Ion Source for Metal Implantation and Methods Thereof
    21.
    发明申请
    Ion Source for Metal Implantation and Methods Thereof 审中-公开
    金属植入物的离子源及其方法

    公开(公告)号:US20160322198A1

    公开(公告)日:2016-11-03

    申请号:US14701320

    申请日:2015-04-30

    Abstract: An ion source for an implanter includes a first solid state source electrode disposed in an ion source chamber. The first solid state source electrode includes a source material coupled to a first negative potential node. A second solid state source electrode is disposed in the ion source chamber. The second solid state source electrode includes the source material coupled to a second negative potential node, and the first solid state source electrode and the second solid state source electrode are configured to produce ions to be implanted by the implanter.

    Abstract translation: 用于注入机的离子源包括设置在离子源室中的第一固态源电极。 第一固态源极包括耦合到第一负电位节点的源极材料。 第二固态源电极设置在离子源室中。 第二固体源电极包括耦合到第二负电位节点的源极材料,并且第一固态源极电极和第二固态源极电极被配置为产生待被注入器植入的离子。

    Gamma ray detector and method of detecting gamma rays
    22.
    发明授权
    Gamma ray detector and method of detecting gamma rays 有权
    γ射线探测器和γ射线检测方法

    公开(公告)号:US09482762B2

    公开(公告)日:2016-11-01

    申请号:US14471075

    申请日:2014-08-28

    CPC classification number: G01T1/28 G01T1/24

    Abstract: In various embodiments, a gamma ray detector is provided. The gamma ray detector may include a converter element, configured to release an electron when a gamma ray moves at least partially through the converter element. The gamma ray detector may further include a semiconductor detector, arranged to receive the electron and configured to produce a signal when the electron moves at least partially through the semiconductor detector; and an amplifier circuit, coupled to the semiconductor detector and configured to amplify the signal produced by the semiconductor detector. In the gamma ray detector, the converter element may be arranged to at least partially shield the amplifier circuit from electromagnetic radiation.

    Abstract translation: 在各种实施例中,提供了一种伽马射线检测器。 伽马射线检测器可以包括转换器元件,其被配置为当伽马射线至少部分地移动通过转换器元件时释放电子。 伽马射线检测器还可以包括半导体检测器,布置成接收电子并且被配置为当电子至少部分地移动通过半导体检测器时产生信号; 以及放大器电路,耦合到半导体检测器并被配置为放大由半导体检测器产生的信号。 在伽马射线检测器中,转换器元件可以布置成至少部分地将放大器电路屏蔽掉电磁辐射。

    SENSOR DEVICE, A METHOD AND A SENSOR TO DETERMINE A RELATIVE CONCENTRATION OF A FIRST KIND OF IONS WITH RESPECT TO A SECOND KIND OF IONS SOLUTE IN A DROP OF LIQUID
    23.
    发明申请
    SENSOR DEVICE, A METHOD AND A SENSOR TO DETERMINE A RELATIVE CONCENTRATION OF A FIRST KIND OF IONS WITH RESPECT TO A SECOND KIND OF IONS SOLUTE IN A DROP OF LIQUID 审中-公开
    传感器装置,方法和传感器,用于确定第一类离子的相对浓度相对于液体中的第二种类型的溶液

    公开(公告)号:US20160313283A1

    公开(公告)日:2016-10-27

    申请号:US15197037

    申请日:2016-06-29

    CPC classification number: G01N27/49 G01N27/414 G01N27/4145 G01N27/48

    Abstract: A method to determine a relative concentration of a first kind of ions with respect to a second kind of ions solute in a drop of a liquid comprises providing a voltage to a measurement electrode and a counter electrode, the measurement electrode being provided over a semiconductor substrate comprising a plurality of channels, the channels connecting a cavity and the measurement electrode, wherein the counter electrode is arranged to be in contact with the cavity, when the cavity, the measurement electrode and the counter electrode are arranged to accommodate the drop of a liquid and allow a voltage to be applied to the drop of liquid. The method further comprises determining a current or a change of the current flowing through the drop of liquid in response to the applied voltage; and providing an evaluation signal indicative of the relative concentration based on the determined current or the determined change of current.

    Abstract translation: 确定第一种离子相对于液滴中的第二类离子溶质的相对浓度的方法包括向测量电极和对电极提供电压,测量电极设置在半导体衬底上 包括多个通道,所述通道连接空腔和所述测量电极,其中所述对电极被布置为与所述空腔接触,当所述空腔,所述测量电极和所述对电极被布置成容纳所述液体的液滴时 并且允许将电压施加到液滴。 该方法还包括响应于所施加的电压来确定流过液滴的电流的电流或变化; 以及基于所确定的电流或确定的电流变化来提供指示相对浓度的评估信号。

    GAMMA RAY DETECTOR AND METHOD OF DETECTING GAMMA RAYS
    26.
    发明申请
    GAMMA RAY DETECTOR AND METHOD OF DETECTING GAMMA RAYS 有权
    伽马射线探测器及其检测方法

    公开(公告)号:US20160061967A1

    公开(公告)日:2016-03-03

    申请号:US14471075

    申请日:2014-08-28

    CPC classification number: G01T1/28 G01T1/24

    Abstract: In various embodiments, a gamma ray detector is provided. The gamma ray detector may include a converter element, configured to release an electron when a gamma ray moves at least partially through the converter element. The gamma ray detector may further include a semiconductor detector, arranged to receive the electron and configured to produce a signal when the electron moves at least partially through the semiconductor detector; and an amplifier circuit, coupled to the semiconductor detector and configured to amplify the signal produced by the semiconductor detector. In the gamma ray detector, the converter element may be arranged to at least partially shield the amplifier circuit from electromagnetic radiation.

    Abstract translation: 在各种实施例中,提供了一种伽马射线检测器。 伽马射线检测器可以包括转换器元件,其被配置为当伽马射线至少部分地移动通过转换器元件时释放电子。 伽马射线检测器还可以包括半导体检测器,布置成接收电子并且被配置为当电子至少部分地移动通过半导体检测器时产生信号; 以及放大器电路,耦合到半导体检测器并被配置为放大由半导体检测器产生的信号。 在伽马射线检测器中,转换器元件可以布置成至少部分地将放大器电路屏蔽掉电磁辐射。

Patent Agency Ranking