：2016-09-20

申请号：US14537387

申请日：2014-11-10

Applicant: Samsung Electronics Co., Ltd.

Inventor： Jiyoung Kim ,  Yongchul Oh ,  Dongsoo Woo ,  Hyun-Woo Chung ,  Gyoyoung Jin ,  Sungkwan Choi ,  Hyeongsun Hong ,  Yoosang Hwang

IPC: G11C11/40 ,  G11C11/4096 ,  H01L27/108 ,  G11C11/404 ,  G11C11/408 ,  H01L29/417 ,  H01L29/423 ,  H01L29/66 ,  H01L29/78 ,  H01L21/8234

CPC classification number: G11C11/4096 ,  G11C11/404 ,  G11C11/4085 ,  H01L21/823437 ,  H01L27/10823 ,  H01L27/10873 ,  H01L27/10876 ,  H01L27/10891 ,  H01L27/10894 ,  H01L29/41741 ,  H01L29/4236 ,  H01L29/66484 ,  H01L29/66613 ,  H01L29/66666 ,  H01L29/7827 ,  H01L29/7831

Abstract: A semiconductor device may include a semiconductor substrate with first and second spaced apart source/drain regions defining a channel region therebetween and a control gate structure on the channel region between the first and second spaced apart source/drain regions. More particularly, the control gate structure may include a first gate electrode on the channel region adjacent the first source/drain region, and a second gate electrode on the channel region adjacent the second source/drain region. Moreover, the first and second gate electrodes may be electrically isolated. Related devices, structures, methods of operation, and methods of fabrication are also discussed.

Abstract translation: 半导体器件可以包括具有限定其间的沟道区的第一和第二间隔开的源极/漏极区的半导体衬底，以及在第一和第二间隔开的源极/漏极区之间的沟道区上的控制栅极结构。 更具体地，控制栅极结构可以包括在与第一源极/漏极区域相邻的沟道区域上的第一栅极电极以及与第二源极/漏极区域相邻的沟道区域上的第二栅极电极。 此外，第一和第二栅电极可以是电隔离的。 还讨论了相关设备，结构，操作方法和制造方法。

公开(公告)号：US09287300B2

公开(公告)日：2016-03-15

申请号：US14569980

申请日：2014-12-15

Applicant: Samsung Electronics Co., Ltd.

Inventor： Eunjung Kim ,  Yong Kwan Kim ,  Jemin Park ,  Semyeong Jang ,  Sangyeon Han ,  Yoosang Hwang

IPC: H01L21/311 ,  H01L29/06 ,  H01L27/12 ,  H01L21/768

CPC classification number: H01L27/1288 ,  H01L21/7688 ,  H01L27/10814 ,  H01L27/10891

Abstract: The present inventive concepts provide methods for fabricating semiconductor devices. The method may comprise providing a substrate, stacking a conductive layer and a lower mask layer on the substrate, forming a plurality of hardmask layers each having an island shape on the lower mask layer, forming a plurality of upper mask patterns having island shapes arranged to expose portions of the lower mask layer, etching the exposed portions of the lower mask layer to expose portions of the conductive layer, and etching the exposed portions of the conductive layer to form a plurality of contact holes each exposing a portion of the substrate.

Abstract translation: 本发明构思提供了制造半导体器件的方法。 该方法可以包括提供衬底，在衬底上堆叠导电层和下掩模层，在下掩模层上形成各自具有岛状的多个硬掩模层，形成具有岛形的多个上掩模图案，其布置成 暴露下掩模层的部分，蚀刻下掩模层的暴露部分以暴露导电层的部分，并且蚀刻导电层的暴露部分以形成多个接触孔，每个接触孔暴露衬底的一部分。