PLANAR PROCESSING OF SUSPENDED MICROELECTROMECHANICAL SYSTEMS (MEMS) DEVICES

    公开(公告)号:US20180148318A1

    公开(公告)日:2018-05-31

    申请号:US15362296

    申请日:2016-11-28

    Abstract: Suspended microelectromechanical systems (MEMS) devices including a stack of one or more materials over a cavity in a substrate are described. The suspended MEMS device may be formed by forming the stack, which may include one or more electrode layers and an active layer, over the substrate and removing part of the substrate underneath the stack to form the cavity. The resulting suspended MEMS device may include one or more channels that extend from a surface of the device to the cavity and the one or more channels have sidewalls with a spacer material. The cavity may have rounded corners and may extend beyond the one or more channels to form one or more undercut regions. The manner of fabrication may allow for forming the stack layers with a high degree of planarity.

    Power conversion apparatus
    347.
    发明授权

    公开(公告)号:US09941812B2

    公开(公告)日:2018-04-10

    申请号:US14912514

    申请日:2014-08-22

    CPC classification number: H02M7/217

    Abstract: A power conversion apparatus can receive an alternating current (AC) signal at an input and provide in dependence thereon a low voltage direct current (DC) signal from an output stage. The apparatus comprises a main path comprising a capacitor in series with the input. The apparatus comprises a first path to carry current carried by the main path in at least one of a positive going part and a negative going part of the AC signal and a second path to carry current carried by the main path in a positive going part and a negative going part of the AC signal. The apparatus further comprises switches operative to determine when one of the first and second paths carries current. The output stage receives current flowing in the first path and at least one of the switches operates based on a control signal derived from the DC signal.

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