SEMICONDUCTOR DEVICE INCLUDING MEMORY STRUCTURE AND METHOD FOR MANUFACTURING THE SAME

    公开(公告)号:US20240138139A1

    公开(公告)日:2024-04-25

    申请号:US18223166

    申请日:2023-07-17

    IPC分类号: H10B12/00 G11C5/06

    CPC分类号: H10B12/00 G11C5/063

    摘要: A semiconductor device and a method of manufacturing the same are provided. The semiconductor device includes a substrate, a plurality of capacitors, and a first supporting layer. The plurality of capacitors are disposed on the substrate. Each of the capacitors extends along a first direction. Each of the plurality of capacitors includes a first capacitor electrode, a second capacitor electrode, and a capacitor dielectric separating the first capacitor electrode from the second capacitor electrode. The first supporting layer is disposed on the substrate. The first supporting layer extends along a second direction different from the first direction. The capacitor dielectric includes a first surface and a second surface which are disposed on two opposite sides along the first direction. The second surface is exposed by the first capacitor electrode. The first supporting layer is disposed between the first surface and the second surface of the capacitor dielectric.

    SEMICONDUCTOR DEVICE INCLUDING MEMORY STRUCTURE

    公开(公告)号:US20240138138A1

    公开(公告)日:2024-04-25

    申请号:US17973202

    申请日:2022-10-24

    IPC分类号: H01L27/108 G11C5/06

    CPC分类号: H01L27/108 G11C5/063

    摘要: A semiconductor device and a method of manufacturing the same are provided. The semiconductor device includes a substrate, a plurality of capacitors, and a first supporting layer. The plurality of capacitors are disposed on the substrate. Each of the capacitors extends along a first direction. Each of the plurality of capacitors includes a first capacitor electrode, a second capacitor electrode, and a capacitor dielectric separating the first capacitor electrode from the second capacitor electrode. The first supporting layer is disposed on the substrate. The first supporting layer extends along a second direction different from the first direction. The capacitor dielectric includes a first surface and a second surface which are disposed on two opposite sides along the first direction. The second surface is exposed by the first capacitor electrode. The first supporting layer is disposed between the first surface and the second surface of the capacitor dielectric.

    SEMICONDUCTOR MEMORY DEVICE
    36.
    发明公开

    公开(公告)号:US20240087616A1

    公开(公告)日:2024-03-14

    申请号:US18463686

    申请日:2023-09-08

    IPC分类号: G11C5/06 G11C5/10

    CPC分类号: G11C5/063 G11C5/10

    摘要: A semiconductor memory device comprises: memory layers arranged in a first direction; and a first and a second via wirings having different positions in a second direction. The memory layer comprises: a first transistor electrically connected to the first via wiring; a memory portion electrically connected to the first transistor; a wiring electrically connected to the first transistor; a second transistor electrically connected to the second via wiring; and an electrode provided in a current path between the second transistor and the wiring. The second transistor comprises: a semiconductor layer electrically connected to the electrode and the second via wiring; and a gate electrode facing the semiconductor layer. The semiconductor layer faces at least one of surfaces on one side or the other side in the first direction of the gate electrode. The electrode includes a portion arranged with the second via wiring in a third direction.

    STACKED RANDOM-ACCESS-MEMORY WITH COMPLEMENTARY ADJACENT CELLS

    公开(公告)号:US20240081037A1

    公开(公告)日:2024-03-07

    申请号:US17930096

    申请日:2022-09-07

    IPC分类号: H01L27/11 G11C5/06

    CPC分类号: H01L27/1112 G11C5/063

    摘要: A field effect transistor (FET) cell structure of an integrated circuit (IC) is provided. The FET cell structure includes first and second adjacent cells. Each of the first and second adjacent cells spans a first layer and a second layer. The second layer is vertically stacked on the first layer. The first cell includes n-doped FETs (NFETs) on one of the first and second layers and p-doped FETs (PFETs) on another of the first and second layers. The second cell includes at least one of a number of NFETs on the one of the first and second layers differing from a number of the NFETs in the first cell and a number of PFETs on the another of the first and second layers differing from a number of the PFETs in the first cell.

    SEMICONDUCTOR MEMORY DEVICE
    38.
    发明公开

    公开(公告)号:US20240079060A1

    公开(公告)日:2024-03-07

    申请号:US18337115

    申请日:2023-06-19

    发明人: Mitsunori MASAKI

    摘要: A semiconductor memory device includes: wiring layers; a semiconductor column opposed to the wiring layers; a gate insulating film disposed between the wiring layers and the semiconductor column; and an insulating member in contact with the gate insulating film. A first wiring layer includes: a first wiring disposed on a gate insulating film side with respect to the insulating member; a second wiring disposed on a side opposite the first wiring; and a metal oxide film covering surfaces on one side and the other side in the stacking direction and not covering a contact surface with the insulating member of the second wiring. The second wiring includes a first conductive layer and a second conductive layer spaced apart in the stacking direction, and a first conductive portion connected to the first conductive layer and the second conductive layer. The first conductive portion includes the contact surface with the insulating member.